DE58907121D1 - Zwei- oder mehrstufige Hochvakuumpumpe. - Google Patents

Zwei- oder mehrstufige Hochvakuumpumpe.

Info

Publication number
DE58907121D1
DE58907121D1 DE89110196T DE58907121T DE58907121D1 DE 58907121 D1 DE58907121 D1 DE 58907121D1 DE 89110196 T DE89110196 T DE 89110196T DE 58907121 T DE58907121 T DE 58907121T DE 58907121 D1 DE58907121 D1 DE 58907121D1
Authority
DE
Germany
Prior art keywords
vacuum pump
high vacuum
stage high
stage
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89110196T
Other languages
English (en)
Inventor
Berthold Fischer
Peter Mueller
Dieter Vorberg
Hanns-Peter Dr Berges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE58907121D1 publication Critical patent/DE58907121D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
    • F04C29/0014—Injection of a fluid in the working chamber for sealing, cooling and lubricating with control systems for the injection of the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
DE89110196T 1989-06-06 1989-06-06 Zwei- oder mehrstufige Hochvakuumpumpe. Expired - Fee Related DE58907121D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89110196A EP0401399B1 (de) 1989-06-06 1989-06-06 Zwei- oder mehrstufige Hochvakuumpumpe

Publications (1)

Publication Number Publication Date
DE58907121D1 true DE58907121D1 (de) 1994-04-07

Family

ID=8201466

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89110196T Expired - Fee Related DE58907121D1 (de) 1989-06-06 1989-06-06 Zwei- oder mehrstufige Hochvakuumpumpe.

Country Status (3)

Country Link
US (1) US5066202A (de)
EP (1) EP0401399B1 (de)
DE (1) DE58907121D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2530765B2 (ja) * 1990-08-31 1996-09-04 株式会社神戸製鋼所 油冷式圧縮機の運転方法
GB9223804D0 (en) * 1992-11-13 1993-01-06 Boc Group Plc Improvements in vacuum pumps
DE4325281A1 (de) * 1993-07-28 1995-02-02 Leybold Ag Vakuumpumpe mit einer Gasballasteinrichtung
DE4325283A1 (de) * 1993-07-28 1995-02-02 Leybold Ag Betriebsabhängig steuerbares Ventilsystem für eine Vakuumpumpe
DE4327583A1 (de) * 1993-08-17 1995-02-23 Leybold Ag Vakuumpumpe mit Ölabscheider
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
US6695591B2 (en) * 2002-05-20 2004-02-24 Grimmer Industries, Inc. Multi-stage gas compressor system
DE10255792C5 (de) * 2002-11-28 2008-12-18 Vacuubrand Gmbh + Co Kg Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem
GB0413776D0 (en) * 2004-06-18 2004-07-21 Boc Group Plc Vacuum pump
DK2296962T3 (da) * 2008-03-10 2012-03-05 Burckhardt Compression Ag Indretning og fremgangsmåde til behandling af naturgas (LNG)
DE102013203268A1 (de) * 2013-02-27 2014-08-28 Bitzer Kühlmaschinenbau Gmbh Kältemittelverdichteranlage
IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE228603C (de) *
US2779533A (en) * 1953-12-22 1957-01-29 Leybolds Nachfolger E High-vacuum rotary oil pumps
US3395856A (en) * 1966-12-30 1968-08-06 Caterpillar Tractor Co Air compressor oil control system
GB1303430A (de) * 1969-06-12 1973-01-17
US4063855A (en) * 1976-05-03 1977-12-20 Fuller Company Compressor capacity and lubrication control system
DE2854741A1 (de) * 1978-12-19 1980-06-26 Dienes Werke Entlastungsventil fuer verdichter
US4383802A (en) * 1981-07-06 1983-05-17 Dunham-Bush, Inc. Oil equalization system for parallel connected compressors
DE3315748C2 (de) * 1983-04-30 1987-02-19 Westfalia Separator Ag, 4740 Oelde Öldosiervorrichtung für Vakuumpumpen von Melkanlagen
US4605357A (en) * 1984-06-18 1986-08-12 Ingersoll-Rand Company Lubrication system for a compressor
DE3706583A1 (de) * 1987-02-25 1988-09-08 Mannesmann Ag Verteilung der schmier- und kuehlfluessigkeit in schraubenverdichtern

Also Published As

Publication number Publication date
EP0401399B1 (de) 1994-03-02
EP0401399A1 (de) 1990-12-12
US5066202A (en) 1991-11-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee