EP0173601B1 - Perfectly dry and closed vacuum pump with rectilinear movement for alternating compression - Google Patents

Perfectly dry and closed vacuum pump with rectilinear movement for alternating compression Download PDF

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Publication number
EP0173601B1
EP0173601B1 EP85401426A EP85401426A EP0173601B1 EP 0173601 B1 EP0173601 B1 EP 0173601B1 EP 85401426 A EP85401426 A EP 85401426A EP 85401426 A EP85401426 A EP 85401426A EP 0173601 B1 EP0173601 B1 EP 0173601B1
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EP
European Patent Office
Prior art keywords
vacuum pump
axial end
pump according
circular
end wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP85401426A
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German (de)
French (fr)
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EP0173601A1 (en
Inventor
Daniel Pottier
Rémi Leclaire
Paul Vulliez
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Normande dEtude et dExploitation SA NORMETEX
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Normande dEtude et dExploitation SA NORMETEX
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Priority to AT85401426T priority Critical patent/ATE35025T1/en
Publication of EP0173601A1 publication Critical patent/EP0173601A1/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/024Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in series

Definitions

  • the present invention relates to a fully dry and sealed vacuum pump.
  • the invention also relates to an alternative compression dry pump which, in combination with a dry spiral pump of the aforementioned type, allows the pumping of all gases, including corrosive and radioactive, with a significant improvement in the vacuum limit and the discharge pressure with respect to known dry pumps.
  • the invention relates to a completely dry and sealed vacuum pump comprising at least one variable volume pumping chamber connected to a suction pipe and to a delivery pipe and non-return means arranged to ensure a flow one-way fluid from said suction manifold to said discharge manifold, said chamber having a fixed axial end wall and a movable axial end wall, characterized in that said pumping chamber has at least one axially flexible circular metallic member having a certain radial stiffness, in that this member has its external part fixed to a rigid part of said pumping chamber and is made integral with a mobile assembly subjected to an alternating axial movement between a spaced apart configuration and a close configuration of said axial end walls and in that said metal member and the axial end wall against the watercolour it comes to apply have substantially the same curved diametral profile, in said close configuration, so that the residual space between said flexible metallic member and this axial end wall facing it is as small as possible.
  • the use of the vacuum pump according to the invention is of particular interest when it is combined with the above-mentioned spiral pumps.
  • FIG. 2 represents a pump according to the invention which comprises two pumping chambers 1 and 1 ′ of the aforementioned type, but arranged head to tail.
  • the same reference signs have been used to designate, with respect to the upper pumping chamber 1, the same elements as in FIG. 1, and similar reference signs, but followed by a "prime" index to designate the corresponding elements of the lower pumping chamber 1 '.
  • the desired shape of the metallic member 18 is determined by subjecting one of the faces of a solid metallic disc to a predetermined hydrostatic pressure, the disc being held at its periphery and on a circular central part 33.
  • the simple forming process makes it possible to obtain the diametral profile giving optimum axial flexibility, but it is not necessarily used industrially to produce the flexible members 18.
  • the latter can for example be obtained by stamping similar discs using tools. presses designed to reproduce the desired profile, determined as indicated above.
  • This pumping member 18 is intended to be connected along its outer edge 7 to the fixed rigid part 5 and to the movable assembly M (FIG. 5) by a central fixing at 33, by any suitable means.
  • Figure 5 shows a dry pump assembly similar to that shown in Figure 2, but where the two pumping chambers 1 and 1 'are between the rigid parts 5 and 5' and the flexible pumping members constituted by two preformed metal discs such as shown in FIG. 3.
  • These unitary members 18 and 18 ′ are joined by their outer edges 7 and 7 ′ to the rigid parts 5 and 5 ′, and their alternating axial movement is transmitted to them by the action of the mobile assembly M from which they are united by their connection in 33 and 33 '.
  • the flexible member 18 somehow forms the movable axial end wall of the variable volume chamber.
  • This example of construction includes the details already described in FIG.
  • the gas suction and delivery pipes 14 are located outside the pump body and they are fitted with non-return valves 14a of the type with flaps or lamellae according to the conventional solutions specific to a alternative pumping.
  • FIGS 7 and 8 show such a scroll pump 19A associated with a pump 19B of the type described in connection with Figure 5 above.
  • a fixed spiral 24 secured by a plate 24A of a gas suction barrel 25 and, nested therein, a movable spiral 22 driven in an exact circular translation movement adapted to make it extend radially and axially, respectively, with a very small constant clearance, the fixed spiral 24 and the associated base plate 24A.
  • the circular translational movement is controlled by three eccentrics 23 of the same eccentricity "e", integral with three parallel shafts 20 and engaged by means of bearings in cavities arranged axially in the part 22A carrying the movable spiral 22.
  • the gases to be pumped are sucked, through a connection tube to the enclosure to be emptied (not shown) in the tube 28 of the barrel 25, penetrate between the spirals at their periphery and by compression between these spirals, are discharged towards the axis in an annular chamber 29 between the barrel 25 and the assembly 27 with double bellows.
  • the volume situated between the two bellows of the double bellows assembly 27 is placed in communication (by a tube 17C), like the volumes 15A and 15'A situated between the flexible members 18 and 18 'and the bellows 15 and 15 ', with a pressure switch 16 suitable for controlling any leakage to the flexible members 27, 18-18', 15-15 '.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A completely dry fluid-tight reciprocating vacuum pump comprises one or more pumping chambers defined between two rigid parts which face one another in the axial direction. One is reciprocated in a straight line relative to the other. They are connected to one another by at least one axially flexible member of appropriate radial stiffness. Each of these members comprises an outside part fixed to a first of these rigid parts. The side of the first rigid part facing the flexible member is shaped to have a profile in diametral cross-section which is substantially the same as the profile in diametral cross-section that this member tends to assume, by virtue of its stiffness, in the configuration with the aforementioned rigid parts moved towards one another. The pump can be used for pumping corrosive and radioactive gases, such as tritium, for example.

Description

La présente invention concerne une pompe à vide intégralement sèche et étanche.The present invention relates to a fully dry and sealed vacuum pump.

On connaît déjà des pompes intégralement sèches du type à spirales et à étanchéité par soufflets métalliques. De telles pompes sont notamment décrites dans les brevets français FR-2 141 402 et FR-2 153 129 de Monsieur Paul VULLIEZ et leurs correspondants DE-2 225 327 et US-3 802 809. Ces pompes sont capables de refouler à la pression atmosphérique tout en atteignant un vide limite résiduel de 10 Pa (10-1 millibars) environ.Fully dry pumps of the spiral type and with metal bellows sealing are already known. Such pumps are described in particular in French patents FR-2 141 402 and FR-2 153 129 by Mr Paul VULLIEZ and their correspondents DE-2 225 327 and US-3 802 809. These pumps are capable of delivering at atmospheric pressure while attaining a residual ultimate vacuum of 10 Pa (10 -1 millibars) around.

Ces brevets proposent entre autre d'associer ces pompes sèches à spirale à des pompes à membranes synthétiques, ce qui permet d'atteindre un vide limite de 10-1 Pa (10-3 millibars) environ. Cette solution est cependant limitée au pompage de gaz compatibles avec la nature de la membrane synthétique; elle n'est pas applicable au pompage de gaz corrosifs ou radio-actifs, tels ceux utilisés, par exemple, dans les procédés d'enrichissement d'uranium ou de fusion thermonucléaire où seul l'emploi d'organes de pompage entièrement métalliques est admissible.These patents propose, among other things, to combine these dry spiral pumps with synthetic diaphragm pumps, which makes it possible to reach a vacuum limit of approximately 10-1 Pa (10-3 millibars). This solution is however limited to pumping gases compatible with the nature of the synthetic membrane; it is not applicable to the pumping of corrosive or radioactive gases, such as those used, for example, in uranium enrichment or thermonuclear fusion processes where only the use of entirely metallic pumping members is admissible .

On connaît par ailleurs des pompes à vide sèches faisant intervenir une compression alternative de soufflets métalliques qui, en association avec des pompes à spirales du type précité, permettent le pompage de gaz corrosifs ou radioactifs jusqu'à un vide limite de même ordre (10-1 Pa). Les performances de ces pompes à soufflets restent toutefois limitées en raison des volumes résiduels qui subsistent immanquablement au voisinage de ces soufflets.Dry vacuum pumps are also known which involve alternative compression of metal bellows which, in combination with spiral pumps of the aforementioned type, allow the pumping of corrosive or radioactive gases up to a limit vacuum of the same order (10- 1 Pa). However, the performance of these bellows pumps remains limited due to the residual volumes which inevitably remain in the vicinity of these bellows.

On connaît enfin d'autres types de pompes ou compresseurs à membrane décrits par exemple dans le brevet français N° 1 457 688 ou le brevet américain N° 2 021 156 ou encore dans le brevet allemand N° 802 642.Finally, other types of diaphragm pumps or compressors are known, described for example in French patent No. 1,457,688 or American patent No. 2,021,156 or in German patent No. 802,642.

Les dispositifs décrits dans les deux premiers brevets sont munis d'une ou plusieurs bagues rigides montées flottantes dans le ou les replis internes de la membrane. Outre les inconvénients, mentionnés ci-dessus, résultant dans certains cas de l'utilisation de membranes synthétiques, la présence des bagues entraîne une usure rapide de la membrane rendant ce genre de dispositif inutilisable pour les usages plus particulièrement envisagés dans le cadre de l'invention.The devices described in the first two patents are provided with one or more rigid rings mounted floating in the internal fold or folds of the membrane. In addition to the drawbacks, mentioned above, resulting in certain cases from the use of synthetic membranes, the presence of the rings results in rapid wear of the membrane making this type of device unusable for the uses more particularly envisaged in the context of invention.

Par ailleurs, le brevet allemand N° 802 642 décrit un compresseur à soufflet coopérant avec des parois d'extrémités planes de la chambre. Une telle structure ne permet pas d'obtenir un taux de compression élevé sans usure par contact.Furthermore, German patent No. 802 642 describes a bellows compressor cooperating with planar end walls of the chamber. Such a structure does not make it possible to obtain a high compression ratio without contact wear.

La présente invention a pour objet un nouveau type de pompe à vide dont les organes de pompage sont métalliques et qui présente de meilleures performances. L'invention vise ainsi une nouvelle pompe sèche à mouvement rectiligne de compression alternative permettant, avec une construction simple et robuste et un fonctionnement exempt d'aléas, l'obtention de bonnes performances en vide limite grâce pour chaque cycle de compression à une expulsion quasi complète du gaz pompé.The present invention relates to a new type of vacuum pump whose pumping members are metallic and which has better performance. The invention thus relates to a new dry pump with rectilinear movement of alternative compression allowing, with a simple and robust construction and an operation free of hazards, to obtain good performances in limit vacuum thanks for each compression cycle to an almost expulsion. full of pumped gas.

L'invention vise aussi une pompe sèche à compression alternative qui, en association avec une pompe sèche à spirales du type précité, permette le pompage de tous gaz, y compris corrosifs et radio-actifs, avec une amélioration sensible du vide limite et de la pression de refoulement par rapport aux pompes sèches connues.The invention also relates to an alternative compression dry pump which, in combination with a dry spiral pump of the aforementioned type, allows the pumping of all gases, including corrosive and radioactive, with a significant improvement in the vacuum limit and the discharge pressure with respect to known dry pumps.

Dans cet esprit, l'invention concerne une pompe à vide intégralement sèche et étanche comportant au moins une chambre de pompage à volume variable reliée à une tubulure d'aspiration et à une tubulure de refoulement et des moyens anti-retour agencés pour assurer un écoulement de fluide en sens unique depuis ladite tubulure d'aspiration jusqu'à ladite tubulure de refoulement, ladite chambre comportant une paroi d'extrémité axiale fixe et une paroi d'extrémité axiale mobile, caractérisée en ce que ladite chambre de pompage comporte au moins un organe métallique circulaire flexible axialement et présentant une certaine raideur radiale, en ce que cet organe a sa partie extérieure fixée à une partie rigide de ladite chambre de pompage et est rendu solidaire d'un ensemble mobile assujetti à un mouvement axial alternatif entre une configuration écartée et une configuration rapprochée desdites parois d'extrémité axiale et en ce que ledit organe métallique et la paroi d'extrémité axiale contre laquelle il vient s'appliquer ont sensiblement un même profil diamétral courbe, dans ladite configuration rapprochée, pour que l'espace résiduel entre ledit organe métallique flexible et cette paroi d'extrémité axiale lui faisant face soit le plus réduit possible.In this spirit, the invention relates to a completely dry and sealed vacuum pump comprising at least one variable volume pumping chamber connected to a suction pipe and to a delivery pipe and non-return means arranged to ensure a flow one-way fluid from said suction manifold to said discharge manifold, said chamber having a fixed axial end wall and a movable axial end wall, characterized in that said pumping chamber has at least one axially flexible circular metallic member having a certain radial stiffness, in that this member has its external part fixed to a rigid part of said pumping chamber and is made integral with a mobile assembly subjected to an alternating axial movement between a spaced apart configuration and a close configuration of said axial end walls and in that said metal member and the axial end wall against the watercolour it comes to apply have substantially the same curved diametral profile, in said close configuration, so that the residual space between said flexible metallic member and this axial end wall facing it is as small as possible.

L'adéquation du profil des parties rigides de la chambre de pompage avec le profil que prend l'organe métallique flexible en configuration rapprochée permet une expulsion presque totale du gaz situé dans la chambre de pompage, le volume résiduel de celle-ci étant ainsi réduit au minimum.The adequacy of the profile of the rigid parts of the pumping chamber with the profile taken by the flexible metal member in close configuration allows an almost total expulsion of the gas located in the pumping chamber, the residual volume thereof being thus reduced at least.

L'invention vise encore une pompe sèche avec une double isolation métallique par rapport à l'ambiance atmosphérique réalisée par l'installation d'un soufflet de sécurité placé autour de l'organe métallique flexible et relié aux pièces rigides. L'établissement dans le volume annulaire étanche ainsi créé d'une pression judicieusement choisie et notablement inférieure à la pression atmosphérique permet d'obtenir d'une façon simple les deux résultats remarquables suivants :

  • 1. Le contrôle de toute fuite accidentelle à l'un des organes métalliques flexibles par la mise en communication de ce volume étanche avec un pressostat de contrôle et d'alarme.
  • 2. La réduction des effets de fatigue supportés par l'organe métallique flexible de pompage lorsque ses parties externes sont soumises directement à la pression atmosphérique.
The invention also relates to a dry pump with double metallic insulation with respect to the atmospheric atmosphere produced by the installation of a safety bellows placed around the flexible metallic member and connected to the rigid parts. The establishment in the sealed annular volume thus created of a judiciously chosen pressure and notably lower than atmospheric pressure makes it possible to obtain in a simple way the following two remarkable results:
  • 1. The control of any accidental leak to one of the flexible metal members by the communication of this sealed volume with a pressure and control pressure switch.
  • 2. Reduction of the fatigue effects borne by the flexible metallic pumping member when its external parts are subjected directly to atmospheric pressure.

L'organe métallique flexible de pompage peut se présenter sous la forme annulaire avec une section droite sensiblement torique, il peut dans ce cas être fabriqué en une seule pièce, tel un élément de soufflet, ou encore en deux pièces par l'assemblage et suivant leurs bords internes de deux diaphragmes métalliques préformés suivant une section droite sensiblement demitorique, c'est-à-dire ouverte radialement vers l'extérieur (figure 1 et figure 2). Ce genre d'organe flexible de forme sensiblement torique convient mieux à de faibles courses de l'organe mobile de pompage et à l'obtention de pressions de refoulement relativement élevées.The flexible metallic pumping member can be in the annular form with a substantially toric cross section, it can in this case be manufactured in one piece, such as a bellows element, or in two pieces by the assembly and following their internal edges of two metal diaphragms preformed along a substantially demitoric cross section, that is to say open radially outward (Figure 1 and Figure 2). This kind of flexible member of substantially toroidal shape is better suited to short strokes of the mobile pumping member and to obtaining relatively high discharge pressures.

Avantageusement ce type de pompe sèche peut être équipé avec un autre modèle d'organe métallique flexible obtenu à partir d'un disque circulaire préformé en position libre, suivant un profil diamétral donnant les meilleures performances de flexibilité axiale pour un minimum d'effort de fatigue. La réunion dos a dos de deux de ces disques dans leur partie centrale permet tout en conservant pour une même course de chacun d'eux les avantages de flexibilité, de doubler le volume de chaque chambre de pompage. Dans ce cas l'assemblage central de ces deux disques doit comporter un trou de communication entre les deux parties d'une même chambre de pompage.Advantageously, this type of dry pump can be equipped with another model of flexible metallic member obtained from a circular disc preformed in the free position, according to a diametral profile giving the best performance of axial flexibility for a minimum of fatigue effort. . The back-to-back meeting of two of these discs in their central part allows, while retaining for the same stroke of each of them the advantages of flexibility, to double the volume of each pumping chamber. In this case, the central assembly of these two discs must include a communication hole between the two parts of the same pumping chamber.

Comme déjà signalé l'utilisation de la pompe à vide suivant l'invention trouve un intérêt tout particulier lorsqu'elle est associée avec les pompes à spirales ci-dessus mentionnées.As already mentioned, the use of the vacuum pump according to the invention is of particular interest when it is combined with the above-mentioned spiral pumps.

Dans ce cas le vide limite rigoureusement sec obtenu peut atteindre 10-2 à 10-3 Pa (10-4 à 10-5 millibars) et ceci conjointement avec l'obtention d'une pression de refoulement notable suivant le type d'organe flexible employé.In this case the dry vacuum strictly limit obtained can reach 10- 2 10-3 Pa (10- 4 to 10-5 millibar) and this together with obtaining a notable discharge pressure according to the type of flexible body employee.

Les caractéristiques et avantages de l'invention ressortiront de la description qui va suivre de formes d'exécution décrites à titre d'exemple en référence aux dessins annexes dans lesquels :

  • la figure 1 est une vue schématique en coupe axiale d'une partie d'une pompe suivant l'invention dans laquelle l'organe métallique flexible de pompage constitué par un élément annulaire de section droite sensiblement torique réalisé par l'assemblage de deux diaphragmes est disposé entre, d'une part, une paroi rigide fixe et, d'autre part, une paroi rigide mobile de manière à assurer un pompage de l'espace compris entre l'élément annulaire et les deux pièces rigides ;
  • la figure 2 est une vue analogue à la figure 1, dans laquelle la partie de pompe représentée à la figure 1 est doublée de telle façon que l'une des chambres de pompage se trouve au volume minimal, tandis que l'autre est au volume maximal, ce qui permet un pompage en série ;
  • la figure 3 est une vue en coupe diamétrale d'un organe métallique flexible de pompage obtenu par le préformage d'un seul disque métallique ;
  • la figure 4 est également une vue en coupe diamétrale d'un organe métallique flexible constitué par l'assemblage de deux organes identiques à celui de la figure 3 ;
  • la figure 5 est une vue schématique en coupe axiale d'une pompe analogue à celle représentée figure 2 mais où chacune des deux chambres de pompage est équipée avec un organe métallique flexible simple tel que représenté figure 3. Sur cette figure est également représenté un agencement de soupapes différent de celui de la figure 2 ;
  • la figure 6 est une vue analogue à la figure 5 mais avec un organe métallique flexible double tel que représenté figure 4 ;
  • la figure 7 est une vue en coupe selon la ligne VII-VII de la figure 8 d'un groupe de pompage intégralement sec et etanche réalisé par couplage d'une pompe selon la figure 5 avec une pompe à spirale à mouvement de translation circulaire ; et
  • la figure 8 est une vue en coupe suivant la lire brisée VIII-VIII de la figure 7.
The characteristics and advantages of the invention will emerge from the following description of embodiments described by way of example with reference to the accompanying drawings in which:
  • FIG. 1 is a schematic view in axial section of a part of a pump according to the invention in which the flexible metallic pumping member constituted by an annular element of substantially toric cross section produced by the assembly of two diaphragms is disposed between, on the one hand, a fixed rigid wall and, on the other hand, a movable rigid wall so as to ensure pumping of the space between the annular element and the two rigid parts;
  • Figure 2 is a view similar to Figure 1, in which the pump part shown in Figure 1 is doubled so that one of the pumping chambers is at minimum volume, while the other is at volume maximum, which allows series pumping;
  • Figure 3 is a diametrical sectional view of a flexible metal pumping member obtained by preforming a single metal disc;
  • Figure 4 is also a diametral sectional view of a flexible metal member formed by the assembly of two identical members to that of Figure 3;
  • Figure 5 is a schematic view in axial section of a pump similar to that shown in Figure 2 but where each of the two pumping chambers is equipped with a simple flexible metal member as shown in Figure 3. An arrangement is also shown in this figure valves different from that of Figure 2;
  • Figure 6 is a view similar to Figure 5 but with a flexible double metal member as shown in Figure 4;
  • Figure 7 is a sectional view along line VII-VII of Figure 8 of a completely dry and sealed pumping unit produced by coupling a pump according to Figure 5 with a spiral pump with circular translation movement; and
  • FIG. 8 is a sectional view along the broken reading VIII-VIII of FIG. 7.

La figure 1 présente, à titre d'exemple non limitatif, une partie de pompe à vide intégralement sèche et étanche à mouvement rectiligne de compression alternative, adaptée selon l'invention à pomper toutes sortes de milieux, même corrosifs ou radio-actifs.FIG. 1 shows, by way of nonlimiting example, a part of an entirely dry and sealed vacuum pump with rectilinear movement of alternative compression, adapted according to the invention to pump all kinds of media, even corrosive or radioactive.

Cette partie de pompe comprend une chambre de pompage 1 dont le volume variable est compris à l'intérieur radialement d'un organe métallique circulaire plus particulièrement ici annulaire à section droite sensiblement torique, ouverte extérieurement, flexible axialement et formé ici de deux diaphragmes annulaires métalliques souples 2 et 3 reliés dos à dos, par leurs bords circulaires internes 4. Cette chambre est par ailleurs délimitée par deux pièces rigides 5 et 6 axialement en regard définissant les parois d'extrémité axiale de la chambre de pompage et animées, l'une par rapport à l'autre, d'un mouvement axial alternatif rectiligne, suivant un axe A-A, entre une configuration écartée et une configuration rapprochée. L'élément annulaire 2-3 est raccordé suivant ses bords circulaires externes 7 et 8, par exemple par soudure, à chacune des deux pièces rigides, respectivement. Ces pièces rigides présentent axialement, en regard, des surfaces centrales 9 et 10 de profils complémentaires, et, entre celles-ci et les lignes de fixation de l'élément annulaire, des zones annulaires évidées 9A et 10A. Le profil de ces zones 9A et 10A doit être extrêmement précis pour qu' en configuration rapprochée il puisse parfaitement correspondre à un petit jeu près a celui que prend alors l'élément annulaire flexible 2, 3, les surfaces centrales 9 et 10, représentées planes dans l'exemple de la figure 1, venant également s'épouser au même petit jeu près. Grâce à ces dispositions le volume résiduel de la chambre 1 est ainsi réduit au minimum.This pump part comprises a pumping chamber 1 whose variable volume is included inside radially of a circular metallic member more particularly here annular with a substantially toric cross section, open externally, axially flexible and formed here of two annular metal diaphragms flexible 2 and 3 connected back to back, by their internal circular edges 4. This chamber is also delimited by two rigid parts 5 and 6 axially opposite defining the walls of axial end of the pumping chamber and animated, one with respect to the other, of a rectilinear alternating axial movement, along an axis AA, between a spaced configuration and a close configuration. The annular element 2-3 is connected along its external circular edges 7 and 8, for example by welding, to each of the two rigid parts, respectively. These rigid parts have axially opposite, central surfaces 9 and 10 of complementary profiles, and, between them and the fixing lines of the annular element, recessed annular zones 9A and 10A. The profile of these zones 9A and 10A must be extremely precise so that in close configuration it can perfectly correspond to a small clearance close to that which then takes the flexible annular element 2, 3, the central surfaces 9 and 10, represented planar in the example of Figure 1, also coming to marry the same little game. Thanks to these provisions, the residual volume of chamber 1 is thus reduced to a minimum.

Dans la partie de pompe représentée à titre d'exemple à la figure 1, la pièce rigide supérieure 5 est fixée sur un bâti B.In the pump part shown by way of example in FIG. 1, the upper rigid part 5 is fixed to a frame B.

La partie rigide inférieure 6 appartient à un équipage mobile M entraîné en mouvement à l'aide d'un dispositif à excentrique 11 du type "à cadre", dont l'axe X-X croise l'axe A-A à angle droit. Tel que représenté, le dispositif 11 comprend un arbre d'entraînement 11A, aligné selon l'axe X-X, solidaire d'un disque excentré 11B engagé dans un roulement à billes 11 C. La pièce rigide mobile 6 comporte deux plages d'appui 6a et 6b parallèles à la surface centrale 10, entre lesquelles est engagée avec jeu la piste externe du roulement à billes 11 C.The lower rigid part 6 belongs to a mobile assembly M driven in movement with the aid of an eccentric device 11 of the "frame" type, the axis X-X of which crosses the axis A-A at right angles. As shown, the device 11 comprises a drive shaft 11A, aligned along the axis XX, integral with an eccentric disc 11B engaged in a ball bearing 11 C. The movable rigid part 6 has two support areas 6a and 6b parallel to the central surface 10, between which is engaged with clearance the outer track of the ball bearing 11 C.

Lors de la rotation de l'excentrique 11 à partir de sa position basse représentée à la figure 1, celui-ci exerce sur l'équipage M une poussée axiale vers le haut, toute composante radiale de frottement étant éliminée grâce à la coopération par roulement du roulement à billes 11 C avec la plage d'appui 6a. Ce mouvement ascendant se poursuit jusqu'à la position correspondant à la configuration rapprochée, puis la rotation de l'excentrique 11 produit un mouvement descendant de l'équipage mobile M et cela se poursuit de manière cyclique. Le débattement axial de l'équipage M est défini par l'excentricité "e" de l'excentrique 11.During the rotation of the eccentric 11 from its low position shown in FIG. 1, the latter exerts on the crew M an axial thrust upwards, any radial friction component being eliminated by means of rolling cooperation of the ball bearing 11 C with the bearing surface 6a. This upward movement continues until the position corresponding to the close configuration, then the rotation of the eccentric 11 produces a downward movement of the movable assembly M and this continues cyclically. The axial movement of the crew M is defined by the eccentricity "e" of the eccentric 11.

Dans les pièces rigides 5 et 6 sont disposées des soupapes anti-retour du type à billes 12 et 13 assurant un écoulement de fluide à sens unique dans une tubulure 14 comprenant un tronçon d'aspiration 14A et un tronçon de refoulement 14B.In the rigid parts 5 and 6 are arranged non-return valves of the ball type 12 and 13 ensuring a one-way fluid flow in a tube 14 comprising a suction section 14A and a discharge section 14B.

En fonctionnement, lors du mouvement ascendant de l'équipage mobile M, l'élément annulaire flexible 2-3 est progressivement amené à épouser à un très petit jeu près les surfaces des zones 9A et 10A de la chambre de pompage en même temps que les surfaces centrales 9 et 10 de cette même chambre s'épousent également à un très petit jeu près. Le gaz est ainsi expulsé dans sa presque totalité au travers de l'orifice de refoulement.In operation, during the upward movement of the mobile assembly M, the flexible annular element 2-3 is gradually brought to conform to a very small clearance near the surfaces of the zones 9A and 10A of the pumping chamber at the same time as the central surfaces 9 and 10 of this same chamber also conform to a very small play. The gas is thus almost entirely expelled through the discharge orifice.

La figure 2 représente une pompe selon l'invention qui comporte deux chambres de pompage 1 et 1' du type précité, mais disposées tête-bêche. Les mêmes signes de référence ont été utilisés pour désigner, à propos de la chambre supérieure de pompage 1, les mêmes éléments qu'à la figure 1, et des signes de références analogues, mais suivis d'un indice "prime" pour désigner les éléments correspondants de la chambre inférieure de pompage 1'.FIG. 2 represents a pump according to the invention which comprises two pumping chambers 1 and 1 ′ of the aforementioned type, but arranged head to tail. The same reference signs have been used to designate, with respect to the upper pumping chamber 1, the same elements as in FIG. 1, and similar reference signs, but followed by a "prime" index to designate the corresponding elements of the lower pumping chamber 1 '.

Ces chambres 1 et 1' sont centrées et alignées sur le même axe A-A et les pièces mobiles 6 et 6' qui contribuent, avec les pièces rigides fixes 5 et 5' et les éléments annulaires 2-3 et 2'-3', à les définir sont toutes deux solidaires de l'équipage mobile M dont le guidage axial par rapport au bâti B est assuré par les éléments annulaires 2-3 et 2'-3' grâce en particulier à leur raideur radiale. De la sorte, ces chambres suivent des cycles de compression en opposition de phase, d'où un pompage en série de la chambre 1' vers la chambre 1.These chambers 1 and 1 'are centered and aligned on the same axis AA and the moving parts 6 and 6' which contribute, with the rigid fixed parts 5 and 5 'and the annular elements 2-3 and 2'-3', to defining them are both integral with the movable assembly M whose axial guidance relative to the frame B is ensured by the annular elements 2-3 and 2'-3 'thanks in particular to their radial stiffness. In this way, these chambers follow compression cycles in phase opposition, resulting in a pumping in series from chamber 1 'to chamber 1.

La tubulure 14A qui traverse l'équipage mobile M constitue une tubulure d'admission pour la chambre de pompage 1, mais une tubulure de refoulement pour la chambre de pompage 1', laquelle reçoit une tubulure d'aspiration 14C qui est avantageusement dans le prolongement des tubulures 14A et 14B qui constitue la tubulure de refoulement de la chambre 1.The tubing 14A which passes through the movable assembly M constitutes an intake tubing for the pumping chamber 1, but a discharge tubing for the pumping chamber 1 ', which receives a suction tubing 14C which is advantageously in the extension tubing 14A and 14B which constitutes the delivery tubing of chamber 1.

Pour des mesures de sécurité, chacun des éléments annulaires ou organes métalliques flexibles de pompage 2-3 et 2'-3' est, de façon préférentielle, entouré par un soufflet métallique 15 ou 15', fixé aux pièces rigides fixe et mobile 5, 6 auxquelles est fixé ledit élément annulaire. Ces éléments annulaires et ces soufflets définissent des chambres annulaires de sécurité 15A et 15'A qui assurent une isolation des chambres de pompage vis-à-vis de l'extérieur. Ces chambres annulaires sont avantageusement reliées, par des tubulures 17A et 17B de liaison à un pressostat 16 adapté à contrôler que la pression du gaz témoin contenu dans ces chambres reste entre deux valeurs limites, et à déclencher tout système de contrôle et de sécurité lorsque cette pression sort de cette plage de valeurs admissibles. Le pressostat permet ainsi de détecter toute rupture soit d'un élément annulaire, soit d'un soufflet, sans qu'aucune communication directe n'ait été établie entre l'intérieur des chambres de pompage et l'extérieur. Il en résulte une bonne sécurité dans le cas du pompage de gaz dangereux.For safety measures, each of the annular elements or flexible metallic pumping elements 2-3 and 2'-3 'is preferably surrounded by a metal bellows 15 or 15', fixed to the rigid fixed and mobile parts 5, 6 to which said annular element is fixed. These annular elements and these bellows define annular safety chambers 15A and 15'A which provide isolation of the pumping chambers from the outside. These annular chambers are advantageously connected, by tubes 17A and 17B connecting to a pressure switch 16 adapted to control that the pressure of the control gas contained in these chambers remains between two limit values, and to trigger any control and safety system when this pressure leaves this range of admissible values. The pressure switch thus makes it possible to detect any rupture either of an annular element or of a bellows, without any direct communication having been established between the interior of the pumping chambers and the exterior. This results in good safety in the case of pumping dangerous gases.

Avantageusement cette même disposition permet en maintenant le gaz témoin dans les chambres 15A et 15'A à une valeur de pression notablement plus faible que la pression atmosphérique de diminuer d'autant les efforts de fatigue supportés par les organes métalliques flexibles de pompage 2-3 et 2'-3' lorsque leurs faces externes sont directement soumises à la pression atmosphérique. Cet avantage appréciable se traduit par une augmentation de durée de vie de l'organe métallique flexible de pompage, donc de fiabilité de l'ensemble de la pompe.Advantageously, this same arrangement makes it possible, by maintaining the control gas in the chambers 15A and 15'A at a pressure value significantly lower than the atmospheric pressure, to reduce the fatigue forces borne by the flexible metallic pumping bodies 2-3 and 2'-3 'when their external faces are directly subjected to atmospheric pressure. This appreciable advantage results in an increase in the service life of the flexible metallic pumping member, and therefore in the reliability of the entire pump.

La figure 3 montre un organe métallique flexible de pompe 18 obtenu à partir d'un disque plein et préformé suivant un profil diamétral permettant une flexibilité axiale optimale, c'est-à-dire le meilleur déplacement axial pour le minimum d'effort axial correspondant.FIG. 3 shows a flexible metallic pump member 18 obtained from a solid disc and preformed according to a diametrical profile allowing optimal axial flexibility, that is to say the best axial displacement for the corresponding minimum axial force .

Plus précisément, la forme souhaitée de l'organe métallique 18 est déterminée en soumettant l'une des faces d'un disque métallique plein à une pression hydrostatique prédéterminée, le disque étant maintenu à sa périphérie et sur une partie centrale 33 circulaire. Le processus de formage simple permet d'obtenir le profil diamétral donnant la flexibilité axiale optimale mais il n'est pas forcément utilisé industriellement pour produire les organes flexibles 18. Ces derniers peuvent être par exemple obtenus par emboutissage de disques semblables au moyen d'outils de presse conformés pour reproduire le profil souhaité, déterminé de la façon indiquée ci-dessus. Cet organe de pompage 18 est destiné à être raccordé suivant son bord extérieur 7 à la pièce rigide fixe 5 et à l'équipage mobile M (figure 5) par une fixation centrale en 33, par tout moyen approprié.More precisely, the desired shape of the metallic member 18 is determined by subjecting one of the faces of a solid metallic disc to a predetermined hydrostatic pressure, the disc being held at its periphery and on a circular central part 33. The simple forming process makes it possible to obtain the diametral profile giving optimum axial flexibility, but it is not necessarily used industrially to produce the flexible members 18. The latter can for example be obtained by stamping similar discs using tools. presses designed to reproduce the desired profile, determined as indicated above. This pumping member 18 is intended to be connected along its outer edge 7 to the fixed rigid part 5 and to the movable assembly M (FIG. 5) by a central fixing at 33, by any suitable means.

La figure 4 montre un organe métallique flexible constitué par deux organes 18 identiques à celui de la figure 3, et réunis par leurs parties centrales 33 respectives, de façon que leurs profils diamétraux soient sensiblement symétriques par rapport à un plan transversal à la direction axiale de déplacement. Les bords extérieurs 7 et 8 sont destinés à être raccordés de façon étanche, par exemple par soudure à chacune des pièces rigides 5 et 6 respectivement et la partie centrale 33 comporte un passage 34 pour la mise en communication des deux parties de la chambre de pompage ainsi créée.FIG. 4 shows a flexible metallic member constituted by two members 18 identical to that of FIG. 3, and joined by their respective central parts 33, so that their diametrical profiles are substantially symmetrical with respect to a plane transverse to the axial direction of displacement. The outer edges 7 and 8 are intended to be tightly connected, for example by welding to each of the rigid parts 5 and 6 respectively and the central part 33 has a passage 34 for the communication between the two parts of the pumping chamber thus created.

La figure 5 représente un montage de pompe sèche similaire à celui représenté figure 2, mais où les deux chambres de pompage 1 et 1' sont comprises entre les pièces rigides 5 et 5' et les organes flexibles de pompage constitués par deux disques métalliques préformés tels que représentés figure 3. Ces organes unitaires 18 et 18' sont réunis par leurs bords extérieurs 7 et 7' aux pièces rigides 5 et 5', et leur mouvement axial alternatif leur est transmis par l'action de l'équipage mobile M duquel elles sont solidaires par leur liaison en 33 et 33'. Dans cet agencement, l'organe flexible 18 forme en quelque sorte la paroi d'extrémité axiale mobile de la chambre à volume variable. Cet exemple de construction comporte les détails déjà décrits figure 2 et se rapportant en particulier à l'établissement de la double enveloppe par les soufflets 15 et 15' au contrôle des espaces 15A et 15'A par le pressostat 16, et aux pièces tel l'excentrique 11 constituant l'ensemble de l'excentrique à cage. Contrairement à la figure 2, les tubulures 14 d'aspiration et de refoulement des gaz sont situées à l'extérieur du corps de pompe et elles sont munies de soupapes anti-retour 14a du type à clapets ou lamelles suivant les solutions classiques propres à un pompage alternatif.Figure 5 shows a dry pump assembly similar to that shown in Figure 2, but where the two pumping chambers 1 and 1 'are between the rigid parts 5 and 5' and the flexible pumping members constituted by two preformed metal discs such as shown in FIG. 3. These unitary members 18 and 18 ′ are joined by their outer edges 7 and 7 ′ to the rigid parts 5 and 5 ′, and their alternating axial movement is transmitted to them by the action of the mobile assembly M from which they are united by their connection in 33 and 33 '. In this arrangement, the flexible member 18 somehow forms the movable axial end wall of the variable volume chamber. This example of construction includes the details already described in FIG. 2 and relating in particular to the establishment of the double envelope by the bellows 15 and 15 ′ to the control of the spaces 15A and 15 ′ A by the pressure switch 16, and to the parts such l 'eccentric 11 constituting the whole of the cage eccentric. Unlike FIG. 2, the gas suction and delivery pipes 14 are located outside the pump body and they are fitted with non-return valves 14a of the type with flaps or lamellae according to the conventional solutions specific to a alternative pumping.

La fiabilité et les perfomances de ce type de pompe intégralement sèche sont dues à la grande souplesse axiale des organes flexibles tels que 18 et à la réduction des effets de fatigue qu'ils supportent par la mise sous faible pression dans les espaces annulaires étanches 15A et 15'A, de leurs surfaces extérieures.The reliability and the performances of this type of fully dry pump are due to the great axial flexibility of the flexible members such as 18 and to the reduction of the effects of fatigue which they support by putting under low pressure in the sealed annular spaces 15A and 15'A, from their exterior surfaces.

La figure 6 est une construction de pompe sèche identique à celle représentée figure 5 mais avec l'adaptation d'un organe de pompage constitué de deux organes 18 réunis entre eux par leur partie centrale 33 et tels que représentés figure 4. Ces organes doubles 18 et 18' sont raccordés par leurs bords extérieurs 7-7' et 8-8' respectivement aux parties rigides fixes 5 et 5' et à la pièce 6 qui fait partie de l'ensemble mobile M, lequel sous l'action de l'excentrique à cage transmet à ces organes flexibles leur mouvement alternatif axial.Figure 6 is a dry pump construction identical to that shown in Figure 5 but with the adaptation of a pumping member consisting of two members 18 joined together by their central part 33 and as shown in Figure 4. These double members 18 and 18 'are connected by their outer edges 7-7' and 8-8 'respectively to the rigid fixed parts 5 and 5' and to the part 6 which is part of the mobile assembly M, which under the action of the Eccentric cage transmits to these flexible members their alternating axial movement.

On remarquera que pour un même travail à chacun des 2 éléments d'un même organe 18 ainsi constitué, le volume de la chambre de pompage 1 se trouve doublé par rapport au volume d'une chambre équipée comme figure 5 d'un seul élément 18 non doublé. Entre la configuration écartée et la configuration rapprochée de l'organe 181e trou d'intercommunication 34 entre les deux parties de la chambre 1 permet l'expulsion de la totalité des gaz. La présente construction bénéficie des diverses dispositions avantageuses déjà mentionnées pour la construction suivant figures 2 et 5.It will be noted that for the same work for each of the 2 elements of the same member 18 thus formed, the volume of the pumping chamber 1 is doubled compared to the volume of a chamber equipped as in FIG. 5 with a single element 18 unlined. Between the discarded configuration and the close configuration of the member 181st interconnection hole 34 between the two parts of the chamber 1 allows the expulsion of all of the gases. The present construction benefits from the various advantageous arrangements already mentioned for the construction according to FIGS. 2 and 5.

Quoiqu'une pompe intégralement sèche et étanche du type précité puisse être utilisée seule, il est avantageux de lui associer une autre pompe, par exemple du type à spirales précédemment mentionné. Les figures 7 et 8 représentent une telle pompe à spirales 19A associée à une pompe 19B du type décrit à propos de la figure 5 ci-dessus.Although an entirely dry and sealed pump of the aforementioned type can be used alone, it is advantageous to associate it with another pump, for example of the spiral type previously mentioned. Figures 7 and 8 show such a scroll pump 19A associated with a pump 19B of the type described in connection with Figure 5 above.

La pompe à spirales 19A, dont le principe est maintenant bien connu d'après les brevets précités de Monsieur Paul VULLIEZ (Fr-2 141 402 et FR-2 153 159 ; DE-2 225 327 ou US-3 802 809, notamment) ne sera décrite ci-dessous que de façon sommaire.The 19A scroll pump, the principle of which is now well known from the aforementioned patents of Mr. Paul VULLIEZ (Fr-2 141 402 and FR-2 153 159; DE-2 225 327 or US-3 802 809, in particular) will only be described below in summary.

Elle comporte, dans une enceinte fermée par une cloche 26 et un ensemble à double soufflet 27, une spirale fixe 24 solidaire par une plaque 24A d'un canon 25 d'aspiration de gaz et, imbriquée dans celle-ci, une spirale mobile 22 entraînée dans un mouvement de translation circulaire exacte adapté à lui faire longer radialement et axialement, respectivement, avec un très petit jeu constant, la spirale fixe 24 et la plaque de base 24A associée. Le mouvement de translation circulaire est commandé par trois excentriques 23 de même excentricité "e" , solidaires de trois arbres parallèles 20 et engagés au moyen de roulements dans des cavités aménagées axialement dans la pièce 22A portant la spirale mobile 22.It comprises, in an enclosure closed by a bell 26 and a double bellows assembly 27, a fixed spiral 24 secured by a plate 24A of a gas suction barrel 25 and, nested therein, a movable spiral 22 driven in an exact circular translation movement adapted to make it extend radially and axially, respectively, with a very small constant clearance, the fixed spiral 24 and the associated base plate 24A. The circular translational movement is controlled by three eccentrics 23 of the same eccentricity "e", integral with three parallel shafts 20 and engaged by means of bearings in cavities arranged axially in the part 22A carrying the movable spiral 22.

L'un, 20A, des trois arbres 20 est entraîné en rotation par un moteur 21, les autres arbres ne servant qu'à assurer un guidage rigoureux de la spirale mobile 22. L'ensemble est disposé dans un bâti B1.One, 20A, of the three shafts 20 is rotated by a motor 21, the other shafts only serving to ensure rigorous guidance of the movable spiral 22. The assembly is arranged in a frame B1.

Les gaz à pomper sont aspirés, par une tubulure de liaison à l'enceinte à vider (non représentée) dans la tubulure 28 du canon 25, pénètrent entre les spirales à leur périphérie et par compression entre ces spirales, sont refoulés vers l'axe dans une chambre annulaire 29 comprise entre le canon 25 et l'ensemble 27 à double soufflet.The gases to be pumped are sucked, through a connection tube to the enclosure to be emptied (not shown) in the tube 28 of the barrel 25, penetrate between the spirals at their periphery and by compression between these spirals, are discharged towards the axis in an annular chamber 29 between the barrel 25 and the assembly 27 with double bellows.

Ces gaz sont ensuite aspirés par une tubulure 30 vers les chambres de pompage 1 et 1' de la pompe 19B.These gases are then sucked through a pipe 30 to the pumping chambers 1 and 1 ′ of the pump 19B.

Cette pompe 19B est analogue à la pompe de la figure 5 mais représentée à la figure 7 selon un plan de coupe perpendiculaire à celui de cette figure 5 ; les éléments correspondants portent les mêmes chiffres que sur cette figure 5. Cette pompe, de la manière précédemment décrite, refoule lesdits gaz, soit à l'atmosphère, soit dans une capacité ou dans un circuit où ils peuvent, selon l'invention, et suivant le type d'organe flexible utilisé être transférés à une pression supérieure à la pression atmosphérique.This pump 19B is analogous to the pump of FIG. 5 but shown in FIG. 7 along a section plane perpendicular to that of this FIG. 5; the corresponding elements bear the same figures as in this figure 5. This pump, in the manner previously described, delivers said gases, either to the atmosphere, or in a capacity or in a circuit where they can, according to the invention, and according to the type of flexible member used be transferred to a pressure higher than atmospheric pressure.

On notera que l'entraînement de l'excentrique 11 de la pompe 19B (excentricité "el") est assuré par la rotation d'un arbre 32 disposé dans le prolongement de l'arbre 20A entraîné par le moteur 21. La liaison entre les arbres 20 et 32 peut être faite, soit directement, soit à travers tout système réducteur de vitesse, la pompe 19B à compression alternative conservant suffisamment d'efficacité à des vitesses reduites, compte tenu du faible débit-masse des gaz à pomper aux pressions où l'essentiel du pompage est confié à la pompe à spirales.It will be noted that the drive of the eccentric 11 of the pump 19B (eccentricity "e l ") is ensured by the rotation of a shaft 32 arranged in the extension of the shaft 20A driven by the motor 21. The connection between shafts 20 and 32 can be made either directly or through any speed reduction system, the alternative compression pump 19B retaining sufficient efficiency at reduced speeds, taking into account the low mass flow rate of the gases to be pumped at pressures where most of the pumping is done by the spiral pump.

De manière avantageuse le volume situé entre les deux soufflets de l'ensemble à double soufflet 27 est mis en communication (par une tubulure 17C), comme les volumes 15A et 15'A situés entre les organes flexibles 18 et 18' et les soufflets 15 et 15', avec un pressostat 16 adapte au contrôle de toute fuite éventuelle aux organes flexibles 27, 18-18', 15-15'.Advantageously, the volume situated between the two bellows of the double bellows assembly 27 is placed in communication (by a tube 17C), like the volumes 15A and 15'A situated between the flexible members 18 and 18 'and the bellows 15 and 15 ', with a pressure switch 16 suitable for controlling any leakage to the flexible members 27, 18-18', 15-15 '.

L'établissement pour ce contrôle d'une pression limitée à quelques dizaines de millibars dans les espaces annulaires étanches 15A et 15'A permet tout aussi avantageusement de diminuer notablement les effets de fatigue sur les organes flexibles 18 dont les faces externes sont ainsi soustraites à l'action de la pression atmosphérique.The establishment for this control of a pressure limited to a few tens of millibars in the sealed annular spaces 15A and 15'A also makes it possible to significantly reduce the effects of fatigue on the flexible members 18 whose external faces are thus removed from the action of atmospheric pressure.

Il va de soi que la description qui précède n'a été proposée qu'à titre illustratif et que de nombreuses variantes peuvent être proposées par l'homme de l'art, notamment par combinaison des diverses dispositions précitées, sans sortir du cadre de l'invention, notamment en ce qui concerne la structure particulière des organes métalliques flexibles de pompage, l'agencement des diverses chambres de pompage au sein d'une même pompe ou le mode d'accouplement d'une pompe selon l'invention à une autre pompe, notamment du type à spirales mais pas nécessairement.It goes without saying that the foregoing description has been offered for illustrative purposes only and that numerous variants can be proposed by those skilled in the art, in particular by combining the various aforementioned provisions, without going beyond the ambit of the invention. invention, in particular with regard to the particular structure of the flexible metallic pumping members, the arrangement of the various pumping chambers within the same pump or the method of coupling a pump according to the invention to another pump, in particular of the spiral type but not necessarily.

Claims (11)

1. A perfectly dry and closed vacuum pump comprising at least one variable volume pumping chamber (1) connected to a suction pipe and a discharge pipe, and anti-return means arranged to ensure a uni-directional fluid circulation from the said suction pipe to the said discharge pipe, the said chamber comprising a stationary axial end wall (5) and a movable axial end wall (6; 18), characterized in that the said pumping chamber comprises at least one circular metallic element (2, 3; 18) flexible axially and having a certain radial stiffness, in that this element has its outer part fixed to a rigid part of the said pumping chamber and is permanently attached to a movable assembly (6) subjected to an alternating movement between a separated configuration and an adjacent configuration of the said axial end walls, and in that the said circular metallic element (2, 3; 18) and the axial end wall (5, 6) against which it comes to be applied have substantially the same diametrically curved profile, in the said adjacent configuration, so that the residual volume between the said flexible metal element and that axial end wall which faces it is the smallest possible.
2. A vacuum pump according to claim 1, characterized in that the, or each, pumping chamber comprises a single circular metallic element (18) previously mentioned, the outer part of which is fixed to the said stationary axial end wall (5) to form a seal and a central part of which (33) is fixed to the said movable assembly (6).
3. A vacuum pump according to claim 1, characterized in that the, or each, pumping chamber comprises two circular metallic elements (18) previously mentioned, connected by their similar central parts (33) in such a way that their respective diametrical profiles are substantially symmetrical with respect to a transverse plane, in that the outer parts of these two circular metal elements (18) are respectively joined to form a seal with the said stationary axial end wall and with the movable axial end wall, and in that a passage (34) is defined in the said assembled central parts.
4. A vacuum pump according to claim 1, characterized in that the circular metallic element previously mentioned has an annular configuration with a substantially toroidal cross- section, opened outwardly to define two outer circular edges (7, 8) joined respectively to rigid parts of the stationary axial end wall (5) and the movable axial end wall (6), these walls comprising hollowed out annular zones (9A, 10A) with a diametrical profile corresponding substantially to that which an adjacent part of the neighbouring metallic element forms in the previously mentioned adjacent configuration.
5. A vacuum pump according to claim 4, characterized in that the said circular metal element is formed from two flexible annular metallic diaphragms (2, 3) joined back to back by their internal circular edges (4).
6. A vacuum pump according to any one of the preceding claims, characterized in that the circular metallic element or elements (18) of the, or each, pumping chamber is, or are, surrounded by a metallic bellows (15) joined axially to form a seal, on the one hand to a stationary rigid part (5), and on the other hand to a movable rigid part (6) of the pump, in such a way as to define an annular safety chamber (15A) separating the said pumping chamber from the outside environment.
7. A vacuum pump according to claim 6, characterized in that the aforementioned annular safety chamber or chambers is connected to means for measuring pressure (16).
8. A vacuum pump according to claim 6 or 7, characterized in that the aforementioned annular safety chamber or chambers (15A) is brought to a pressure considerably lower than the pressure of the said outside environment.
9. A vacuum pump according to any one of claims 1 to 3, characterized in that the diametrical profile of the aforementioned circular metallic element results from the application of a predetermined hydrostatic pressure on a metallic disc held at its periphery and at a central part, to obtain an optimal axial flexiblity.
10. A vacuum pump according to any one of the preceding claims, characterized in that the aforementioned movable assembly (6) is entrained in a rectilinear alternating movement by an arrangement of the encased eccentric kind (11 ).
11. A vacuum pump according to any one of the preceding claims, characterized in that it is mounted in association with a perfectly dry and closed vacuum pump of the kind comprising a movable spiral (22) imbricated in a stationary spiral (24) and arranged to describe, in this stationary spiral, a circular translational movement controlled by three eccentrics (23) having the same eccentricity and integral with three parallel shafts (20) one of which (20A) is attached to a motor (21), and in that the said eccentric device of the encased eccentric kind (11) is mounted on a shaft (32) situated on the prolongation of that (20A) shaft of the three which is driven by the said motor, the said eccentric device (11) being driven in rotation by the said shaft (20A).
EP85401426A 1984-07-23 1985-07-12 Perfectly dry and closed vacuum pump with rectilinear movement for alternating compression Expired EP0173601B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85401426T ATE35025T1 (en) 1984-07-23 1985-07-12 ALL DRY AND INSULATED VACUUM PUMP WITH LINEAR MOVEMENT TO OBTAIN ALTERNATE COMPRESSION.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8411652A FR2567970B1 (en) 1984-07-23 1984-07-23 COMPLETELY DRY AND WATERPROOF VACUUM PUMP WITH RECTILINEAR MOTION OF COMPRESSION COMPRESSION
FR8411652 1984-07-23

Publications (2)

Publication Number Publication Date
EP0173601A1 EP0173601A1 (en) 1986-03-05
EP0173601B1 true EP0173601B1 (en) 1988-06-08

Family

ID=9306386

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85401426A Expired EP0173601B1 (en) 1984-07-23 1985-07-12 Perfectly dry and closed vacuum pump with rectilinear movement for alternating compression

Country Status (8)

Country Link
US (1) US4718836A (en)
EP (1) EP0173601B1 (en)
JP (1) JPS6193283A (en)
AT (1) ATE35025T1 (en)
CA (1) CA1317576C (en)
DE (1) DE3563242D1 (en)
FR (1) FR2567970B1 (en)
ZA (1) ZA855368B (en)

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Also Published As

Publication number Publication date
ATE35025T1 (en) 1988-06-15
FR2567970B1 (en) 1989-04-28
FR2567970A1 (en) 1986-01-24
JPH0315038B2 (en) 1991-02-28
DE3563242D1 (en) 1988-07-14
EP0173601A1 (en) 1986-03-05
ZA855368B (en) 1986-03-26
CA1317576C (en) 1993-05-11
JPS6193283A (en) 1986-05-12
US4718836A (en) 1988-01-12

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