GB2146073B - Turbomolecular pumps - Google Patents

Turbomolecular pumps

Info

Publication number
GB2146073B
GB2146073B GB08419569A GB8419569A GB2146073B GB 2146073 B GB2146073 B GB 2146073B GB 08419569 A GB08419569 A GB 08419569A GB 8419569 A GB8419569 A GB 8419569A GB 2146073 B GB2146073 B GB 2146073B
Authority
GB
United Kingdom
Prior art keywords
turbomolecular pumps
turbomolecular
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08419569A
Other versions
GB2146073A (en
GB8419569D0 (en
Inventor
Tadao Ishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Publication of GB8419569D0 publication Critical patent/GB8419569D0/en
Publication of GB2146073A publication Critical patent/GB2146073A/en
Application granted granted Critical
Publication of GB2146073B publication Critical patent/GB2146073B/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB08419569A 1983-08-16 1984-08-01 Turbomolecular pumps Expired GB2146073B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12661383U JPS6034594U (en) 1983-08-16 1983-08-16 Vertical turbo molecular pump

Publications (3)

Publication Number Publication Date
GB8419569D0 GB8419569D0 (en) 1984-09-05
GB2146073A GB2146073A (en) 1985-04-11
GB2146073B true GB2146073B (en) 1987-04-01

Family

ID=14939531

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08419569A Expired GB2146073B (en) 1983-08-16 1984-08-01 Turbomolecular pumps

Country Status (4)

Country Link
JP (1) JPS6034594U (en)
DE (1) DE3429137A1 (en)
FR (1) FR2550829B1 (en)
GB (1) GB2146073B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3728154C2 (en) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Multi-stage molecular pump
JPH01277698A (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk Compound vacuum pump
DE4216237A1 (en) * 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
DE4237971B4 (en) † 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vacuum pump with converter
CN102865250B (en) * 2012-09-27 2017-04-19 上海华虹宏力半导体制造有限公司 Shielding cover of pump suction port for semiconductor fabrication

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (en) * 1941-11-04 1943-11-15 Brown Molecular pump
BE619944A (en) * 1961-08-04 1963-01-09 Snecma Advanced Turbomolecular Vacuum Pump
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
DE2349033C3 (en) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
DE2354046A1 (en) * 1973-10-29 1975-05-07 Battelle Institut E V Molecular turbine pump for high vacuum - has permanently magnetised rotor blades forming rotor of brushless motor
DE2409857B2 (en) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln TURBOMOLECULAR VACUUM PUMP WITH AT LEAST PARTIAL BELL-SHAPED ROTOR
DE2554995A1 (en) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik TURBOMOLECULAR PUMP
DE3032967A1 (en) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Turbo-molecular type vacuum pump - has spaces inside and outside rotor bell sealed from each other to increase vacuum obtained

Also Published As

Publication number Publication date
FR2550829A1 (en) 1985-02-22
JPS6034594U (en) 1985-03-09
DE3429137A1 (en) 1985-03-07
DE3429137C2 (en) 1993-08-05
JPS6332393Y2 (en) 1988-08-29
GB2146073A (en) 1985-04-11
FR2550829B1 (en) 1988-01-08
GB8419569D0 (en) 1984-09-05

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030801