JPS6034594U - Vertical turbo molecular pump - Google Patents

Vertical turbo molecular pump

Info

Publication number
JPS6034594U
JPS6034594U JP12661383U JP12661383U JPS6034594U JP S6034594 U JPS6034594 U JP S6034594U JP 12661383 U JP12661383 U JP 12661383U JP 12661383 U JP12661383 U JP 12661383U JP S6034594 U JPS6034594 U JP S6034594U
Authority
JP
Japan
Prior art keywords
rotor
base
molecular pump
vertical turbo
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12661383U
Other languages
Japanese (ja)
Other versions
JPS6332393Y2 (en
Inventor
石沢　資男
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP12661383U priority Critical patent/JPS6034594U/en
Priority to GB08419569A priority patent/GB2146073B/en
Priority to DE19843429137 priority patent/DE3429137A1/en
Priority to FR8412535A priority patent/FR2550829B1/en
Publication of JPS6034594U publication Critical patent/JPS6034594U/en
Application granted granted Critical
Publication of JPS6332393Y2 publication Critical patent/JPS6332393Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の縦型ターボ分子ポンプを２段に接続した
状態を示す説明図、第２図は本考案に係る縦型ターボ分
子のポンプの縦断面図、第３図は第２図のＡ矢視因、第
４図Ａ、　Ｂは同ターボ分子ポンプの接続例を示す説明
図である。 ２・・・ロータハウジング、３・・・ベース、１０・・
・ステータ、２０・・・ロータケース、２３・・・ロー
タ翼、３１・・・開口部、３６・・・蓋部材。Fig. 1 is an explanatory diagram showing a conventional vertical turbomolecular pump connected in two stages, Fig. 2 is a longitudinal sectional view of the vertical turbomolecular pump according to the present invention, and Fig. 3 is the same as Fig. 2. Viewed from arrow A, FIGS. 4A and 4B are explanatory diagrams showing connection examples of the same turbomolecular pump. 2... Rotor housing, 3... Base, 10...
- Stator, 20... Rotor case, 23... Rotor blade, 31... Opening, 36... Lid member.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 内周部に複数段のステータを固定するとともに、上面開
口を吸気側に結合するロータハウジングと、このハウジ
ング内に回転自在に収装され、かつ周縁に前記各ステー
タ間に配列される複数段のロータ翼を設けたロータと、
前記ハウジングの下面に気密に一体化されてロータの基
部を支持するとともに、周囲にロータの回転に伴い吸引
された気体を排出するための排気管を設けたベースとか
らなる縦型ターボ分子ポンプにおいて、前記ベースの底
面には、その内外を貫通して前記吸引された気体の通路
に連通ずる開口部を開口形成するとともに、その開口部
周縁における外底面には、シール部を介して蓋、または
他の真空機器に結合するための結合部を形成したことを
特徴とする縦型ターボ分子ポンプ。A rotor housing having a plurality of stages of stators fixed to its inner periphery and connecting an upper opening to the intake side; a rotor provided with rotor blades;
In a vertical turbo-molecular pump, the base is airtightly integrated with the lower surface of the housing to support the base of the rotor, and is surrounded by an exhaust pipe for discharging gas sucked in as the rotor rotates. , an opening is formed in the bottom surface of the base to communicate with the passage of the sucked gas through the inside and outside of the base, and a lid or A vertical turbo-molecular pump characterized by forming a coupling part for coupling to other vacuum equipment.
JP12661383U 1983-08-16 1983-08-16 Vertical turbo molecular pump Granted JPS6034594U (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP12661383U JPS6034594U (en) 1983-08-16 1983-08-16 Vertical turbo molecular pump
GB08419569A GB2146073B (en) 1983-08-16 1984-08-01 Turbomolecular pumps
DE19843429137 DE3429137A1 (en) 1983-08-16 1984-08-08 TURBOMOLECULAR PUMP
FR8412535A FR2550829B1 (en) 1983-08-16 1984-08-08 VERTICAL TURBO-MOLECULAR PUMP

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12661383U JPS6034594U (en) 1983-08-16 1983-08-16 Vertical turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS6034594U true JPS6034594U (en) 1985-03-09
JPS6332393Y2 JPS6332393Y2 (en) 1988-08-29

Family

ID=14939531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12661383U Granted JPS6034594U (en) 1983-08-16 1983-08-16 Vertical turbo molecular pump

Country Status (4)

Country Link
JP (1) JPS6034594U (en)
DE (1) DE3429137A1 (en)
FR (1) FR2550829B1 (en)
GB (1) GB2146073B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3728154C2 (en) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Multi-stage molecular pump
JPH01277698A (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk Compound vacuum pump
DE4216237A1 (en) * 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
DE4237971B4 (en) † 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vacuum pump with converter
CN102865250B (en) * 2012-09-27 2017-04-19 上海华虹宏力半导体制造有限公司 Shielding cover of pump suction port for semiconductor fabrication

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (en) * 1941-11-04 1943-11-15 Brown Molecular pump
BE619944A (en) * 1961-08-04 1963-01-09 Snecma Advanced Turbomolecular Vacuum Pump
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
DE2349033C3 (en) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
DE2354046A1 (en) * 1973-10-29 1975-05-07 Battelle Institut E V Molecular turbine pump for high vacuum - has permanently magnetised rotor blades forming rotor of brushless motor
DE2409857B2 (en) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln TURBOMOLECULAR VACUUM PUMP WITH AT LEAST PARTIAL BELL-SHAPED ROTOR
DE2554995A1 (en) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik TURBOMOLECULAR PUMP
DE3032967A1 (en) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Turbo-molecular type vacuum pump - has spaces inside and outside rotor bell sealed from each other to increase vacuum obtained

Also Published As

Publication number Publication date
DE3429137C2 (en) 1993-08-05
GB8419569D0 (en) 1984-09-05
GB2146073A (en) 1985-04-11
FR2550829A1 (en) 1985-02-22
GB2146073B (en) 1987-04-01
DE3429137A1 (en) 1985-03-07
FR2550829B1 (en) 1988-01-08
JPS6332393Y2 (en) 1988-08-29

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