GB2230562B - Turbomolecular vacuum pump - Google Patents

Turbomolecular vacuum pump

Info

Publication number
GB2230562B
GB2230562B GB8926400A GB8926400A GB2230562B GB 2230562 B GB2230562 B GB 2230562B GB 8926400 A GB8926400 A GB 8926400A GB 8926400 A GB8926400 A GB 8926400A GB 2230562 B GB2230562 B GB 2230562B
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
turbomolecular vacuum
turbomolecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8926400A
Other versions
GB8926400D0 (en
GB2230562A (en
Inventor
Vladimir Pavlovich Sergeev
Valery Borisovich Sholokhov
Vladimir Iliich Vikhrev
Sergei Nikolaevich Sharshin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB8926400D0 publication Critical patent/GB8926400D0/en
Publication of GB2230562A publication Critical patent/GB2230562A/en
Application granted granted Critical
Publication of GB2230562B publication Critical patent/GB2230562B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump
GB8926400A 1988-03-30 1989-11-16 Turbomolecular vacuum pump Expired - Lifetime GB2230562B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (en) 1988-03-30 1988-03-30 Turbomolecular vacuum pump

Publications (3)

Publication Number Publication Date
GB8926400D0 GB8926400D0 (en) 1990-08-01
GB2230562A GB2230562A (en) 1990-10-24
GB2230562B true GB2230562B (en) 1991-09-11

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8926400A Expired - Lifetime GB2230562B (en) 1988-03-30 1989-11-16 Turbomolecular vacuum pump

Country Status (7)

Country Link
JP (1) JPH02503703A (en)
CH (1) CH676378A5 (en)
DE (1) DE3891280T1 (en)
FI (1) FI895719A0 (en)
FR (1) FR2632361B1 (en)
GB (1) GB2230562B (en)
WO (1) WO1989009341A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (en) * 1990-09-28 1999-08-03 株式会社日立製作所 Turbo vacuum pump
DE19915983A1 (en) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vacuum pump with gas storage

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
DE2255618C2 (en) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molecular vacuum pump
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618C2 (en) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molecular vacuum pump
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Also Published As

Publication number Publication date
FR2632361A1 (en) 1989-12-08
CH676378A5 (en) 1991-01-15
JPH02503703A (en) 1990-11-01
GB8926400D0 (en) 1990-08-01
DE3891280T1 (en) 1990-04-05
WO1989009341A1 (en) 1989-10-05
FR2632361B1 (en) 1992-05-07
FI895719A0 (en) 1989-11-29
GB2230562A (en) 1990-10-24

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940330