DE3574274D1 - Multistage vacuum pump - Google Patents

Multistage vacuum pump

Info

Publication number
DE3574274D1
DE3574274D1 DE8585104947T DE3574274T DE3574274D1 DE 3574274 D1 DE3574274 D1 DE 3574274D1 DE 8585104947 T DE8585104947 T DE 8585104947T DE 3574274 T DE3574274 T DE 3574274T DE 3574274 D1 DE3574274 D1 DE 3574274D1
Authority
DE
Germany
Prior art keywords
vacuum pump
multistage vacuum
multistage
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585104947T
Other languages
German (de)
Inventor
Hanns-Peter Dr Berges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE3574274D1 publication Critical patent/DE3574274D1/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE8585104947T 1985-04-24 1985-04-24 Multistage vacuum pump Expired DE3574274D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP85104947A EP0198936B1 (en) 1985-04-24 1985-04-24 Multistage vacuum pump

Publications (1)

Publication Number Publication Date
DE3574274D1 true DE3574274D1 (en) 1989-12-21

Family

ID=8193462

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585104947T Expired DE3574274D1 (en) 1985-04-24 1985-04-24 Multistage vacuum pump

Country Status (3)

Country Link
EP (1) EP0198936B1 (en)
JP (1) JPS61283781A (en)
DE (1) DE3574274D1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4439637A1 (en) * 1994-11-07 1996-05-09 Balzers Pfeiffer Gmbh Multistage vane=type rotary vacuum pump
GB2475254B (en) 2009-11-11 2016-02-10 Edwards Ltd Vacuum pump
DE102012217071A1 (en) * 2012-09-21 2014-03-27 Robert Bosch Gmbh pump assembly
GB2535187A (en) * 2015-02-11 2016-08-17 Flybrid Automotive Ltd Vacuum pump system
GB2535794B (en) * 2015-02-27 2018-07-18 Flybrid Automotive Ltd Vacuum management system
CN109026707B (en) * 2018-08-22 2024-05-14 中北大学 Composite pump combining claw pump and slide valve pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL296852A (en) * 1900-01-01
SE302815B (en) * 1965-01-13 1968-08-05 Svenska Rotor Maskiner Ab
DE1811285A1 (en) * 1968-11-27 1970-06-18 Linde Ag Machine set consisting of at least two machines with screw displacement runners
GB1484994A (en) * 1973-09-03 1977-09-08 Svenska Rotor Maskiner Ab Shaft seal system for screw compressors
JPS50153307A (en) * 1974-05-31 1975-12-10
JPS5468510A (en) * 1977-11-11 1979-06-01 Kobe Steel Ltd Gas leak preventive method for self-lubricating screw compressor
DE3139232A1 (en) * 1981-10-02 1983-04-21 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar CLUTCH ARRANGEMENT FOR 2-STAGE ROTARY VALVE PUMPS
DE3216990A1 (en) * 1982-05-06 1983-11-10 Sihi Gmbh & Co Kg, 2210 Itzehoe ROLLING PISTON PUMP

Also Published As

Publication number Publication date
JPS61283781A (en) 1986-12-13
EP0198936A1 (en) 1986-10-29
EP0198936B1 (en) 1989-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee