JPS60134893U - Fixed structure of stator blades in turbo molecular pumps - Google Patents

Fixed structure of stator blades in turbo molecular pumps

Info

Publication number
JPS60134893U
JPS60134893U JP2279484U JP2279484U JPS60134893U JP S60134893 U JPS60134893 U JP S60134893U JP 2279484 U JP2279484 U JP 2279484U JP 2279484 U JP2279484 U JP 2279484U JP S60134893 U JPS60134893 U JP S60134893U
Authority
JP
Japan
Prior art keywords
stator blades
fixed structure
spacer ring
stator
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2279484U
Other languages
Japanese (ja)
Other versions
JPH0110473Y2 (en
Inventor
正晴 三木
石沢　資男
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP2279484U priority Critical patent/JPS60134893U/en
Publication of JPS60134893U publication Critical patent/JPS60134893U/en
Application granted granted Critical
Publication of JPH0110473Y2 publication Critical patent/JPH0110473Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はターボ分子ポンプの基本形状を示す縦断面図、
第２図は本考案に係るステータ翼の取付構造を示す分解
斜視図、第３図は同取付状態を示す一部拡大断面図、第
４図ａ、　ｂはステータ翼間の接合部の形状を示す説明
図である。 ７・・・ステータ翼、７ａ・・・リング部、７ｂ・・・
翼、′１０．１０’・・・スペーサリング、１０ａ、１
０’ａ、１０ｂ・・・エツジ。Figure 1 is a vertical cross-sectional view showing the basic shape of a turbomolecular pump.
Fig. 2 is an exploded perspective view showing the stator blade mounting structure according to the present invention, Fig. 3 is a partially enlarged sectional view showing the same mounting state, and Fig. 4 a and b show the shape of the joint between the stator blades. FIG. 7... Stator blade, 7a... Ring part, 7b...
Wing, '10.10'... Spacer ring, 10a, 1
0'a, 10b...edge.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] スペーサリングとステータ翼とを交互に積層して各ロー
タ間にステータ翼を位置させ、次いでノ１ウジングをス
ペーサリング外周に嵌合することでステータ翼及びスペ
ーサリングを固気するようにしたターボ分子ポンプにお
いて、前記スペーサリ・　　ングを硬質金属で構成する
とともに、このスペーサリングのステータ翼との接触面
にエツジを突出形成し、このエツジをステータ翼に喰い
込ませて接触面の内・外周をシールするようにしたこと
を特徴とするターボ分子ポンプにおけるステータ翼の固
定構造。A turbo molecule in which spacer rings and stator blades are alternately stacked, the stator blades are positioned between each rotor, and then a nozzle is fitted to the outer periphery of the spacer ring to solidify the stator blades and the spacer ring. In the pump, the spacer ring is made of hard metal, and a protruding edge is formed on the contact surface of the spacer ring with the stator blade, and this edge is bitten into the stator blade to seal the inner and outer periphery of the contact surface. A fixed structure for stator blades in a turbomolecular pump, characterized in that the stator blades are fixed.
JP2279484U 1984-02-20 1984-02-20 Fixed structure of stator blades in turbo molecular pumps Granted JPS60134893U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2279484U JPS60134893U (en) 1984-02-20 1984-02-20 Fixed structure of stator blades in turbo molecular pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2279484U JPS60134893U (en) 1984-02-20 1984-02-20 Fixed structure of stator blades in turbo molecular pumps

Publications (2)

Publication Number Publication Date
JPS60134893U true JPS60134893U (en) 1985-09-07
JPH0110473Y2 JPH0110473Y2 (en) 1989-03-24

Family

ID=30515423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2279484U Granted JPS60134893U (en) 1984-02-20 1984-02-20 Fixed structure of stator blades in turbo molecular pumps

Country Status (1)

Country Link
JP (1) JPS60134893U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000064986A (en) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd Turbo-molecular pump
EP4269804A1 (en) * 2023-08-14 2023-11-01 Pfeiffer Vacuum Technology AG Vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000064986A (en) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd Turbo-molecular pump
EP4269804A1 (en) * 2023-08-14 2023-11-01 Pfeiffer Vacuum Technology AG Vacuum pump

Also Published As

Publication number Publication date
JPH0110473Y2 (en) 1989-03-24

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