JPS59145563U - Film forming equipment - Google Patents
Film forming equipmentInfo
- Publication number
- JPS59145563U JPS59145563U JP3962483U JP3962483U JPS59145563U JP S59145563 U JPS59145563 U JP S59145563U JP 3962483 U JP3962483 U JP 3962483U JP 3962483 U JP3962483 U JP 3962483U JP S59145563 U JPS59145563 U JP S59145563U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- shutter
- forming equipment
- vacuum container
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は一般の成膜装置の正断面図、第２図は従来装置
のシャッタ部の平面図、第３図は本考案の一実施例の装
置のシャッタ部の平面図、第４゜５図は同じく他の実施
例を示すシャッタ部の平面図、第６図は同じく他の実施
例を示すシャッタ部の平面図、第７図は同じく他の実施
例を示すシャッタ部の平面図である。 −
１・・・真空容器、２・・・真空配管、３・・・真空ポ
ンプ、４・・・ガス配管、５・・・ガス源、６・・・ゲ
ートバルブ、７・・・基板、８・・・搬送手段、９・・
・開口、１０・・・相膜手段、１１・・・電源、１２・
・・アクチュエータ、１３・・・シャッタ、１４・・・
ゲートバルブ、１５・・・軸、１６・・・アーム、１７
・・・しやへい部、１８．１９・・・アーム、２０．２
１・・・しやへい部、２２・・・シャツタ板、２３・・
・開口、２４．２５・・・しやへい部。Fig. 1 is a front sectional view of a general film forming apparatus, Fig. 2 is a plan view of the shutter section of a conventional apparatus, Fig. 3 is a plan view of the shutter section of an apparatus according to an embodiment of the present invention, and Fig. 4. FIG. 6 is a plan view of the shutter section similarly showing another embodiment; FIG. 7 is a plan view of the shutter section similarly showing another embodiment. . - 1... Vacuum container, 2... Vacuum piping, 3... Vacuum pump, 4... Gas piping, 5... Gas source, 6... Gate valve, 7... Substrate, 8 ...Transportation means, 9...
・Opening, 10... Phase film means, 11... Power supply, 12.
...Actuator, 13...Shutter, 14...
Gate valve, 15...shaft, 16...arm, 17
...Shiyahei part, 18.19...Arm, 20.2
1... Shiyahei part, 22... Shaft board, 23...
・Opening, 24.25... Shiyahei part.
Claims (1)
保たれている真空容器と、電源に接続され、該真空容器
の内側に露出して設置された成膜手段と、該成膜手段の
対向した位置に、成膜処理中静止しておかれる基板と該
成膜手段との間を開閉可能に設置されたシャッタとから
成る成膜装置において、成膜開始時にシャッタの開く方
向と、成膜終了時にシャッタの閉じる方向とが同一であ
ることを特徴とする成膜装置。A vacuum container connected to a vacuum evacuation means and maintained at a predetermined atmosphere below atmospheric pressure; a film forming means connected to a power source and installed exposed inside the vacuum container; In a film forming apparatus consisting of a shutter that is installed at opposing positions to be able to open and close between a substrate that is kept stationary during the film forming process and the film forming means, the opening direction of the shutter at the start of film forming and the A film forming apparatus characterized in that the shutter closes in the same direction when the film is finished.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3962483U JPS59145563U (en) | 1983-03-22 | 1983-03-22 | Film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3962483U JPS59145563U (en) | 1983-03-22 | 1983-03-22 | Film forming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59145563U true JPS59145563U (en) | 1984-09-28 |
Family
ID=30170262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3962483U Pending JPS59145563U (en) | 1983-03-22 | 1983-03-22 | Film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59145563U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01138713A (en) * | 1987-11-26 | 1989-05-31 | Toshiba Corp | Device for formation of film by optical pumping |
-
1983
- 1983-03-22 JP JP3962483U patent/JPS59145563U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01138713A (en) * | 1987-11-26 | 1989-05-31 | Toshiba Corp | Device for formation of film by optical pumping |
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