US3832084A - Pivot for rotating molecular pumps - Google Patents

Pivot for rotating molecular pumps Download PDF

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Publication number
US3832084A
US3832084A US00307231A US30723172A US3832084A US 3832084 A US3832084 A US 3832084A US 00307231 A US00307231 A US 00307231A US 30723172 A US30723172 A US 30723172A US 3832084 A US3832084 A US 3832084A
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stator
gas
pivot
pivot according
rotor
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Expired - Lifetime
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US00307231A
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English (en)
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L Maurice
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Alcatel CIT SA
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Alcatel CIT SA
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/08—Rigid support of bearing units; Housings, e.g. caps, covers for spindles
    • F16C35/10—Rigid support of bearing units; Housings, e.g. caps, covers for spindles with sliding-contact bearings

Definitions

  • the present invention concerns a pivot for rotating molecular pumps.
  • rotating molecular pumps there is known that several types of rotating molecular pumps exist: cylindrical rotor pumps such as described by Holweck (French Pat. No. 1,293,546), pumps with a rotor in the form of a disk such as described by Gondet and Siegbahn (U.S. Pat. No. 1,942,139), and turbomolecular pumps such as described by Becker (French Pat. No. 1,165,792) and Hablanian (French Pat. No. 1,297,182).
  • cylindrical rotor pumps such as described by Holweck (French Pat. No. 1,293,546)
  • pumps with a rotor in the form of a disk such as described by Gondet and Siegbahn (U.S. Pat. No. 1,942,139)
  • turbomolecular pumps such as described by Becker (French Pat. No. 1,165,792) and Hablanian (French Pat. No. 1,297,182).
  • the applicant has designed a molecular pump of the Holweck type using no oil lubrication, but comprising fluid gas bearings and molecular seals intended for ensuring fluid-tight sealing along the rotating shaft.
  • This pump has the advantages of rotating without wear with a low drive power, for the power lost in a fluid gas bearing is infinitely slight, of being completely free from oil vapor and also of being capable of bearing radiations and of being installed by heating because it is entirely metallic and has no lubricating or cooling liquid.
  • this pump has the advantage of being driven by a drive means installed in the outside atmosphere.
  • the applicant has therefore sought to perfect a model of pivot capable of being adapted to rotating molecular pumps of all types, by providing the pivot according to the invention with the required elements for the pump installed on such a pivot to have advantages which can compare with those mentioned above, obtained with the pump of the Holweck type in French Pat. No. 1,293,546 in the name of the applicant.
  • the pumps are installed in an overhanging position on the pivot according to the invention, this making them more compact and easier to house on pump frames, and making the dismantling thereof easier.
  • the pivot according to the invention on which any type of rotating molecular pump may be installed in an overhanging position comprising a stator element fixed to the stator of the pump by means of a connecting part as well as a rotor element having a cylindrical shape, mechanically coupled to the rotor of the pump, is characterized in that the rotor element rotates with slight play inside an internal space formed in the stator element, and in that this space comprises successively, from the upper part of the pivot to the lower part of the pivot, a dynamic molecular seal, a dynamic viscous seal, several gas bearings, a gas thrust bearing and a gas counter-thrust bearing.
  • the pumps using such a pivot may easily be dismantled by the user.
  • FIG. 1 shows the pivot according to the invention
  • FIG. 2 shows the pivot according to the invention on which is assembled a molecular pump of the Holweck type in an overhanging position;
  • FIG. 3 shows the pivot according to the invention on which is assembled a turbomolecular pump in an overhanging position.
  • FIG. 4 shows the pivot according to the invention on which is assembled a disk type molecular pump in an overhanging position.
  • FIG. 5 shows the molecular seal and the viscous seal used in the pivot according to the invention.
  • FIG. 1 shows the pivot 1 according to the invention.
  • That pivot comprises a stator element 2 (called, hereinafter, in the description, stator 2) inside which is arranged a cylindrical chamber 3 in which is a rotor element 4 (called, hereinafter, in the description, rotor 4) constituted by a hollow cylinder.
  • stator element 2 called, hereinafter, in the description, stator 2
  • rotor element 4 constituted by a hollow cylinder.
  • the upper part of the rotor 4 has a cylindrical ring 5 whose central part is tapped and whose lower part has a ring 6, having a toroidal shape with a rectangular cross-section.
  • the stator 2 of the pivot 1 comprises two series of ducts 7, 8, whose axes are situated in two horizontal planes and which bring a gas under pressure into the cylindrical chamber 3 at points 9, 10. These points are regularly spaced on the inside surface 11 of the stator 2 in two equal parallel circumferences.
  • the ducts 7, 8 are connected to a device supplying gas under pressure (not shown) and lead into the bottom 12 of a cutaway part provided in the outside surface of the pivot 1 between these two series of ducts.
  • a cavity 15 in which the ring 6 rotates, as well as four circular grooves 16, 17, 18, 19 are provided in the stator 2.
  • the first groove 16 is arranged above the injection points 9, the second 17, between the injection points 9 and 10, the third 18 below the injection point 10, just above the cavity 15 and the fourth 19 just below the cavity 15.
  • the grooves 16 and 17 communicate with an exhaust tube 20, for gases to be let out into the open atmosphere, to which is fitted a pipe (not shown).
  • An exhaust tube 21 is provided for the groove 18.
  • the space between the stator 2 and the lateral surface of the ring 6 which has remained free is connected to the outside atmosphere by a tube 22.
  • Two series of helical grooves 23, 24 are provided in Nos. 3,131,940; 3,131,942; and 3,071,384, disclose seals of a general type similar to the molecular seal and viscous seal of the present invention.
  • the gas under pressure injected at the points 9 is expanded and evacuated in the grooves 16 and 17; likewise, the gas under pressure injected at the points is expanded and is evacuated in the grooves 17 and 18 thus enabling the operation of a first gas bearing 27 placed between the grooves 16 and 17, and of a second gas bearing 28 placed between-the grooves 17 and 18.
  • the bearing 27 and 28 ensure the radial stability of the rotor 4.
  • Air under pressure injected through the ducts l3 and 14 is removed after expanding into the outside atmo sphere through the ducts 21 and 22, as well as through the space 29 comprised between the stator 2 and the rotor 4, placed below the groove 19, thus enabling the operation of a thrust bearing 30, respectively of a gas counter thrust bearing 31, constituted by the upper surface, respectively the lower surface, of the ring 6 cooperating with the walls of the cavity 15.
  • the thrust bear-- ing 30 and the gas counter-thrust bearing 31 provide axial stability for the rotor 4.
  • the drive of the rotor 4 is ensured by a drive device not shown (motor, air turbine, pulleys, gear trains, etc.) exterior to the pivot and placed in the outside atmosphere.
  • a drive device not shown motor, air turbine, pulleys, gear trains, etc.
  • FIG. 2 shows the pivot 1 according to the invention, on which is installed a Holweck pump 32 with a vertical axis, in an overhanging position.
  • the pivot 1 being in all points identical to that described in FIG. 1, it will not be described again here.
  • the elements of that pivot are referenced with the same numerals as in FIG. 1.
  • That pump 32 comprises, in a conventional way, a rotor 33 formed by a smooth cylinder closed at its upper part, and a stator 34 having a cylindrical shape.
  • One or several helical grooves 36 connecting a lower chamber 37 in which there is a primary vacuum to an upper chamber 38 in which there is a secondary vacuum or a thorough vacuum are arranged in a known way in the inside walls 35 of the stator 34.
  • a duct 39 leading into the lower chamber 37 is connected to a primary pump (not shown).
  • the stator 34 of the pump 32 is connected to the stator element 2 of the pivot 1 through a hollow and cylindrical connected part 40.
  • That connecting part 40 comprises a cutaway part 41 formed in its inside wall and arranged facing the bottom cutaway part 12 formed in the outside surface of the pivot 1, thus defining, with the stator element 2, a toroidal chamber 42.
  • the toroidal chamber 42 communicates, on the one hand, with an air inlet tube 43 for air under pressure formed in the connecting part 40, and, on the other hand, with the ducts 7 and 8 of the pivot 1.
  • the toroidal chamber 42 therefore acts as a gas supply chamber for gas under pressure and as a stabilizer chamber for the bearings 27 and 28 of the pivot 1.
  • the connecting part is also provided with a passage 44 for the pipe (not shown) connected to the gas exhaust tube 20 leading to the outside atmosphere.
  • the rotor 33 of the pump 32 is provided at its center with a screw 45 which engages in the central part of the ring 5 of the rotor element 4 and mechanically coupling the rotor 33 to the rotor element 4.
  • the nut 46 of the screw 45 is tightened hard against the ring 5.
  • the upper part of the pump rotor in contact with the secondary vacuum has a smooth surface with a simple shape, this making degassing easier and enabling a very thorough vacuum to be obtained.
  • the molecular seal 25 and the viscous seal 26 ensure fluid-tight sealing between the space 47 under primary vacuum comprised between the rotor 33 and the stator element 2 and the groove 16 of the pivot 1.
  • FIG. 3 shows the pivot according to the invention, installed in a turbomolecular pump.
  • the pivot l is identical to that shown in FIG. 1 and it will not be described again here.
  • the elements of that pivot are referenced by the same numerals in that fig ure as in FIG. 1.
  • the turbomolecular pump 48 comprises a rotor 49 provided with rotating disks50 between fixed disks 51 fast with a stator 52.
  • the stator 52 of the pump 48 is connected to the stator element 2 of the pivot 1 through a mushroomshaped connecting part 53 whose central part has been removed to allow the pivot 1 to pass.
  • the connecting part 53 comprises a cutaway part 54 1 formed in its inside wall and arranged facing the cutaway part 12 in the bottom, formed in the outside surface of the pivot 1, thus defining, with the stator element 2, a toroidal chamber 55.
  • the toroidal chamber 55 communicates, on the one hand, with air inlet tube 56 for air under pressure formed in the connecting part 53, and, on the other hand with the ducts 7 and 8 of the pivot l.
  • the toroidal chamber 55 therefore acts as a gas supply chamber for gas under pressure and as a stabilizer chamber for the bearings 27 and 28 of the pivot l, as does the toroidal chamber 42 in the preceding example.
  • the connecting part 53 is also provided with a passage 57 for the pipe'tnot shown) connected to the gas 1 exhaust tube 20 leading to the outside atmosphere.
  • the rotor 49 of the pump 48 is provided at its center with a screw 58 engaging in the central part of the ring 5 of the rotor element 4 and mechanically coupling the rotor 49 to the rotor element 4.
  • the nut 59 of the screw 58 is tightened against the ring 5.
  • the upper part of the rotor of the pump in contact with the secondary vacuum has a smooth surface and a simple shape this making degassing easier and making it possible to obtain a very thorough vacuum.
  • a chamber 60 containing a primary vacuum, connected to a primary pump (not shown) by a tube 61 is placed at the bottom of the pump 48.
  • the molecular seal 25 and the viscous seal 26 of the pivot 1 ensure fluid-tight sealing between the space containing a primary vacuum 60 and the groove 16 of the pivot 1.
  • FIG. 4 shows the pivot according to the invention installed in a pump of the disk type.
  • the pivot l is identical to the pivot shown in FIG. 1 and it will not be described again here.
  • the pump 62 comprises a rotor 63 in the form of a disk rotating in a stator 64 in whose walls are arranged several helical grooves 65.
  • the stator 64 of the pump 62 is connected to the sta tor element 2 of the pivot 1 through hollow cylindrical connecting part 66.
  • That connecting part 66 comprises a cutaway part 67 formed in its inside wall and arranged facing the cutaway part in the bottom 12, formed in the outside surface of the pivot l,'thus defining, with the stator element 2, a toroidal chamber 68.
  • the toroidal chamber 68 communicates, on the one hand, with an air inlet tube 69 for air under pressure formed in the connecting part 66 and, on the other hand, with the ducts 7 and 8 of the pivot l.
  • the toroidal chamber 68 therefore acts as a supply chamber for gas under pressure and as a stabilizer chamber for the bearings 27 and 28 of the pivot l, as do the toroidal chambers 42 and 55 in the preceding examples.
  • the connecting part 66 is also provided with a passage 70 for the pipe (not shown) connected to the gas exhaust tube leading to the outside atmosphere.
  • the rotor 63 of the pump 62 is provided at its center with a screw 71 which engages in the central part of the ring 5 of the rotor element 4 and mechanically coupling the rotor 33 to the rotor element 4.
  • the nut 72 of the screw 71 is tightened hard against the ring 5.
  • the upper part of the pump rotor in contact with the secondary vacuum has a smooth surface with a simple shape, this making degassing easier and enabling a very thorough vacuum to be obtained.
  • the stator 64 comprises vertical tubes 73 making the grooves 65 communicate with a'space 74 containing a primary vacuum. That space is connected by a tube 75 to a primary pump (not shown).
  • the molecular seal and the viscous seal 26 provide fluid-tight sealing between the space 74 containing a primary vacuum and the groove 16 of the pivot l.
  • FIG. 5 shows the molecular seal and the viscous seal used in the pivot according to the invention.
  • the molecular seal 25 consists of n grooves 23 having a constant depth a, inclined at an angle of a in relation to the horizontal and extending between the upper end of the stator 2 and an intermediate space havingno groove.
  • the applicant has also produced satisfactory molecular and viscous seals in which the depth of the grooves decreases in degrees starting from the upper part of these seals.
  • the applicant has formed, in certain cases, in the inside surface 1 l of the stator 2, at the level of the intermediate space,
  • pivot is in no way limited to the production of molecular pumps cited by way of examples having no limiting character,.but on the contrary is extended quite naturally to all devices rotating at high speed and operating in a vacuum, and more particularly to ultracentrifuging devices.
  • stator connecting means for connecting said stator element to the pump stator
  • dynamic sealing means for sealing the opening bemeans for installing a rotating molecular pump in an overhanging position at the upper-part of said pivot.
  • said dynamic sealing means includes a dynamic molecular seal arranged in said internal space adjacent the top of said pivot and a dynamic viscous seal arranged in said internal space below said dynamic molecular seal.
  • said gas bearing means include a plurality of axially spaced gas bearings arranged in said internal space below said dynamic viscous seal.
  • said gas thrust bearing means includes a gas thrust bearing and a gas counter-thrust bearing.
  • said stator connecting means includes a. stator connecting part positionable between said pump stator and said stator element, and wherein said stator element includes a cutaway part formed on its outside surface, said stator connecting part and said cutaway part forming a stabilizer chamber for the gas bearing means.
  • said stator connecting means includes a stator connecting part positionable between said pump stator and said stator element, and wherein said stator element includes a cutaway part formed on its outside surface, said stator connecting part and said cutaway part forming a stabilizer chamber for the gas bearing means.
  • said gas thrust bearing means includes a gas thrust bearing and a gas counter-thrust bearing constituted by a ring of the rotor element rotating in a cavity formed in the stator element and held in a middle position in the cavity under the combined action of pressurized gas jets on respective upper and lower faces of said ring.
  • said gas thrust bearing means includes a gas thrust bearing and a gas counter-thrust bearing constituted by a ring of the rotor element rotating in a cavity formed in the stator element and held in a middle position in the cavity under the combined action of pressurized gas jets on respective upper and lower faces of said ring.
  • said molecular seal includes several grooves formed in the stator element and inclined at a certain angle in relation to the horizontal.
  • said viscous seal includes several grooves formed in the stator ele ment and inclined at a certain angle in relation to the horizontal.
  • said gas bearing means includes two axially spaced gas bearings arranged in said internal space below said dynamic sealing means.
  • said gas bearing means includes two axially spaced gas bearings arranged in said internal space below said dynamic sealing means.
  • said rotor element includes means for attaching to a rotor driving means at a position placed in the outside atmosphere.
  • gas exhaust grooves are formed in said stator element at positions axially spaced from gas inlets to said gas bearings.
  • gas exhaust openings communicate directly with the outer circumference of said ring for exhausting gases supplied to the thrust and counter-thrust bearings.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US00307231A 1971-11-16 1972-11-16 Pivot for rotating molecular pumps Expired - Lifetime US3832084A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7140995A FR2161180A5 (fr) 1971-11-16 1971-11-16

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US3832084A true US3832084A (en) 1974-08-27

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US (1) US3832084A (fr)
BE (1) BE790969A (fr)
CH (1) CH564691A5 (fr)
DE (1) DE2255618C2 (fr)
FR (1) FR2161180A5 (fr)
GB (1) GB1359920A (fr)
IT (1) IT970919B (fr)
NL (1) NL7215491A (fr)

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US3947193A (en) * 1973-03-30 1976-03-30 Compagnie Industrielle Des Telecommunications Cit-Alcatel Molecular vacuum pump structure
US3969042A (en) * 1973-11-29 1976-07-13 Leybold-Heraeus Gmbh & Co. Kg Turbomolecular vacuum pump having a gas bearing-supported rotor
US4588361A (en) * 1984-07-05 1986-05-13 Compagnie Industrielle Des Telecommunications Cit-Alcatel High vacuum rotary pump
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4746265A (en) * 1981-12-14 1988-05-24 Ultra-Centrifuge Nederland B.V. High-vacuum molecular pump
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4797062A (en) * 1984-03-24 1989-01-10 Leybold-Heraeus Gmbh Device for moving gas at subatmospheric pressure
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806074A (en) * 1987-02-24 1989-02-21 Alcatel Hochvakuumtechnik Gmbh High-vacuum pump having a bell-shaped rotor
DE3932228A1 (de) * 1988-09-28 1990-04-05 Hitachi Ltd Turbovakuumpumpe
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
US5451147A (en) * 1990-09-28 1995-09-19 Hitachi, Ltd. Turbo vacuum pump
WO1999020433A1 (fr) * 1997-10-21 1999-04-29 Multilevel Metals, Inc. Turbopompe avec palier a gaz and passage d'interconnexion de palier a gaz
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US6368082B1 (en) * 1999-04-09 2002-04-09 Pfeiffer Vacuum Gmbh Vacuum pump with rotor supporting gas bearings
US6461113B1 (en) * 1988-09-13 2002-10-08 Helix Technology Corporation Electronically controlled vacuum pump
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
WO2003087636A1 (fr) * 2002-04-12 2003-10-23 Advanced Fluid Systems Limited Joint magnetique et dispositif de palier
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
US20050169744A1 (en) * 2004-01-29 2005-08-04 Armin Conrad Gas friction pump
DE102010021015A1 (de) 2010-05-19 2011-11-24 O3-innovation Ursula Bürger e.Kfr. Wärmepumpe mit gewendelten Kolben gleichen Profilquerschnitts für die Erzeugung von Kälte und Wärme
US20120020596A1 (en) * 2009-01-26 2012-01-26 Air Bearings Limited Gas bearing and method of manufacturing the same
WO2011095400A3 (fr) * 2010-02-03 2012-03-01 Trumpf Maschinen Ag Laser à gaz pourvu d'un palier radial et d'un palier axial
US20150275914A1 (en) * 2014-03-28 2015-10-01 Shimadzu Corporation Vacuum pump
US20220235776A1 (en) * 2019-05-15 2022-07-28 Edwards Japan Limited Vacuum pump and stator component of thread groove pump portion of the vacuum pump

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FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
DE3600124A1 (de) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag Geblaese zum umwaelzen grosser gasmengen, insbesondere fuer hochleistungs-laser
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
JPH02502743A (ja) * 1987-12-25 1990-08-30 ショロホフ　ヴァレリイ　ボリソヴィチ 分子真空ポンプ
DE3891201T1 (de) * 1988-01-05 1990-01-11 Valerij Borisovic Solochov Vakuum-molekularpumpe
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
WO1989009341A1 (fr) * 1988-03-30 1989-10-05 Sergeev Vladimir P Pompe a vide turbomoleculaire
CN103016531B (zh) * 2012-12-31 2015-02-25 浙江工业大学 无摩擦旋转供气气浮装置
CN112302990A (zh) * 2019-07-30 2021-02-02 青岛海尔智能技术研发有限公司 静压轴承供气系统、制冷设备
CN111692340B (zh) * 2020-06-12 2022-03-22 东台市岳东橡胶密封件厂 一种内藏浮动式伸缩密封件

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US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1023679B (de) * 1956-06-08 1958-01-30 Messerschmitt Boelkow Blohm Vorrichtung zum Regeln von Kennfeldern mit aehnlichen bzw. praktisch aehnlichen Niveaulinien
FR1203718A (fr) * 1958-03-28 1960-01-20 Jansen Gmbh Th Dépoussiéreur à brosses
FR1284111A (fr) * 1961-01-23 1962-02-09 Bristol Siddeley Engines Ltd Perfectionnements aux compresseurs
US3168977A (en) * 1962-01-23 1965-02-09 Snecma Turbomolecular vacuum pump
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump

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US3947193A (en) * 1973-03-30 1976-03-30 Compagnie Industrielle Des Telecommunications Cit-Alcatel Molecular vacuum pump structure
US3969042A (en) * 1973-11-29 1976-07-13 Leybold-Heraeus Gmbh & Co. Kg Turbomolecular vacuum pump having a gas bearing-supported rotor
US4746265A (en) * 1981-12-14 1988-05-24 Ultra-Centrifuge Nederland B.V. High-vacuum molecular pump
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4797062A (en) * 1984-03-24 1989-01-10 Leybold-Heraeus Gmbh Device for moving gas at subatmospheric pressure
US4588361A (en) * 1984-07-05 1986-05-13 Compagnie Industrielle Des Telecommunications Cit-Alcatel High vacuum rotary pump
US4806074A (en) * 1987-02-24 1989-02-21 Alcatel Hochvakuumtechnik Gmbh High-vacuum pump having a bell-shaped rotor
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
US6461113B1 (en) * 1988-09-13 2002-10-08 Helix Technology Corporation Electronically controlled vacuum pump
US7155919B2 (en) 1988-09-13 2007-01-02 Brooks Automation, Inc. Cryopump temperature control of arrays
US20050081536A1 (en) * 1988-09-13 2005-04-21 Helix Technology Corporation Cryopump temperature control of arrays
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US20040194477A1 (en) * 1988-09-13 2004-10-07 Helix Technology Corporation Electronically controlled vacuum pump gauge
US6755028B2 (en) 1988-09-13 2004-06-29 Helix Technology Corporation Electronically controlled cryopump
US6460351B2 (en) 1988-09-13 2002-10-08 Helix Technology Corporation Electronically controlled cryopump
DE3932228A1 (de) * 1988-09-28 1990-04-05 Hitachi Ltd Turbovakuumpumpe
US5451147A (en) * 1990-09-28 1995-09-19 Hitachi, Ltd. Turbo vacuum pump
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
US7413411B2 (en) 1993-07-16 2008-08-19 Brooks Automation, Inc. Electronically controlled vacuum pump
US20050196284A1 (en) * 1993-07-16 2005-09-08 Helix Technology Corporation Electronically controlled vacuum pump
WO1999020433A1 (fr) * 1997-10-21 1999-04-29 Multilevel Metals, Inc. Turbopompe avec palier a gaz and passage d'interconnexion de palier a gaz
EP1043505A3 (fr) * 1999-04-09 2002-07-17 Pfeiffer Vacuum GmbH Pompe à vide avec des paliers à gaz
US6368082B1 (en) * 1999-04-09 2002-04-09 Pfeiffer Vacuum Gmbh Vacuum pump with rotor supporting gas bearings
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
WO2003087636A1 (fr) * 2002-04-12 2003-10-23 Advanced Fluid Systems Limited Joint magnetique et dispositif de palier
US6991424B2 (en) 2004-01-29 2006-01-31 Pfeiffer Vacuum Gmbh Gas friction pump
US20050169744A1 (en) * 2004-01-29 2005-08-04 Armin Conrad Gas friction pump
US20120020596A1 (en) * 2009-01-26 2012-01-26 Air Bearings Limited Gas bearing and method of manufacturing the same
US8882353B2 (en) * 2009-01-26 2014-11-11 Ralf Dupont Gas bearing and method of manufacturing the same
WO2011095400A3 (fr) * 2010-02-03 2012-03-01 Trumpf Maschinen Ag Laser à gaz pourvu d'un palier radial et d'un palier axial
US8611390B2 (en) 2010-02-03 2013-12-17 Trumpf Maschinen Ag Gas laser having radial and axial gas bearings
DE102010021015A1 (de) 2010-05-19 2011-11-24 O3-innovation Ursula Bürger e.Kfr. Wärmepumpe mit gewendelten Kolben gleichen Profilquerschnitts für die Erzeugung von Kälte und Wärme
US20150275914A1 (en) * 2014-03-28 2015-10-01 Shimadzu Corporation Vacuum pump
US10253778B2 (en) * 2014-03-28 2019-04-09 Shimadzu Corporation Vacuum pump
US20220235776A1 (en) * 2019-05-15 2022-07-28 Edwards Japan Limited Vacuum pump and stator component of thread groove pump portion of the vacuum pump

Also Published As

Publication number Publication date
DE2255618A1 (de) 1973-05-24
NL7215491A (fr) 1973-05-18
IT970919B (it) 1974-04-20
FR2161180A5 (fr) 1973-07-06
GB1359920A (en) 1974-07-17
DE2255618C2 (de) 1982-12-23
CH564691A5 (fr) 1975-07-31
BE790969A (fr) 1973-05-07

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