JPS63106757U - - Google Patents
Info
- Publication number
- JPS63106757U JPS63106757U JP20327386U JP20327386U JPS63106757U JP S63106757 U JPS63106757 U JP S63106757U JP 20327386 U JP20327386 U JP 20327386U JP 20327386 U JP20327386 U JP 20327386U JP S63106757 U JPS63106757 U JP S63106757U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum vessel
- cylinder
- gap
- reaction
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す要部断面図
、第２図は従来のこの種真空処理装置を示す断面
図である。
図中、４は真空容器、５は筒体、６はヒータ、
７はマスフローコントローラである。
FIG. 1 is a sectional view of a main part showing an embodiment of this invention, and FIG. 2 is a sectional view showing a conventional vacuum processing apparatus of this type. In the figure, 4 is a vacuum container, 5 is a cylinder, 6 is a heater,
7 is a mass flow controller.
Claims (1)
給される真空容器、この真空容器の内周面に間隙
を隔てて配置された筒体、この筒体と真空容器と
の間隙に反応に影響のない熱伝達用ガスを供給す
る装置を備えた真空処理装置。 A vacuum vessel that is heated from the outside and a reaction gas supplied inside, a cylinder placed on the inner circumferential surface of the vacuum vessel with a gap between the cylinder and the vacuum vessel, and a heat source that does not affect the reaction in the gap between the cylinder and the vacuum vessel. Vacuum processing equipment equipped with a device to supply transmission gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20327386U JPS63106757U (en) | 1986-12-27 | 1986-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20327386U JPS63106757U (en) | 1986-12-27 | 1986-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106757U true JPS63106757U (en) | 1988-07-09 |
Family
ID=31168444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20327386U Pending JPS63106757U (en) | 1986-12-27 | 1986-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106757U (en) |
-
1986
- 1986-12-27 JP JP20327386U patent/JPS63106757U/ja active Pending