JP2009544956A - 漏れ検出器 - Google Patents
漏れ検出器 Download PDFInfo
- Publication number
- JP2009544956A JP2009544956A JP2009521188A JP2009521188A JP2009544956A JP 2009544956 A JP2009544956 A JP 2009544956A JP 2009521188 A JP2009521188 A JP 2009521188A JP 2009521188 A JP2009521188 A JP 2009521188A JP 2009544956 A JP2009544956 A JP 2009544956A
- Authority
- JP
- Japan
- Prior art keywords
- flow sensor
- supply pump
- restrictor
- leak detector
- buffer volume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 32
- 238000001514 detection method Methods 0.000 description 11
- 238000009434 installation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000011002 quantification Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
Claims (10)
- プレ真空供給ポンプ(20)、ガス検出器(18)及び流れセンサ(26)を備えた漏れ検出器(10)において、
バッファボリューム(22)及びリストリクタ(24)が、前記供給ポンプ(20)と前記流れセンサ(26)との間に配置されていることを特徴とする漏れ検出器。 - 前記バッファボリューム(22)は、前記リストリクタ(24)側から見て、前記供給ポンプ側に配置されていることを特徴とする請求項1に記載の漏れ検出器(10)。
- 前記流れセンサ(26)は、前記供給ポンプ(20)の出口側に配置されていることを特徴とする請求項1又は2に記載の漏れ検出器(10)。
- 前記バッファボリューム(22)の体積が、前記供給ポンプ(20)のポンピングボリュームの少なくとも3倍の大きさであることを特徴とする請求項1乃至3のいずれかに記載の漏れ検出器(10)。
- 前記バッファボリューム(22)及びリストリクタ(24)の設備(21)の限界周波数が、前記供給ポンプ(20)のストローク周波数の半分より小さいことを特徴とする請求項1乃至4のいずれかに記載の漏れ検出器(10)。
- 前記リストリクタ(24)での圧力降下が、100 mbar未満であることを特徴とする請求項1乃至5のいずれかに記載の漏れ検出器(10)。
- バッファボリューム及びリストリクタの少なくとも一つの更なる設備が設けられていることを特徴とする請求項1乃至6のいずれかに記載の漏れ検出器(10)。
- 前記供給ポンプ(20)は容量ポンプであることを特徴とする請求項1乃至7のいずれかに記載の漏れ検出器(10)。
- 前記流れセンサ(26)は、マイクロメカニカル流れセンサであることを特徴とする請求項1乃至8のいずれかに記載の漏れ検出器(10)。
- 前記流れセンサ(26)は、熱流センサであることを特徴とする請求項1乃至9のいずれかに記載の漏れ検出器(10)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006034735A DE102006034735A1 (de) | 2006-07-27 | 2006-07-27 | Lecksuchgerät |
DE102006034735.8 | 2006-07-27 | ||
PCT/EP2007/056639 WO2008012174A2 (de) | 2006-07-27 | 2007-07-02 | Lecksuchgerät |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009544956A true JP2009544956A (ja) | 2009-12-17 |
JP5276588B2 JP5276588B2 (ja) | 2013-08-28 |
Family
ID=38859334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009521188A Active JP5276588B2 (ja) | 2006-07-27 | 2007-07-02 | 漏れ検出器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20110100097A1 (ja) |
EP (1) | EP2047226B1 (ja) |
JP (1) | JP5276588B2 (ja) |
CN (1) | CN101495848B (ja) |
DE (1) | DE102006034735A1 (ja) |
WO (1) | WO2008012174A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010107452A (ja) * | 2008-10-31 | 2010-05-13 | Yamatake Corp | 密閉容器のリーク検出システム及びリーク検出方法 |
JP2021523362A (ja) * | 2018-05-07 | 2021-09-02 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | 切換弁およびバッファチャンバを備える嗅気型漏洩検出器 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8987664B2 (en) * | 2013-02-07 | 2015-03-24 | Shimadzu Corporation | Mass spectrometry device |
CN104034495A (zh) * | 2013-03-06 | 2014-09-10 | 楚天科技股份有限公司 | 一种容器的真空检漏方法及真空检漏系统 |
CN103323189B (zh) * | 2013-06-07 | 2016-01-20 | 中国人民解放军91872部队青岛研究室 | 一种船舶管道负压检漏罩 |
CN104677567B (zh) * | 2015-03-23 | 2017-04-19 | 苏州鸿普精密模具有限公司 | 冷凝器氦气检漏机的氦气供给装置 |
DE102015222213A1 (de) * | 2015-11-11 | 2017-05-11 | Inficon Gmbh | Druckmessung am Prüfgaseinlass |
CN105628420B (zh) * | 2015-12-25 | 2018-08-24 | 北海绩迅电子科技有限公司 | 一种检测再生墨盒导气回路的装置 |
CN105806438A (zh) * | 2016-04-25 | 2016-07-27 | 济南本安科技发展有限公司 | 一种数据记录的系统及方法 |
CN109932028A (zh) * | 2019-04-15 | 2019-06-25 | 广州南控自动化设备有限公司 | 一种循环式气体涡轮流量计的检测装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH10318877A (ja) * | 1997-04-03 | 1998-12-04 | Alcatel Alsthom Co General Electricite | トレーサガス式漏れ検出器 |
JP2005207920A (ja) * | 2004-01-23 | 2005-08-04 | Gastec:Kk | バッファー及び該バッファーを備えた採取装置 |
JP2006515666A (ja) * | 2001-11-15 | 2006-06-01 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 試験ガス漏れ検出装置 |
WO2006076110A2 (en) * | 2005-01-10 | 2006-07-20 | Mocon, Inc | Instrument and method for detecting leaks in hermetically sealed packaging |
Family Cites Families (19)
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US2947166A (en) * | 1956-11-05 | 1960-08-02 | Ca Atomic Energy Ltd | Vapour leak detector |
US3299907A (en) * | 1963-12-16 | 1967-01-24 | American Radiator & Standard | Pulsation dampener |
US4660408A (en) * | 1984-03-19 | 1987-04-28 | Horiba Instruments Incorporated | Proportional exhaust sampler system and control means |
US4827774A (en) * | 1985-07-15 | 1989-05-09 | Pall Corporation | Flow sensing device |
US5090234A (en) * | 1990-08-30 | 1992-02-25 | Vista Research, Inc. | Positive displacement pump apparatus and methods for detection of leaks in pressurized pipeline systems |
US5228329A (en) * | 1991-12-27 | 1993-07-20 | Conservation Devices, Inc. | Leak detector for fluid distribution systems serving intermittent loads |
JPH07190821A (ja) * | 1993-12-24 | 1995-07-28 | Nippondenso Co Ltd | 流量計 |
ES2192568T3 (es) * | 1994-12-23 | 2003-10-16 | Unaxis Balzers Ag | Procedimiento para el analisis de gases y analizador de gases. |
DE19859186A1 (de) * | 1998-12-21 | 2000-06-29 | Mannesmann Rexroth Ag | Ventilanordnung |
DE19960174A1 (de) * | 1999-12-14 | 2001-06-28 | Leybold Vakuum Gmbh | Verfahren zur Lecksuche und Lecklokalisierung sowie zur Durchführung dieser Verfahren geeignete Vorrichtungen |
US6530264B1 (en) * | 2000-11-16 | 2003-03-11 | Autoliv Asp, Inc. | Detection systems and methods |
DE10058009A1 (de) * | 2000-11-23 | 2002-06-06 | Bosch Gmbh Robert | Strömungssensor |
DE10061188A1 (de) * | 2000-12-08 | 2002-07-11 | Knf Flodos Ag Sursee | Pulsationsdämpfer |
SE518522C2 (sv) * | 2001-03-21 | 2002-10-22 | Sensistor Ab | Metod och anordning vid täthetsprovning och läcksökning |
US7107821B2 (en) * | 2001-04-11 | 2006-09-19 | Inficon Gmbh | Leak indicator with test leak and test leak for integration into a leak indicator |
JP2003081603A (ja) * | 2001-07-04 | 2003-03-19 | Hitachi Ltd | 水素製造装置及びそれを用いた発電システム |
DE10133567A1 (de) * | 2001-07-13 | 2003-01-30 | Inficon Gmbh | Schnüffellecksucher und Verfahren zu seinem Betrieb |
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US20050039809A1 (en) * | 2003-08-21 | 2005-02-24 | Speldrich Jamie W. | Flow sensor with integrated delta P flow restrictor |
-
2006
- 2006-07-27 DE DE102006034735A patent/DE102006034735A1/de not_active Ceased
-
2007
- 2007-07-02 JP JP2009521188A patent/JP5276588B2/ja active Active
- 2007-07-02 CN CN2007800283136A patent/CN101495848B/zh active Active
- 2007-07-02 EP EP07765757.5A patent/EP2047226B1/de active Active
- 2007-07-02 US US12/309,567 patent/US20110100097A1/en not_active Abandoned
- 2007-07-02 WO PCT/EP2007/056639 patent/WO2008012174A2/de active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10318877A (ja) * | 1997-04-03 | 1998-12-04 | Alcatel Alsthom Co General Electricite | トレーサガス式漏れ検出器 |
JP2006515666A (ja) * | 2001-11-15 | 2006-06-01 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 試験ガス漏れ検出装置 |
JP2005207920A (ja) * | 2004-01-23 | 2005-08-04 | Gastec:Kk | バッファー及び該バッファーを備えた採取装置 |
WO2006076110A2 (en) * | 2005-01-10 | 2006-07-20 | Mocon, Inc | Instrument and method for detecting leaks in hermetically sealed packaging |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010107452A (ja) * | 2008-10-31 | 2010-05-13 | Yamatake Corp | 密閉容器のリーク検出システム及びリーク検出方法 |
JP2021523362A (ja) * | 2018-05-07 | 2021-09-02 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | 切換弁およびバッファチャンバを備える嗅気型漏洩検出器 |
JP7280283B2 (ja) | 2018-05-07 | 2023-05-23 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 切換弁およびバッファチャンバを備える嗅気型漏洩検出器 |
Also Published As
Publication number | Publication date |
---|---|
CN101495848B (zh) | 2012-02-08 |
WO2008012174A2 (de) | 2008-01-31 |
WO2008012174A3 (de) | 2008-05-15 |
CN101495848A (zh) | 2009-07-29 |
EP2047226A2 (de) | 2009-04-15 |
DE102006034735A1 (de) | 2008-01-31 |
US20110100097A1 (en) | 2011-05-05 |
EP2047226B1 (de) | 2018-12-19 |
JP5276588B2 (ja) | 2013-08-28 |
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