CN103742389B - 一种真空低温泵中的组合冷板 - Google Patents
一种真空低温泵中的组合冷板 Download PDFInfo
- Publication number
- CN103742389B CN103742389B CN201310495456.5A CN201310495456A CN103742389B CN 103742389 B CN103742389 B CN 103742389B CN 201310495456 A CN201310495456 A CN 201310495456A CN 103742389 B CN103742389 B CN 103742389B
- Authority
- CN
- China
- Prior art keywords
- cold drawing
- connecting tube
- plate
- array board
- drawing support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010622 cold drawing Methods 0.000 claims abstract description 43
- 239000007788 liquid Substances 0.000 claims abstract description 23
- 238000009833 condensation Methods 0.000 abstract description 4
- 230000005494 condensation Effects 0.000 abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310495456.5A CN103742389B (zh) | 2013-10-18 | 2013-10-18 | 一种真空低温泵中的组合冷板 |
Applications Claiming Priority (1)
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CN201310495456.5A CN103742389B (zh) | 2013-10-18 | 2013-10-18 | 一种真空低温泵中的组合冷板 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103742389A CN103742389A (zh) | 2014-04-23 |
CN103742389B true CN103742389B (zh) | 2015-12-23 |
Family
ID=50499442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310495456.5A Expired - Fee Related CN103742389B (zh) | 2013-10-18 | 2013-10-18 | 一种真空低温泵中的组合冷板 |
Country Status (1)
Country | Link |
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CN (1) | CN103742389B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105179199B (zh) * | 2015-10-30 | 2018-12-28 | 上海优拓低温技术有限公司 | 一种低温泵 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0144575A2 (en) * | 1983-09-20 | 1985-06-19 | Kabushiki Kaisha Toshiba | Cryosorption pump |
US4546613A (en) * | 1983-04-04 | 1985-10-15 | Helix Technology Corporation | Cryopump with rapid cooldown and increased pressure |
DE3038415C2 (zh) * | 1979-10-18 | 1987-02-12 | Varian Associates, Inc., Palo Alto, Calif., Us | |
JPS63501585A (ja) * | 1985-10-31 | 1988-06-16 | ヘリツクス テクノロジ− コ−ポレ−シヨン | 迅速吸着クライオポンプ |
US5000007A (en) * | 1989-02-28 | 1991-03-19 | Leybold Aktiengesellschaft | Cryogenic pump operated with a two-stage refrigerator |
CN101044319A (zh) * | 2004-09-24 | 2007-09-26 | 布鲁克斯自动化有限公司 | 用于ⅲ型气体抽吸的高传导率低温泵 |
CN203548125U (zh) * | 2013-10-18 | 2014-04-16 | 昆山珍实复合材料有限公司 | 一种真空低温泵中的组合冷板 |
-
2013
- 2013-10-18 CN CN201310495456.5A patent/CN103742389B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3038415C2 (zh) * | 1979-10-18 | 1987-02-12 | Varian Associates, Inc., Palo Alto, Calif., Us | |
US4546613A (en) * | 1983-04-04 | 1985-10-15 | Helix Technology Corporation | Cryopump with rapid cooldown and increased pressure |
EP0144575A2 (en) * | 1983-09-20 | 1985-06-19 | Kabushiki Kaisha Toshiba | Cryosorption pump |
JPS63501585A (ja) * | 1985-10-31 | 1988-06-16 | ヘリツクス テクノロジ− コ−ポレ−シヨン | 迅速吸着クライオポンプ |
US5000007A (en) * | 1989-02-28 | 1991-03-19 | Leybold Aktiengesellschaft | Cryogenic pump operated with a two-stage refrigerator |
CN101044319A (zh) * | 2004-09-24 | 2007-09-26 | 布鲁克斯自动化有限公司 | 用于ⅲ型气体抽吸的高传导率低温泵 |
CN203548125U (zh) * | 2013-10-18 | 2014-04-16 | 昆山珍实复合材料有限公司 | 一种真空低温泵中的组合冷板 |
Also Published As
Publication number | Publication date |
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CN103742389A (zh) | 2014-04-23 |
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SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
CB03 | Change of inventor or designer information |
Inventor after: Li Guoyang Inventor before: Huang Wencheng |
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Effective date of registration: 20151117 Address after: 362700, Fujian, Shishi Lake River cross-strait incubation base (pilot plant five floor) Applicant after: SHISHI TAIRUI PRECISION MACHINERY Co.,Ltd. Address before: Pengxi Kunjia supporting industrial zone Kunshan Road, Suzhou City, Jiangsu province 215000 Applicant before: KUNSHAN TRUETIME COMPOSITE MATERIAL Co.,Ltd. |
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Effective date of registration: 20181207 Address after: 233010 409 Wu Wan Road, Yuhui District, Bengbu, Anhui Patentee after: BENGBU JINSHI NEW MATERIAL Co.,Ltd. Address before: 230031 B-1014, 10 floor, business office building, Wo Ye garden, Shushan District, Hefei, Anhui. Patentee before: HEFEI WISDOM LOTUT INTELLECTUAL PROPERTY Co.,Ltd. Effective date of registration: 20181207 Address after: 230031 B-1014, 10 floor, business office building, Wo Ye garden, Shushan District, Hefei, Anhui. Patentee after: HEFEI WISDOM LOTUT INTELLECTUAL PROPERTY Co.,Ltd. Address before: 362700 incubation base on both sides of Shihu Strait, Shishi City, Fujian Province (5th floor of pilot plant) Patentee before: SHISHI TAIRUI PRECISION MACHINERY Co.,Ltd. |
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Effective date of registration: 20190717 Address after: Ganquan road Shushan District of Hefei City, Anhui Province, 230000 West hillock road to the South Wild Garden commercial office building room B-1512 Patentee after: ANHUI YINGLONG INDUSTRIAL DESIGN Co.,Ltd. Address before: 233010 No. 409 Wuwan Road, Yuhui District, Bengbu City, Anhui Province Patentee before: BENGBU JINSHI NEW MATERIAL Co.,Ltd. |
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Effective date of registration: 20191216 Address after: Yaolin town forest farm, Tonglu County, Hangzhou City, Zhejiang Province Patentee after: Hangzhou xinlingfeng Lubricating Oil Co.,Ltd. Address before: Ganquan road Shushan District of Hefei City, Anhui Province, 230000 West hillock road to the South Wild Garden commercial office building room B-1512 Patentee before: ANHUI YINGLONG INDUSTRIAL DESIGN Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151223 Termination date: 20201018 |
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