JPS6199682U - - Google Patents

Info

Publication number
JPS6199682U
JPS6199682U JP18360484U JP18360484U JPS6199682U JP S6199682 U JPS6199682 U JP S6199682U JP 18360484 U JP18360484 U JP 18360484U JP 18360484 U JP18360484 U JP 18360484U JP S6199682 U JPS6199682 U JP S6199682U
Authority
JP
Japan
Prior art keywords
vacuum pump
rotary vacuum
oil
oil rotary
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18360484U
Other languages
Japanese (ja)
Other versions
JPH0121187Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984183604U priority Critical patent/JPH0121187Y2/ja
Publication of JPS6199682U publication Critical patent/JPS6199682U/ja
Application granted granted Critical
Publication of JPH0121187Y2 publication Critical patent/JPH0121187Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Separating Particles In Gases By Inertia (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案装置の系統図、第２図は、ミ
ストトラツプの詳細構造図である。 １……処理室、２……圧力調整弁、３……閉止
弁、４……ターボ分子ポンプ、５……閉止弁、６
……油回転真空ポンプ、７……オイルフイルトレ
ーシヨン・ユニツト、８……圧力調整弁、９……
ミストトラツプ、１０……スクラバー、１６……
出口管、１７……フランジ、１８……反射板、１
９……冷却槽、２０……本体、２１……フランジ
、２２……入口管、２３……固形粒子流、２４…
…ガス流、２５……固形粒子、２６……オイル。 FIG. 1 is a system diagram of the device of the present invention, and FIG. 2 is a detailed structural diagram of the mist trap. DESCRIPTION OF SYMBOLS 1... Processing chamber, 2... Pressure adjustment valve, 3... Closing valve, 4... Turbo molecular pump, 5... Closing valve, 6
...Oil rotary vacuum pump, 7...Oil filtration unit, 8...Pressure regulating valve, 9...
Mist trap, 10...Scrubber, 16...
Outlet pipe, 17...flange, 18...reflector, 1
9...Cooling tank, 20...Main body, 21...Flange, 22...Inlet pipe, 23...Solid particle flow, 24...
...gas flow, 25...solid particles, 26...oil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ガスを導入しながら所定の圧力を維持する目的
で構成された、圧力調整弁、ターボ分子ポンプ、
油回転真空ポンプ等より成る排気系において、油
回転真空ポンプにオイルフイルトレーシヨンユニ
ツトを連結し、かつ、油回転真空ポンプとスクラ
バーとの間にミストトラツプを設けたことを特徴
とする真空排気装置。 A pressure regulating valve, a turbomolecular pump, configured to maintain a predetermined pressure while introducing gas,
A vacuum evacuation system comprising an oil rotary vacuum pump or the like, characterized in that an oil filtration unit is connected to the oil rotary vacuum pump, and a mist trap is provided between the oil rotary vacuum pump and a scrubber.
JP1984183604U 1984-12-05 1984-12-05 Expired JPH0121187Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984183604U JPH0121187Y2 (en) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984183604U JPH0121187Y2 (en) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199682U true JPS6199682U (en) 1986-06-25
JPH0121187Y2 JPH0121187Y2 (en) 1989-06-23

Family

ID=30741102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984183604U Expired JPH0121187Y2 (en) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH0121187Y2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130093A (en) * 1987-11-13 1989-05-23 Hitachi Ltd Vacuum pump
JPH02103933A (en) * 1988-10-13 1990-04-17 Supiide Fuamu Clean Syst Kk Method of drying work by air and device therefor
JP2006043528A (en) * 2004-08-02 2006-02-16 Inoue Mfg Inc Vacuum type mixer
CN109098952A (en) * 2018-08-30 2018-12-28 西安交通大学 A kind of axial-flow type whizzer and oil and gas separation method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162116A (en) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd Preparation of silicon film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162116A (en) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd Preparation of silicon film

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130093A (en) * 1987-11-13 1989-05-23 Hitachi Ltd Vacuum pump
JPH02103933A (en) * 1988-10-13 1990-04-17 Supiide Fuamu Clean Syst Kk Method of drying work by air and device therefor
JP2006043528A (en) * 2004-08-02 2006-02-16 Inoue Mfg Inc Vacuum type mixer
JP4700303B2 (en) * 2004-08-02 2011-06-15 株式会社井上製作所 Vacuum mixer
CN109098952A (en) * 2018-08-30 2018-12-28 西安交通大学 A kind of axial-flow type whizzer and oil and gas separation method
CN109098952B (en) * 2018-08-30 2019-08-23 西安交通大学 A kind of axial-flow type whizzer and oil and gas separation method

Also Published As

Publication number Publication date
JPH0121187Y2 (en) 1989-06-23

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