JPS62173594U - - Google Patents

Info

Publication number
JPS62173594U
JPS62173594U JP4198186U JP4198186U JPS62173594U JP S62173594 U JPS62173594 U JP S62173594U JP 4198186 U JP4198186 U JP 4198186U JP 4198186 U JP4198186 U JP 4198186U JP S62173594 U JPS62173594 U JP S62173594U
Authority
JP
Japan
Prior art keywords
vane ring
stator vane
plate portion
spacer
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4198186U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4198186U priority Critical patent/JPS62173594U/ja
Publication of JPS62173594U publication Critical patent/JPS62173594U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図と第２図は本考案の一実施例を示し、第
１図はターボ分子ポンプの要部の断面図、第２図
は静翼リングの平面図である。第３図と第４図は
本考案の他の実施例を示し、第３図はターボ分子
ポンプの要部の断面図、第４図は静翼リングの平
面図である。第５図は一部を破断して示すターボ
分子の側面図である。第６図は第５図の一部を拡
大して示す断面図である。第７図と第８図は従来
例を示し、第７図は静翼リングの簡略平面図、第
８図はそのＡ部の拡大図である。 １……動翼、２……静翼、３……プレート部、
３ａ……プレート部両端（分割面）、４……静翼
リング、４Ａ……半割静翼リング、５……外枠、
６……スペーサ、６ａ……上端面（静翼リング載
置面）、６ｂ……下端面、６ｃ……段部、７……
ピン穴、７ａ……半円弧状ピン穴、８……ピン、
９……ピン打ち孔、１０……ピン逃げ穴（溝）。 FIGS. 1 and 2 show an embodiment of the present invention, with FIG. 1 being a sectional view of the essential parts of a turbomolecular pump, and FIG. 2 being a plan view of a stator vane ring. 3 and 4 show other embodiments of the present invention, in which FIG. 3 is a sectional view of the essential parts of a turbomolecular pump, and FIG. 4 is a plan view of a stator vane ring. FIG. 5 is a partially cutaway side view of the turbo molecule. FIG. 6 is an enlarged sectional view of a part of FIG. 5. 7 and 8 show a conventional example, in which FIG. 7 is a simplified plan view of the stator vane ring, and FIG. 8 is an enlarged view of section A thereof. 1... Moving blade, 2... Stationary blade, 3... Plate part,
3a...Both ends of the plate part (divided surface), 4...Stator blade ring, 4A...Half stationary blade ring, 5...Outer frame,
6... Spacer, 6a... Upper end surface (stationary blade ring mounting surface), 6b... Lower end surface, 6c... Step portion, 7...
Pin hole, 7a...Semicircular arc pin hole, 8...Pin,
9...Pin driving hole, 10...Pin escape hole (groove).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] プレート部から内方に静翼を突設してなる静翼
リングを２分割して得られる半割静翼リングを、
積重されるスペーサ上でその分割面を突き合せて
合体するとともに前記プレート部を該スペーサに
挟持させて固定するようにしたターボ分子ポンプ
において、前記静翼リングのプレート部にその２
分割位置でピン穴を設ける一方、前記スペーサの
静翼リング載置側端面にその円周２等分位置で前
記ピン穴を嵌め合せるピンを突設したことを特徴
とするターボ分子ポンプ。 A half-split stator vane ring is obtained by dividing a stator vane ring, which has stator vanes protruding inward from the plate part, into two parts.
In a turbo-molecular pump in which the divided surfaces of stacked spacers are brought together to abut against each other, and the plate portion is sandwiched and fixed between the spacers, the plate portion of the stator vane ring is attached to the second plate portion.
A turbo-molecular pump characterized in that pin holes are provided at divided positions, and pins that fit into the pin holes are provided protruding from the end face of the spacer on the stator vane ring mounting side at positions bisecting the circumference of the spacer.
JP4198186U 1986-03-22 1986-03-22 Pending JPS62173594U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4198186U JPS62173594U (en) 1986-03-22 1986-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4198186U JPS62173594U (en) 1986-03-22 1986-03-22

Publications (1)

Publication Number Publication Date
JPS62173594U true JPS62173594U (en) 1987-11-04

Family

ID=30857477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4198186U Pending JPS62173594U (en) 1986-03-22 1986-03-22

Country Status (1)

Country Link
JP (1) JPS62173594U (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219495A (en) * 1990-02-16 1992-08-10 Varian Spa Stator for turbo-molecular pump
JP2001153087A (en) * 1999-10-28 2001-06-05 Pfeiffer Vacuum Gmbh Turbo molecular pump
JP2005337028A (en) * 2004-05-24 2005-12-08 Shimadzu Corp Turbo-molecular pump
WO2006027961A1 (en) * 2004-09-10 2006-03-16 Boc Edowards Japan Limited Fixed vane of turbo molecular pump
JP2014173468A (en) * 2013-03-07 2014-09-22 Shimadzu Corp Vacuum pump
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
WO2021140330A1 (en) * 2020-01-09 2021-07-15 Edwards Limited Vacuum pump
EP3916235A1 (en) * 2020-05-27 2021-12-01 Pfeiffer Vacuum Technology AG Method for producing a vacuum pump

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219495A (en) * 1990-02-16 1992-08-10 Varian Spa Stator for turbo-molecular pump
JP2001153087A (en) * 1999-10-28 2001-06-05 Pfeiffer Vacuum Gmbh Turbo molecular pump
JP2005337028A (en) * 2004-05-24 2005-12-08 Shimadzu Corp Turbo-molecular pump
JP4517724B2 (en) * 2004-05-24 2010-08-04 株式会社島津製作所 Turbo molecular pump
WO2006027961A1 (en) * 2004-09-10 2006-03-16 Boc Edowards Japan Limited Fixed vane of turbo molecular pump
JP2014173468A (en) * 2013-03-07 2014-09-22 Shimadzu Corp Vacuum pump
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
WO2021140330A1 (en) * 2020-01-09 2021-07-15 Edwards Limited Vacuum pump
US12018691B2 (en) 2020-01-09 2024-06-25 Edwards Limited Vacuum pump
EP3916235A1 (en) * 2020-05-27 2021-12-01 Pfeiffer Vacuum Technology AG Method for producing a vacuum pump
JP2021188612A (en) * 2020-05-27 2021-12-13 プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト Method for manufacturing vacuum pump

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