EP0197238B1 - Enveloppe pour une pompe à vide turbomoléculaire - Google Patents

Enveloppe pour une pompe à vide turbomoléculaire Download PDF

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Publication number
EP0197238B1
EP0197238B1 EP86100310A EP86100310A EP0197238B1 EP 0197238 B1 EP0197238 B1 EP 0197238B1 EP 86100310 A EP86100310 A EP 86100310A EP 86100310 A EP86100310 A EP 86100310A EP 0197238 B1 EP0197238 B1 EP 0197238B1
Authority
EP
European Patent Office
Prior art keywords
housing
connection flange
accordance
thermal conductivity
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP86100310A
Other languages
German (de)
English (en)
Other versions
EP0197238A3 (en
EP0197238A2 (fr
Inventor
Ludger Dr. Deters
Hans-Peter Dr. Kabelitz
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6264742&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0197238(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0197238A2 publication Critical patent/EP0197238A2/fr
Publication of EP0197238A3 publication Critical patent/EP0197238A3/de
Application granted granted Critical
Publication of EP0197238B1 publication Critical patent/EP0197238B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a housing for a turbomolecular vacuum pump with a connecting flange made of a material which is a good heat conductor, e.g. Aluminum, and a housing jacket. Copper or brass can also be used as the material for the connecting flange.
  • a connecting flange made of a material which is a good heat conductor, e.g. Aluminum, and a housing jacket. Copper or brass can also be used as the material for the connecting flange.
  • Turbomolecular vacuum pumps belong to the high and ultra-high vacuum pumps, which means that they reach final pressures of up to 10- 10 mbar. In order to generate such a final pressure in a recipient in a reasonable time, it is necessary to bake it, usually up to 200 ° C, sometimes even higher. As a result, the gas molecules diffused into the inner wall of the recipient are released relatively quickly, which would otherwise prevent the final pressure from being reached over long periods of time.
  • turbomolecular vacuum pump also heats up strongly during the heating of the recipient, which is not only for the rotor - the rotor strength, i.e. the strength of the aluminum blades stressed by the rotation decreases with increasing temperature - but also for their storage - the bearing grease is no longer stable at higher temperatures (> 130 ° C) - is undesirable.
  • the present invention has for its object to provide a housing for a turbomolecular vacuum pump in which there is no longer any risk of undesirably excessive heating during the heating of the recipient.
  • this object is achieved in that the housing jacket is formed at least in the area adjoining the connecting flange in such a way that the thermal conductivity in this area is reduced compared to the thermal conductivity of the connecting flange in such a way that undesirably strong heating of the housing jacket during the heating of one with the Connecting flange connected recipients is avoided).
  • the heat transfer barrier prevents undesired heating of the housing and thus the components therein, such as the rotor, bearing and the like.
  • the housing shell is designated by 1 and the connection flange forming or surrounding the connection opening 2 by 3.
  • the flange 3 is made of aluminum or another material with good thermal conductivity such as brass or copper. Further components of the turbomolecular vacuum pump are not shown since they are not the subject of the invention.
  • the housing jacket 1 directly adjoins the flange 3.
  • the heat transfer barrier 4 consists of an annular section 5, which is welded or soldered between the housing jacket 1 and the flange 3 and made of a material with low thermal conductivity, e.g. Stainless steel.
  • Fig. 4 shows a similar embodiment as Fig. 3.
  • the heat transfer barrier 4 consists of a ring 6, also made of a material with low conductivity.
  • the heat flow is restricted in that the annular section 6 has a reduced wall thickness in some cases.
  • a heat transfer barrier 4 which also consists of aluminum, adjoins the flange 3.
  • the heat flow is limited in that a meandering ring section 7 forms the heat transfer barrier 4.
  • This is made of a material with low thermal conductivity, preferably stainless steel, so that an effective limitation of the heat flow is achieved between the flange 3 and the housing jacket 1.
  • Stainless steel is essentially the material for the thermal barrier. Stainless steel has a thermal conductivity of 15, which is 14 times smaller than the thermal conductivity of aluminum. The materials nickel or bronze are also suitable as materials for the thermal barrier.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (8)

1. Corps de pompe à vide turbomoléculaire qui comprend une bride de raccordement (3) faite d'une matière bonne conductrice de la chaleur, par exemple, d'aluminium, et une paroi latérale de corps (1), caractérisé en ce que la paroi latérale (1 ) du corps est constituée, du moins dans la région (1', 4), qui fait suite à la bride de raccordement (3), de telle manière que la conductibilité thermique dans cette région soit réduite comparativement à la conductibilité thermique de la bride de raccordement, dans une mesure suffisante pour éviter un échauffement excessif de la paroi du corps pendant le chauffage d'un récipient solidaire de la bride de raccordement.
2. Corps selon la revendication 1, caractérisé en ce que la paroi latérale (1) qui fait suite à la bride de raccordement (3) est faite d'une matière de faible conductibilité thermique, du moins dans la région de la bride de raccordement.
3. Corps selon la revendication 1, caractérisé en ce que la région de la paroi latérale (1) qui fait suite à la bride de raccordement (3) est réalisée sous la forme d'une barrière à la transmission de la chaleur ou barrière thermique (1', 4).
4. Corps selon la revendication 3, caractérisé en ce qu'il est composé d'aluminium, y compris sa bride de raccordement (2) et en ce que la barrière thermique (4) fait directement suite à la bride.
5. Corps selon la revendication 3 ou 4, caractérisé en ce que la barrière thermique (4) est constituée par un segment (5 à 8) du corps qui possède une plus faible épaisseur de paroi et/ou une configuration en soufflet.
6. Corps selon la revendication 3, caractérisé en ce qu'un segment annulaire (5, 6, 8) fait d'une matière à faible conductibilité thermique forme la barrière thermique.
7. Corps selon la revendication 6, caractérisé en ce que le segment annulaire (5, 6, 8) possède une épaisseur de paroi réduite et/ou une configuration en forme de soufflet.
8. Corps selon la revendication 6 ou 7, caractérisé en ce que le segment annulaire (5, 6, 8) qui forme la barrière thermique (4) est composé d'acier inoxydable.
EP86100310A 1985-03-09 1986-01-11 Enveloppe pour une pompe à vide turbomoléculaire Expired - Lifetime EP0197238B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19853508483 DE3508483A1 (de) 1985-03-09 1985-03-09 Gehaeuse fuer eine turbomolekularvakuumpumpe
DE3508483 1985-03-09

Publications (3)

Publication Number Publication Date
EP0197238A2 EP0197238A2 (fr) 1986-10-15
EP0197238A3 EP0197238A3 (en) 1987-08-12
EP0197238B1 true EP0197238B1 (fr) 1990-01-10

Family

ID=6264742

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86100310A Expired - Lifetime EP0197238B1 (fr) 1985-03-09 1986-01-11 Enveloppe pour une pompe à vide turbomoléculaire

Country Status (3)

Country Link
EP (1) EP0197238B1 (fr)
JP (1) JPH0823358B2 (fr)
DE (2) DE3508483A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574810B2 (ja) * 1987-09-11 1997-01-22 株式会社日立製作所 真空ポンプ
JPH01190991A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
JP2854628B2 (ja) * 1989-10-31 1999-02-03 富士通株式会社 排気装置
JPH03237291A (ja) * 1990-02-14 1991-10-23 World Chem:Kk マグネットポンプ
JPH0772557B2 (ja) * 1990-02-28 1995-08-02 株式会社島津製作所 ターボ分子ポンプ
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
JP4504476B2 (ja) * 1999-07-23 2010-07-14 キヤノンアネルバ株式会社 分子ポンプ
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP1533530B1 (fr) * 2003-11-18 2006-04-26 VARIAN S.p.A. Pompe à vide avec amortisseur de vibrations
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP3051138B1 (fr) * 2015-01-27 2021-03-10 Pfeiffer Vacuum Gmbh Carter de pompe à vide, pompe à vide et procédé de fabrication d'un carter de pompe à vide
EP3135919B1 (fr) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Pompe à vide

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB941342A (en) * 1961-08-29 1963-11-13 Rudolph Birmann Improvements in or relating to a turbocharged engine power plant
US3565497A (en) * 1969-05-23 1971-02-23 Caterpillar Tractor Co Turbocharger seal assembly
DE2263612A1 (de) * 1972-12-27 1974-07-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
JPS5183280A (ja) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd Choenshinbunrikyokaitendoondobunpuseigyogatabunshihonpu
DE3151869C2 (de) * 1981-12-30 1988-08-18 Vits-Maschinenbau Gmbh, 4018 Langenfeld Hochtemperaturgebläse, insbes. für Glühöfen
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPS5985397U (ja) * 1982-12-01 1984-06-09 日本真空技術株式会社 タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken

Also Published As

Publication number Publication date
JPH0823358B2 (ja) 1996-03-06
DE3668222D1 (de) 1990-02-15
DE3508483A1 (de) 1986-10-23
EP0197238A3 (en) 1987-08-12
EP0197238A2 (fr) 1986-10-15
JPS61207893A (ja) 1986-09-16

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