JPS58174235U - Baking equipment for vacuum component materials - Google Patents
Baking equipment for vacuum component materialsInfo
- Publication number
- JPS58174235U JPS58174235U JP7302682U JP7302682U JPS58174235U JP S58174235 U JPS58174235 U JP S58174235U JP 7302682 U JP7302682 U JP 7302682U JP 7302682 U JP7302682 U JP 7302682U JP S58174235 U JPS58174235 U JP S58174235U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- component materials
- baking equipment
- vacuum component
- constant temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の装置の概略構成図、第２図はこの考案の
一実施例の概略構成図である。
１・・・・・・被処理物、２・・・・・・真空恒温槽、
３ａ。
３ｂ、 ３ｃ・・・・・・バルブ、４・・・・・・真
空ポンプ、５ａ・・・・・・真空引き手段、５ｂ・・・
・・・排気手段、５Ｃ・・・・・・不活性ガス供給手段
、６・・・・・・不活性ガスボンベ。なお、図中、同一
符号は同一または相当部分を示す。FIG. 1 is a schematic diagram of a conventional device, and FIG. 2 is a schematic diagram of an embodiment of this invention. 1... Workpiece, 2... Vacuum constant temperature chamber,
3a. 3b, 3c... Valve, 4... Vacuum pump, 5a... Vacuuming means, 5b...
... Exhaust means, 5C ... Inert gas supply means, 6 ... Inert gas cylinder. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
それぞれ接続された真空引き手段、排気手段および不活
性ガス供給手段を備えてなることを特徴とする真空構成
材料のベーキング装置。1. A baking device for vacuum constituent materials, comprising a vacuum constant temperature chamber in which a workpiece is housed, and a vacuum pulling means, an exhaust means, and an inert gas supply means connected to the vacuum constant temperature chamber, respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7302682U JPS58174235U (en) | 1982-05-17 | 1982-05-17 | Baking equipment for vacuum component materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7302682U JPS58174235U (en) | 1982-05-17 | 1982-05-17 | Baking equipment for vacuum component materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58174235U true JPS58174235U (en) | 1983-11-21 |
Family
ID=30082552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7302682U Pending JPS58174235U (en) | 1982-05-17 | 1982-05-17 | Baking equipment for vacuum component materials |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58174235U (en) |
-
1982
- 1982-05-17 JP JP7302682U patent/JPS58174235U/en active Pending
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