JPH02259297A - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
JPH02259297A
JPH02259297A JP8029389A JP8029389A JPH02259297A JP H02259297 A JPH02259297 A JP H02259297A JP 8029389 A JP8029389 A JP 8029389A JP 8029389 A JP8029389 A JP 8029389A JP H02259297 A JPH02259297 A JP H02259297A
Authority
JP
Japan
Prior art keywords
rotor
cylinder
blades
rotary cylinder
stationary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8029389A
Other languages
Japanese (ja)
Other versions
JP2745660B2 (en
Inventor
Kiyoshi Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1080293A priority Critical patent/JP2745660B2/en
Publication of JPH02259297A publication Critical patent/JPH02259297A/en
Application granted granted Critical
Publication of JP2745660B2 publication Critical patent/JP2745660B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To get high compression performance without enlargement in length of a stationary cylinder and a rotary cylinder by performing compression exhaust of gas through providing helicoidal grooves on opposite surfaces formed through inserting the rotary cylinder into a gap between plural stationary cylinders.
CONSTITUTION: Many rotor blades 11 are extended horizontally on a periphery of a rotor 21 fixed to a rotor shaft 3, while stationary blades 12 are held on an inner circumference of a casing 4 through stator spacers 41. A turbine is made up by inserting the stator blades 12 between the rotor blades 11. A rotary cylinder 23 is extended downwards as a monoblock part of the rotor 21 and has a helicoidal groove 23a on its outer periphery in the range below the rotor blades 11, while the lowest stator spacer 41a has a double cylindrical structure which is formed by folding it inwards so as to have an outer cylinder 42 and an inner cylinder 44 having a helicoidal grooves 44a on its outer periphery. Compression exhaust of gas becomes possible by inserting the rotary cylinder 23 between both of the cylinders 42 and 43. A main exhaust port 51 and an auxiliary exhaust port 52 are formed on the opposite side of a pump base 33.
COPYRIGHT: (C)1990,JPO&Japio
JP1080293A 1989-03-30 1989-03-30 Vacuum pump Expired - Fee Related JP2745660B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1080293A JP2745660B2 (en) 1989-03-30 1989-03-30 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1080293A JP2745660B2 (en) 1989-03-30 1989-03-30 Vacuum pump

Publications (2)

Publication Number Publication Date
JPH02259297A true JPH02259297A (en) 1990-10-22
JP2745660B2 JP2745660B2 (en) 1998-04-28

Family

ID=13714224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1080293A Expired - Fee Related JP2745660B2 (en) 1989-03-30 1989-03-30 Vacuum pump

Country Status (1)

Country Link
JP (1) JP2745660B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6454524B1 (en) 1998-07-21 2002-09-24 Seiko Instruments Inc. Vacuum pump and vacuum apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193094U (en) * 1982-06-20 1983-12-22
JPS61145394A (en) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd Molecular pump
JPS63147991A (en) * 1986-12-09 1988-06-20 Daikin Ind Ltd Combination vacuum pump
JPS6447994U (en) * 1987-09-18 1989-03-24
JPS6484128A (en) * 1987-09-28 1989-03-29 Hitachi Ltd Helium leak detector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193094U (en) * 1982-06-20 1983-12-22
JPS61145394A (en) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd Molecular pump
JPS63147991A (en) * 1986-12-09 1988-06-20 Daikin Ind Ltd Combination vacuum pump
JPS6447994U (en) * 1987-09-18 1989-03-24
JPS6484128A (en) * 1987-09-28 1989-03-29 Hitachi Ltd Helium leak detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6454524B1 (en) 1998-07-21 2002-09-24 Seiko Instruments Inc. Vacuum pump and vacuum apparatus

Also Published As

Publication number Publication date
JP2745660B2 (en) 1998-04-28

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