NL166100C - TURBO MOLECULAR PUMP WITH A SUPPORT BEARING AND A MAGNETIC CENTERING BEARING. - Google Patents

TURBO MOLECULAR PUMP WITH A SUPPORT BEARING AND A MAGNETIC CENTERING BEARING.

Info

Publication number
NL166100C
NL166100C NL7104322.A NL7104322A NL166100C NL 166100 C NL166100 C NL 166100C NL 7104322 A NL7104322 A NL 7104322A NL 166100 C NL166100 C NL 166100C
Authority
NL
Netherlands
Prior art keywords
rotor
bearing
molecular pump
turbo molecular
magnetic centering
Prior art date
Application number
NL7104322.A
Other languages
Dutch (nl)
Other versions
NL7104322A (en
NL166100B (en
Inventor
Marcel-Gustave Rousseau
Robert Berthoumieux
Original Assignee
Snecma
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Snecma filed Critical Snecma
Publication of NL7104322A publication Critical patent/NL7104322A/xx
Publication of NL166100B publication Critical patent/NL166100B/en
Application granted granted Critical
Publication of NL166100C publication Critical patent/NL166100C/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C23/00—Bearings for exclusively rotary movement adjustable for aligning or positioning
    • F16C23/06—Ball or roller bearings
    • F16C23/08—Ball or roller bearings self-adjusting
    • F16C23/082—Ball or roller bearings self-adjusting by means of at least one substantially spherical surface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0402—Bearings not otherwise provided for using magnetic or electric supporting means combined with other supporting means, e.g. hybrid bearings with both magnetic and fluid supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/07—Fixing them on the shaft or housing with interposition of an element
    • F16C35/077—Fixing them on the shaft or housing with interposition of an element between housing and outer race ring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The vertical rotating assembly of a vacuum pump (comprising a turbomolecular rotor and the rotating member of an electric driving motor located under the rotor) is centered by a magnetic bearing located above the pump rotor and is supported by a ball bearing assembly located under the rotor and the motor. The ball bearing assembly is so constructed or connected to the pump housing as to tolerate radial deflection of the rotor.
NL7104322.A 1970-04-01 1971-03-31 TURBO MOLECULAR PUMP WITH A SUPPORT BEARING AND A MAGNETIC CENTERING BEARING. NL166100C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7011571A FR2086525A5 (en) 1970-04-01 1970-04-01

Publications (3)

Publication Number Publication Date
NL7104322A NL7104322A (en) 1971-10-05
NL166100B NL166100B (en) 1981-01-15
NL166100C true NL166100C (en) 1981-06-15

Family

ID=9053185

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7104322.A NL166100C (en) 1970-04-01 1971-03-31 TURBO MOLECULAR PUMP WITH A SUPPORT BEARING AND A MAGNETIC CENTERING BEARING.

Country Status (7)

Country Link
US (1) US3749528A (en)
BE (1) BE765041A (en)
CA (1) CA947733A (en)
CH (1) CH536940A (en)
FR (1) FR2086525A5 (en)
GB (1) GB1304989A (en)
NL (1) NL166100C (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2213470B2 (en) * 1972-03-20 1980-04-10 Padana Ag, Zug (Schweiz) Magnetic bearing
GB1398364A (en) * 1972-09-14 1975-06-18 Eheim G Motor and pump combination
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
DE2349033C3 (en) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
CH583856A5 (en) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
DE2654055B2 (en) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor and stator disks for turbo molecular pumps
FR2378487A1 (en) * 1977-02-01 1978-08-25 Lamour Danielle APPARATUS FOR JOINTLY ENSURING THE WAKING UP AND PREPARATION OF A HOT DRINK OR SIMILAR PRODUCT
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
DE3204750C2 (en) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetically mounted turbo molecular pump
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPH0646036B2 (en) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 Axial flow molecular pump
DE3580275D1 (en) * 1985-07-09 1990-11-29 Howden James & Co Ltd GAS SURVEILLANCE.
DE4314419A1 (en) * 1993-05-03 1994-11-10 Leybold Ag Friction vacuum pump with bearing support
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE69730781T2 (en) * 1996-06-26 2005-09-29 Rolls-Royce Corp., Indianapolis Storage combination for a gas turbine
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10010371A1 (en) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolecular pump
US6727616B1 (en) * 2000-11-08 2004-04-27 Christopher W. Gabrys Flywheel energy storage system with quill stabilizer
US7679245B2 (en) * 2001-09-17 2010-03-16 Beacon Power Corporation Repulsive lift systems, flywheel energy storage systems utilizing such systems and methods related thereto
US6707202B2 (en) * 2002-03-29 2004-03-16 Emerson Electric Co. Sleeve and bearing that locate a rotating component and a machined surface of a rotary device
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
DE102012224070A1 (en) * 2012-12-20 2014-06-26 Pfeiffer Vacuum Gmbh Bearing holder for a rotary bearing, in particular for a vacuum pump
JP6427963B2 (en) * 2014-06-03 2018-11-28 株式会社島津製作所 Vacuum pump
CN116692401B (en) * 2023-07-31 2023-10-27 原平市兴胜机械制造有限公司 Belt type thin oil lubrication roller

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1402053A (en) * 1919-04-07 1922-01-03 Pyle National Co Elastic-fluid turbine
US2436939A (en) * 1943-10-21 1948-03-02 Hoover Co Magnetic coupling and bearing
CA530369A (en) * 1953-02-24 1956-09-11 E. Shafer Julius Bearing mounting
US3107310A (en) * 1960-08-03 1963-10-15 Const Mecanique Magnetic coupling having a magnetic bearing
FR1475765A (en) * 1966-01-31 1967-04-07 Snecma Improvements to devices with vertical shaft rotating at high speed

Also Published As

Publication number Publication date
US3749528A (en) 1973-07-31
FR2086525A5 (en) 1971-12-31
BE765041A (en) 1971-08-16
NL7104322A (en) 1971-10-05
CH536940A (en) 1973-05-15
NL166100B (en) 1981-01-15
CA947733A (en) 1974-05-21
GB1304989A (en) 1973-01-31

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Legal Events

Date Code Title Description
SNR Assignments of patents or rights arising from examined patent applications

Owner name: ARTHUR PFEIFFER VAKUUMTECHNIK WETZLAR GMBH

V4 Discontinued because of reaching the maximum lifetime of a patent