GB1359920A - Molecular pump installations - Google Patents

Molecular pump installations

Info

Publication number
GB1359920A
GB1359920A GB5249872A GB5249872A GB1359920A GB 1359920 A GB1359920 A GB 1359920A GB 5249872 A GB5249872 A GB 5249872A GB 5249872 A GB5249872 A GB 5249872A GB 1359920 A GB1359920 A GB 1359920A
Authority
GB
United Kingdom
Prior art keywords
bearings
seal
grooves
pump
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5249872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Compagnie Industrielle de Telecommunication CIT Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Compagnie Industrielle de Telecommunication CIT Alcatel SA filed Critical Alcatel CIT SA
Publication of GB1359920A publication Critical patent/GB1359920A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/08—Rigid support of bearing units; Housings, e.g. caps, covers for spindles
    • F16C35/10—Rigid support of bearing units; Housings, e.g. caps, covers for spindles with sliding-contact bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

1359920 Molecular pumps COMPAGNIE INDUSTRIELLE DES TELECOMMUNICATIONS CIT-ALCATEL 14 Nov 1972 [16 Nov 1971] 52498/72 Heading F1C [Also in Division F2] A molecular pump installation comprises a stator element 2 fixed to a stator 34 of the pump through a connecting part 40, and a cylindrical rotor element 4 mechanically connected to a rotor 33 of the pump, the rotor element being rotatable with slight play inside an internal space formed in the stator element, the internal space comprising successively, from top to bottom, a dynamic molecular seal 25, a dynamic viscousflow seal 26, at least one gas radial bearing 27, 28, a gas thrust bearing 30 and a gas counter thrust bearing 31. Air under pressure is supplied at 43 to an annular chamber 42 and thence via ducts 7, 8 to the bearings 27, 28 and via ducts 13, 14 to the bearings 30, 31. After passing through the bearings, the air is exhausted to atmosphere via ducts 20, 44 leading from the bearings 27, 28 and ducts 21, 22 leading from the bearings 30, 31. Each of the seals 25, 26 is provided with fifty helical grooves formed in the inner surface of the stator element 2, the depth of the grooves and their angle to the horizontal being 300 microns and 15 degrees in the case of the seal 25 and 100 microns and 10 degrees in the case of the seal 26. The depth of the grooves may decrease from top to bottom of each seal. The land intermediate the seals may be provided with a groove in which a partial vacuum of about 20 Torre is produced. The molecular pump shown comprises a cylindrical rotor 33 co-operating with one or several helical stator grooves 36. Instead, it may be a multidisc turbomolecular pump, Fig. 3 (not shown) or may comprise a rotor disc, Fig. 4 (not shown), co-operating with several spiral grooves.
GB5249872A 1971-11-16 1972-11-14 Molecular pump installations Expired GB1359920A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7140995A FR2161180A5 (en) 1971-11-16 1971-11-16

Publications (1)

Publication Number Publication Date
GB1359920A true GB1359920A (en) 1974-07-17

Family

ID=9085846

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5249872A Expired GB1359920A (en) 1971-11-16 1972-11-14 Molecular pump installations

Country Status (8)

Country Link
US (1) US3832084A (en)
BE (1) BE790969A (en)
CH (1) CH564691A5 (en)
DE (1) DE2255618C2 (en)
FR (1) FR2161180A5 (en)
GB (1) GB1359920A (en)
IT (1) IT970919B (en)
NL (1) NL7215491A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2208895A (en) * 1987-08-24 1989-04-19 Pfeiffer Vakuumtechnik Multi-stage molecular pump
CN103016531A (en) * 2012-12-31 2013-04-03 浙江工业大学 Friction-free rotary air supply air flotation device
CN111692340A (en) * 2020-06-12 2020-09-22 东台市岳东橡胶密封件厂 Built-in floating telescopic sealing element

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
DE2359456A1 (en) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR VACUUM PUMP WITH GAS BEARED ROTOR
DE2512828C3 (en) * 1975-03-22 1978-11-16 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Turbo molecular pump
FR2446934A1 (en) * 1979-01-19 1980-08-14 Cit Alcatel HIGH VACUUM ROTARY PUMP
DE3032967A1 (en) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Turbo-molecular type vacuum pump - has spaces inside and outside rotor bell sealed from each other to increase vacuum obtained
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
FR2521650A1 (en) * 1982-02-16 1983-08-19 Cit Alcatel ROTARY PUMP WITH HIGH VACUUM
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
DE3410905A1 (en) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln DEVICE FOR CONVEYING GASES IN SUBATMOSPHAERIC PRESSURES
FR2567208B1 (en) * 1984-07-05 1988-12-09 Cit Alcatel HIGH VACUUM ROTARY PUMP
DE3600124A1 (en) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag BLOWERS FOR CIRCUITING LARGE QUANTITIES OF GAS, IN PARTICULAR FOR HIGH-PERFORMANCE LASERS
DE3705912A1 (en) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh HIGH VACUUM PUMP WITH A BELL-SHAPED ROTOR
DE3791053T1 (en) * 1987-12-25 1989-12-21 Valerij Borisovic Solochov VACUUM MOLECULAR PUMP
WO1989006320A1 (en) * 1988-01-05 1989-07-13 Sholokhov Valery B Molecular vacuum pump
DE3891263T1 (en) * 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov TURBOMOLECULAR VACUUM PUMP
CH676378A5 (en) * 1988-03-30 1991-01-15 Vladimir Pavlovich Sergeev
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JP2928615B2 (en) * 1990-09-28 1999-08-03 株式会社日立製作所 Turbo vacuum pump
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
AU9797298A (en) * 1997-10-21 1999-05-10 Multilevel Metals, Inc. Gas bearing turbo pump and gas bearing feedthrough
DE19915983A1 (en) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vacuum pump with gas storage
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
GB0208556D0 (en) * 2002-04-12 2002-05-22 Advanced Fluid Systems Ltd Magnetic seal and bearing arrangement
EP1559915B1 (en) * 2004-01-29 2007-05-16 Pfeiffer Vacuum GmbH Gas friction pump
GB2467168B (en) * 2009-01-26 2011-03-16 Air Bearings Ltd Gas bearing and method of manufacturing the same
DE102010001538A1 (en) 2010-02-03 2011-08-04 Trumpf Maschinen Ag Gas laser with radial and axial gas bearings
DE102010021015A1 (en) 2010-05-19 2011-11-24 O3-innovation Ursula Bürger e.Kfr. Apparatus for generating water vapor, heat and cold, has vacuum-tight spiral piston pump equipped with hermetically sealed motor drive, where hermetic vacuum actuator is formed with spiral towards each other
JP6287475B2 (en) * 2014-03-28 2018-03-07 株式会社島津製作所 Vacuum pump
JP2020186687A (en) * 2019-05-15 2020-11-19 エドワーズ株式会社 Vacuum pump and stationary component for screw groove pump part

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1023679B (en) * 1956-06-08 1958-01-30 Messerschmitt Boelkow Blohm Device for regulating maps with similar or practically similar level lines
FR1203718A (en) * 1958-03-28 1960-01-20 Jansen Gmbh Th Brush dust collector
FR1284111A (en) * 1961-01-23 1962-02-09 Bristol Siddeley Engines Ltd Compressor improvements
FR1293546A (en) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Improvements to rotary molecular pumps
FR81075E (en) * 1962-01-23 1963-07-26 Snecma Advanced Turbomolecular Vacuum Pump
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
US3999827A (en) * 1975-10-10 1976-12-28 Burroughs Corporation Electrical connector for semiconductor device package

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2208895A (en) * 1987-08-24 1989-04-19 Pfeiffer Vakuumtechnik Multi-stage molecular pump
GB2208895B (en) * 1987-08-24 1991-01-23 Pfeiffer Vakuumtechnik Multi-stage molecular pump
CN103016531A (en) * 2012-12-31 2013-04-03 浙江工业大学 Friction-free rotary air supply air flotation device
CN103016531B (en) * 2012-12-31 2015-02-25 浙江工业大学 Friction-free rotary air supply air flotation device
CN111692340A (en) * 2020-06-12 2020-09-22 东台市岳东橡胶密封件厂 Built-in floating telescopic sealing element
CN111692340B (en) * 2020-06-12 2022-03-22 东台市岳东橡胶密封件厂 Built-in floating telescopic sealing element

Also Published As

Publication number Publication date
IT970919B (en) 1974-04-20
FR2161180A5 (en) 1973-07-06
DE2255618C2 (en) 1982-12-23
US3832084A (en) 1974-08-27
BE790969A (en) 1973-05-07
DE2255618A1 (en) 1973-05-24
NL7215491A (en) 1973-05-18
CH564691A5 (en) 1975-07-31

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee