EP0384922B1 - Pompe cryogénique fonctionnant avec un réfrigérateur à deux étages - Google Patents

Pompe cryogénique fonctionnant avec un réfrigérateur à deux étages Download PDF

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Publication number
EP0384922B1
EP0384922B1 EP89103453A EP89103453A EP0384922B1 EP 0384922 B1 EP0384922 B1 EP 0384922B1 EP 89103453 A EP89103453 A EP 89103453A EP 89103453 A EP89103453 A EP 89103453A EP 0384922 B1 EP0384922 B1 EP 0384922B1
Authority
EP
European Patent Office
Prior art keywords
plates
baffle
stage
pump
cryopump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89103453A
Other languages
German (de)
English (en)
Other versions
EP0384922A1 (fr
Inventor
Ulrich Dr. Häfner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE8989103453T priority Critical patent/DE58904918D1/de
Priority to AT89103453T priority patent/ATE91531T1/de
Priority to EP89103453A priority patent/EP0384922B1/fr
Priority to JP2042734A priority patent/JP2731276B2/ja
Priority to US07/485,639 priority patent/US5000007A/en
Publication of EP0384922A1 publication Critical patent/EP0384922A1/fr
Application granted granted Critical
Publication of EP0384922B1 publication Critical patent/EP0384922B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to a cryopump operated with a two-stage refrigerator, the first (warmer) stage carrying pump surfaces, which are designed as a pot-shaped shield and a baffle comprising parallel strips arranged in the region of the pot opening, and the second (colder) one within the Pot-shaped shield arranged stage carries pump surfaces, which comprise several, partially covered with adsorption material, joined to a cuboid basic shape, the long sides of the cuboid being arranged parallel to the longitudinal axes of the strips of the baffle.
  • Cryopumps operated with a two-stage refrigerator are becoming increasingly popular as they have a comparably high pumping speed.
  • the pumping surfaces of the first stage the temperature of which is kept at approx. 80 K, are used for the condensation of water vapor and gases with similar boiling temperatures.
  • the baffle also has the task of protecting the pumping surfaces of the second stage against direct radiation.
  • gases boiling at lower temperatures e.g. B. argon, and particularly light gases such as hydrogen and helium. Hydrogen and helium can only be retained by adsorption on activated carbon or similar adsorption materials.
  • the pumping surfaces of the second stage of a cryopump are therefore designed in such a way that the gases passing through the baffle initially only "see” those surfaces that are condensed by argon and the like Serve gases.
  • the areas covered with adsorption material are shielded from them and can only be reached indirectly. This makes it possible to filter out the condensable gases before reaching the areas covered with adsorption material, in order not to unnecessarily load the adsorption material with condensable gases.
  • the light and therefore easily movable gases reach the adsorption areas and accumulate there.
  • the pump surfaces of the second stage of a cryopump operated with a two-stage refrigerator can be divided into two groups.
  • the pump surfaces consist of disk-shaped, circular or conical sheets and have an overall rotationally symmetrical structure (see European patent applications 128 323, 134 942 and 185 702 as well as German patent applications 28 21 276, 29 12 856 and 30 38 415). These solutions require a baffle that is also rotationally symmetrical.
  • the pump surfaces of the second group consist of several, essentially flat sheet metal sections which are joined to form a cuboid structure (European patent application 196 281, German patent application 26 20 880). Pump surface configurations of this type use baffle that consist of several metal strips arranged parallel to each other.
  • the pumping surfaces of the first group have the fundamental disadvantage compared to the pumping surfaces of the second group that their manufacture and assembly are more complex, in particular with regard to equipping various pump sizes with such pumping surfaces, because of their rotationally symmetrical structure.
  • the present invention relates to a cryopump of the second group, that is to say a cryopump with pumping surfaces carried by the second stage, which have a substantially cuboid structure.
  • Pumps of this type are often used in systems in which sputter processes are carried out.
  • Large amounts of condensable gases (especially argon) and adsorbable gases (especially hydrogen) are produced in sputtering processes.
  • the pumping speed for these gases depends - apart from the conductivity of the inlet baffle - above all on the surface that is offered to the respective gas inside the pump as the "inlet surface”.
  • this "entry surface” is the outer surface of the pump surface configuration.
  • For hydrogen, this "entry surface” is given by the gaps and openings which the outer surface of the pumping surface configuration has and through which the hydrogen can penetrate into the shielded areas with activated carbon coating.
  • the two "entrance surfaces” therefore compete with each other to a certain extent: If one enlarges the area intended for the addition of argon, that is to say the outer surface, then such an enlargement with a reduction in the "entrance area” for light gases, i.e. with a reduction in the pumping speed for light gases.
  • This also applies the other way round, ie one enlarges the areas through which the light gas to the areas covered with adsorbent material can reach, then this is necessarily associated with a reduction in the outer surface, that is, with a reduction in the pumping speed for condensable gases.
  • the present invention has for its object to provide a cryopump of the type mentioned, in which the pumping surfaces of the second stage have both an improved pumping speed for condensable gases and an improved pumping speed for light gases.
  • the pump surfaces of the second stage should meet the requirements that they are simple and therefore inexpensive to manufacture and assemble even for different pump types.
  • the number and size of the folds determine the pumping speed for condensable gases, while the gaps that exist due to the spacing of the sheets, which are not only in the area of the end faces of the rectangular basic shape, but also in the area of the side surfaces, determine the pumping speed for determine light gases.
  • the pumping speed for hydrogen is therefore substantially greater in the case of a rectangular pump surface according to the invention than in the case of a corresponding pump surface according to the prior art.
  • this improvement in the H 2 pumping speed is not necessarily associated with a reduction in the pumping speed for condensable gases.
  • the cryopump 1 shown in FIG. 1 with the housing 2 comprises the only partially illustrated two-stage refrigerator 3, the cooling stages of which are designated 4 (first, warmer stage) and 5 (second, colder stage).
  • the cup-shaped pump surface 6 is fastened in a heat-conducting manner so that it, together with the baffle 7 carried by the pot 6, encloses the interior 8 of the pump.
  • the pumping surfaces 9 which are connected to the second cooling stage 5 of the refrigerator 3 with good thermal conductivity and have an essentially cuboid structure.
  • the housing 2 of the cryopump 1 is equipped with a flange 11 which forms the inlet opening 12 of the cryopump 1 and with which the cryopump 1 does not adhere to one shown recipients, preferably with the interposition of a valve, is connected.
  • the higher-boiling gases accumulate on the baffle 7 and on the cup-shaped pump surface 6. Gases with lower boiling points, preferably argon, and light gases, preferably hydrogen, enter the interior 8 through the baffle 7.
  • the pump surface 9 has the task of accumulating these gases.
  • the pumping surface 9 according to FIG. 1 consists of a total of 9 sheets, of which the lower 8 sheets are designated 13 and the upper sheet 14. All of the sheets 13 and 14 are fastened to a central support 15, which in turn is connected to the colder stage 5 of the refrigerator 3 with good thermal conductivity. All sheets 13 and 14 are provided with bevels 18 which extend away from the baffle 7.
  • the carrier 15 has essentially the shape of a U, the legs of which extend parallel to the second stage 5 of the refrigerator 3. In the area of the connection of the U-legs, the carrier 15 is fastened to the step 5 with good thermal conductivity.
  • the pump surfaces 9 of the second refrigerator stage 5 have the task of depositing argon (as an example for condensable gases with a relatively low boiling temperature) by condensation and preferably hydrogen by adsorption.
  • argon as an example for condensable gases with a relatively low boiling temperature
  • the outer surfaces of the essentially cuboid pump surface structure that is to say the surface of the sheet 14 facing the baffle and the surfaces of the folds 18 facing the baffle 7, are intended to serve for the condensation of argon and therefore have the surface structure suitable for this.
  • the size of the sum of these areas determines the argon pumping speed.
  • the shielded surfaces of the sheets 13 and 14, that is to say preferably the sheet metal sections extending parallel to the plane of the baffle 7, are intended to hold light gases by adsorption.
  • adsorbent material 19 for. B. activated carbon.
  • the size of the total with activated carbon 19 occupied space depends on the desired hydrogen pumping capacity. If this is to be very large, the surfaces of the bevels 18 facing away from the baffle 7 can also be coated with activated carbon 19, as is shown in the example of the lower plate 13.
  • FIG. 1 also shows that the baffle 7 has angular baffles 21 directly above the pump surface 9 and simple baffles 23 in the outer region.
  • This combination of a Louver Baffles with a Chevron Baffle has the advantage of a further improvement in the pumping speed compared to the previously known Baffle solutions (only Louver Baffle with complete coverage of the central area).
  • only Louver Baffle with complete coverage of the central area only Louver Baffle with complete coverage of the central area.
  • FIG. 2 shows a single sheet 13 and shows the manner of its attachment to the central support 15.
  • Each sheet 13 is equipped with a central opening 23.
  • tabs 24 extending perpendicular to the plane of the sheet 13 are provided, by means of which the sheets 13 are fastened to the central support 15.
  • the central opening 23 is omitted only in the uppermost plate 14 of the pump surface 9, which lies directly on the connecting part of the U-shaped carrier 15 and is fastened together with this to the step 5.
  • the tabs 24 and the bevels 18 extend in the opposite direction. This arrangement has the advantage that the sheets 13 can be attached to the carrier 15 in a simple manner. The assembly takes place from bottom to top, so that the tabs 24 and the connecting screws are each freely accessible.
  • the sheets 13 are simple and inexpensive to produce.
  • the bevel 18 forms an angle ⁇ of approximately 45 ° with the plane of the sheet 13. This angle can be varied. By selecting different angles ⁇ , the hydrogen pumping speed can be influenced. If larger pumps are to be equipped with a pump surface 9 of the type described, then it is often sufficient to choose only a longer length L. It is not necessary to change the tool if it is long enough. If a larger width is also desired, then a tool which can be easily modified in this respect can be used, as will be described below with reference to FIG. 5.
  • argon pumping speed is particularly large compared to the hydrogen pumping speed, there is the possibility of providing a further bend 25 (only indicated by dashed lines), which follows the bend 18 and is essentially perpendicular downwards with respect to the plane of the central portion of the sheet 13 extends.
  • FIG. 3 shows a pump surface 9 according to the invention with a total of 11 sheets 13, 14, which have a relatively small distance from each other.
  • Such an arrangement with a very dense composition of the individual sheets is favorable for use in cryopumps for sputtering processes in which a high hydrogen suction capacity and a high hydrogen capacity are desired.
  • the distance between the individual sheets is chosen to be larger.
  • two bevels 18 and 25 are provided.
  • Such a spread-apart composition makes sense where dense stacking is not possible for reasons of weight saving, that is to say with relatively large cold surfaces for particularly large cryopump types.
  • FIG. 5 shows a tool for producing sheets 13, 14 for pump surfaces 9 according to the invention.
  • the printing tool 27 comprises an upper and a lower part 28, 29. Its shape and length L are chosen so that it is used for the production of the cold surfaces Cryopumps of the type according to the invention with different sizes and / or properties is suitable.
  • the length L corresponds to the maximum desired length. Its shape is chosen so that both a single edge and a double edge can be carried out, so that different tools are not required for these variations. If the width B is also to be variable, then the tool 27 must be able to be modified in this regard. It is preferably divisible with respect to its longitudinal axis, so that intermediate elements 30 can be used. Completely new tools, such as would be required in the case of a rotationally symmetrical construction of the cold surfaces, are not required for the pump surface designed according to the invention.

Claims (10)

  1. Cryopompe (1) fonctionnant avec un réfrigérateur (3) à deux étages dont le premier étage (4) (plus chaud) porte des surfaces de pompe réalisées comme une enveloppe de protection (6) en forme de godet et comme une chicane appelée baffle (7), lequel est disposé dans la zone de l'ouverture du godet et comprend des bandes parallèles (22), et dont le second étage (5) (plus froid), placé à l'intérieur de l'enveloppe de protection (6) en forme de godet, porte des surfaces de pompe (9) qui comprennent plusieurs tôles partiellement garnies de matériau adsorbant (19) et assemblées en une forme de base parallélépipédique, les côtés longitudinaux du parallélépipède étant disposés parallèlement aux axes longitudinaux des bandes (22) du baffle (7), caractérisée en ce que les surfaces de pompes (9) du second étage (5) sont formées par plusieurs tôles rectangulaires (13, 14) disposées parallèlement entre elles, en étant espacées les unes des autres, qui sont agencées et conformées comme suit:
    - elles s'étendent pour l'essentiel parallèlement au plan du baffle (7);
    - sur leurs grands côtés, elles présentent des bords repliés (18, 25) de forme et grandeur identiques, orientés dans le sens de l'éloignement du baffle (7);
    - les côtés extrêmes, non pourvus de bords repliés, des tôles (13, 14), assemblées en une forme de base parallélépipédique, sont ouverts;
    - les surfaces abritées des tôles (13, 14) sont garnies au moins partiellement de matériau adsorbant; et
    - les surfaces des bords repliés (18, 25) dirigées vers le baffle (7) sont réalisées comme des surfaces de condensation.
  2. Cryopompe selon la revendication 1, caractérisée en ce qu'elle comprend un support central (15) fixé à l'étage plus froid (5) du réfrigérateur (3), auquel sont fixées les surfaces (13, 14).
  3. Cryopompe selon la revendication 2, caractérisée en ce que le support (15) possède une forme essentiellement en U, que ses branches s'étendent parallèlement à l'étage (5) du réfrigérateur (3) et que la partie reliant les branches du U est fixée à l'étage (5) par une liaison bonne conductrice de chaleur.
  4. Cryopompe selon la revendication 2 ou 3, caractérisée en ce que les tôles (13) présentent une ouverture centrale (23) et que des pattes (24) sont coordonnées à cette ouverture (23), au moyen desquelles les tôles (13) sont fixées au support central (15) par une liaison bonne conductrice de chaleur.
  5. Cryopompe selon une des revendications précédentes, caractérisée en ce qu'elle est pourvue de bords repliés (18) dont la largeur est plus grande que l'espacement des tôles (13, 14).
  6. Cryopompe selon une des revendications précédentes, caractérisée en ce que les tôles (13, 14) sont pourvues de doubles bords repliés (18, 25).
  7. Cryopompe selon la revendication 6, caractérisée en ce que les premiers bords repliés (18) forment un angle d'environ 45° avec le plan de la zone centrale des tôles (13) et les seconds bords repliés (25) forment avec ce plan un angle d'environ 90°.
  8. Cryopompe selon une des revendications 1 à 7, caractérisée en ce que le surfaces des bords repliés (18 ou 25) éloignées du baffle (7) sont garnies de charbon actif ou d'un autre matériau adsorbant.
  9. Cryopompe selon la revendication 4 et une des autres revendications, caractérisée en ce que les bords repliés (18 ou 25) et les pattes (24) sont orientés dans des directions opposées par rapport au plan de la zone centrale des rôles (13).
  10. Cryopompe selon une des revendications précédentes, caractérisée en ce qu'elle comporte une combinaison d'un baffle à chevrons et d'un baffle à persiennes (7).
EP89103453A 1989-02-28 1989-02-28 Pompe cryogénique fonctionnant avec un réfrigérateur à deux étages Expired - Lifetime EP0384922B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE8989103453T DE58904918D1 (de) 1989-02-28 1989-02-28 Mit einem zweistufigen refrigerator betriebene kryopumpe.
AT89103453T ATE91531T1 (de) 1989-02-28 1989-02-28 Mit einem zweistufigen refrigerator betriebene kryopumpe.
EP89103453A EP0384922B1 (fr) 1989-02-28 1989-02-28 Pompe cryogénique fonctionnant avec un réfrigérateur à deux étages
JP2042734A JP2731276B2 (ja) 1989-02-28 1990-02-26 ２段式の冷凍機により作動されるクライオポンプ
US07/485,639 US5000007A (en) 1989-02-28 1990-02-27 Cryogenic pump operated with a two-stage refrigerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89103453A EP0384922B1 (fr) 1989-02-28 1989-02-28 Pompe cryogénique fonctionnant avec un réfrigérateur à deux étages

Publications (2)

Publication Number Publication Date
EP0384922A1 EP0384922A1 (fr) 1990-09-05
EP0384922B1 true EP0384922B1 (fr) 1993-07-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP89103453A Expired - Lifetime EP0384922B1 (fr) 1989-02-28 1989-02-28 Pompe cryogénique fonctionnant avec un réfrigérateur à deux étages

Country Status (5)

Country Link
US (1) US5000007A (fr)
EP (1) EP0384922B1 (fr)
JP (1) JP2731276B2 (fr)
AT (1) ATE91531T1 (fr)
DE (1) DE58904918D1 (fr)

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US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
WO1994000212A1 (fr) * 1992-06-24 1994-01-06 Extek Cryogenics Inc. Pompe cryogenique
CA2367818C (fr) * 2001-01-18 2010-05-11 Electric Power Research Institute, Inc. Methode et appareil pour la sorption renouvelable du mercure
CA2381610C (fr) * 2001-04-16 2010-07-06 Electric Power Research Institute, Inc. Technique et appareil pour retirer des contaminants gazeux d'un flux gazeux de combustion
US6905534B2 (en) * 2001-04-16 2005-06-14 Electric Power Research Institute, Inc. Method and apparatus for removing vapor phase contaminants from a flue gas stream
US20050274128A1 (en) * 2004-06-10 2005-12-15 Genesis Cryopump with enhanced hydrogen pumping
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
EP1966548A2 (fr) * 2005-12-19 2008-09-10 Behr GmbH & Co. KG Paroi de transfert de chaleur a sorption et element de transfert de chaleur a sorption
JP2010196632A (ja) * 2009-02-26 2010-09-09 Sumitomo Heavy Ind Ltd クライオポンプ
CH703216A1 (de) * 2010-05-27 2011-11-30 Hsr Ag Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen.
US20130008189A1 (en) * 2011-05-12 2013-01-10 Sumitomo Heavy Industries, Ltd. Cryopump and Method of Manufacturing the Same
JP5398780B2 (ja) * 2011-05-12 2014-01-29 住友重機械工業株式会社 クライオポンプ
CN103742389B (zh) * 2013-10-18 2015-12-23 石狮市台瑞精密机械有限公司 一种真空低温泵中的组合冷板
US10145371B2 (en) * 2013-10-22 2018-12-04 Taiwan Semiconductor Manufacturing Co., Ltd. Ultra high vacuum cryogenic pumping apparatus with nanostructure material
CA2979870C (fr) * 2015-05-15 2019-12-03 Exxonmobil Upstream Research Company Appareil et systeme pour procedes d'adsorption par oscillation associes a ceux-ci
JP6871751B2 (ja) * 2017-02-07 2021-05-12 住友重機械工業株式会社 クライオポンプ
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
CN207111346U (zh) * 2017-07-03 2018-03-16 京东方科技集团股份有限公司 低温泵

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CH628959A5 (en) * 1978-04-18 1982-03-31 Balzers Hochvakuum Cryopump with a fitted refrigerating machine
US4212170A (en) * 1979-04-16 1980-07-15 Oerlikon Buhrle USA Incorporated Cryopump
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US4546613A (en) * 1983-04-04 1985-10-15 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure
US4530213A (en) * 1983-06-28 1985-07-23 Air Products And Chemicals, Inc. Economical and thermally efficient cryopump panel and panel array
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
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US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
JPH07100963B2 (ja) * 1985-12-26 1995-11-01 清水建設株式会社 コンクリ−ト補強部材
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JPH01150532A (ja) * 1987-12-08 1989-06-13 Kenji Tsunoda 多軸方向に補強された補強芯地を有する加工製品
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Also Published As

Publication number Publication date
US5000007A (en) 1991-03-19
JP2731276B2 (ja) 1998-03-25
JPH03981A (ja) 1991-01-07
ATE91531T1 (de) 1993-07-15
DE58904918D1 (de) 1993-08-19
EP0384922A1 (fr) 1990-09-05

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