DE3865009D1 - Mehrstufige vakuumpumpe. - Google Patents

Mehrstufige vakuumpumpe.

Info

Publication number
DE3865009D1
DE3865009D1 DE8888117706T DE3865009T DE3865009D1 DE 3865009 D1 DE3865009 D1 DE 3865009D1 DE 8888117706 T DE8888117706 T DE 8888117706T DE 3865009 T DE3865009 T DE 3865009T DE 3865009 D1 DE3865009 D1 DE 3865009D1
Authority
DE
Germany
Prior art keywords
vacuum pump
stage vacuum
stage
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888117706T
Other languages
English (en)
Inventor
Hanns-Peter Dr Berges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE3865009D1 publication Critical patent/DE3865009D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE8888117706T 1988-02-29 1988-10-25 Mehrstufige vakuumpumpe. Expired - Fee Related DE3865009D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88102986 1988-02-29

Publications (1)

Publication Number Publication Date
DE3865009D1 true DE3865009D1 (de) 1991-10-24

Family

ID=8198761

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888117706T Expired - Fee Related DE3865009D1 (de) 1988-02-29 1988-10-25 Mehrstufige vakuumpumpe.

Country Status (2)

Country Link
EP (1) EP0332741B1 (de)
DE (1) DE3865009D1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2537696B2 (ja) * 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
GB9902083D0 (en) * 1999-01-29 1999-03-24 Boc Group Plc Vacuum pump systems
DE10019066A1 (de) 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vakuumpumpe mit zwei zusammenwirkenden Rotoren

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1854318A (en) * 1926-06-17 1932-04-19 Westinghouse Electric & Mfg Co Compressor
US1626484A (en) * 1926-11-24 1927-04-26 James Mccaffrey R Pump
GB315365A (de) * 1928-07-12 1930-02-06 Gebrueder Ludwig
GB531798A (en) * 1939-08-02 1941-01-10 Siemens Brothers & Co Ltd Improvements in or relating to electrical filter networks
FR1120279A (fr) * 1955-01-24 1956-07-03 Groupe compresseur hermétique
DE2158866A1 (de) * 1971-11-27 1973-05-30 Engstfeld Wilh Fa Vorrichtung zum entgasen von metallschmelzen
DE2158868B2 (de) * 1971-11-27 1975-12-04 Gebr. Claas, 4834 Harsewinkel Maschine zum Zerkleinern von sperrigen Abfällen
US3837764A (en) * 1972-05-11 1974-09-24 Robinair Mfg Corp Multi-stage rotary vacuum pump with separate oil reservoir
DE2503020A1 (de) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Drehkolbenmaschine sowie verfahren zu ihrer herstellung

Also Published As

Publication number Publication date
EP0332741A1 (de) 1989-09-20
EP0332741B1 (de) 1991-09-18

Similar Documents

Publication Publication Date Title
DE68914320D1 (de) Zusammengestellte Vakuumpumpe.
DE3879423D1 (de) Schraubenkolben-vakuumpumpe.
DE69109398D1 (de) Turbomolekularpumpe.
DE3885689D1 (de) Hochdruckverstellpumpe.
DE59007218D1 (de) Magnetgelagerte Vakuumpumpe.
DE68904020D1 (de) Mehrstufiger zentrifugalverdichter.
DE69008638D1 (de) Transfusionspumpe.
FI894271A0 (fi) Turbomolekular vakuumpump.
DE69308527D1 (de) Mehrstufige Vakuumpumpe
DE3669356D1 (de) Vakuumpumpe.
DE68901783D1 (de) Tauchmotorpumpe.
DE69112160D1 (de) Mehrstufige Vakuumpumpe.
DE68903355D1 (de) Vakuumpumpen.
DE69004566D1 (de) Vakuumpumpeneinheit.
DE3770367D1 (de) Turbomolekularpumpe.
DE68903862D1 (de) Vakuumpumpenanlagen.
DE3768593D1 (de) Hochvakuumpumpe.
DE68906929D1 (de) Turbomolekularpumpe.
DE58907121D1 (de) Zwei- oder mehrstufige Hochvakuumpumpe.
DE3791053T1 (de) Vakuum-molekularpumpe
DE59201550D1 (de) Trockenlaufende vakuumpumpe.
DE68907576D1 (de) Verdraengerpumpe.
DE59202713D1 (de) Mehrstufiges Vakuum-Pumpsystem.
DE69109424D1 (de) Turbovakuumpumpe.
DE68904263D1 (de) Vakuumpumpe der schraubenbauart.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee