JP4235273B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

Info

Publication number
JP4235273B2
JP4235273B2 JP35053397A JP35053397A JP4235273B2 JP 4235273 B2 JP4235273 B2 JP 4235273B2 JP 35053397 A JP35053397 A JP 35053397A JP 35053397 A JP35053397 A JP 35053397A JP 4235273 B2 JP4235273 B2 JP 4235273B2
Authority
JP
Japan
Prior art keywords
vacuum pump
back pressure
side mechanism
high vacuum
pressure side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP35053397A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10205486A (ja
Inventor
クルト・ヘルシュ
ハインリヒ・ロッツ
マティアス・メートラー
ハインツ・ライヒハルト
イェルク・シュタンツェル
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7818235&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP4235273(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by プファイファー・ヴァキューム・ゲーエムベーハー filed Critical プファイファー・ヴァキューム・ゲーエムベーハー
Publication of JPH10205486A publication Critical patent/JPH10205486A/ja
Application granted granted Critical
Publication of JP4235273B2 publication Critical patent/JP4235273B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
JP35053397A 1997-01-24 1997-12-19 真空ポンプ Expired - Fee Related JP4235273B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19702456.4 1997-01-24
DE19702456A DE19702456B4 (de) 1997-01-24 1997-01-24 Vakuumpumpe

Publications (2)

Publication Number Publication Date
JPH10205486A JPH10205486A (ja) 1998-08-04
JP4235273B2 true JP4235273B2 (ja) 2009-03-11

Family

ID=7818235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35053397A Expired - Fee Related JP4235273B2 (ja) 1997-01-24 1997-12-19 真空ポンプ

Country Status (4)

Country Link
EP (1) EP0855517B1 (fr)
JP (1) JP4235273B2 (fr)
AT (1) ATE251722T1 (fr)
DE (2) DE19702456B4 (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
JP2002115692A (ja) * 2000-10-04 2002-04-19 Osaka Vacuum Ltd 複合真空ポンプ
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10142567A1 (de) 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP2010025122A (ja) * 2003-02-18 2010-02-04 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP2004270692A (ja) * 2003-02-18 2004-09-30 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP4243996B2 (ja) * 2003-08-21 2009-03-25 株式会社荏原製作所 ターボ真空ポンプおよび該ターボ真空ポンプを備えた半導体製造装置
JP4916655B2 (ja) * 2004-11-17 2012-04-18 株式会社島津製作所 真空ポンプ
JP5104288B2 (ja) * 2007-12-25 2012-12-19 富士通セミコンダクター株式会社 真空ポンプ、半導体装置の製造装置及び半導体装置の製造方法
JP5486184B2 (ja) * 2008-12-10 2014-05-07 エドワーズ株式会社 真空ポンプ
EP2589814B3 (fr) 2010-07-02 2024-01-24 Edwards Japan Limited Pompe à vide
JP2014029129A (ja) * 2012-07-31 2014-02-13 Edwards Kk 真空ポンプ
CN104350283B (zh) * 2012-09-24 2016-08-24 株式会社岛津制作所 涡轮分子泵
JP6735058B2 (ja) * 2013-07-31 2020-08-05 エドワーズ株式会社 真空ポンプ
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6484919B2 (ja) * 2013-09-24 2019-03-20 株式会社島津製作所 ターボ分子ポンプ
JP6375631B2 (ja) * 2014-02-05 2018-08-22 株式会社島津製作所 ターボ分子ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP6776971B2 (ja) * 2017-03-27 2020-10-28 株式会社島津製作所 真空ポンプおよびポンプ一体型の電源装置
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
JP7048391B2 (ja) 2018-03-30 2022-04-05 エドワーズ株式会社 真空ポンプ
JP7566540B2 (ja) 2020-09-10 2024-10-15 エドワーズ株式会社 真空ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE619944A (fr) * 1961-08-04 1963-01-09 Snecma Pompe à vide turbomoleculaire perfectionnée
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Also Published As

Publication number Publication date
DE19702456B4 (de) 2006-01-19
JPH10205486A (ja) 1998-08-04
DE19702456A1 (de) 1998-07-30
EP0855517A2 (fr) 1998-07-29
ATE251722T1 (de) 2003-10-15
EP0855517B1 (fr) 2003-10-08
EP0855517A3 (fr) 1999-07-07
DE59809829D1 (de) 2003-11-13

Similar Documents

Publication Publication Date Title
JP4235273B2 (ja) 真空ポンプ
JP7048391B2 (ja) 真空ポンプ
JP5924414B2 (ja) ターボ分子ポンプ
JP6666696B2 (ja) 真空ポンプ
US6793466B2 (en) Vacuum pump
JP3792318B2 (ja) 真空ポンプ
US10704555B2 (en) Stator-side member and vacuum pump
JP6390478B2 (ja) 真空ポンプ
US10941787B2 (en) Power source integrated vacuum pump having a power source with a substrate in contact with and covering a portion of a cooling surface which is also covered by a heat insulating plate
JP2002303293A (ja) ターボ分子ポンプ
US20220049705A1 (en) Multi-stage turbomolecular pump
JP4262457B2 (ja) ターボ分子ポンプ
JP3098140B2 (ja) 複合分子ポンプ
JP3794775B2 (ja) 分子ポンプ
EP3808983B1 (fr) Pompe à vide avec chauffage dans le couvercle latéral
CN112524059A (zh) 真空泵的制造方法
JP2007278192A (ja) ターボ分子ポンプ
JP2004270692A (ja) 分子ポンプの断熱構造
WO2023106154A1 (fr) Pompe à vide et composant à haute conductivité thermique
JP7546410B2 (ja) 真空ポンプおよび真空ポンプ用回転翼
JP7552497B2 (ja) ターボ分子ポンプ
JP7378447B2 (ja) 真空ポンプおよび固定部品
JP2024107319A (ja) ターボ分子ポンプ
JP2002115692A (ja) 複合真空ポンプ
CN116783391A (zh) 真空泵

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041101

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070604

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20070903

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20070906

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071204

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080321

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080620

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080625

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080904

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20081204

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20081215

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111219

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121219

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131219

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees