ES2192568T3 - Procedimiento para el analisis de gases y analizador de gases. - Google Patents

Procedimiento para el analisis de gases y analizador de gases.

Info

Publication number
ES2192568T3
ES2192568T3 ES95119823T ES95119823T ES2192568T3 ES 2192568 T3 ES2192568 T3 ES 2192568T3 ES 95119823 T ES95119823 T ES 95119823T ES 95119823 T ES95119823 T ES 95119823T ES 2192568 T3 ES2192568 T3 ES 2192568T3
Authority
ES
Spain
Prior art keywords
pump
gas
low pressure
pressure side
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95119823T
Other languages
English (en)
Inventor
Armin L Dr Stoeckli
Urs Dr Waelchli
Martin Dr Boesch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Unaxis Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers AG filed Critical Unaxis Balzers AG
Application granted granted Critical
Publication of ES2192568T3 publication Critical patent/ES2192568T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Abstract

EN UNA DISPOSICION DE BUSQUEDA DE FUGA PARA OPERACION CON CAPACIDAD OLFATEADORA DE UNA SONDA (40) SE RAMIFICA EN UN DISTRIBUIDOR (44) DE FLUJO EL GAS DE PRUEBA COMO GAS (G{SUB,S}) DE CORRIENTE Y SE GUIA A UN CURSOR (48) INTERMEDIO DE UNA BOMBA HOLWECK (50). EN EL LADO DE BAJA PRESION SE UNE LA BOMBA HOLWECK CON UN DETECTOR (52) DE HELIO, DISPONIENDOSE UNA APLICACION DE ALTA PRESION EN EL LADO DE BAJA PRESION DE UNA BOMBA (54) DE MEMBRANA, DE FORMA QUE ESTA ULTIMA ESTA UNIDA EN EL LADO DE ALTA PRESION CON EL LADO DE BAJA PRESION DE LA BOMBA (46) DE MEMBRANA. LAS ETAPAS DE BOMBEO DE LA BOMBA (50) HOLWECK SON RECORRIDAS ENTRE UNA CONEXION (48) INTERMEDIA Y LA ENTRADA DE BAJA PRESION DE LA BOMBA (4) DE MEMBRANA POR MEDIO DEL GAS (G{SUB,S}) BIFURCADO, CON LO CUAL SE ELEVA LA COMPRESION DE GAS DE PRUEBA PARCIAL.
ES95119823T 1994-12-23 1995-12-15 Procedimiento para el analisis de gases y analizador de gases. Expired - Lifetime ES2192568T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH392394 1994-12-23

Publications (1)

Publication Number Publication Date
ES2192568T3 true ES2192568T3 (es) 2003-10-16

Family

ID=4266403

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95119823T Expired - Lifetime ES2192568T3 (es) 1994-12-23 1995-12-15 Procedimiento para el analisis de gases y analizador de gases.

Country Status (5)

Country Link
US (1) US5756881A (es)
EP (1) EP0718613B1 (es)
KR (1) KR100347637B1 (es)
DE (1) DE59510573D1 (es)
ES (1) ES2192568T3 (es)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
FR2784184B1 (fr) 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
US7210342B1 (en) 2001-06-02 2007-05-01 Fluid Inclusion Technologies, Inc. Method and apparatus for determining gas content of subsurface fluids for oil and gas exploration
DE10156205A1 (de) * 2001-11-15 2003-06-05 Inficon Gmbh Testgaslecksuchgerät
US20070028669A1 (en) * 2003-09-26 2007-02-08 Brewster Barrie D Detection of contaminants within fluid pumped by a vacuum pump
DE102005054638B4 (de) * 2005-11-16 2013-09-26 Oerlikon Leybold Vacuum Gmbh Mobiles Lecksuchegerät
DE102006034735A1 (de) * 2006-07-27 2008-01-31 Inficon Gmbh Lecksuchgerät
DE102006047856A1 (de) * 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
US8762075B2 (en) * 2009-09-29 2014-06-24 Lawrence Livermore National Security, Llc Microcantilever-based gas sensor employing two simultaneous physical sensing modes
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
US3626760A (en) * 1969-07-16 1971-12-14 Varian Associates Leak detection cyclic pumping control
US3645127A (en) * 1970-01-12 1972-02-29 Veeco Instr Remote leak detection
US3968675A (en) * 1974-06-07 1976-07-13 Varian Associates Method and apparatus for preparing a mass spectrometer leak detector system for operation
JPS56126733A (en) * 1980-03-10 1981-10-05 Nippon Sanso Kk Detecting method for leakage of helium
DE3124205A1 (de) * 1981-06-19 1982-12-30 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Lecksuchanordnung
US4472962A (en) * 1981-08-03 1984-09-25 Balzers Aktiengesellschaft Low pressure leak detector
GB2190204B (en) * 1986-05-09 1990-10-17 Boc Group Plc Improvement in leak detectors
DE3616319C1 (de) * 1986-05-15 1987-07-02 Cit Alcatel Gmbh Heliumlecksuchanlage
FR2604522B1 (fr) * 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
US4893497A (en) * 1988-09-12 1990-01-16 Philip Danielson Leak detection system
FR2667937B1 (fr) * 1990-10-15 1995-03-10 Cit Alcatel Detecteur de fuite a gaz traceur.
JP2500488B2 (ja) * 1991-02-08 1996-05-29 ヤマハ株式会社 漏洩試験方法及び漏洩試験装置
FR2681688B1 (fr) * 1991-09-24 1993-11-19 Alcatel Cit Installation de detection de fuites de gaz utilisant la technique de reniflage.
FR2681689B1 (fr) * 1991-09-25 1993-11-12 Alcatel Cit Detecteur de fuite a gaz traceur.
DE4140366A1 (de) * 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5318752A (en) * 1993-01-22 1994-06-07 Jan Visser Method and apparatus for sampling a reactive atmosphere into a vacuum chamber of an analyzer

Also Published As

Publication number Publication date
EP0718613B1 (de) 2003-03-05
KR960024341A (ko) 1996-07-20
US5756881A (en) 1998-05-26
DE59510573D1 (de) 2003-04-10
KR100347637B1 (ko) 2002-11-23
EP0718613A1 (de) 1996-06-26

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