EP1441128B1 - Vacuum pump system - Google Patents

Vacuum pump system Download PDF

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Publication number
EP1441128B1
EP1441128B1 EP03028333A EP03028333A EP1441128B1 EP 1441128 B1 EP1441128 B1 EP 1441128B1 EP 03028333 A EP03028333 A EP 03028333A EP 03028333 A EP03028333 A EP 03028333A EP 1441128 B1 EP1441128 B1 EP 1441128B1
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EP
European Patent Office
Prior art keywords
pump
vacuum pump
vacuum
pumps
pumping
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EP03028333A
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German (de)
French (fr)
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EP1441128A2 (en
EP1441128A3 (en
Inventor
Armin Conrad
Peter Fahrenbach
Matthias Mädler
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Definitions

  • the invention relates to a vacuum pumping system for conveying light gases with at least one high vacuum pump.
  • Pump systems for evacuating a recipient consist, for example, of a turbomolecular pump on the high-vacuum side and of one or more backing pumps for further conveying and for compressing to atmospheric pressure of the gases compressed by the turbomolecular pump.
  • These backing pumps may be, for example, a combination of a Roots pump and a rotary vane pump or a dry-compressing, anti-atmosphere pump.
  • the DE-OS 38 28 608 shows such a vacuum pumping station, which is composed of a molecular pump, a Roots pump and a mechanical, the atmosphere-compressing vacuum pump. In order to control the pumping speed of the arrangement, it is proposed to equip the Roots pump with means for controlling the speed.
  • Such pumping systems are suitable for conveying and compressing medium and high molecular weight gases (for example, N 2 , O 2 , Ar).
  • medium and high molecular weight gases for example, N 2 , O 2 , Ar.
  • they are less suitable for pumping light gases (eg H 2 , He), especially when it comes to conveying large quantities of gas.
  • light gases eg H 2 , He
  • several high-vacuum pumps are often used for sucking up the resulting gases on the high-vacuum side.
  • the conventional pre-vacuum systems are incapable of absorbing the large amounts of gas accumulating on the gas discharge side of the high vacuum pump.
  • the forepumps used since are extremely bad for the Pumps of light gases suitable. Roots pumps have little compression and rotary vane pumps are not oil free. You would have to be equipped with a cold trap in which condense the oil parts. This means a lot of effort and complicates the pumping system.
  • Vorvakuumsystem is mounted at a greater distance from the gas connection part of the high vacuum pump, so that at this point still a large Leitwert theme added.
  • the invention has for its object to design a pumping system, which is suitable to pump large amounts of gas whose main components are light gases.
  • Existing pumping systems should be able to be converted by simple measures in suitable for the task pumping systems.
  • the solution is an increase in compression and pumping speed in the fore-vacuum range.
  • This increase is made by providing an additional Pump, hereinafter called intermediate pump, reached between the gas discharge side of the high vacuum pump and the suction side of the backing system. It is important according to the invention that this intermediate pump is connected directly to the discharge side of the high-vacuum pump without a large loss of conductance.
  • the pumping speed of the at least one intermediate pump should advantageously be of the order of magnitude of the pumping speed of the at least one high-vacuum pump or at least 50% thereof.
  • one or more intermediate pumps may be provided. If several intermediate pumps are provided, these are connected in series and / or in parallel.
  • a molecular pump including a side channel pump, which operates in the same pressure range to count.
  • the molecular pump is formed with a preferred embodiment as a turbomolecular pump.
  • the compression for light gases of such a pump is sufficiently high to ensure that the amount of gas produced at the discharge of the high vacuum pump can be compressed and conveyed further without loss.
  • a further improvement in conductance and thus an increase in the gas throughput takes place in that the at least one intermediate pump is connected directly to the discharge side of the high-vacuum pump.
  • a pumping system which is suitable for pumping large amounts of gas, which mainly consist of light gases, more effectively and compressing them to atmospheric pressure. It even results in a disproportionate increase in the pumping speed on the high-vacuum side.
  • a particular advantage of the vacuum pumping system according to the invention is that the pumping system is compatible with conventional systems, that is, these can be retrofitted for pumping larger amounts of light gases without much effort.
  • the intake system and the entire backing system can continue to be used unchanged.
  • the use of a molecular pump as an intermediate pump takes up little space, so that a compact system is created which can be used effectively by simple modification in a wide pressure range for all gases.
  • the Fig. 1 shows a vacuum pumping system (1).
  • two high-vacuum pumps (3, 4) preferably turbomolecular pumps, arranged.
  • a backing system consisting of two backing pumps (8, 9), conveys and compresses the pumped gases to atmospheric pressure.
  • a further intermediate pump (6) which is connected directly to the gas outlet (7) of the high-vacuum pumps (3, 4), is located between the high-vacuum pumps (3, 4) and the backing system (8, 9).
  • the intermediate pump (6) serves to supply the gas quantity delivered by the high-vacuum pumps (3, 4) to the fore-vacuum system (8, 9) without losses.
  • the backing pump system (8, 9) On an outlet side (5) of the intermediate pump (6), the backing pump system (8, 9) is arranged. Between the intermediate pump (6) and the backing pump (8, 9) may be a greater distance.
  • Fig. 2 shows a vacuum pumping system (10).
  • two turbomolecular pumps (3, 4) are arranged.
  • two intermediate pumps (12, 13) are arranged downstream of the turbomolecular pumps (3, 4) on an outlet side (11).
  • the intermediate pumps (12, 13) are connected in parallel to increase the pumping speed.
  • the pre-vacuum system (8, 9) is as in Fig. 1 downstream of the intermediate pumps (12, 13).
  • Fig. 3 shows a vacuum pumping system (14) with a recipient (2) on which two turbomolecular pumps (3, 4) are arranged.
  • the turbomolecular pumps (3, 4) are connected directly downstream without any significant conductance losses intermediate pumps (16, 17).
  • the intermediate pumps (16, 17) connected in series.
  • the system of the intermediate pumps (16, 17), the backing system (8, 9) connected downstream.

Abstract

The vacuum pump system (1) includes at least one high vacuum pump (3, 4). It has at least one intermediate pump (6) fitted directly and with low conductance loss on the ejection side of the high vacuum pump. There may be several intermediate pumps, which may be arranged in series or in parallel. At least one of them may have a suction capacity at least 50% that of the high vacuum pump.

Description

Die Erfindung betrifft ein Vakuumpumpsystem zur Förderung leichter Gase mit wenigstens einer Hochvakuumpumpe.The invention relates to a vacuum pumping system for conveying light gases with at least one high vacuum pump.

Pumpsysteme zur Evakuierung eines Rezipienten bestehen zum Beispiel aus einer Turbomolekularpumpe auf der Hochvakuumseite und aus einer oder mehreren Vorvakuumpumpen zur Weiterförderung und zum Verdichten auf Atmosphärendruck der von der Turbomolekularpumpe komprimierten Gase. Diese Vorvakuumpumpen können zum Beispiel eine Kombination aus einer Wälzkolbenpumpe und einer Drehschieberpumpe oder einer trocken verdichtenden, gegen Atmosphäre ausstoßenden Pumpe bestehen. Die DE-OS 38 28 608 zeigt einen solchen Vakuumpumpstand, der aus einer Molekularpumpe, einer Wälzkolbenpumpe und einer mechanischen, zur Atmosphäre verdichtenden Vakuumpumpe aufgebaut ist. Um das Saugvermögen der Anordnung regeln zu können, wird vorgeschlagen, die Wälzkolbenpumpe mit Mitteln zur Steuerung der Drehzahl auszustatten. Solche Pumpsysteme sind geeignet zur Förderung und zum Komprimieren von Gasen mit mittleren und höheren Molekulargewichten (zum Beispiel N2, O2, Ar). Zum Pumpen von leichten Gasen (z. B. H2, He) sind sie dagegen weniger tauglich, insbesondere, wenn es darum geht, große Gasmengen zu fördern. In diesen Fällen werden auf der Hochvakuumseite oft mehrere Hochvakuumpumpen zum Ansaugen der anfallenden Gase eingesetzt.Pump systems for evacuating a recipient consist, for example, of a turbomolecular pump on the high-vacuum side and of one or more backing pumps for further conveying and for compressing to atmospheric pressure of the gases compressed by the turbomolecular pump. These backing pumps may be, for example, a combination of a Roots pump and a rotary vane pump or a dry-compressing, anti-atmosphere pump. The DE-OS 38 28 608 shows such a vacuum pumping station, which is composed of a molecular pump, a Roots pump and a mechanical, the atmosphere-compressing vacuum pump. In order to control the pumping speed of the arrangement, it is proposed to equip the Roots pump with means for controlling the speed. Such pumping systems are suitable for conveying and compressing medium and high molecular weight gases (for example, N 2 , O 2 , Ar). On the other hand, they are less suitable for pumping light gases (eg H 2 , He), especially when it comes to conveying large quantities of gas. In these cases, several high-vacuum pumps are often used for sucking up the resulting gases on the high-vacuum side.

Die herkömmlichen Vorvakuumsysteme sind nicht in der Lage, die auf der Gasausstoßseite der Hochvakuumpumpe anfallenden großen Gasmengen aufzunehmen. Die seither verwendeten Vorpumpen sind äußerst schlecht für das Pumpen von leichten Gasen geeignet. Wälzkolbenpumpen haben nur eine geringe Kompression, und Drehschieberpumpen sind nicht ölfrei. Sie müssten mit einer Kühlfalle ausgestattet sein, in welcher die Ölteile kondensieren. Dies bedeutet einen großen Aufwand und kompliziert das Pumpsystem.The conventional pre-vacuum systems are incapable of absorbing the large amounts of gas accumulating on the gas discharge side of the high vacuum pump. The forepumps used since are extremely bad for the Pumps of light gases suitable. Roots pumps have little compression and rotary vane pumps are not oil free. You would have to be equipped with a cold trap in which condense the oil parts. This means a lot of effort and complicates the pumping system.

Oft wird ein Trägergas eingesetzt, um den Transport von leichten Gasen zu verbessern. Auch diese Lösung ist mit großem Aufwand verbunden. Zudem müssen in diesen Fällen Maßnahmen ergriffen werden, um die Gase wieder zu trennen. Dazu kommt, dass der Vorvakuumdruck und damit die Pumpeigenschaften des gesamten Systems durch das Trägergas wieder verschlechtert werden.Often a carrier gas is used to enhance the transport of light gases. This solution is associated with great effort. In addition, measures must be taken in these cases to separate the gases again. In addition, the prevacuum pressure and thus the pumping properties of the entire system are again degraded by the carrier gas.

In vielen Fällen ist das Vorvakuumsystem in größerer Entfernung vom Gasanschlussteil der Hochvakuumpumpe angebracht, so dass an dieser Stelle noch ein großer Leitwertverlust hinzukommt.In many cases, the Vorvakuumsystem is mounted at a greater distance from the gas connection part of the high vacuum pump, so that at this point still a large Leitwertverlust added.

Der Erfindung liegt die Aufgabe zugrunde, ein Pumpsystem zu entwerfen, welches geeignet ist, große Gasmengen zu pumpen, deren Hauptbestandteile leichte Gase sind. Bestehende Pumpsysteme sollen durch einfache Maßnahmen in für die Aufgabe geeignete Pumpsysteme umgewandelt werden können.The invention has for its object to design a pumping system, which is suitable to pump large amounts of gas whose main components are light gases. Existing pumping systems should be able to be converted by simple measures in suitable for the task pumping systems.

Diese Aufgabe wird durch ein Vakuumpumpsystem mit den Merkmalen gemäß Anspruch 1 gelöst.This object is achieved by a vacuum pumping system having the features according to claim 1.

Die Lösung besteht in einer Erhöhung von Kompression und Saugvermögen im Vorvakuumbereich. Diese Erhöhung wird durch Vorsehen einer zusätzlichen Pumpe, im Folgenden Zwischenpumpe genannt, zwischen der Gasausstoßseite der Hochvakuumpumpe und der Ansaugseite des Vorvakuumsystems erreicht. Dabei ist es erfindungsgemäß wichtig, dass diese Zwischenpumpe direkt ohne großen Leitwertverlust an die Ausstoßseite der Hochvakuumpumpe angeschlossen wird. Das Saugvermögen der wenigstens einen Zwischenpumpe soll vorteilhaft in der Größenordnung des Saugvermögens der wenigstens einen Hochvakuumpumpe liegen oder mindestens 50 % davon betragen.The solution is an increase in compression and pumping speed in the fore-vacuum range. This increase is made by providing an additional Pump, hereinafter called intermediate pump, reached between the gas discharge side of the high vacuum pump and the suction side of the backing system. It is important according to the invention that this intermediate pump is connected directly to the discharge side of the high-vacuum pump without a large loss of conductance. The pumping speed of the at least one intermediate pump should advantageously be of the order of magnitude of the pumping speed of the at least one high-vacuum pump or at least 50% thereof.

Gemäß der Erfindung können eine oder mehrere Zwischenpumpen vorgesehen sein. Sind mehrere Zwischenpumpen vorgesehen, werden diese in Serie und/oder parallel geschaltet.According to the invention, one or more intermediate pumps may be provided. If several intermediate pumps are provided, these are connected in series and / or in parallel.

Als Pumpentyp wird eine Molekularpumpe vorgeschlagen, wozu auch eine Seitenkanalpumpe, welche im gleichen Druckbereich arbeitet, zu zählen ist. Die Molekularpumpe ist mit einer bevorzugten Ausführungsform als Turbomolekularpumpe ausgebildet.As a pump type, a molecular pump is proposed, including a side channel pump, which operates in the same pressure range to count. The molecular pump is formed with a preferred embodiment as a turbomolecular pump.

Die Kompression für leichte Gase einer solchen Pumpe ist ausreichend hoch, um zu gewährleisten, dass die am Ausstoß der Hochvakuumpumpe anfallende Gasmenge verdichtet und ohne Verlust weiter gefördert werden kann. Eine weitere Leitwertverbesserung und damit eine Steigerung des Gasdurchsatzes erfolgt dadurch, dass die wenigstens eine Zwischenpumpe direkt an der Austoßseite der Hochvakuumpumpe angeschlossen ist.The compression for light gases of such a pump is sufficiently high to ensure that the amount of gas produced at the discharge of the high vacuum pump can be compressed and conveyed further without loss. A further improvement in conductance and thus an increase in the gas throughput takes place in that the at least one intermediate pump is connected directly to the discharge side of the high-vacuum pump.

Mit der erfindungsgemäßen Anordnung wird ein Pumpsystem bereitgestellt, welches geeignet ist, große Gasmengen, die hauptsächlich aus leichten Gasen bestehen, effektiver zu pumpen und auf Atmosphärendruck zu verdichten. Es ergibt sich sogar eine überproportionale Erhöhung des Saugvermögens auf der Hochvakuumseite.With the arrangement according to the invention, a pumping system is provided, which is suitable for pumping large amounts of gas, which mainly consist of light gases, more effectively and compressing them to atmospheric pressure. It even results in a disproportionate increase in the pumping speed on the high-vacuum side.

Ein besonderer Vorteil des erfindungsgemäßen Vakuumpumpsystems liegt darin, dass das Pumpsystem kompatibel ist mit herkömmlichen Systemen, das heißt, diese können zum Pumpen von größeren Mengen leichter Gase ohne großen Aufwand umgerüstet werden. Dabei kann das Ansaugsystem und das gesamte Vorvakuumsystem unverändert weiterverwendet werden. Die Vewendung einer Molekularpumpe als Zwischenpumpe beansprucht darüber hinaus wenig Platz, so dass ein kompaktes System entsteht, welches durch einfache Modifikation in weitem Druckbereich für alle Gase wirkungsvoll einsetzbar ist.A particular advantage of the vacuum pumping system according to the invention is that the pumping system is compatible with conventional systems, that is, these can be retrofitted for pumping larger amounts of light gases without much effort. In this case, the intake system and the entire backing system can continue to be used unchanged. In addition, the use of a molecular pump as an intermediate pump takes up little space, so that a compact system is created which can be used effectively by simple modification in a wide pressure range for all gases.

In der Zeichnung ist ein Ausführungsbeispiel der Erfindung dargestellt, und zwar zeigen:

Fig. 1
ein erfindungsgemäßes Vakuumpumpsystem mit einer Zwischenpumpe;
Fig. 2
ein Vakuumpumpsystem mit zwei parallel geschalteten Zwischenpumpen;
Fig. 3
ein Vakuumpumpsystem mit zwei in Serie geschalteten Zwischenpumpen.
In the drawing an embodiment of the invention is shown, in which:
Fig. 1
a vacuum pump system according to the invention with an intermediate pump;
Fig. 2
a vacuum pumping system with two intermediate pumps connected in parallel;
Fig. 3
a vacuum pumping system with two intermediate pumps connected in series.

Die Fig. 1 zeigt ein Vakuumpumpsystem (1). An einem Rezipienten (2) sind zwei Hochvakuumpumpen (3, 4), vorzugsweise Turbomolekularpumpen, angeordnet. Ein Vorvakuumsystem, bestehend aus zwei Vorvakuumpumpen (8, 9), fördert und verdichtet die gepumpten Gase auf Atmosphärendruck. Erfindungsgemäß befindet sich zwischen den Hochvakuumpumpen (3, 4) und dem Vorvakuumsystem (8, 9) eine weitere Zwischenpumpe (6), welche direkt am Gasauslass (7) der Hochvakuumpumpen (3, 4) angeschlossen ist. Die Zwischenpumpe (6) dient dazu, die von den Hochvakuumpumpen (3, 4) geförderte Gasmenge ohne Verluste dem Vorvakuumsystem (8, 9) zuzuführen.The Fig. 1 shows a vacuum pumping system (1). At a recipient (2), two high-vacuum pumps (3, 4), preferably turbomolecular pumps, arranged. A backing system, consisting of two backing pumps (8, 9), conveys and compresses the pumped gases to atmospheric pressure. According to the invention, a further intermediate pump (6), which is connected directly to the gas outlet (7) of the high-vacuum pumps (3, 4), is located between the high-vacuum pumps (3, 4) and the backing system (8, 9). The intermediate pump (6) serves to supply the gas quantity delivered by the high-vacuum pumps (3, 4) to the fore-vacuum system (8, 9) without losses.

An einer Auslassseite (5) der Zwischenpumpe (6) ist das Vorvakuumpumpsystem (8, 9) angeordnet. Zwischen der Zwischenpumpe (6) und den Vorvakuumpumpen (8, 9) kann eine größere Wegstrecke liegen.On an outlet side (5) of the intermediate pump (6), the backing pump system (8, 9) is arranged. Between the intermediate pump (6) and the backing pump (8, 9) may be a greater distance.

Fig. 2 zeigt ein Vakuumpumpsystem (10). An dem Rezipienten (2) sind wiederum zwei Turbomolekularpumpen (3, 4) angeordnet. Direkt und ohne weitere Leitwertverluste sind den Turbomolekularpumpen (3, 4) an einer Auslassseite (11) zwei Zwischenpumpen (12, 13) nachgeordnet. Die Zwischenpumpen (12, 13) sind zur Erhöhung des Saugvermögens parallel geschaltet. Das Vorvakuumsystem (8, 9) ist wie in Fig. 1 den Zwischenpumpen (12, 13) nachgeordnet. Fig. 2 shows a vacuum pumping system (10). At the recipient (2) turn two turbomolecular pumps (3, 4) are arranged. Directly and without further conductance losses, two intermediate pumps (12, 13) are arranged downstream of the turbomolecular pumps (3, 4) on an outlet side (11). The intermediate pumps (12, 13) are connected in parallel to increase the pumping speed. The pre-vacuum system (8, 9) is as in Fig. 1 downstream of the intermediate pumps (12, 13).

Fig. 3 zeigt ein Vakuumpumpsystem (14) mit einem Rezipienten (2), an dem zwei Turbomolekularpumpen (3, 4) angeordnet sind. Den Turbomolekularpumpen (3, 4) sind direkt und ohne nennenswerte Leitwertverluste Zwischenpumpen (16, 17) nachgeschaltet. Zur Erhöhung der Kompression sind die Zwischenpumpen (16, 17) in Serie geschaltet. Wie in den Fig. 1 und 2 gezeigt, ist dem System aus den Zwischenpumpen (16, 17) das Vorvakuumsystem (8, 9) nachgeschaltet. Fig. 3 shows a vacuum pumping system (14) with a recipient (2) on which two turbomolecular pumps (3, 4) are arranged. The turbomolecular pumps (3, 4) are connected directly downstream without any significant conductance losses intermediate pumps (16, 17). To increase the compression, the intermediate pumps (16, 17) connected in series. As in the Fig. 1 and 2 is shown, the system of the intermediate pumps (16, 17), the backing system (8, 9) connected downstream.

Bezugszahlenreference numerals

11
VakuumpumpsystemVacuum pumping system
22
Rezipientrecipient
3, 43, 4
Hochvakuumpumpenhigh vacuum pumps
55
Auslassseiteoutlet
66
Zwischenpumpebetween the pump
77
Gasauslassgas outlet
8, 98, 9
VorvakuumsystemVorvakuumsystem
1010
VakuumpumpsystemVacuum pumping system
1111
Auslassseiteoutlet
12, 1312, 13
Zwischenpumpebetween the pump
1414
VakuumpumpsystemVacuum pumping system
16, 1716, 17
Zwischenpumpenbetween the pump

Claims (3)

  1. Vacuum pump system for delivering gases, in particular gas mixtures with a high proportion of light gases, having at least one high vacuum pump, wherein at a discharge end (7) of the at least one high vacuum pump (3, 4) at least one intermediate pump (6; 12, 13; 16, 17) is disposed directly and with a low conductance loss, characterized in that the at least one intermediate pump (6; 12, 13; 16, 17) has a displacement capacity corresponding to at least 50% of the displacement capacity of the at least one high vacuum pump (3, 4).
  2. Vacuum pump system according to claim 1, characterized in that a plurality of intermediate pumps (12, 13; 16, 17) are provided connected in series and/or in parallel.
  3. Vacuum pump system according to claim 1, characterized in that as an intermediate pump (6; 12, 13; 16, 17) Lhere is provided a molecular pump, in particular a turbomolecular pump.
EP03028333A 2003-01-24 2003-12-10 Vacuum pump system Expired - Lifetime EP1441128B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10302764A DE10302764A1 (en) 2003-01-24 2003-01-24 Vacuum pumping system
DE10302764 2003-01-24

Publications (3)

Publication Number Publication Date
EP1441128A2 EP1441128A2 (en) 2004-07-28
EP1441128A3 EP1441128A3 (en) 2004-09-01
EP1441128B1 true EP1441128B1 (en) 2008-03-26

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US (1) US7033142B2 (en)
EP (1) EP1441128B1 (en)
AT (1) ATE390561T1 (en)
DE (2) DE10302764A1 (en)

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Also Published As

Publication number Publication date
EP1441128A2 (en) 2004-07-28
US20040146410A1 (en) 2004-07-29
EP1441128A3 (en) 2004-09-01
DE50309460D1 (en) 2008-05-08
DE10302764A1 (en) 2004-07-29
US7033142B2 (en) 2006-04-25
ATE390561T1 (en) 2008-04-15

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