JPS61137629U - - Google Patents
Info
- Publication number
- JPS61137629U JPS61137629U JP1985021762U JP2176285U JPS61137629U JP S61137629 U JPS61137629 U JP S61137629U JP 1985021762 U JP1985021762 U JP 1985021762U JP 2176285 U JP2176285 U JP 2176285U JP S61137629 U JPS61137629 U JP S61137629U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- vacuum heat
- treatment tank
- inert gas
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
第１図は本考案実施例による真空熱処理装置の
ブロツク図、第２図は従来例による真空熱処理装
置のブロツク図。
１……低真空熱処理槽、２……高真空熱処理槽
、３ａ，３ｂ，３ｃ……真空仕切弁、４……本引
きパルプ、５……拡散ポンプ、６……補助バルブ
、７……ワツクストラツプ、８……メカニカルポ
ンプ、９……油回転ポンプ、１０……成形体、１
１……不活性ガス導入弁、１２……不活性ガス流
量調整弁、１３……粗引きバルブ。
FIG. 1 is a block diagram of a vacuum heat treatment apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional vacuum heat treatment apparatus. 1...Low vacuum heat treatment tank, 2...High vacuum heat treatment tank, 3a, 3b, 3c...Vacuum gate valve, 4...Main pulp, 5...Diffusion pump, 6...Auxiliary valve, 7...Watsuku Strap, 8... Mechanical pump, 9... Oil rotary pump, 10... Molded object, 1
1... Inert gas introduction valve, 12... Inert gas flow rate adjustment valve, 13... Roughing valve.
Claims (1)
処理槽とを連結してなる真空処理装置において、
前記高真空熱処理槽に不活性ガス導入弁を介して
不活性ガス流量調整弁を連結接続させたことを特
徴とする真空熱処理装置。 In a vacuum processing apparatus that connects a low vacuum heat treatment tank and a high vacuum heat treatment tank via a vacuum gate valve,
A vacuum heat treatment apparatus characterized in that an inert gas flow rate adjustment valve is connected to the high vacuum heat treatment tank via an inert gas introduction valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021762U JPH0543055Y2 (en) | 1985-02-18 | 1985-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021762U JPH0543055Y2 (en) | 1985-02-18 | 1985-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61137629U true JPS61137629U (en) | 1986-08-27 |
| JPH0543055Y2 JPH0543055Y2 (en) | 1993-10-29 |
Family
ID=30513452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985021762U Expired - Lifetime JPH0543055Y2 (en) | 1985-02-18 | 1985-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543055Y2 (en) |
-
1985
- 1985-02-18 JP JP1985021762U patent/JPH0543055Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543055Y2 (en) | 1993-10-29 |