JPS58193094U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS58193094U
JPS58193094U JP9273882U JP9273882U JPS58193094U JP S58193094 U JPS58193094 U JP S58193094U JP 9273882 U JP9273882 U JP 9273882U JP 9273882 U JP9273882 U JP 9273882U JP S58193094 U JPS58193094 U JP S58193094U
Authority
JP
Japan
Prior art keywords
blade group
rotor
molecular pump
casing
impeller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9273882U
Other languages
Japanese (ja)
Other versions
JPS647269Y2 (en
Inventor
小寺　節夫
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP9273882U priority Critical patent/JPS58193094U/en
Publication of JPS58193094U publication Critical patent/JPS58193094U/en
Application granted granted Critical
Publication of JPS647269Y2 publication Critical patent/JPS647269Y2/ja
Granted legal-status Critical Current

Links

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  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例を示す回路説明図である。第２図は本考
案の一実施例を示す回路説明図、第３図は正断面図であ
る。 １１・・・・・・ターボ分子ポンプ、２３・・・・・・
ロータ、２４．２５・・・・・田−夕翼群、２６・・・
・・・ケーシング、２７．２８・・・・・・ステータ翼
群、２９・・・・・・環状通路、３１．３２・・・・・
・気体分子圧縮機構、３３・・・・・・自由空間、３４
・・・・・・吸気口、３５・・・・・・中間開口部、３
６・・・・・・排気口。FIG. 1 is a circuit explanatory diagram showing a conventional example. FIG. 2 is an explanatory circuit diagram showing one embodiment of the present invention, and FIG. 3 is a front sectional view. 11...Turbo molecular pump, 23...
Rotor, 24.25... Ta-Yuyoku group, 26...
... Casing, 27.28 ... Stator blade group, 29 ... Annular passage, 31.32 ...
・Gas molecule compression mechanism, 33...Free space, 34
...Intake port, 35...Middle opening, 3
6...Exhaust port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 高速回転するロータと該ロータを囲繞する円筒状のケー
シングとの間に一端が吸気口に連通し他端が排気口に連
通ずる環状通路を形成し、この環状通路内に、前記ロー
タの外周から羽根車状に突゛設したロータ翼群と前記ケ
ーシングの内周から羽根車状に突設したステータ翼群と
を所要段数交互に配列させてなる気体分子圧縮機構を、
前記ロータ翼群および前記ステータ翼群が存在しない環
状の自由空間を介して複数組設け、前記ケーシングに前
記自由空間に連通ずる中間開口部を設けたことを特徴と
するターボ分子ポンプ。An annular passage is formed between a rotor that rotates at high speed and a cylindrical casing surrounding the rotor, and one end communicates with the intake port and the other end communicates with the exhaust port. A gas molecule compression mechanism comprising a rotor blade group protruding in the shape of an impeller and a stator blade group protruding in the shape of an impeller from the inner periphery of the casing are alternately arranged in a required number of stages,
A turbo-molecular pump characterized in that a plurality of sets of the rotor blade group and the stator blade group are provided via an annular free space in which they do not exist, and an intermediate opening communicating with the free space is provided in the casing.
JP9273882U 1982-06-20 1982-06-20 turbo molecular pump Granted JPS58193094U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9273882U JPS58193094U (en) 1982-06-20 1982-06-20 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9273882U JPS58193094U (en) 1982-06-20 1982-06-20 turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS58193094U true JPS58193094U (en) 1983-12-22
JPS647269Y2 JPS647269Y2 (en) 1989-02-27

Family

ID=30100675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9273882U Granted JPS58193094U (en) 1982-06-20 1982-06-20 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS58193094U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259297A (en) * 1989-03-30 1990-10-22 Shimadzu Corp Vacuum pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363709U (en) * 1977-10-18 1978-05-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363709U (en) * 1977-10-18 1978-05-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259297A (en) * 1989-03-30 1990-10-22 Shimadzu Corp Vacuum pump

Also Published As

Publication number Publication date
JPS647269Y2 (en) 1989-02-27

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