GB885954A - Improvements in or relating to molecular pumps - Google Patents

Improvements in or relating to molecular pumps

Info

Publication number
GB885954A
GB885954A GB8192/60A GB819260A GB885954A GB 885954 A GB885954 A GB 885954A GB 8192/60 A GB8192/60 A GB 8192/60A GB 819260 A GB819260 A GB 819260A GB 885954 A GB885954 A GB 885954A
Authority
GB
United Kingdom
Prior art keywords
shell
oil
chambers
pump
bearing support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8192/60A
Inventor
Willi Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ARTHUR PFEIFFER GmbH
Original Assignee
ARTHUR PFEIFFER GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ARTHUR PFEIFFER GmbH filed Critical ARTHUR PFEIFFER GmbH
Priority to GB8192/60A priority Critical patent/GB885954A/en
Publication of GB885954A publication Critical patent/GB885954A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/06Lubrication
    • F04D29/063Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

885,954. Axial flow pumps. PFEIFFER G.m.b.H., ARTHUR. March 8, 1960, No. 8192/60. Class 110 (1). [Also in Group XXXIV] In a molecular pump, having pressure chambers under a preliminary vacuum and bounded by a pump casing and by bearing support plates, a housing mounted on the inner side of each bearing support plate encloses a bearing opening in the plate, surrounds the rotor shaft with a slight clearance, and is provided with cooling chambers and a return pipe for oil passing out of the bearing. An inlet 4 is provided in the pump casing 1 and outlets 5 communicate with a backing pump. The molecular pump shown comprises discs 9, which are mounted on the shaft 6, and have diagonal peripheral slots which co-operate with diagonal slots in stationary rings 10 secured to the pump casing. A housing 17 attached to bearing support plates 2, 3 comprises a shell 18 surrounded by a second shell 29, the space therebetween forming the cooling chamber 31. A radially projecting wall 25 inside the shell 18 forms chambers 27, 28 interconnected at their lowest point. Oil is supplied to the bearings through a pipe 37, accumulates in the chamber 28 and is drawn off through a pipe 38. The shaft 6, being stepped, prevents the flow of oil into the pressure chamber. As the shell 18 is cooled any oil vapour in the chambers 27, 28 will condense therein and be discharged. Oil vapour which enters the pressure chamber 12 will condense on the housings 17 and dripping off the housing walls passes into the sockets 5. Specification 811,858 is referred to.
GB8192/60A 1960-03-08 1960-03-08 Improvements in or relating to molecular pumps Expired GB885954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8192/60A GB885954A (en) 1960-03-08 1960-03-08 Improvements in or relating to molecular pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8192/60A GB885954A (en) 1960-03-08 1960-03-08 Improvements in or relating to molecular pumps

Publications (1)

Publication Number Publication Date
GB885954A true GB885954A (en) 1962-01-03

Family

ID=9847621

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8192/60A Expired GB885954A (en) 1960-03-08 1960-03-08 Improvements in or relating to molecular pumps

Country Status (1)

Country Link
GB (1) GB885954A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
DE2309665A1 (en) * 1973-02-27 1974-09-05 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR VACUUM PUMP
EP0147015A2 (en) * 1983-10-07 1985-07-03 Sargent-Welch Scientific Company Turbomolecular pump and bearing assembly therefor
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
GB2498768B (en) * 2012-01-27 2016-07-27 Edwards Ltd Gas transfer vacuum pump

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
DE2309665A1 (en) * 1973-02-27 1974-09-05 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR VACUUM PUMP
EP0147015A2 (en) * 1983-10-07 1985-07-03 Sargent-Welch Scientific Company Turbomolecular pump and bearing assembly therefor
EP0147015A3 (en) * 1983-10-07 1986-03-19 Sargent-Welch Scientific Company Turbomolecular pump and bearing assembly therefor
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
GB2498768B (en) * 2012-01-27 2016-07-27 Edwards Ltd Gas transfer vacuum pump
US10337517B2 (en) 2012-01-27 2019-07-02 Edwards Limited Gas transfer vacuum pump

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