ATE426098T1 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- ATE426098T1 ATE426098T1 AT00117868T AT00117868T ATE426098T1 AT E426098 T1 ATE426098 T1 AT E426098T1 AT 00117868 T AT00117868 T AT 00117868T AT 00117868 T AT00117868 T AT 00117868T AT E426098 T1 ATE426098 T1 AT E426098T1
- Authority
- AT
- Austria
- Prior art keywords
- fixed
- pump
- components
- casing
- rotating
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electrophonic Musical Instruments (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19942410A DE19942410A1 (de) | 1999-09-06 | 1999-09-06 | Vakuumpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE426098T1 true ATE426098T1 (de) | 2009-04-15 |
Family
ID=7920926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00117868T ATE426098T1 (de) | 1999-09-06 | 2000-08-19 | Vakuumpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US6464451B1 (de) |
EP (1) | EP1081387B1 (de) |
JP (1) | JP2001090690A (de) |
AT (1) | ATE426098T1 (de) |
DE (2) | DE19942410A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10114585A1 (de) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US7171786B2 (en) * | 2003-12-01 | 2007-02-06 | Tapco International Corporation | Window well |
WO2007146882A1 (en) * | 2006-06-12 | 2007-12-21 | Mag Aerospace Industries, Inc. | Regenerative vacuum generator for aircraft and other vehicles |
GB0618745D0 (en) † | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
DE102007010068B4 (de) | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
WO2009142905A1 (en) | 2008-05-20 | 2009-11-26 | Sundew Technologies, Llc | Deposition method and apparatus |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1809902C3 (de) * | 1968-11-20 | 1973-11-15 | Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar | Mehrstufige Turbo Molekularhoch vakuumpumpe |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
DE2354046A1 (de) * | 1973-10-29 | 1975-05-07 | Battelle Institut E V | Elektrisch angetriebene turbomolekularvakuumpumpe |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
DE4331589C2 (de) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
CN1115362A (zh) * | 1994-07-06 | 1996-01-24 | 储继国 | 多拖动面分子泵 |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
GB2333127A (en) * | 1997-10-21 | 1999-07-14 | Varian Associates | Molecular drag compressors having finned rotor construction |
-
1999
- 1999-09-06 DE DE19942410A patent/DE19942410A1/de not_active Withdrawn
-
2000
- 2000-08-19 DE DE50015596T patent/DE50015596D1/de not_active Expired - Lifetime
- 2000-08-19 EP EP00117868A patent/EP1081387B1/de not_active Expired - Lifetime
- 2000-08-19 AT AT00117868T patent/ATE426098T1/de not_active IP Right Cessation
- 2000-09-05 JP JP2000268621A patent/JP2001090690A/ja active Pending
- 2000-09-06 US US09/655,981 patent/US6464451B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE50015596D1 (de) | 2009-04-30 |
EP1081387A2 (de) | 2001-03-07 |
DE19942410A1 (de) | 2001-03-08 |
JP2001090690A (ja) | 2001-04-03 |
US6464451B1 (en) | 2002-10-15 |
EP1081387A3 (de) | 2002-04-17 |
EP1081387B1 (de) | 2009-03-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
REN | Ceased due to non-payment of the annual fee |