EP0855517A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP0855517A3
EP0855517A3 EP98100372A EP98100372A EP0855517A3 EP 0855517 A3 EP0855517 A3 EP 0855517A3 EP 98100372 A EP98100372 A EP 98100372A EP 98100372 A EP98100372 A EP 98100372A EP 0855517 A3 EP0855517 A3 EP 0855517A3
Authority
EP
European Patent Office
Prior art keywords
section
cooler
heater
sections
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98100372A
Other languages
German (de)
English (en)
Other versions
EP0855517A2 (fr
EP0855517B1 (fr
Inventor
Kurt Hölss
Heinrich Lotz
Matthias. Mädler
Heinz Reichert
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7818235&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0855517(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0855517A2 publication Critical patent/EP0855517A2/fr
Publication of EP0855517A3 publication Critical patent/EP0855517A3/fr
Application granted granted Critical
Publication of EP0855517B1 publication Critical patent/EP0855517B1/fr
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
EP98100372A 1997-01-24 1998-01-12 Pompe à vide Revoked EP0855517B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19702456A DE19702456B4 (de) 1997-01-24 1997-01-24 Vakuumpumpe
DE19702456 1997-01-24

Publications (3)

Publication Number Publication Date
EP0855517A2 EP0855517A2 (fr) 1998-07-29
EP0855517A3 true EP0855517A3 (fr) 1999-07-07
EP0855517B1 EP0855517B1 (fr) 2003-10-08

Family

ID=7818235

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98100372A Revoked EP0855517B1 (fr) 1997-01-24 1998-01-12 Pompe à vide

Country Status (4)

Country Link
EP (1) EP0855517B1 (fr)
JP (1) JP4235273B2 (fr)
AT (1) ATE251722T1 (fr)
DE (2) DE19702456B4 (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
JP2002115692A (ja) * 2000-10-04 2002-04-19 Osaka Vacuum Ltd 複合真空ポンプ
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10142567A1 (de) 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP2004270692A (ja) * 2003-02-18 2004-09-30 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP2010025122A (ja) * 2003-02-18 2010-02-04 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP4243996B2 (ja) * 2003-08-21 2009-03-25 株式会社荏原製作所 ターボ真空ポンプおよび該ターボ真空ポンプを備えた半導体製造装置
JP4916655B2 (ja) * 2004-11-17 2012-04-18 株式会社島津製作所 真空ポンプ
JP5104288B2 (ja) * 2007-12-25 2012-12-19 富士通セミコンダクター株式会社 真空ポンプ、半導体装置の製造装置及び半導体装置の製造方法
JP5486184B2 (ja) * 2008-12-10 2014-05-07 エドワーズ株式会社 真空ポンプ
WO2012002084A1 (fr) 2010-07-02 2012-01-05 エドワーズ株式会社 Pompe à vide
JP2014029129A (ja) * 2012-07-31 2014-02-13 Edwards Kk 真空ポンプ
JP5924414B2 (ja) * 2012-09-24 2016-05-25 株式会社島津製作所 ターボ分子ポンプ
JP6735058B2 (ja) * 2013-07-31 2020-08-05 エドワーズ株式会社 真空ポンプ
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
JP6484919B2 (ja) * 2013-09-24 2019-03-20 株式会社島津製作所 ターボ分子ポンプ
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6375631B2 (ja) * 2014-02-05 2018-08-22 株式会社島津製作所 ターボ分子ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP6776971B2 (ja) * 2017-03-27 2020-10-28 株式会社島津製作所 真空ポンプおよびポンプ一体型の電源装置
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
JP7048391B2 (ja) 2018-03-30 2022-04-05 エドワーズ株式会社 真空ポンプ
JP2022046347A (ja) 2020-09-10 2022-03-23 エドワーズ株式会社 真空ポンプ

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH465124A (fr) * 1961-08-04 1968-11-15 Moteurs D Aviat Et Commissaria Pompe à vide turbomoléculaire
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
EP0197238A2 (fr) * 1985-03-09 1986-10-15 Leybold Aktiengesellschaft Enveloppe pour une pompe à vide turbomoléculaire
EP0352688A1 (fr) * 1988-07-27 1990-01-31 Alcatel Cit Pompe à vide
EP0451708A2 (fr) * 1990-04-06 1991-10-16 Hitachi, Ltd. Pompe à vide
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH465124A (fr) * 1961-08-04 1968-11-15 Moteurs D Aviat Et Commissaria Pompe à vide turbomoléculaire
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
EP0197238A2 (fr) * 1985-03-09 1986-10-15 Leybold Aktiengesellschaft Enveloppe pour une pompe à vide turbomoléculaire
EP0352688A1 (fr) * 1988-07-27 1990-01-31 Alcatel Cit Pompe à vide
EP0451708A2 (fr) * 1990-04-06 1991-10-16 Hitachi, Ltd. Pompe à vide
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Also Published As

Publication number Publication date
EP0855517A2 (fr) 1998-07-29
EP0855517B1 (fr) 2003-10-08
JP4235273B2 (ja) 2009-03-11
JPH10205486A (ja) 1998-08-04
ATE251722T1 (de) 2003-10-15
DE19702456B4 (de) 2006-01-19
DE19702456A1 (de) 1998-07-30
DE59809829D1 (de) 2003-11-13

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