DE3668222D1 - Gehaeuse fuer eine turbomolekularvakuumpumpe. - Google Patents

Gehaeuse fuer eine turbomolekularvakuumpumpe.

Info

Publication number
DE3668222D1
DE3668222D1 DE8686100310T DE3668222T DE3668222D1 DE 3668222 D1 DE3668222 D1 DE 3668222D1 DE 8686100310 T DE8686100310 T DE 8686100310T DE 3668222 T DE3668222 T DE 3668222T DE 3668222 D1 DE3668222 D1 DE 3668222D1
Authority
DE
Germany
Prior art keywords
housing
vacuum pump
turbomolecular vacuum
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686100310T
Other languages
English (en)
Inventor
Ludger Dr Deters
Hans-Peter Dr Kabelitz
Guenter Schuetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6264742&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3668222(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE8686100310T priority Critical patent/DE3668222D1/de
Application granted granted Critical
Publication of DE3668222D1 publication Critical patent/DE3668222D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE8686100310T 1985-03-09 1986-01-11 Gehaeuse fuer eine turbomolekularvakuumpumpe. Expired - Lifetime DE3668222D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8686100310T DE3668222D1 (de) 1985-03-09 1986-01-11 Gehaeuse fuer eine turbomolekularvakuumpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19853508483 DE3508483A1 (de) 1985-03-09 1985-03-09 Gehaeuse fuer eine turbomolekularvakuumpumpe
DE8686100310T DE3668222D1 (de) 1985-03-09 1986-01-11 Gehaeuse fuer eine turbomolekularvakuumpumpe.

Publications (1)

Publication Number Publication Date
DE3668222D1 true DE3668222D1 (de) 1990-02-15

Family

ID=6264742

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19853508483 Withdrawn DE3508483A1 (de) 1985-03-09 1985-03-09 Gehaeuse fuer eine turbomolekularvakuumpumpe
DE8686100310T Expired - Lifetime DE3668222D1 (de) 1985-03-09 1986-01-11 Gehaeuse fuer eine turbomolekularvakuumpumpe.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19853508483 Withdrawn DE3508483A1 (de) 1985-03-09 1985-03-09 Gehaeuse fuer eine turbomolekularvakuumpumpe

Country Status (3)

Country Link
EP (1) EP0197238B1 (de)
JP (1) JPH0823358B2 (de)
DE (2) DE3508483A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574810B2 (ja) * 1987-09-11 1997-01-22 株式会社日立製作所 真空ポンプ
JPH01190991A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
JP2854628B2 (ja) * 1989-10-31 1999-02-03 富士通株式会社 排気装置
JPH03237291A (ja) * 1990-02-14 1991-10-23 World Chem:Kk マグネットポンプ
JPH0772557B2 (ja) * 1990-02-28 1995-08-02 株式会社島津製作所 ターボ分子ポンプ
WO1994000694A1 (de) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
JP4504476B2 (ja) * 1999-07-23 2010-07-14 キヤノンアネルバ株式会社 分子ポンプ
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP3051138B1 (de) * 2015-01-27 2021-03-10 Pfeiffer Vacuum Gmbh Vakuumpumpengehäuse, Vakuumpumpe und Verfahren zur Herstellung eines Vakuumpumpengehäuses
EP3135919B1 (de) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB941342A (en) * 1961-08-29 1963-11-13 Rudolph Birmann Improvements in or relating to a turbocharged engine power plant
US3565497A (en) * 1969-05-23 1971-02-23 Caterpillar Tractor Co Turbocharger seal assembly
DE2263612A1 (de) * 1972-12-27 1974-07-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
JPS5183280A (ja) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd Choenshinbunrikyokaitendoondobunpuseigyogatabunshihonpu
DE3151869C2 (de) * 1981-12-30 1988-08-18 Vits-Maschinenbau Gmbh, 4018 Langenfeld Hochtemperaturgebläse, insbes. für Glühöfen
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPS5985397U (ja) * 1982-12-01 1984-06-09 日本真空技術株式会社 タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken

Also Published As

Publication number Publication date
JPH0823358B2 (ja) 1996-03-06
EP0197238A2 (de) 1986-10-15
JPS61207893A (ja) 1986-09-16
EP0197238A3 (en) 1987-08-12
EP0197238B1 (de) 1990-01-10
DE3508483A1 (de) 1986-10-23

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee