BE790969A - PIVOT FOR ROTARY MOLECULAR PUMPS - Google Patents

PIVOT FOR ROTARY MOLECULAR PUMPS

Info

Publication number
BE790969A
BE790969A BE790969DA BE790969A BE 790969 A BE790969 A BE 790969A BE 790969D A BE790969D A BE 790969DA BE 790969 A BE790969 A BE 790969A
Authority
BE
Belgium
Prior art keywords
pivot
molecular pumps
rotary molecular
rotary
pumps
Prior art date
Application number
Other languages
French (fr)
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE790969A publication Critical patent/BE790969A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/08—Rigid support of bearing units; Housings, e.g. caps, covers for spindles
    • F16C35/10—Rigid support of bearing units; Housings, e.g. caps, covers for spindles with sliding-contact bearings
BE790969D 1971-11-16 PIVOT FOR ROTARY MOLECULAR PUMPS BE790969A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7140995A FR2161180A5 (en) 1971-11-16 1971-11-16

Publications (1)

Publication Number Publication Date
BE790969A true BE790969A (en) 1973-05-07

Family

ID=9085846

Family Applications (1)

Application Number Title Priority Date Filing Date
BE790969D BE790969A (en) 1971-11-16 PIVOT FOR ROTARY MOLECULAR PUMPS

Country Status (8)

Country Link
US (1) US3832084A (en)
BE (1) BE790969A (en)
CH (1) CH564691A5 (en)
DE (1) DE2255618C2 (en)
FR (1) FR2161180A5 (en)
GB (1) GB1359920A (en)
IT (1) IT970919B (en)
NL (1) NL7215491A (en)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
DE2359456A1 (en) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR VACUUM PUMP WITH GAS BEARED ROTOR
DE2512828C3 (en) * 1975-03-22 1978-11-16 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Turbo molecular pump
FR2446934A1 (en) * 1979-01-19 1980-08-14 Cit Alcatel HIGH VACUUM ROTARY PUMP
DE3032967A1 (en) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Turbo-molecular type vacuum pump - has spaces inside and outside rotor bell sealed from each other to increase vacuum obtained
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
FR2521650A1 (en) * 1982-02-16 1983-08-19 Cit Alcatel ROTARY PUMP WITH HIGH VACUUM
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE3410905A1 (en) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln DEVICE FOR CONVEYING GASES IN SUBATMOSPHAERIC PRESSURES
FR2567208B1 (en) * 1984-07-05 1988-12-09 Cit Alcatel HIGH VACUUM ROTARY PUMP
DE3600124A1 (en) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag BLOWERS FOR CIRCUITING LARGE QUANTITIES OF GAS, IN PARTICULAR FOR HIGH-PERFORMANCE LASERS
DE3705912A1 (en) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh HIGH VACUUM PUMP WITH A BELL-SHAPED ROTOR
DE3728154C2 (en) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Multi-stage molecular pump
WO1989006319A1 (en) * 1987-12-25 1989-07-13 Sholokhov Valery B Molecular vacuum pump
WO1989006320A1 (en) * 1988-01-05 1989-07-13 Sholokhov Valery B Molecular vacuum pump
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
JPH02503703A (en) * 1988-03-30 1990-11-01 セルゲエフ　ヴラディミル　パヴロヴィチ turbo molecular vacuum pump
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JP2928615B2 (en) * 1990-09-28 1999-08-03 株式会社日立製作所 Turbo vacuum pump
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
AU9797298A (en) * 1997-10-21 1999-05-10 Multilevel Metals, Inc. Gas bearing turbo pump and gas bearing feedthrough
DE19915983A1 (en) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vacuum pump with gas storage
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
GB0208556D0 (en) * 2002-04-12 2002-05-22 Advanced Fluid Systems Ltd Magnetic seal and bearing arrangement
EP1559915B1 (en) * 2004-01-29 2007-05-16 Pfeiffer Vacuum GmbH Gas friction pump
GB2467168B (en) * 2009-01-26 2011-03-16 Air Bearings Ltd Gas bearing and method of manufacturing the same
DE102010001538A1 (en) 2010-02-03 2011-08-04 Trumpf Maschinen Ag Gas laser with radial and axial gas bearings
DE102010021015A1 (en) 2010-05-19 2011-11-24 O3-innovation Ursula Bürger e.Kfr. Apparatus for generating water vapor, heat and cold, has vacuum-tight spiral piston pump equipped with hermetically sealed motor drive, where hermetic vacuum actuator is formed with spiral towards each other
CN103016531B (en) * 2012-12-31 2015-02-25 浙江工业大学 Friction-free rotary air supply air flotation device
JP6287475B2 (en) * 2014-03-28 2018-03-07 株式会社島津製作所 Vacuum pump
JP2020186687A (en) * 2019-05-15 2020-11-19 エドワーズ株式会社 Vacuum pump and stationary component for screw groove pump part
CN111692340B (en) * 2020-06-12 2022-03-22 东台市岳东橡胶密封件厂 Built-in floating telescopic sealing element

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1023679B (en) * 1956-06-08 1958-01-30 Messerschmitt Boelkow Blohm Device for regulating maps with similar or practically similar level lines
FR1203718A (en) * 1958-03-28 1960-01-20 Jansen Gmbh Th Brush dust collector
FR1284111A (en) * 1961-01-23 1962-02-09 Bristol Siddeley Engines Ltd Compressor improvements
FR1293546A (en) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Improvements to rotary molecular pumps
FR81075E (en) * 1962-01-23 1963-07-26 Snecma Advanced Turbomolecular Vacuum Pump
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
US3999827A (en) * 1975-10-10 1976-12-28 Burroughs Corporation Electrical connector for semiconductor device package

Also Published As

Publication number Publication date
GB1359920A (en) 1974-07-17
NL7215491A (en) 1973-05-18
DE2255618C2 (en) 1982-12-23
DE2255618A1 (en) 1973-05-24
FR2161180A5 (en) 1973-07-06
CH564691A5 (en) 1975-07-31
IT970919B (en) 1974-04-20
US3832084A (en) 1974-08-27

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