EP0197238A2 - Housing for a turbo-molecular vacuum pump - Google Patents

Housing for a turbo-molecular vacuum pump Download PDF

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Publication number
EP0197238A2
EP0197238A2 EP86100310A EP86100310A EP0197238A2 EP 0197238 A2 EP0197238 A2 EP 0197238A2 EP 86100310 A EP86100310 A EP 86100310A EP 86100310 A EP86100310 A EP 86100310A EP 0197238 A2 EP0197238 A2 EP 0197238A2
Authority
EP
European Patent Office
Prior art keywords
housing
connecting flange
thermal conductivity
housing according
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86100310A
Other languages
German (de)
French (fr)
Other versions
EP0197238A3 (en
EP0197238B1 (en
Inventor
Ludger Dr. Deters
Hans-Peter Dr. Kabelitz
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Leybold AG, Leybold Heraeus GmbH filed Critical Leybold AG
Publication of EP0197238A2 publication Critical patent/EP0197238A2/en
Publication of EP0197238A3 publication Critical patent/EP0197238A3/en
Application granted granted Critical
Publication of EP0197238B1 publication Critical patent/EP0197238B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a housing for a turbomolecular vacuum pump with a connecting flange made of good heat-conducting material, for. B. aluminum, and a housing jacket. Copper or brass can also be used as the material for the connecting flange.
  • Turbomolecular vacuum pumps belong to the high and ultra-high vacuum pumps, which means that they reach final pressures of up to 10 -10 mbar. In order to generate such a final pressure in a recipient in a reasonable time, it is necessary to bake it out, usually up to 200 ° C, sometimes even higher. As a result, the gas molecules diffused into the inner wall of the recipient are released relatively quickly, which would otherwise prevent the final pressure from being reached over long periods of time.
  • turbomolecular vacuum pump also heats up strongly during the heating of the recipient, which is not only for the rotor - the rotor strength, ie the strength of the aluminum blades stressed by the rotation, decreases with increasing temperature - but Also for its storage - the bearing grease is no longer stable at higher temperatures (> 130 0 C) - is undesirable.
  • the present invention has for its object to provide a housing for a turbomolecular vacuum pump in which there is no longer any risk of undesirably excessive heating during the heating of the recipient.
  • this object is achieved in that the housing jacket is designed, at least in the region adjoining the connecting flange, in such a way that the thermal conductivity is low in this region.
  • the heat transfer barrier prevents undesired heating of the housing and thus the components therein, such as the rotor, bearing and the like.
  • the housing shell is designated by 1 and the connection flange forming or surrounding the connection opening 2 by 3.
  • the flange 3 is made of aluminum or another material with good thermal conductivity such as brass or copper. Further components of the turbomolecular vacuum pump are not shown since they are not the subject of the invention.
  • the housing jacket 1 directly adjoins the flange 3.
  • the heat transfer barrier 4 consists of an annular section 5 which is welded or soldered between the housing shell 1 and the flange 3 and made of a material with low thermal conductivity, for. B. stainless steel.
  • Fig. 4 shows a similar embodiment as Fig. 3.
  • the heat transfer barrier 4 consists of a ring 6, also made of a material with low conductivity.
  • the heat flow is restricted in that the annular section 6 has a reduced wall thickness in some cases.
  • Fig. 5 joins the flange 3 a W ärme pengangssperre 4, which also consists of aluminum.
  • the heat flow is limited in that a meandering ring section 7 forms the heat transfer barrier 4.
  • This is made of a material with low thermal conductivity, preferably stainless steel, so that an effective limitation of the heat flow is achieved between the flange 3 and the housing jacket 1.
  • Stainless steel is essentially the material for the thermal barrier. Stainless steel has a thermal conductivity of 15, which is 14 times smaller than the thermal conductivity of aluminum. The materials nickel or bronze are also suitable as materials for the thermal barrier.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

1. Housing of a turbomolecular vacuum pump with a connection flange (3) of a material which is a good thermal conductor, e.g. aluminium, and a housing shell (1), characterized in that the housing shell (1) at least in the area (1', 4) adjoining the connection flange (3) is so formed that the thermal conductivity in this area is so much reduced relative to the thermal conductivity of the connection flange that undesirably strong heating of the housing shell during the baking out of a receiver connected to the connection flange is avoided.

Description

Die Erfindung bezieht sich auf ein Gehäuse für eine Turbomolekularvakuumpumpe mit einem Anschlußflansch aus gutwärmeleitendem Werkstoff, z. B. Aluminium, und einem Gehäusemantel. Als Werkstoff für den Anschlußflansch können auch Kupfer oder Messing in Frage kommen.The invention relates to a housing for a turbomolecular vacuum pump with a connecting flange made of good heat-conducting material, for. B. aluminum, and a housing jacket. Copper or brass can also be used as the material for the connecting flange.

Turbomolekularvakuumpumpen gehören zu den Hoch- und Ultrahochvakuumpumpen, d. h., daß sie Enddrücke bis zu 10-10 mbar erreichen. Um in einem Rezipienten einen solchen Enddruck in angemessener Zeit zu erzeugen, ist es erforderlich, diesen auszuheizen, und zwar in der Regel bis zu 200° C, gelegentlich auch höher. Dadurch werden die in die Innenwandung des Rezipienten hineindiffundierten Gasmoleküle relativ schnell freigesetzt, die sonst über lange Zeiten das Erreichen des Enddruckes verhindern würden.Turbomolecular vacuum pumps belong to the high and ultra-high vacuum pumps, which means that they reach final pressures of up to 10 -10 mbar. In order to generate such a final pressure in a recipient in a reasonable time, it is necessary to bake it out, usually up to 200 ° C, sometimes even higher. As a result, the gas molecules diffused into the inner wall of the recipient are released relatively quickly, which would otherwise prevent the final pressure from being reached over long periods of time.

In zunehmendem Maße werden Rezipienten, die Bestandteil von Ultrahochvakuum-Anlagen sind, einschließlich ihrer Anschlußflansche aus Aluminium gefertigt. In diesen Fällen ist es zweckmäßig, daß auch der Flansch der anzuschließenden Turbomolekularvakuumpumpe aus Aluminium besteht, da eine sichere UHV-Abdichtung - in der Regel mit einem metallischen Dichtring - nur dann gewährleistet ist, wenn Flansch und Gegenflansch aus gleichem Material (und damit gleichem Wärme-Ausdehnungskoeffizienten) bestehen. Bei UHV-Anlagen mit aus Aluminium bestehenden Rezipienten werden deshalb in der Regel Turbomolekularvakuumpumpen eingesetzt, deren Gehäuse einschließlich des Anschlußflansches ebenfalls aus Aluminium bestehen. Ähnlich liegen die Verhältnisse bei Rezipienten aus Kupfer oder Messing.Recipients, which are part of ultra-high vacuum systems, including their connecting flanges, are increasingly being manufactured from aluminum. In these cases, it is advisable that the flange of the turbomolecular vacuum pump to be connected is made of aluminum, since a secure UHV seal - usually with a metallic sealing ring - is only guaranteed if the flange and counterflange are made of the same material (and therefore the same heat) Expansion coefficients) exist. In UHV systems with aluminum recipients, turbomolecular vacuum pumps are therefore generally used, the housing of which, including the connecting flange, is also made of aluminum. The situation is similar for recipients made of copper or brass.

Nachteilig an einer solchen Anordnung ist, daß sich die Turbomolekularvakuumpumpe während des Ausheizens des Rezipienten ebenfalls stark erwärmt, was nicht nur für den Rotor - die Rotorfestigkeit, d. h. die Festigkeit der durch die Rotation auf Zug beanspruchten Aluminiumschaufeln, nimmt mit steigender Temperatur ab -,sondern auch für dessen Lagerung - das Lagerfett ist bei höheren Temperaturen (> 1300 C) nicht mehr stabil - unerwünscht ist.A disadvantage of such an arrangement is that the turbomolecular vacuum pump also heats up strongly during the heating of the recipient, which is not only for the rotor - the rotor strength, ie the strength of the aluminum blades stressed by the rotation, decreases with increasing temperature - but Also for its storage - the bearing grease is no longer stable at higher temperatures (> 130 0 C) - is undesirable.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein Gehäuse für eine Turbomolekularvakuumpumpe zu schaffen, bei der die Gefahr einer unerwünscht starken Erwärmung während des Ausheizens des Rezipienten nicht mehr besteht.The present invention has for its object to provide a housing for a turbomolecular vacuum pump in which there is no longer any risk of undesirably excessive heating during the heating of the recipient.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß der Gehäusemantel zumindest im sich an den Anschlußflansch anschließenden Bereich so ausgebildet ist, daß die Wärmeleitfähigkeit in diesem Bereich gering ist. Bei einer Turbomolekularvakuumpumpe mit einem in dieser Weise gestalteten Gehäuse verhindert die Wärmedurchgangssperre eine unerwünschte Aufheizung des Gehäuses und damit der darin befindlichen Bauteile, wie Rotor, Lagerung und dergleichen.According to the invention, this object is achieved in that the housing jacket is designed, at least in the region adjoining the connecting flange, in such a way that the thermal conductivity is low in this region. In the case of a turbomolecular vacuum pump with a housing designed in this way, the heat transfer barrier prevents undesired heating of the housing and thus the components therein, such as the rotor, bearing and the like.

In den Figuren 1 bis 6 sind unterschiedliche Gestaltungsmöglichkeiten für ein Gehäuse nach der Erfindung dargestellt.In Figures 1 to 6 different design options for a housing according to the invention are shown.

In allen Figuren sind der Gehäusemantel mit 1 und der die Anschlußöffnung 2 bildende bzw. umgebende Anschlußflansch mit 3 bezeichnet. Der Flansch 3 besteht aus Aluminium oder auch aus einem anderen Werkstoff mit guter Wärmeleitfähigkeit wie Messing oder Kupfer. Weitere Bauteile der Turbomolekularvakuumpumpe sind nicht dargestellt, da sie nicht Gegenstand der Erfindung sind.In all figures, the housing shell is designated by 1 and the connection flange forming or surrounding the connection opening 2 by 3. The flange 3 is made of aluminum or another material with good thermal conductivity such as brass or copper. Further components of the turbomolecular vacuum pump are not shown since they are not the subject of the invention.

Beim Ausführungsbeispiel nach den Figuren 1 und 2 schließt sich der Gehäusemantel 1 unmittelbar an den Flansch 3 an.In the exemplary embodiment according to FIGS. 1 and 2, the housing jacket 1 directly adjoins the flange 3.

Er besteht entweder nur im Bereich des Anschlußflansches (Abschnitt 1', Figur 2) oder insgesamt (Figur 1) aus einem Werkstoff mit geringer Wärmeleitfähigkeit, z. B. Edelstahl, so daß der Wärmefluß vom Flansch 3 auf den Gehäusemantel 1 so stark behindert ist, daß eine unerwünscht hohe Erwärmung des Gehäusemantels während der Ausheizphase des nicht dargestellten Rezipienten verhindert ist.It consists either only in the area of the connecting flange (section 1 ', Figure 2) or overall (Figure 1) made of a material with low thermal conductivity, for. B. stainless steel, so that the heat flow from the flange 3 to the housing shell 1 is so much impeded that an undesirably high heating of the housing shell is prevented during the heating phase of the recipient, not shown.

Die weiteren Figuren 3 bis 6 zeigen Lösungen, bei denen sich zwischen dem Flansch 3 und dem Gehäusemantel 1 eine Wärmedurchgangssperre 4 befindet.The other Figures 3 to 6 show solutions in which there is a thermal barrier 4 between the flange 3 and the housing shell 1.

Beim Ausführungsbeispiel nach Fig. 3 besteht die Wärmedurchgangssperre 4 aus einem ringförmigen Abschnitt 5, der zwischen dem Gehäusemantel 1 und dem Flansch 3 eingeschweißt oder eingelötet ist und aus einem Werkstoff mit geringer Wärmeleitfähigkeit, z. B. Edelstahl, besteht.3, the heat transfer barrier 4 consists of an annular section 5 which is welded or soldered between the housing shell 1 and the flange 3 and made of a material with low thermal conductivity, for. B. stainless steel.

Fig. 4 zeigt ein ähnliches Ausführungsbeispiel wie Fig. 3. Die Wärmedurchgangssperre 4 besteht aus einem Ring 6, ebenfalls aus einem Werkstoff mit geringer Leitfähigkeit. Zusätzlich ist der Wärmefluß dadurch eingeschränkt, daß der ringförmige Abschnitt 6 teilweise eine verringerte Wandstärke aufweist.Fig. 4 shows a similar embodiment as Fig. 3. The heat transfer barrier 4 consists of a ring 6, also made of a material with low conductivity. In addition, the heat flow is restricted in that the annular section 6 has a reduced wall thickness in some cases.

Beim Ausführungsbeispiel nach Fig. 5 schließt sich an den Flansch 3 eine Wärmedurchgangssperre 4 an, die ebenfalls aus Aluminium besteht. Die Begrenzung des Wärmeflusses ist dadurch erreicht, daß ein mäanderförmig gestalteter Ringabschnitt 7 die Wärmedurchgangssperre 4 bildet.In the embodiment of Fig. 5 joins the flange 3 a W ärmedurchgangssperre 4, which also consists of aluminum. The heat flow is limited in that a meandering ring section 7 forms the heat transfer barrier 4.

Beim Ausführungsbeispiel nach Fig. 6 befindet sich zwischen dem Anschlußflansch 2 und dem Gehäusemantel 1 ein Balgabschnitt 8. Dieser besteht aus einem Material mit geringer Wärmeleitfähigkeit, vorzugsweise Edelstahl, so daß zwischen dem Flansch 3 und dem Gehäusemantel 1 eine wirksame Begrenzung des Wärmeflusses erreicht ist.In the embodiment according to FIG. 6 there is a bellows section 8 between the connecting flange 2 and the housing jacket 1. This is made of a material with low thermal conductivity, preferably stainless steel, so that an effective limitation of the heat flow is achieved between the flange 3 and the housing jacket 1.

Als Werkstoff für die Wärmedurchgangssperre kommt im wesentlichen Edelstahl in Frage. Edelstahl hat eine Wärmeleitfähigkeit von 15, die damit um den Faktor 14 kleiner ist als die Wärmeleitfähigkeit von Aluminium. Auch die Werkstoffe Nickel oder Bronze kommen als Materialien für die Wärmedurchgangssperre in Frage.Stainless steel is essentially the material for the thermal barrier. Stainless steel has a thermal conductivity of 15, which is 14 times smaller than the thermal conductivity of aluminum. The materials nickel or bronze are also suitable as materials for the thermal barrier.

Claims (8)

1. Gehäuse für eine Turbomolekularvakuumpumpe mit einem Anschlußflansch aus gutwärmeleitendem Werkstoff, z. B. Aluminium, und einem Gehäusemantel,
dadurch gekennzeichnet , daß der Gehäusemantel (1) zumindest im sich an den Anscnlußflansch (3) anschließenden Bereich (1', 4) so ausgebildet ist, daß die Wärmeleitfähigkeit in diesem Bereich gering ist.1. Housing for a turbomolecular vacuum pump with a connecting flange made of a good heat-conducting material, for. B. aluminum, and a housing shell,
characterized in that the housing jacket (1) is designed at least in the area (1 ', 4) adjoining the connecting flange (3) in such a way that the thermal conductivity in this area is low. 2. Gehäuse nach Anspruch 1, dadurch gekennzeichnet , daß der sich an den Anschlußflansch (3) anschließende Gehäusemantel (1) zumindest im Bereich des Anschlußflansches aus einem Werkstoff mit geringer Wärmeleitfähigkeit besteht.2. Housing according to claim 1, characterized in that the connecting flange (3) adjoining housing jacket (1) consists at least in the region of the connecting flange of a material with low thermal conductivity. 3. Gehäuse nach Anspruch 1, dadurch gekennzeichnet , daß sich zwischen Anschlußflansch (3) und Gehäusemantel (1) eine Wärmedurchgangssperre (4) befindet.3. Housing according to claim 1, characterized in that there is a heat barrier (4) between the connecting flange (3) and the housing jacket (1). 4. Gehäuse nach Anspruch 3, dadurch gekennzeichnet , daß es einschließlich seines Anschlußflansches (2) aus Aluminium besteht und daß sich die Wärmedurchgangssperre (4) unmittelbar an den Flansch anschließt.4. Housing according to claim 3, characterized in that it, including its connecting flange (2) consists of aluminum and that the heat transfer barrier (4) connects directly to the flange. 5. Gehäuse nach Anspruch 3 oder 4, dadurch gekennzeichnet , daß die Wärmedurchgangssperre (4) von einem Gehäuseabschnitt (5 bis 8) mit geringerer Wandstärke und/oder balgähnlicher Gestaltung gebildet wird.5. Housing according to claim 3 or 4, characterized in that the heat barrier (4) of a housing section (5 to 8) with less wall thickness and / or bellows-like design is formed. 6. Gehäuse nach Anspruch 3 oder 4, dadurch gekennzeichnet daß ein ringförmiger Abschnitt (5, 6, 8) aus einem Werkstoff mit geringer Wärmeleitfähigkeit die Wärmedurchgangssperre (4) bildet.6. Housing according to claim 3 or 4, characterized in that an annular section (5, 6, 8) of a material with low thermal conductivity forms the heat barrier (4). 7. Gehäuse nach Anspruch 6, dadurch gekennzeichnet , daß der ringförmige Abschnitt (5, 6, 8) eine verringerte Wandstärke und/oder eine balgähnliche Gestaltung hat.7. Housing according to claim 6, characterized in that the annular portion (5, 6, 8) has a reduced wall thickness and / or a bellows-like design. 8. Gehäuse nach Anspruch 6 oder 7, dadurch gekennzeichnet daß der die Wärmedurchgangssperre (4) bildende ringförmige Abschnitt (5, 6, 8) aus Edelstahl besteht.8. Housing according to claim 6 or 7, characterized in that the heat barrier (4) forming the annular portion (5, 6, 8) consists of stainless steel.
EP86100310A 1985-03-09 1986-01-11 Housing for a turbo-molecular vacuum pump Expired - Lifetime EP0197238B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3508483 1985-03-09
DE19853508483 DE3508483A1 (en) 1985-03-09 1985-03-09 HOUSING FOR A TURBOMOLECULAR VACUUM PUMP

Publications (3)

Publication Number Publication Date
EP0197238A2 true EP0197238A2 (en) 1986-10-15
EP0197238A3 EP0197238A3 (en) 1987-08-12
EP0197238B1 EP0197238B1 (en) 1990-01-10

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EP86100310A Expired - Lifetime EP0197238B1 (en) 1985-03-09 1986-01-11 Housing for a turbo-molecular vacuum pump

Country Status (3)

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EP (1) EP0197238B1 (en)
JP (1) JPH0823358B2 (en)
DE (2) DE3508483A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0352688A1 (en) * 1988-07-27 1990-01-31 Alcatel Cit Vacuum pump
WO1994000694A1 (en) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gas friction vacuum pump
EP0855517A2 (en) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Vacuum pump
EP1236906A1 (en) * 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Vacuum pump
EP1533530A1 (en) * 2003-11-18 2005-05-25 VARIAN S.p.A. Vacuum pump provided with vibration damper
EP3051138A1 (en) * 2015-01-27 2016-08-03 Pfeiffer Vacuum Gmbh Vacuum pump housing, vacuum pump and method for producing a vacuum pump housing

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JP2574810B2 (en) * 1987-09-11 1997-01-22 株式会社日立製作所 Vacuum pump
JPH01190991A (en) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk Vacuum pump
JP2854628B2 (en) * 1989-10-31 1999-02-03 富士通株式会社 Exhaust device
JPH03237291A (en) * 1990-02-14 1991-10-23 World Chem:Kk Magnet pump
JPH0772557B2 (en) * 1990-02-28 1995-08-02 株式会社島津製作所 Turbo molecular pump
DE19724323A1 (en) 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flange connection
JP4504476B2 (en) * 1999-07-23 2010-07-14 キヤノンアネルバ株式会社 Molecular pump
DE202013008470U1 (en) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh vacuum pump
EP3135919B1 (en) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Vacuum pump

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0352688A1 (en) * 1988-07-27 1990-01-31 Alcatel Cit Vacuum pump
FR2634829A1 (en) * 1988-07-27 1990-02-02 Cit Alcatel VACUUM PUMP
JPH0270994A (en) * 1988-07-27 1990-03-09 Alcatel Cit molecular pump
WO1994000694A1 (en) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gas friction vacuum pump
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
EP0855517A2 (en) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Vacuum pump
EP0855517A3 (en) * 1997-01-24 1999-07-07 Pfeiffer Vacuum GmbH Vacuum pump
EP1236906A1 (en) * 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Vacuum pump
EP1533530A1 (en) * 2003-11-18 2005-05-25 VARIAN S.p.A. Vacuum pump provided with vibration damper
EP3051138A1 (en) * 2015-01-27 2016-08-03 Pfeiffer Vacuum Gmbh Vacuum pump housing, vacuum pump and method for producing a vacuum pump housing

Also Published As

Publication number Publication date
EP0197238A3 (en) 1987-08-12
JPH0823358B2 (en) 1996-03-06
JPS61207893A (en) 1986-09-16
EP0197238B1 (en) 1990-01-10
DE3668222D1 (en) 1990-02-15
DE3508483A1 (en) 1986-10-23

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