EP0197238A2 - Enveloppe pour une pompe à vide turbomoléculaire - Google Patents

Enveloppe pour une pompe à vide turbomoléculaire Download PDF

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Publication number
EP0197238A2
EP0197238A2 EP86100310A EP86100310A EP0197238A2 EP 0197238 A2 EP0197238 A2 EP 0197238A2 EP 86100310 A EP86100310 A EP 86100310A EP 86100310 A EP86100310 A EP 86100310A EP 0197238 A2 EP0197238 A2 EP 0197238A2
Authority
EP
European Patent Office
Prior art keywords
housing
connecting flange
thermal conductivity
housing according
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86100310A
Other languages
German (de)
English (en)
Other versions
EP0197238A3 (en
EP0197238B1 (fr
Inventor
Ludger Dr. Deters
Hans-Peter Dr. Kabelitz
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6264742&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0197238(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold AG, Leybold Heraeus GmbH filed Critical Leybold AG
Publication of EP0197238A2 publication Critical patent/EP0197238A2/fr
Publication of EP0197238A3 publication Critical patent/EP0197238A3/de
Application granted granted Critical
Publication of EP0197238B1 publication Critical patent/EP0197238B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a housing for a turbomolecular vacuum pump with a connecting flange made of good heat-conducting material, for. B. aluminum, and a housing jacket. Copper or brass can also be used as the material for the connecting flange.
  • Turbomolecular vacuum pumps belong to the high and ultra-high vacuum pumps, which means that they reach final pressures of up to 10 -10 mbar. In order to generate such a final pressure in a recipient in a reasonable time, it is necessary to bake it out, usually up to 200 ° C, sometimes even higher. As a result, the gas molecules diffused into the inner wall of the recipient are released relatively quickly, which would otherwise prevent the final pressure from being reached over long periods of time.
  • turbomolecular vacuum pump also heats up strongly during the heating of the recipient, which is not only for the rotor - the rotor strength, ie the strength of the aluminum blades stressed by the rotation, decreases with increasing temperature - but Also for its storage - the bearing grease is no longer stable at higher temperatures (> 130 0 C) - is undesirable.
  • the present invention has for its object to provide a housing for a turbomolecular vacuum pump in which there is no longer any risk of undesirably excessive heating during the heating of the recipient.
  • this object is achieved in that the housing jacket is designed, at least in the region adjoining the connecting flange, in such a way that the thermal conductivity is low in this region.
  • the heat transfer barrier prevents undesired heating of the housing and thus the components therein, such as the rotor, bearing and the like.
  • the housing shell is designated by 1 and the connection flange forming or surrounding the connection opening 2 by 3.
  • the flange 3 is made of aluminum or another material with good thermal conductivity such as brass or copper. Further components of the turbomolecular vacuum pump are not shown since they are not the subject of the invention.
  • the housing jacket 1 directly adjoins the flange 3.
  • the heat transfer barrier 4 consists of an annular section 5 which is welded or soldered between the housing shell 1 and the flange 3 and made of a material with low thermal conductivity, for. B. stainless steel.
  • Fig. 4 shows a similar embodiment as Fig. 3.
  • the heat transfer barrier 4 consists of a ring 6, also made of a material with low conductivity.
  • the heat flow is restricted in that the annular section 6 has a reduced wall thickness in some cases.
  • Fig. 5 joins the flange 3 a W ärme pengangssperre 4, which also consists of aluminum.
  • the heat flow is limited in that a meandering ring section 7 forms the heat transfer barrier 4.
  • This is made of a material with low thermal conductivity, preferably stainless steel, so that an effective limitation of the heat flow is achieved between the flange 3 and the housing jacket 1.
  • Stainless steel is essentially the material for the thermal barrier. Stainless steel has a thermal conductivity of 15, which is 14 times smaller than the thermal conductivity of aluminum. The materials nickel or bronze are also suitable as materials for the thermal barrier.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP86100310A 1985-03-09 1986-01-11 Enveloppe pour une pompe à vide turbomoléculaire Expired - Lifetime EP0197238B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3508483 1985-03-09
DE19853508483 DE3508483A1 (de) 1985-03-09 1985-03-09 Gehaeuse fuer eine turbomolekularvakuumpumpe

Publications (3)

Publication Number Publication Date
EP0197238A2 true EP0197238A2 (fr) 1986-10-15
EP0197238A3 EP0197238A3 (en) 1987-08-12
EP0197238B1 EP0197238B1 (fr) 1990-01-10

Family

ID=6264742

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86100310A Expired - Lifetime EP0197238B1 (fr) 1985-03-09 1986-01-11 Enveloppe pour une pompe à vide turbomoléculaire

Country Status (3)

Country Link
EP (1) EP0197238B1 (fr)
JP (1) JPH0823358B2 (fr)
DE (2) DE3508483A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0352688A1 (fr) * 1988-07-27 1990-01-31 Alcatel Cit Pompe à vide
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
EP0855517A2 (fr) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Pompe à vide
EP1236906A1 (fr) * 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Pompe à vide
EP1533530A1 (fr) * 2003-11-18 2005-05-25 VARIAN S.p.A. Pompe à vide avec amortisseur de vibrations
EP3051138A1 (fr) * 2015-01-27 2016-08-03 Pfeiffer Vacuum Gmbh Carter de pompe à vide, pompe à vide et procédé de fabrication d'un carter de pompe à vide

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574810B2 (ja) * 1987-09-11 1997-01-22 株式会社日立製作所 真空ポンプ
JPH01190991A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JP2854628B2 (ja) * 1989-10-31 1999-02-03 富士通株式会社 排気装置
JPH03237291A (ja) * 1990-02-14 1991-10-23 World Chem:Kk マグネットポンプ
JPH0772557B2 (ja) * 1990-02-28 1995-08-02 株式会社島津製作所 ターボ分子ポンプ
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
JP4504476B2 (ja) * 1999-07-23 2010-07-14 キヤノンアネルバ株式会社 分子ポンプ
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP3135919B1 (fr) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Pompe à vide

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2263612A1 (de) * 1972-12-27 1974-07-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
FR2525698A1 (fr) * 1982-04-21 1983-10-28 Hitachi Ltd Pompe turbomoleculaire

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB941342A (en) * 1961-08-29 1963-11-13 Rudolph Birmann Improvements in or relating to a turbocharged engine power plant
US3565497A (en) * 1969-05-23 1971-02-23 Caterpillar Tractor Co Turbocharger seal assembly
JPS5183280A (ja) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd Choenshinbunrikyokaitendoondobunpuseigyogatabunshihonpu
DE3151869C2 (de) * 1981-12-30 1988-08-18 Vits-Maschinenbau Gmbh, 4018 Langenfeld Hochtemperaturgebläse, insbes. für Glühöfen
JPS5985397U (ja) * 1982-12-01 1984-06-09 日本真空技術株式会社 タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2263612A1 (de) * 1972-12-27 1974-07-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
FR2525698A1 (fr) * 1982-04-21 1983-10-28 Hitachi Ltd Pompe turbomoleculaire

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0352688A1 (fr) * 1988-07-27 1990-01-31 Alcatel Cit Pompe à vide
FR2634829A1 (fr) * 1988-07-27 1990-02-02 Cit Alcatel Pompe a vide
JPH0270994A (ja) * 1988-07-27 1990-03-09 Alcatel Cit 分子ポンプ
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
EP0855517A2 (fr) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Pompe à vide
EP0855517A3 (fr) * 1997-01-24 1999-07-07 Pfeiffer Vacuum GmbH Pompe à vide
EP1236906A1 (fr) * 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Pompe à vide
EP1533530A1 (fr) * 2003-11-18 2005-05-25 VARIAN S.p.A. Pompe à vide avec amortisseur de vibrations
EP3051138A1 (fr) * 2015-01-27 2016-08-03 Pfeiffer Vacuum Gmbh Carter de pompe à vide, pompe à vide et procédé de fabrication d'un carter de pompe à vide

Also Published As

Publication number Publication date
JPH0823358B2 (ja) 1996-03-06
JPS61207893A (ja) 1986-09-16
EP0197238A3 (en) 1987-08-12
EP0197238B1 (fr) 1990-01-10
DE3508483A1 (de) 1986-10-23
DE3668222D1 (de) 1990-02-15

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