EP0197238A3 - Housing for a turbo-molecular vacuum pump - Google Patents

Housing for a turbo-molecular vacuum pump Download PDF

Info

Publication number
EP0197238A3
EP0197238A3 EP86100310A EP86100310A EP0197238A3 EP 0197238 A3 EP0197238 A3 EP 0197238A3 EP 86100310 A EP86100310 A EP 86100310A EP 86100310 A EP86100310 A EP 86100310A EP 0197238 A3 EP0197238 A3 EP 0197238A3
Authority
EP
European Patent Office
Prior art keywords
turbo
housing
vacuum pump
molecular vacuum
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86100310A
Other languages
German (de)
Other versions
EP0197238B1 (en
EP0197238A2 (en
Inventor
Ludger Dr. Deters
Hans-Peter Dr. Kabelitz
Gunter Schutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6264742&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0197238(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of EP0197238A2 publication Critical patent/EP0197238A2/en
Publication of EP0197238A3 publication Critical patent/EP0197238A3/en
Application granted granted Critical
Publication of EP0197238B1 publication Critical patent/EP0197238B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP86100310A 1985-03-09 1986-01-11 Housing for a turbo-molecular vacuum pump Expired - Lifetime EP0197238B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19853508483 DE3508483A1 (en) 1985-03-09 1985-03-09 HOUSING FOR A TURBOMOLECULAR VACUUM PUMP
DE3508483 1985-03-09

Publications (3)

Publication Number Publication Date
EP0197238A2 EP0197238A2 (en) 1986-10-15
EP0197238A3 true EP0197238A3 (en) 1987-08-12
EP0197238B1 EP0197238B1 (en) 1990-01-10

Family

ID=6264742

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86100310A Expired - Lifetime EP0197238B1 (en) 1985-03-09 1986-01-11 Housing for a turbo-molecular vacuum pump

Country Status (3)

Country Link
EP (1) EP0197238B1 (en)
JP (1) JPH0823358B2 (en)
DE (2) DE3508483A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574810B2 (en) * 1987-09-11 1997-01-22 株式会社日立製作所 Vacuum pump
JPH01190991A (en) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk Vacuum pump
FR2634829B1 (en) * 1988-07-27 1990-09-14 Cit Alcatel VACUUM PUMP
JP2854628B2 (en) * 1989-10-31 1999-02-03 富士通株式会社 Exhaust device
JPH03237291A (en) * 1990-02-14 1991-10-23 World Chem:Kk Magnet pump
JPH0772557B2 (en) * 1990-02-28 1995-08-02 株式会社島津製作所 Turbo molecular pump
JP3616639B2 (en) * 1992-06-19 2005-02-02 ウナクシス ドイチュラント ホールディング ゲゼルシャフト ミット ベシュレンクテル ハフツング Gas friction vacuum pump
DE19702456B4 (en) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh vacuum pump
DE19724323A1 (en) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flange connection
JP4504476B2 (en) * 1999-07-23 2010-07-14 キヤノンアネルバ株式会社 Molecular pump
DE10107341A1 (en) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh vacuum pump
EP1533530B1 (en) * 2003-11-18 2006-04-26 VARIAN S.p.A. Vacuum pump provided with vibration damper
DE202013008470U1 (en) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh vacuum pump
EP3051138B1 (en) * 2015-01-27 2021-03-10 Pfeiffer Vacuum Gmbh Vacuum pump housing, vacuum pump and method for producing a vacuum pump housing
EP3135919B1 (en) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2263612A1 (en) * 1972-12-27 1974-07-04 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP
DE2349033A1 (en) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP
FR2525698A1 (en) * 1982-04-21 1983-10-28 Hitachi Ltd TURBOMOLECULAR PUMP

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB941342A (en) * 1961-08-29 1963-11-13 Rudolph Birmann Improvements in or relating to a turbocharged engine power plant
US3565497A (en) * 1969-05-23 1971-02-23 Caterpillar Tractor Co Turbocharger seal assembly
JPS5183280A (en) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd CHOENSHINBUNRIKYOKAITENDOONDOBUNPUSEIGYOGATABUNSHIHONPU
DE3151869C2 (en) * 1981-12-30 1988-08-18 Vits-Maschinenbau Gmbh, 4018 Langenfeld High temperature blowers, especially for annealing furnaces
JPS5985397U (en) * 1982-12-01 1984-06-09 日本真空技術株式会社 turbo molecular pump
DE3410905A1 (en) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln DEVICE FOR CONVEYING GASES IN SUBATMOSPHAERIC PRESSURES

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2263612A1 (en) * 1972-12-27 1974-07-04 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP
DE2349033A1 (en) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP
FR2525698A1 (en) * 1982-04-21 1983-10-28 Hitachi Ltd TURBOMOLECULAR PUMP

Also Published As

Publication number Publication date
DE3668222D1 (en) 1990-02-15
EP0197238B1 (en) 1990-01-10
JPS61207893A (en) 1986-09-16
EP0197238A2 (en) 1986-10-15
JPH0823358B2 (en) 1996-03-06
DE3508483A1 (en) 1986-10-23

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