FI895719A0 - TURBOMOLEKYLAER VACUUM PUMP. - Google Patents

TURBOMOLEKYLAER VACUUM PUMP.

Info

Publication number
FI895719A0
FI895719A0 FI895719A FI895719A FI895719A0 FI 895719 A0 FI895719 A0 FI 895719A0 FI 895719 A FI895719 A FI 895719A FI 895719 A FI895719 A FI 895719A FI 895719 A0 FI895719 A0 FI 895719A0
Authority
FI
Finland
Prior art keywords
turbomolekylaer
vacuum pump
vacuum
pump
turbomolekylaer vacuum
Prior art date
Application number
FI895719A
Other languages
Finnish (fi)
Inventor
Ilm.
Original Assignee
Sergeev Vladimir P
Sholokhov Valery B
Vikhrev Vladimir I
Sharshin Sergei N
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sergeev Vladimir P, Sholokhov Valery B, Vikhrev Vladimir I, Sharshin Sergei N filed Critical Sergeev Vladimir P
Publication of FI895719A0 publication Critical patent/FI895719A0/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump
FI895719A 1988-03-30 1989-11-29 TURBOMOLEKYLAER VACUUM PUMP. FI895719A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (en) 1988-03-30 1988-03-30 Turbomolecular vacuum pump

Publications (1)

Publication Number Publication Date
FI895719A0 true FI895719A0 (en) 1989-11-29

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
FI895719A FI895719A0 (en) 1988-03-30 1989-11-29 TURBOMOLEKYLAER VACUUM PUMP.

Country Status (7)

Country Link
JP (1) JPH02503703A (en)
CH (1) CH676378A5 (en)
DE (1) DE3891280T1 (en)
FI (1) FI895719A0 (en)
FR (1) FR2632361B1 (en)
GB (1) GB2230562B (en)
WO (1) WO1989009341A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (en) * 1990-09-28 1999-08-03 株式会社日立製作所 Turbo vacuum pump
DE19915983A1 (en) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vacuum pump with gas storage

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
BE790969A (en) * 1971-11-16 1973-05-07 Cit Alcatel PIVOT FOR ROTARY MOLECULAR PUMPS
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Also Published As

Publication number Publication date
FR2632361A1 (en) 1989-12-08
CH676378A5 (en) 1991-01-15
JPH02503703A (en) 1990-11-01
GB8926400D0 (en) 1990-08-01
DE3891280T1 (en) 1990-04-05
WO1989009341A1 (en) 1989-10-05
FR2632361B1 (en) 1992-05-07
GB2230562B (en) 1991-09-11
GB2230562A (en) 1990-10-24

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Legal Events

Date Code Title Description
FA Application withdrawn

Owner name: SHARSHIN, SERGEI NIKOLAEVICH

Owner name: SHOLOKHOV, VALERY BORISOVICH

Owner name: VIKHREV, VLADIMIR ILIICH

Owner name: SERGEEV, VLADIMIR PAVLOVICH