JPH0217831U - - Google Patents
Info
- Publication number
- JPH0217831U JPH0217831U JP9595688U JP9595688U JPH0217831U JP H0217831 U JPH0217831 U JP H0217831U JP 9595688 U JP9595688 U JP 9595688U JP 9595688 U JP9595688 U JP 9595688U JP H0217831 U JPH0217831 U JP H0217831U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma processing
- frequency power
- plasma
- processes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 2
- 229910001385 heavy metal Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Description
第１図はこの考案の一実施例によるプラズマ処
理装置を示すチヤンバー部断面図、第２図は従来
のプラズマ処理装置を示すチヤンバー部断面図で
ある。
図において、２は上電極、４はガス吹出板、６
はボルト、７は被加工物、８は下電極、９は高周
波電源である。なお、図中、同一符号は同一、ま
たは相当部分を示す。
FIG. 1 is a sectional view of a chamber portion showing a plasma processing apparatus according to an embodiment of this invention, and FIG. 2 is a sectional view of a chamber portion showing a conventional plasma processing apparatus. In the figure, 2 is the upper electrode, 4 is the gas blowing plate, and 6 is the upper electrode.
7 is a bolt, 7 is a workpiece, 8 is a lower electrode, and 9 is a high frequency power source. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
周波電源を供給してプラズマを発生させることに
より電極上に配置した被加工物を処理するプラズ
マ処理装置において、ガスを均一に吹き付ける吹
出板を非重金属製のボルトで取付けたことを特徴
とするプラズマ処理装置。 In plasma processing equipment that processes a workpiece placed on the electrodes by introducing gas between opposing electrodes and supplying high-frequency power between the electrodes to generate plasma, a blowing plate that sprays gas uniformly is used. A plasma processing device characterized by being attached with bolts made of non-heavy metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9595688U JPH0217831U (en) | 1988-07-20 | 1988-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9595688U JPH0217831U (en) | 1988-07-20 | 1988-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217831U true JPH0217831U (en) | 1990-02-06 |
Family
ID=31320737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9595688U Pending JPH0217831U (en) | 1988-07-20 | 1988-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217831U (en) |
-
1988
- 1988-07-20 JP JP9595688U patent/JPH0217831U/ja active Pending
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