EP1441128A2 - Vacuum pump system - Google Patents

Vacuum pump system Download PDF

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Publication number
EP1441128A2
EP1441128A2 EP03028333A EP03028333A EP1441128A2 EP 1441128 A2 EP1441128 A2 EP 1441128A2 EP 03028333 A EP03028333 A EP 03028333A EP 03028333 A EP03028333 A EP 03028333A EP 1441128 A2 EP1441128 A2 EP 1441128A2
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EP
European Patent Office
Prior art keywords
pump
vacuum pump
pumps
high vacuum
pump system
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Application number
EP03028333A
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German (de)
French (fr)
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EP1441128A3 (en
EP1441128B1 (en
Inventor
Armin Conrad
Peter Fahrenbach
Matthias Mädler
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Definitions

  • the invention relates to a vacuum pump system for conveying light gases at least one high vacuum pump.
  • Pump systems for evacuating a recipient consist, for example, of a turbomolecular pump on the high vacuum side and one or more forevacuum pumps for further delivery and for compression to atmospheric pressure of the gases compressed by the turbomolecular pump.
  • These backing pumps can consist, for example, of a combination of a Roots pump and a rotary vane pump or a dry-compressing, atmosphere-emitting pump (DE-OS 38 28 608).
  • Pump systems of this type are suitable for conveying and compressing gases with medium and higher molecular weights (for example N 2 , O 2 , Ar). In contrast, they are less suitable for pumping light gases (e.g. H 2 , He), especially when it comes to pumping large amounts of gas. In these cases, several high-vacuum pumps are often used on the high-vacuum side to draw in the resulting gases.
  • a carrier gas is often used to transport light gases improve. This solution is also associated with great effort. moreover In these cases, measures have to be taken to get the gases back separate. In addition, the backing pressure and thus the pump properties of the entire system deteriorated again by the carrier gas become.
  • the backing system is at a greater distance from the gas connection part the high vacuum pump attached so that at this point still there is a big loss of conductance.
  • the invention has for its object to design a pump system which is suitable for pumping large quantities of gas, the main components of which are light gases.
  • Existing pump systems are supposed to take simple measures can be converted into pump systems suitable for the task.
  • the solution is to increase compression and pumping speed in the Pre-vacuum. This increase is made possible by the provision of an additional one Pump, hereinafter referred to as the intermediate pump, between the gas discharge side the high vacuum pump and the suction side of the forevacuum system. It is important according to the invention that this intermediate pump is direct connected to the discharge side of the high-vacuum pump without any major loss of conductivity becomes.
  • the intermediate pump is direct connected to the discharge side of the high-vacuum pump without any major loss of conductivity becomes.
  • one or more intermediate pumps can be provided his. If several intermediate pumps are provided, these will be in series and / or connected in parallel.
  • a molecular pump is proposed as the pump type, including a side channel pump, which works in the same pressure range is to be counted.
  • the Molecular pump is with a preferred embodiment as a turbomolecular pump educated.
  • the pumping speed of the at least one intermediate pump should advantageously be in the Magnitude of the pumping speed of the at least one high vacuum pump lie or amount to at least 50% of it.
  • the compression for light gases of such a pump is sufficiently high to ensure that the high vacuum pump output Compressed gas volume and can be further promoted without loss.
  • Another Improvement in conductivity and thus an increase in gas throughput in that the at least one intermediate pump directly on the discharge side the high vacuum pump is connected.
  • a pump system which is suitable for large amounts of gas, mainly from light gases consist of pumping more effectively and compressing to atmospheric pressure. It there is even a disproportionate increase in the pumping speed on the High vacuum side.
  • a particular advantage of the vacuum pump system according to the invention is that the pump system is compatible with conventional systems that means they can be used to pump larger quantities of light gases without great effort to be converted.
  • the intake system and that entire forevacuum system can be used unchanged.
  • the use a molecular pump as an intermediate pump also claimed little space, so that a compact system is created, which is simple Modification in a wide pressure range can be used effectively for all gases.
  • FIG. 1 shows a vacuum pump system (1).
  • two high vacuum pumps (3, 4) preferably turbomolecular pumps, arranged.
  • a forevacuum system consisting of two forevacuum pumps (8, 9), conveys and compresses the pumped gases to atmospheric pressure.
  • the invention is located between the high vacuum pumps (3, 4) and the forevacuum system (8, 9) another intermediate pump (6), which is located directly at the gas outlet (7) the high vacuum pump (3, 4) is connected.
  • the intermediate pump (6) serves the amount of gas pumped by the high vacuum pumps (3, 4) without losses to the forevacuum system (8, 9).
  • the forevacuum pump system is on an outlet side (5) of the intermediate pump (6) (8, 9) arranged. Between the intermediate pump (6) and the forevacuum pumps (8, 9) can be a longer distance.
  • Fig. 2 shows a vacuum pump system (10).
  • At the recipient (2) are again two turbomolecular pumps (3, 4) arranged.
  • Directly and without further Conductivity losses are the turbomolecular pumps (3, 4) on an outlet side (11) two intermediate pumps (12, 13) downstream.
  • the intermediate pumps (12, 13) are connected in parallel to increase the pumping speed.
  • the forevacuum system (8, 9) is arranged as in Fig. 1, the intermediate pumps (12, 13).
  • Fig. 3 shows a vacuum pump system (14) with a recipient (2) on which two turbomolecular pumps (3, 4) are arranged.
  • the turbomolecular pumps (3, 4) are intermediate pumps without any significant loss of conductivity (16, 17) downstream.
  • the intermediate pumps are used to increase the compression (16, 17) connected in series.
  • Figs. 1 and 2 is the system from the intermediate pumps (16, 17) the forevacuum system (8, 9) downstream.

Abstract

The vacuum pump system (1) includes at least one high vacuum pump (3, 4). It has at least one intermediate pump (6) fitted directly and with low conductance loss on the ejection side of the high vacuum pump. There may be several intermediate pumps, which may be arranged in series or in parallel. At least one of them may have a suction capacity at least 50% that of the high vacuum pump.

Description

Die Erfindung betrifft ein Vakuumpumpsystem zur Förderung leichter Gase mit wenigstens einer Hochvakuumpumpe.The invention relates to a vacuum pump system for conveying light gases at least one high vacuum pump.

Pumpsysteme zur Evakuierung eines Rezipienten bestehen zum Beispiel aus einer Turbomolekularpumpe auf der Hochvakuumseite und aus einer oder mehreren Vorvakuumpumpen zur Weiterförderung und zum Verdichten auf Atmosphärendruck der von der Turbomolekularpumpe komprimierten Gase. Diese Vorvakuumpumpen können zum Beispiel eine Kombination aus einer Wälzkolbenpumpe und einer Drehschieberpumpe oder einer trocken verdichtenden, gegen Atmosphäre ausstoßenden Pumpe bestehen (DE-OS 38 28 608). Solche Pumpsysteme sind geeignet zur Förderung und zum Komprimieren von Gasen mit mittleren und höheren Molekulargewichten (zum Beispiel N2, O2, Ar). Zum Pumpen von leichten Gasen (z. B. H2, He) sind sie dagegen weniger tauglich, insbesondere, wenn es darum geht, große Gasmengen zu fördern. In diesen Fällen werden auf der Hochvakuumseite oft mehrere Hochvakuumpumpen zum Ansaugen der anfallenden Gase eingesetzt.Pump systems for evacuating a recipient consist, for example, of a turbomolecular pump on the high vacuum side and one or more forevacuum pumps for further delivery and for compression to atmospheric pressure of the gases compressed by the turbomolecular pump. These backing pumps can consist, for example, of a combination of a Roots pump and a rotary vane pump or a dry-compressing, atmosphere-emitting pump (DE-OS 38 28 608). Pump systems of this type are suitable for conveying and compressing gases with medium and higher molecular weights (for example N 2 , O 2 , Ar). In contrast, they are less suitable for pumping light gases (e.g. H 2 , He), especially when it comes to pumping large amounts of gas. In these cases, several high-vacuum pumps are often used on the high-vacuum side to draw in the resulting gases.

Die herkömmlichen Vorvakuumsysteme sind nicht in der Lage, die auf der Gasausstoßseite der Hochvakuumpumpe anfallenden großen Gasmengen aufzunehmen. Die seither verwendeten Vorpumpen sind äußerst schlecht für das Pumpen von leichten Gasen geeignet. Wälzkolbenpumpen haben nur eine geringe Kompression, und Drehschieberpumpen sind nicht ölfrei. Sie müssten mit einer Kühlfalle ausgestattet sein, in welcher die Ölteile kondensieren. Dies bedeutet einen großen Aufwand und kompliziert das Pumpsystem.The conventional forevacuum systems are not able to operate on the Large gas quantities arising from the gas discharge side of the high vacuum pump. The backing pumps used since then are extremely bad for that Suitable for pumping light gases. Roots pumps have only a small number Compression and rotary vane pumps are not oil-free. You would have to be equipped with a cold trap in which the oil parts condense. this means a great effort and complicates the pumping system.

Oft wird ein Trägergas eingesetzt, um den Transport von leichten Gasen zu verbessern. Auch diese Lösung ist mit großem Aufwand verbunden. Zudem müssen in diesen Fällen Maßnahmen ergriffen werden, um die Gase wieder zu trennen. Dazu kommt, dass der Vorvakuumdruck und damit die Pumpeigenschaften des gesamten Systems durch das Trägergas wieder verschlechtert werden.A carrier gas is often used to transport light gases improve. This solution is also associated with great effort. moreover In these cases, measures have to be taken to get the gases back separate. In addition, the backing pressure and thus the pump properties of the entire system deteriorated again by the carrier gas become.

In vielen Fällen ist das Vorvakuumsystem in größerer Entfernung vom Gasanschlussteil der Hochvakuumpumpe angebracht, so dass an dieser Stelle noch ein großer Leitwertverlust hinzukommt.In many cases, the backing system is at a greater distance from the gas connection part the high vacuum pump attached so that at this point still there is a big loss of conductance.

Der Erfindung liegt die Aufgabe zugrunde, ein Pumpsystem zu entwerfen, welches geeignet ist, große Gasmengen zu pumpen, deren Hauptbestandteile leichte Gase sind. Bestehende Pumpsysteme sollen durch einfache Maßnahmen in für die Aufgabe geeignete Pumpsysteme umgewandelt werden können.The invention has for its object to design a pump system which is suitable for pumping large quantities of gas, the main components of which are light gases. Existing pump systems are supposed to take simple measures can be converted into pump systems suitable for the task.

Diese Aufgabe wird durch ein Vakuumpumpsystem mit den Merkmalen gemäß Anspruch 1 gelöst.This task is performed by a vacuum pump system with the features according to Claim 1 solved.

Die Lösung besteht in einer Erhöhung von Kompression und Saugvermögen im Vorvakuumbereich. Diese Erhöhung wird durch Vorsehen einer zusätzlichen Pumpe, im Folgenden Zwischenpumpe genannt, zwischen der Gasausstoßseite der Hochvakuumpumpe und der Ansaugseite des Vorvakuumsystems erreicht. Dabei ist es erfindungsgemäß wichtig, dass diese Zwischenpumpe direkt ohne großen Leitwertverlust an die Ausstoßseite der Hochvakuumpumpe angeschlossen wird.The solution is to increase compression and pumping speed in the Pre-vacuum. This increase is made possible by the provision of an additional one Pump, hereinafter referred to as the intermediate pump, between the gas discharge side the high vacuum pump and the suction side of the forevacuum system. It is important according to the invention that this intermediate pump is direct connected to the discharge side of the high-vacuum pump without any major loss of conductivity becomes.

Gemäß der Erfindung können eine oder mehrere Zwischenpumpen vorgesehen sein. Sind mehrere Zwischenpumpen vorgesehen, werden diese in Serie und/oder parallel geschaltet.According to the invention, one or more intermediate pumps can be provided his. If several intermediate pumps are provided, these will be in series and / or connected in parallel.

Als Pumpentyp wird eine Molekularpumpe vorgeschlagen, wozu auch eine Seitenkanalpumpe, welche im gleichen Druckbereich arbeitet, zu zählen ist. Die Molekularpumpe ist mit einer bevorzugten Ausführungsform als Turbomolekularpumpe ausgebildet.A molecular pump is proposed as the pump type, including a side channel pump, which works in the same pressure range is to be counted. The Molecular pump is with a preferred embodiment as a turbomolecular pump educated.

Das Saugvermögen der wenigstens einen Zwischenpumpe soll vorteilhaft in der Größenordnung des Saugvermögens der wenigstens einen Hochvakuumpumpe liegen oder mindestens 50 % davon betragen.The pumping speed of the at least one intermediate pump should advantageously be in the Magnitude of the pumping speed of the at least one high vacuum pump lie or amount to at least 50% of it.

Die Kompression für leichte Gase einer solchen Pumpe ist ausreichend hoch, um zu gewährleisten, dass die am Ausstoß der Hochvakuumpumpe anfallende Gasmenge verdichtet und ohne Verlust weiter gefördert werden kann. Eine weitere Leitwertverbesserung und damit eine Steigerung des Gasdurchsatzes erfolgt dadurch, dass die wenigstens eine Zwischenpumpe direkt an der Austoßseite der Hochvakuumpumpe angeschlossen ist. The compression for light gases of such a pump is sufficiently high to ensure that the high vacuum pump output Compressed gas volume and can be further promoted without loss. Another Improvement in conductivity and thus an increase in gas throughput in that the at least one intermediate pump directly on the discharge side the high vacuum pump is connected.

Mit der erfindungsgemäßen Anordnung wird ein Pumpsystem bereitgestellt, welches geeignet ist, große Gasmengen, die hauptsächlich aus leichten Gasen bestehen, effektiver zu pumpen und auf Atmosphärendruck zu verdichten. Es ergibt sich sogar eine überproportionale Erhöhung des Saugvermögens auf der Hochvakuumseite.With the arrangement according to the invention, a pump system is provided, which is suitable for large amounts of gas, mainly from light gases consist of pumping more effectively and compressing to atmospheric pressure. It there is even a disproportionate increase in the pumping speed on the High vacuum side.

Ein besonderer Vorteil des erfindungsgemäßen Vakuumpumpsystems liegt darin, dass das Pumpsystem kompatibel ist mit herkömmlichen Systemen, das heißt, diese können zum Pumpen von größeren Mengen leichter Gase ohne großen Aufwand umgerüstet werden. Dabei kann das Ansaugsystem und das gesamte Vorvakuumsystem unverändert weiterverwendet werden. Die Vewendung einer Molekularpumpe als Zwischenpumpe beansprucht darüber hinaus wenig Platz, so dass ein kompaktes System entsteht, welches durch einfache Modifikation in weitem Druckbereich für alle Gase wirkungsvoll einsetzbar ist.A particular advantage of the vacuum pump system according to the invention is that that the pump system is compatible with conventional systems that means they can be used to pump larger quantities of light gases without great effort to be converted. The intake system and that entire forevacuum system can be used unchanged. The use a molecular pump as an intermediate pump also claimed little space, so that a compact system is created, which is simple Modification in a wide pressure range can be used effectively for all gases.

In der Zeichnung ist ein Ausführungsbeispiel der Erfindung dargestellt, und zwar zeigen:

Fig. 1
ein erfindungsgemäßes Vakuumpumpsystem mit einer Zwischenpumpe;
Fig. 2
ein Vakuumpumpsystem mit zwei parallel geschalteten Zwischenpumpen;
Fig. 3
ein Vakuumpumpsystem mit zwei in Serie geschalteten Zwischenpumpen.
An exemplary embodiment of the invention is shown in the drawing, namely:
Fig. 1
an inventive vacuum pump system with an intermediate pump;
Fig. 2
a vacuum pump system with two intermediate pumps connected in parallel;
Fig. 3
a vacuum pump system with two intermediate pumps connected in series.

Die Fig. 1 zeigt ein Vakuumpumpsystem (1). An einem Rezipienten (2) sind zwei Hochvakuumpumpen (3, 4), vorzugsweise Turbomolekularpumpen, angeordnet. Ein Vorvakuumsystem, bestehend aus zwei Vorvakuumpumpen (8, 9), fördert und verdichtet die gepumpten Gase auf Atmosphärendruck. Erfindungsgemäß befindet sich zwischen den Hochvakuumpumpen (3, 4) und dem Vorvakuumsystem (8, 9) eine weitere Zwischenpumpe (6), welche direkt am Gasauslass (7) der Hochvakuumpumpen (3, 4) angeschlossen ist. Die Zwischenpumpe (6) dient dazu, die von den Hochvakuumpumpen (3, 4) geförderte Gasmenge ohne Verluste dem Vorvakuumsystem (8, 9) zuzuführen.1 shows a vacuum pump system (1). At a recipient (2) two high vacuum pumps (3, 4), preferably turbomolecular pumps, arranged. A forevacuum system consisting of two forevacuum pumps (8, 9), conveys and compresses the pumped gases to atmospheric pressure. According to the invention is located between the high vacuum pumps (3, 4) and the forevacuum system (8, 9) another intermediate pump (6), which is located directly at the gas outlet (7) the high vacuum pump (3, 4) is connected. The intermediate pump (6) serves the amount of gas pumped by the high vacuum pumps (3, 4) without losses to the forevacuum system (8, 9).

An einer Auslassseite (5) der Zwischenpumpe (6) ist das Vorvakuumpumpsystem (8, 9) angeordnet. Zwischen der Zwischenpumpe (6) und den Vorvakuumpumpen (8, 9) kann eine größere Wegstrecke liegen.The forevacuum pump system is on an outlet side (5) of the intermediate pump (6) (8, 9) arranged. Between the intermediate pump (6) and the forevacuum pumps (8, 9) can be a longer distance.

Fig. 2 zeigt ein Vakuumpumpsystem (10). An dem Rezipienten (2) sind wiederum zwei Turbomolekularpumpen (3, 4) angeordnet. Direkt und ohne weitere Leitwertverluste sind den Turbomolekularpumpen (3, 4) an einer Auslassseite (11) zwei Zwischenpumpen (12, 13) nachgeordnet. Die Zwischenpumpen (12, 13) sind zur Erhöhung des Saugvermögens parallel geschaltet. Das Vorvakuumsystem (8, 9) ist wie in Fig. 1 den Zwischenpumpen (12, 13) nachgeordnet.Fig. 2 shows a vacuum pump system (10). At the recipient (2) are again two turbomolecular pumps (3, 4) arranged. Directly and without further Conductivity losses are the turbomolecular pumps (3, 4) on an outlet side (11) two intermediate pumps (12, 13) downstream. The intermediate pumps (12, 13) are connected in parallel to increase the pumping speed. The forevacuum system (8, 9) is arranged as in Fig. 1, the intermediate pumps (12, 13).

Fig. 3 zeigt ein Vakuumpumpsystem (14) mit einem Rezipienten (2), an dem zwei Turbomolekularpumpen (3, 4) angeordnet sind. Den Turbomolekularpumpen (3, 4) sind direkt und ohne nennenswerte Leitwertverluste Zwischenpumpen (16, 17) nachgeschaltet. Zur Erhöhung der Kompression sind die Zwischenpumpen (16, 17) in Serie geschaltet. Wie in den Fig. 1 und 2 gezeigt, ist dem System aus den Zwischenpumpen (16, 17) das Vorvakuumsystem (8, 9) nachgeschaltet. Fig. 3 shows a vacuum pump system (14) with a recipient (2) on which two turbomolecular pumps (3, 4) are arranged. The turbomolecular pumps (3, 4) are intermediate pumps without any significant loss of conductivity (16, 17) downstream. The intermediate pumps are used to increase the compression (16, 17) connected in series. As shown in Figs. 1 and 2, is the system from the intermediate pumps (16, 17) the forevacuum system (8, 9) downstream.

Bezugszahlenreference numerals

11
VakuumpumpsystemVacuum pumping system
22
Rezipientrecipient
3, 43, 4
Hochvakuumpumpenhigh vacuum pumps
55
Auslassseiteoutlet
66
Zwischenpumpebetween the pump
77
Gasauslassgas outlet
8, 98, 9
VorvakuumsystemVorvakuumsystem
1010
VakuumpumpsystemVacuum pumping system
1111
Auslassseiteoutlet
12, 1312, 13
Zwischenpumpebetween the pump
1414
VakuumpumpsystemVacuum pumping system
16, 1716, 17
Zwischenpumpenbetween the pump

Claims (4)

Vakuumpumpsystem zur Förderung von Gasen, insbesondere von Gasgemischen mit hohem Anteil leichter Gase, mit wenigstens einer Hochvakuumpumpe, dadurch gekennzeichnet, dass an einer Ausstoßseite (7) der wenigstens einen Hochvakuumpumpe (3, 4) wenigstens eine Zwischenpumpe (6; 12, 13; 16, 17) direkt und mit einem geringen Leitwertverlust angeordnet ist.Vacuum pump system for conveying gases, in particular gas mixtures with a high proportion of light gases, with at least one high vacuum pump, characterized in that at least one intermediate pump (6; 12, 13; 16 , 17) is arranged directly and with a small loss of conductance. Vakuumpumpsystem nach Anspruch 1, dadurch gekennzeichnet, dass mehrere Zwischenpumpen (12, 13; 16, 17) in Serie und/oder parallel geschaltet vorgesehen sind.Vacuum pump system according to claim 1, characterized in that several intermediate pumps (12, 13; 16, 17) are provided connected in series and / or in parallel. Vakuumpumpsystem nach Anspruch 1, dadurch gekennzeichnet, dass die wenigstens eine Zwischenpumpe (6; 12, 13; 16, 17) ein Saugvermögen aufweist, das mindestens 50 % des Saugvermögens der wenigstens einen Hochvakuumpumpe (3, 4) entspricht.Vacuum pump system according to claim 1, characterized in that the at least one intermediate pump (6; 12, 13; 16, 17) has a pumping speed which corresponds to at least 50% of the pumping speed of the at least one high vacuum pump (3, 4). Vakuumpumpsystem nach Anspruch 1, dadurch gekennzeichnet, dass als Zwischenpumpe (6; 12, 13; 16, 17) eine Molekularpumpe, insbesondere eine Turbomolekularpumpe vorgesehen ist.Vacuum pump system according to claim 1, characterized in that a molecular pump, in particular a turbomolecular pump, is provided as the intermediate pump (6; 12, 13; 16, 17).
EP03028333A 2003-01-24 2003-12-10 Vacuum pump system Expired - Lifetime EP1441128B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10302764A DE10302764A1 (en) 2003-01-24 2003-01-24 Vacuum pumping system
DE10302764 2003-01-24

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EP1441128A2 true EP1441128A2 (en) 2004-07-28
EP1441128A3 EP1441128A3 (en) 2004-09-01
EP1441128B1 EP1441128B1 (en) 2008-03-26

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US (1) US7033142B2 (en)
EP (1) EP1441128B1 (en)
AT (1) ATE390561T1 (en)
DE (2) DE10302764A1 (en)

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Also Published As

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US20040146410A1 (en) 2004-07-29
EP1441128A3 (en) 2004-09-01
DE50309460D1 (en) 2008-05-08
EP1441128B1 (en) 2008-03-26
DE10302764A1 (en) 2004-07-29
US7033142B2 (en) 2006-04-25
ATE390561T1 (en) 2008-04-15

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