FI894157A0 - Molekylvakuumpump. - Google Patents

Molekylvakuumpump.

Info

Publication number
FI894157A0
FI894157A0 FI894157A FI894157A FI894157A0 FI 894157 A0 FI894157 A0 FI 894157A0 FI 894157 A FI894157 A FI 894157A FI 894157 A FI894157 A FI 894157A FI 894157 A0 FI894157 A0 FI 894157A0
Authority
FI
Finland
Prior art keywords
molekylvakuumpump
Prior art date
Application number
FI894157A
Other languages
English (en)
Finnish (fi)
Inventor
Konstantin Evgenievic Demikhov
Vladimir Iliich Vikhrev
Vladimir Pavlovich Sergeev
Sergei Nikolaevich Sharshin
Valery Borisovich Sholokhov
Original Assignee
Demikhov Konstantin E
Vikhrev Vladimir I
Sergeev Vladimir P
Sharshin Sergei N
Sholokhov Valery B
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Demikhov Konstantin E, Vikhrev Vladimir I, Sergeev Vladimir P, Sharshin Sergei N, Sholokhov Valery B filed Critical Demikhov Konstantin E
Publication of FI894157A0 publication Critical patent/FI894157A0/fi

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FI894157A 1988-01-05 1989-09-04 Molekylvakuumpump. FI894157A0 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000001 WO1989006320A1 (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Publications (1)

Publication Number Publication Date
FI894157A0 true FI894157A0 (fi) 1989-09-04

Family

ID=21617173

Family Applications (1)

Application Number Title Priority Date Filing Date
FI894157A FI894157A0 (fi) 1988-01-05 1989-09-04 Molekylvakuumpump.

Country Status (6)

Country Link
JP (1) JPH02502840A (de)
DE (1) DE3891201T1 (de)
FI (1) FI894157A0 (de)
FR (1) FR2630167B1 (de)
GB (1) GB2221255B (de)
WO (1) WO1989006320A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE19846188A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626621A (en) * 1925-08-28 1927-05-03 Middendorf George Compressor for refrigerators or the like
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2244370A5 (de) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ

Also Published As

Publication number Publication date
GB2221255A (en) 1990-01-31
WO1989006320A1 (en) 1989-07-13
GB8917836D0 (en) 1989-11-01
FR2630167A1 (fr) 1989-10-20
DE3891201T1 (de) 1990-01-11
GB2221255B (en) 1991-10-16
FR2630167B1 (fr) 1990-08-31
JPH02502840A (ja) 1990-09-06

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Legal Events

Date Code Title Description
FA Application withdrawn

Owner name: DEMIKHOV, KONSTANTIN EVGENIEVICH

Owner name: SHARSHIN, SERGEI NIKOLAEVICH

Owner name: SERGEEV, VLADIMIR PAVLOVICH

Owner name: SHOLOKHOV, VALERY BORISOVICH

Owner name: VIKHREV, VLADIMIR ILIICH