DE60313493D1 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- DE60313493D1 DE60313493D1 DE60313493T DE60313493T DE60313493D1 DE 60313493 D1 DE60313493 D1 DE 60313493D1 DE 60313493 T DE60313493 T DE 60313493T DE 60313493 T DE60313493 T DE 60313493T DE 60313493 D1 DE60313493 D1 DE 60313493D1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pump
- pumping mechanism
- turbomolecular
- molecular drag
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005086 pumping Methods 0.000 abstract 5
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/121—Aluminium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Jet Pumps And Other Pumps (AREA)
- Electrophonic Musical Instruments (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0229355.3A GB0229355D0 (en) | 2002-12-17 | 2002-12-17 | Vacuum pumping arrangement |
GB0229355 | 2002-12-17 | ||
PCT/GB2003/005370 WO2004055375A1 (en) | 2002-12-17 | 2003-12-09 | Vacuum pumping arrangement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60313493D1 true DE60313493D1 (de) | 2007-06-06 |
DE60313493T2 DE60313493T2 (de) | 2008-01-03 |
Family
ID=9949816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60313493T Expired - Lifetime DE60313493T2 (de) | 2002-12-17 | 2003-12-09 | Vakuumpumpe |
Country Status (9)
Country | Link |
---|---|
US (1) | US8727751B2 (de) |
EP (1) | EP1573204B1 (de) |
JP (1) | JP4667043B2 (de) |
AT (1) | ATE360756T1 (de) |
AU (1) | AU2003295099A1 (de) |
DE (1) | DE60313493T2 (de) |
GB (1) | GB0229355D0 (de) |
TW (1) | TWI335959B (de) |
WO (1) | WO2004055375A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
US7140847B2 (en) * | 2004-08-11 | 2006-11-28 | The Boc Group, Inc. | Integrated high vacuum pumping system |
DE102005008643A1 (de) * | 2005-02-25 | 2006-08-31 | Leybold Vacuum Gmbh | Holweck-Vakuumpumpe |
WO2009036403A2 (en) * | 2007-09-13 | 2009-03-19 | Borgwarner Inc. | Fan with structural support ring |
DE102008024764A1 (de) * | 2008-05-23 | 2009-11-26 | Oerlikon Leybold Vacuum Gmbh | Mehrstufige Vakuumpumpe |
DE102009035812A1 (de) * | 2009-08-01 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpenrotor |
JP5786639B2 (ja) * | 2011-10-24 | 2015-09-30 | 株式会社島津製作所 | ターボ分子ポンプ |
DE102012003680A1 (de) | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP2956674B1 (de) * | 2013-02-15 | 2019-05-01 | Edwards Limited | Vakuumpumpe |
DE102013207269A1 (de) * | 2013-04-22 | 2014-10-23 | Pfeiffer Vacuum Gmbh | Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe |
DE102014105582A1 (de) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
CN107646076B (zh) * | 2015-06-08 | 2020-06-09 | 莱宝有限公司 | 真空泵转子 |
GB201715151D0 (en) | 2017-09-20 | 2017-11-01 | Edwards Ltd | A drag pump and a set of vacuum pumps including a drag pump |
GB2579665B (en) * | 2018-12-12 | 2021-05-19 | Edwards Ltd | Multi-stage turbomolecular pump |
GB2601313A (en) * | 2020-11-25 | 2022-06-01 | Edwards Ltd | Drag pumping mechanism for a turbomolecular pump |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4465434A (en) * | 1982-04-29 | 1984-08-14 | Williams International Corporation | Composite turbine wheel |
JPS61215495A (ja) * | 1985-03-22 | 1986-09-25 | Mitsubishi Heavy Ind Ltd | タ−ボ分子ポンプ |
JPH0259294A (ja) | 1988-08-26 | 1990-02-28 | Nippon F D Kk | 自動切断装置 |
JPH0259294U (de) * | 1988-10-25 | 1990-04-27 | ||
US5230924A (en) | 1988-12-14 | 1993-07-27 | Li Chou H | Metallized coatings on ceramics for high-temperature uses |
JPH0444496A (ja) | 1990-06-12 | 1992-02-14 | Mitsubishi Electric Corp | コントロール装置 |
JPH0444496U (de) * | 1990-08-16 | 1992-04-15 | ||
JP2547907B2 (ja) | 1991-09-03 | 1996-10-30 | 蛇の目ミシン工業株式会社 | 刺しゅう機能付きミシンの刺しゅう枠駆動装置 |
JPH0538389U (ja) * | 1991-10-24 | 1993-05-25 | セイコー精機株式会社 | 真空ポンプ |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
JP3099516B2 (ja) | 1992-05-29 | 2000-10-16 | ダイキン工業株式会社 | 真空ポンプ |
GB9318801D0 (en) | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
JP3095338B2 (ja) | 1995-06-19 | 2000-10-03 | 富士通株式会社 | ターボ分子ポンプ |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
DE19632375A1 (de) | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
DE29717079U1 (de) | 1997-09-24 | 1997-11-06 | Leybold Vakuum GmbH, 50968 Köln | Compoundpumpe |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
JP3788558B2 (ja) | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
US6220824B1 (en) | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
DE19937392A1 (de) | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven Elementen |
GB9927493D0 (en) * | 1999-11-19 | 2000-01-19 | Boc Group Plc | Improved vacuum pumps |
JP2001323892A (ja) | 2000-05-16 | 2001-11-22 | Shimadzu Corp | ターボ型真空機器 |
DE10056144A1 (de) | 2000-11-13 | 2002-05-23 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
JP3961273B2 (ja) | 2001-12-04 | 2007-08-22 | Bocエドワーズ株式会社 | 真空ポンプ |
-
2002
- 2002-12-17 GB GBGB0229355.3A patent/GB0229355D0/en not_active Ceased
-
2003
- 2003-12-09 AT AT03786099T patent/ATE360756T1/de not_active IP Right Cessation
- 2003-12-09 DE DE60313493T patent/DE60313493T2/de not_active Expired - Lifetime
- 2003-12-09 JP JP2004559871A patent/JP4667043B2/ja not_active Expired - Lifetime
- 2003-12-09 US US10/536,781 patent/US8727751B2/en active Active
- 2003-12-09 AU AU2003295099A patent/AU2003295099A1/en not_active Abandoned
- 2003-12-09 EP EP03786099A patent/EP1573204B1/de not_active Expired - Lifetime
- 2003-12-09 WO PCT/GB2003/005370 patent/WO2004055375A1/en active IP Right Grant
- 2003-12-17 TW TW092135767A patent/TWI335959B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI335959B (en) | 2011-01-11 |
JP4667043B2 (ja) | 2011-04-06 |
EP1573204A1 (de) | 2005-09-14 |
ATE360756T1 (de) | 2007-05-15 |
AU2003295099A1 (en) | 2004-07-09 |
TW200419074A (en) | 2004-10-01 |
WO2004055375A1 (en) | 2004-07-01 |
GB0229355D0 (en) | 2003-01-22 |
DE60313493T2 (de) | 2008-01-03 |
US20060140795A1 (en) | 2006-06-29 |
JP2006509951A (ja) | 2006-03-23 |
EP1573204B1 (de) | 2007-04-25 |
US8727751B2 (en) | 2014-05-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: EDWARDS LTD., CRAWLEY, WEST SUSSEX, GB |
|
8364 | No opposition during term of opposition |