EP1164294B1 - Gas friction pump - Google Patents

Gas friction pump Download PDF

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Publication number
EP1164294B1
EP1164294B1 EP20010110210 EP01110210A EP1164294B1 EP 1164294 B1 EP1164294 B1 EP 1164294B1 EP 20010110210 EP20010110210 EP 20010110210 EP 01110210 A EP01110210 A EP 01110210A EP 1164294 B1 EP1164294 B1 EP 1164294B1
Authority
EP
European Patent Office
Prior art keywords
rotor
component
gas
stator
friction pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP20010110210
Other languages
German (de)
French (fr)
Other versions
EP1164294A1 (en
Inventor
Armin Conrad
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10111546A external-priority patent/DE10111546A1/en
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1164294A1 publication Critical patent/EP1164294A1/en
Application granted granted Critical
Publication of EP1164294B1 publication Critical patent/EP1164294B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports

Definitions

  • the invention relates to a gas friction pump according to the preamble of the first claim.
  • gas friction pumps of various types are known. Their mode of operation in the molecular flow regime is based on the transmission of impulses from moving walls to the gas particles.
  • the first gas friction pump of this type was presented by Gaede. Further technical modifications while retaining the basic principle are designs by Siegbahn, Holweck and Becker. The latter is known as a turbomolecular pump and has proven successful in many areas of technology and science with great success. It is therefore used as an example for the description of the present invention.
  • the pumping speed of turbomolecular pumps is determined not only by the internal structure of the pump and the speed but also by the inlet cross-section of the intake flange.
  • the dimensions of the intake flange are through Standards are set to a few sizes. If a larger suction capacity is to be achieved with such a predetermined intake cross-section, the diameter of the disks and thus the pump-active surface can be increased. This leads to a design in which the diameter of the discs is greater than the diameter of the intake flange. It is obvious that the pumping speed is limited by the cross section of the intake flange. This acts as a flow resistance between the upper rotor disk and the recipient.
  • the object of the invention is to largely overcome this flow resistance and thus maximize the suction capacity, which is predetermined by the diameter of the upper rotor disk.
  • the modified rotor component Due to the modified rotor component, the conductance loss, which is caused by the predetermined diameter of the intake flange, is largely eliminated.
  • the gas to be pumped is fed from the recipient through the gas-conveying structure to the other, larger-diameter rotor and stator components and can be further conveyed from here without additional losses.
  • the modified rotor component can be optimally adapted to the recipient and its connection to the intake flange. This also opens up the possibility of partially projecting the rotor component beyond the intake flange into the recipient.
  • Stator components with respect to the modified rotor component can be provided with pump-active structures. As a result, the transition from smaller to larger diameter of the modified rotor component is made even more effective.
  • FIG. 1 shows a turbomolecular pump with the inventive arrangement.
  • FIGS. 2a-4b and 5 show further embodiments which are shown in section in FIGS. 2a, 3a, 4a and 5 and in the associated perspective in FIGS. 2b, 3b and 4b.
  • Fig. 1 shows a gas friction pump with the housing 1, which is provided with a suction port 2 for connecting a recipient and a gas outlet opening 3.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • the rotor components 12 are attached on the rotor shaft 4, the rotor components 12 are attached. These are provided with a pump-active structure and cause with the stator components 14, which are also provided with a pump-active structure, the pumping effect.
  • the Intake port has an inner diameter that is smaller than the outer diameter of the rotor and stator components.
  • a modified rotor component 16 is mounted according to the invention, which is shown in section in FIGS. 2a and 2b as a detail of FIG. 1 in section and perspective.
  • This rotor component is provided with a gas-promoting structure. Its radial extent increases from the intake opening in the direction of the other rotor and stator components and can finally reach their radial extent.
  • the radial expansion may increase either in stages as in Figs. 1, 2a and 2b, or continuously in conical 17 in Figs. 3a and 3b, or dome-shaped 18 in Figs. 4a and 4b. Mixed forms of the embodiments are possible.
  • a multi-part design of the modified component 19a, 19b, as in FIG. 5, can be useful for reasons of production possibilities.
  • the possibility should be mentioned that the radial extent of the modified rotor component is smaller than that of the other rotor components and remains constant in the axial direction.
  • stator components 26-29 with a pump-active structure can be attached. These stator components are formed either as individual components or as part of the housing 1.

Description

Die Erfindung betrifft eine Gasreibungspumpe nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a gas friction pump according to the preamble of the first claim.

Zur Förderung von Gasen sind Gasreibungspumpen der verschiedensten Bauarten bekannt. Ihre Arbeitsweise im molekularen Strömungsbereich beruht auf der Übertragung von Impulsen von bewegten Wänden auf die Gasteilchen. Die erste Gasreibungspumpe dieser Art wurde von Gaede vorgestellt. Weitere technische Abwandlungen unter Beibehaltung des Grundprinzips sind Konstruktionen von Siegbahn, Holweck und Becker. Letztere ist als Turbomolekularpumpe bekannt und hat sich in weiten Bereichen der Technik und Wissenschaft mit großem Erfolg bewährt. Sie wird daher für die Beschreibung der vorliegenden Erfindung als Beispiel herangezogen.For the promotion of gases gas friction pumps of various types are known. Their mode of operation in the molecular flow regime is based on the transmission of impulses from moving walls to the gas particles. The first gas friction pump of this type was presented by Gaede. Further technical modifications while retaining the basic principle are designs by Siegbahn, Holweck and Becker. The latter is known as a turbomolecular pump and has proven successful in many areas of technology and science with great success. It is therefore used as an example for the description of the present invention.

Die im folgenden beschriebenen Nachteile der bisher bekannten Pumpen und die Beseitigung der Nachteile im Rahmen der Erfindung treffen genauso gut für andere Gasreibungspumpen zu.The disadvantages described below of the previously known pumps and the elimination of the disadvantages in the context of the invention apply equally well to other gas friction pumps.

Das Saugvermögen von Turbomolekularpumpen wird neben der inneren Struktur der Pumpe und der Drehzahl auch wesentlich durch den Eingangsquerschnitt des Ansaugflansches bestimmt. Die Dimensionen des Ansaugflansches werden durch Normvorschriften auf einige wenige Größen festgelegt. Soll bei einem so vorgegebenen Ansaugquerschnitt ein größeres Saugvermögen erreicht werden, kann der Durchmesser der Scheiben und somit die pumpaktive Fläche vergrößert werden. Dies führt zu einer Bauform, bei der der Durchmesser der Scheiben größer ist als der Durchmesser des Ansaugflansches. Es ist offensichtlich, dass das Saugvermögen hierbei durch den Querschnitt des Ansaugflansches begrenzt wird. Dieser wirkt wie ein Strömungswiderstand zwischen oberster Rotorscheibe und Rezipient.The pumping speed of turbomolecular pumps is determined not only by the internal structure of the pump and the speed but also by the inlet cross-section of the intake flange. The dimensions of the intake flange are through Standards are set to a few sizes. If a larger suction capacity is to be achieved with such a predetermined intake cross-section, the diameter of the disks and thus the pump-active surface can be increased. This leads to a design in which the diameter of the discs is greater than the diameter of the intake flange. It is obvious that the pumping speed is limited by the cross section of the intake flange. This acts as a flow resistance between the upper rotor disk and the recipient.

Die Aufgabe der Erfindung besteht darin, diesen Strömungswiderstand weitgehend zu überwinden und so das Saugvermögen, welches durch den Durchmesser der oberen Rotorscheibe vorgegeben ist, maximal auszunutzen.The object of the invention is to largely overcome this flow resistance and thus maximize the suction capacity, which is predetermined by the diameter of the upper rotor disk.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Schutzanspruches gelöst. Die Ansprüche 2 bis 11 stellen weitere Ausgestaltungsformen der Erfindung dar.The problem is solved by the characterizing features of the first protection claim. The claims 2 to 11 represent further embodiments of the invention.

Durch das abgewandelte Rotorbauteil wird der Leitwertverlust, welcher durch den vorgegebenen Durchmesser des Ansaugflansches bewirkt wird, weitgehend beseitigt. Das abzupumpende Gas wird vom Rezipienten aus durch die gasfördernde Struktur den übrigen, mit größerem Durchmesser ausgestatteten Rotor- und Statorbauteile zugeführt und kann von hier aus ohne zusätzliche Verluste weiter gefördert werden. Durch die in den Unteransprüchen beschriebenen unterschiedlichen Ausgestaltungsformen kann das abgewandelte Rotorbauteil optimal an den Rezipienten und dessen Verbindung mit dem Ansaugflansch angepasst werden. Dies eröffnet auch die Möglichkeit, das Rotorbauteil teilweise über den Ansaugflansch hinaus in den Rezipienten hineinragen zu lassen.Due to the modified rotor component, the conductance loss, which is caused by the predetermined diameter of the intake flange, is largely eliminated. The gas to be pumped is fed from the recipient through the gas-conveying structure to the other, larger-diameter rotor and stator components and can be further conveyed from here without additional losses. By the described in the dependent claims different Embodiments, the modified rotor component can be optimally adapted to the recipient and its connection to the intake flange. This also opens up the possibility of partially projecting the rotor component beyond the intake flange into the recipient.

Statorbauteile gegenüber dem abgewandelten Rotorbauteil können mit pumpaktiven Strukturen versehen sein. Dadurch wird der Übergang vom kleineren zum größeren Durchmesser des abgewandelten Rotorbauteils noch wirkungsvoller gestaltet.Stator components with respect to the modified rotor component can be provided with pump-active structures. As a result, the transition from smaller to larger diameter of the modified rotor component is made even more effective.

Anhand der Figuren 1 bis 5 soll die Erfindung näher erläutert werden.Reference to the figures 1 to 5, the invention will be explained in more detail.

Fig. 1 zeigt eine Turbomolekularpumpe mit der erfindungsgemäßen Anordnung. Die Fig. 2a - 4b und 5 zeigen weitere Ausgestaltungsformen, die in den Fig. 2a, 3a, 4a und 5 im Schnitt und in den Fig. 2b, 3b und 4b in der jeweils zugehörigen Perspektive dargestellt sind.Fig. 1 shows a turbomolecular pump with the inventive arrangement. FIGS. 2a-4b and 5 show further embodiments which are shown in section in FIGS. 2a, 3a, 4a and 5 and in the associated perspective in FIGS. 2b, 3b and 4b.

Fig. 1 zeigt eine Gasreibungspumpe mit dem Gehäuse 1, welches mit einer Ansaugöffnung 2 zum Anschluss eines Rezipienten und einer Gasaustrittsöffnung 3 versehen ist. Die Rotorwelle 4 ist in Lagern 5 und 6 fixiert und wird durch den Motor 7 angetrieben. Auf der Rotorwelle 4 sind die Rotorbauteile 12 befestigt. Diese sind mit einer pumpaktiven Struktur versehen und bewirken mit den Statorbauteilen 14, welche ebenfalls mit einer pumpaktiven Struktur versehen sind, den Pumpeffekt. Die Ansaugöffnung hat einen Innendurchmesser, der kleiner ist als der Außendurchmesser der Rotor- und Statorbauteile.Fig. 1 shows a gas friction pump with the housing 1, which is provided with a suction port 2 for connecting a recipient and a gas outlet opening 3. The rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7. On the rotor shaft 4, the rotor components 12 are attached. These are provided with a pump-active structure and cause with the stator components 14, which are also provided with a pump-active structure, the pumping effect. The Intake port has an inner diameter that is smaller than the outer diameter of the rotor and stator components.

Auf der Seite der Ansaugöffnung ist erfindungsgemäß ein abgewandeltes Rotorbauteil 16 angebracht, welches in den Fig. 2a und 2b als Ausschnitt aus Fig. 1 in Schnitt und Perspektive dargestellt. Dieses Rotorbauteil ist mit einer gasfördernden Struktur versehen. Seine radiale Ausdehnung nimmt von der Ansaugöffnung aus in Richtung der übrigen Rotor- und Statorbauteile zu und kann schließlich deren radiale Ausdehnung erreichen. Bei den verschiedenen Ausführungsformen kann die radiale Ausdehnung entweder in Stufen, wie in den Fig. 1, 2a und 2b oder kontinuierlich in konischer 17 in den Fig. 3a und 3b oder kuppelförmiger 18 in den Fig. 4a und 4b Bauweise zunehmen. Auch Mischformen der Ausführungsarten sind möglich. Eine mehrteilige Ausführung des abgewandelten Bauteiles 19a, 19b wie in Fig. 5, kann aus Gründen der Fertigungsmöglichkeiten sinnvoll sein.
Schließlich soll noch die Möglichkeit erwähnt werden, dass die radiale Ausdehnung des abgewandelten Rotorbauteils kleiner ist als die der übrigen Rotorbauteile und in axialer Richtung konstant bleibt.On the side of the suction opening, a modified rotor component 16 is mounted according to the invention, which is shown in section in FIGS. 2a and 2b as a detail of FIG. 1 in section and perspective. This rotor component is provided with a gas-promoting structure. Its radial extent increases from the intake opening in the direction of the other rotor and stator components and can finally reach their radial extent. In the various embodiments, the radial expansion may increase either in stages as in Figs. 1, 2a and 2b, or continuously in conical 17 in Figs. 3a and 3b, or dome-shaped 18 in Figs. 4a and 4b. Mixed forms of the embodiments are possible. A multi-part design of the modified component 19a, 19b, as in FIG. 5, can be useful for reasons of production possibilities.
Finally, the possibility should be mentioned that the radial extent of the modified rotor component is smaller than that of the other rotor components and remains constant in the axial direction.

Gegenüber den abgewandelten Rotorbauteil können Statorbauteile 26 - 29 mit pumpaktiver Struktur angebracht sein. Diese Statorbauteile werden entweder als Einzelbauteile oder als Teil des Gehäuses 1 ausgebildet.Compared with the modified rotor component, stator components 26-29 with a pump-active structure can be attached. These stator components are formed either as individual components or as part of the housing 1.

Claims (11)

  1. A gas friction pump comprising a housing (1) with a suction aperture (2) for connecting a vessel and a gas outlet (3), wherein rotor-(12) and stator-components (14) with a pumping action for delivering gases and producing a pressure ratio are located in the housing, and the inside diameter of the suction aperture (2) is smaller than the diameter of the rotor- and stator-components with a pumping action, characterised in that a modified rotor component (16, 17, 18, 19a, 19b) with a gas-delivering structure is provided at the suction aperture (2) side, its radial extent increasing from the suction aperture towards the other rotor- and stator-components.
  2. A gas friction pump according to claim 1, characterised in that the radial extent of the modified rotor-component increases in steps.
  3. A gas friction pump according to claim 1, characterised in that the radial extent of the modified rotor-component increases continuously.
  4. A gas friction pump according to any one of claims 1-3, characterised in that all or part of the modified rotor-component has a conical shape.
  5. A gas friction pump according to claims 1-3, characterised in that all or part of the rotor-component has a dome shape.
  6. A gas friction pump according to one of the preceding claims, characterised in that the radial extent of the modified rotor-component corresponds to the radial extent of the other rotor-components at the side facing towards the stator-component.
  7. A gas friction pump according to one of the preceding claims, characterised in that part of the modified rotor- component projects beyond the suction aperture into the vessel.
  8. A gas friction pump according to one of the preceding claims, characterised in that the modified rotor-component comprises a plurality of parts.
  9. A gas friction pump comprising a housing (1) with a suction aperture (2) for connecting a vessel and a gas outlet (3),), wherein rotor-(12) and stator-components (14) with a pumping action for delivering gases and producing a pressure ratio are located in the housing, and the inside diameter of the suction aperture (2) is smaller than the diameter of the rotor- and stator-components with a pumping action, characterised in that a modified rotor-component with a gas-delivering structure is provided at the suction aperture (2) side, its radial extent being smaller than that of the other rotor- and stator-components.
  10. A gas friction pump according to one of the preceding claims, characterised in that a stator-component (26, 27, 28, 29) of a structure with a pumping action is located opposite the modified rotor-component.
  11. A gas friction pump according to claim 10, characterised in that the stator-component (26, 27, 28, 29) forms part of the housing (1).
EP20010110210 2000-05-15 2001-04-25 Gas friction pump Expired - Lifetime EP1164294B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10023799 2000-05-15
DE10023799 2000-05-15
DE10111546 2001-03-10
DE10111546A DE10111546A1 (en) 2000-05-15 2001-03-10 Gas friction pump

Publications (2)

Publication Number Publication Date
EP1164294A1 EP1164294A1 (en) 2001-12-19
EP1164294B1 true EP1164294B1 (en) 2003-09-10

Family

ID=26005688

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010110210 Expired - Lifetime EP1164294B1 (en) 2000-05-15 2001-04-25 Gas friction pump

Country Status (2)

Country Link
EP (1) EP1164294B1 (en)
JP (1) JP5149472B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10208795A1 (en) * 2002-02-28 2003-09-04 Pfeiffer Vacuum Gmbh Machine with a fast rotating rotor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2757599A1 (en) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Rotary molecular pump with bladed rotor and stator - reduces rotor and=or stator temp. to improve compression ratio and=or suction
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
JPS6214198U (en) * 1985-07-10 1987-01-28
JPS62168994A (en) * 1985-12-26 1987-07-25 Morihiko Kimata High vacuum exhaust device
JPS6456597U (en) * 1987-10-05 1989-04-07
JPH02153294A (en) * 1988-12-05 1990-06-12 Nippon Soken Inc Variable capacity type vacuum pump
EP0408791B1 (en) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Drag pump with a bell-shaped rotor
DE4216237A1 (en) * 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
WO1994000694A1 (en) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gas friction vacuum pump
DE19634095A1 (en) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Entry stage for a double-flow gas friction pump
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
JP3961155B2 (en) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 Vacuum pump

Also Published As

Publication number Publication date
JP5149472B2 (en) 2013-02-20
JP2002005079A (en) 2002-01-09
EP1164294A1 (en) 2001-12-19

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