EP1081387B1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP1081387B1 EP1081387B1 EP00117868A EP00117868A EP1081387B1 EP 1081387 B1 EP1081387 B1 EP 1081387B1 EP 00117868 A EP00117868 A EP 00117868A EP 00117868 A EP00117868 A EP 00117868A EP 1081387 B1 EP1081387 B1 EP 1081387B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- gas
- parallel
- vacuum
- units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a vacuum pump for conveying gases and for generating high vacuum according to the preamble of the first claim.
- At least two vacuum pumps of different design and operation have been assembled to form a pumping station to produce high vacuum.
- Pumping stations, consisting of at least two vacuum pumps, which are necessary to achieve the required vacuum technical parameters, such as pressure ratio and pumping speed, have the disadvantage that they are expensive and have a large footprint.
- Each pump requires its own drive system with power supply, monitoring and control and its own storage system. Connecting lines between the pumps with valves and control devices increase the effort.
- Turbomolecular pumps are particularly suitable for generating high and ultra-high vacuum for use in wide areas of technology.
- their field of use is limited to higher pressures because they are fully effective only at low pressures to about 10 -3 mbar due to their operation.
- the D1 ( DE-A-198 48 406 ) teaches a favorable design for a parallel-working Gaedepumpe.
- the rotor is constructed from a cylinder, on which a plurality of radially or axially protruding ribs are arranged, which circulate in a channel which has a vapor barrier.
- the D2 ( US-A-5,238,362 ) deals with a built-up of turbomolecular pumping stage and side channel pumping vacuum pump. It is taught to arrange the side channel pumping stage in a self-contained housing, which is then installed in the housing of the vacuum pump.
- turbomolecular pumping stage or another molecular pumping stage can not be completed without vacuum technology.
- the compression of a turbomolecular pumping stage decreases after higher pressure and the compression of a side channel pumping stage decreases with lower pressure.
- the work areas of both pumps practically do not overlap.
- the invention has for its object to develop a vacuum pump, which comprises the entire pressure range from atmospheric pressure to the high and ultra-high vacuum range.
- the pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations consisting of several pumps, are avoided. Furthermore, they should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use. Reliable and safe operation is one of the basic requirements.
- the arrangement according to the invention makes it possible by the parallel connection of Gaedepumpgen to present a compact vacuum pump, which is adapted to cover the entire pressure range from atmospheric pressure to the high or ultra-high vacuum range.
- a compact vacuum pump which is adapted to cover the entire pressure range from atmospheric pressure to the high or ultra-high vacuum range.
- the suction capacity present at the intake opening can be optimally utilized over the entire pressure range, since the pressure compatibility can be designed in such a way that that of the respective preceding pumping unit or unit can be designed level of delivered gas from the next pump unit or stage is taken without loss.
- the illustrated vacuum pump houses in a housing 1 three pumping units 14, 16, 18.
- the housing is provided with a gas inlet opening 2 and a gas outlet opening 4.
- the pump units consist of rotating and fixed gas-conveying components.
- the rotating components are mounted on a shaft 6 in the axial direction one behind the other.
- To operate the shaft includes a drive system 8 and bearing elements 10 and 12.
- the fixed components are connected to the housing 1.
- the gas inlet opening facing pump unit 14 is formed as a turbomolecular pump.
- the following in the direction of gas flow pump unit 16 consists of several subunits 16a, 16b and 16c. These each have one or more molecular pumping stages according to the type of Gaede, hereinafter called Gaedeschen on. Within the subunits, the Gaedeschen are connected in parallel. This means that connecting elements 34a for the subunit 16a or 34b for the subunit 16b combine the input sides and on the other side the output sides of the Gaedeschen so that a parallel gas flow in the individual subunits is made possible.
- the subunit 16a consists of four parallel-pumping Gaedeculturen, the subunit 16b of two parallel pumping Gaedeschen and the subunit 16c of two individual, connected in series Gaedeschen.
- the subunits are interconnected by connecting members 36a, 36b and 36c so that the output side of one subunit is connected to the input side of the following subunit, respectively.
- the gas outlet opening facing pump unit is designed as a multi-stage side channel pump.
- the pumping units 14 and 16 are connected via connecting channels 32 and the pumping units 16 and 18 via connecting channels 38 in series such as the subunits 16a, 16b, 16c. Via a line 42, the pump unit 18 is connected to the gas outlet.
- the amount of gas sucked in via the gas inlet opening 2 on the high-vacuum side is compressed by the turbomolecular pump unit 14 and carried on via the connecting lines 32 to the second pump unit 16.
- the first sub-unit 16a consists of four Gaedeschen that take over the further promotion in parallel operation. The fact that several Gaedeschen are connected in parallel, the entire, funded by the turbomolecular pump and compressed gas quantity can be recorded. In the subunit 16a, the gas quantity is further compressed, so that for the second subunit 16b two parallel Gaedeschen are sufficient to further promote the total amount of gas and further compressing until finally a Gaedeici sufficient as a subunit 16c for the promotion. The side channel pump following the last gas stage can now continue to deliver the gas without loss and compress it to high pressure.
- the combination of the pump units can vary depending on the application and vacuum technical requirements. Thus, for some applications, only a combination of a turbomolecular pump with the pumping unit 16, consisting of Gaesterunn be sufficient. For other applications, a combination of Gaesterunn and side channel pump can meet the requirements.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electrophonic Musical Instruments (AREA)
Abstract
Description
Die Erfindung betrifft eine Vakuumpumpe zur Förderung von Gasen und zur Erzeugung von Hochvakuum nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a vacuum pump for conveying gases and for generating high vacuum according to the preamble of the first claim.
Zur Erzeugung von Hochvakuum sind Kombinationen von verschiedenen Typen von Vakuumpumpen notwendig, da der weite Druckbereich zwischen Atmosphärendruck und Hochvakuumdruck mehrere Strömungsgebiete umfasst, in denen die physikalischen Eigenschaften von Zuständen und Strömungen der Gase jeweils anderen Gesetzen unterworfen sind.To create high vacuum, combinations of different types of vacuum pumps are necessary because the wide pressure range between atmospheric pressure and high vacuum pressure includes multiple flow areas in which the physical properties of states and flows of the gases are subject to different laws.
Seither wurden zur Erzeugung von Hochvakuum mindestens zwei Vakuumpumpen unterschiedlicher Bauart und Arbeitsweise zu einem Pumpstand zusammengefügt. Bewährt haben sich zum Beispiel Pumpstände, bestehend aus einer Turbomolekularpumpe als Hochvakuumpumpe und einer Drehschieberpumpe, welche gegen Atmosphärendruck ausstößt. Pumpstände, bestehend aus mindestens zwei Vakuumpumpen, welche zum Erzielen der geforderten vakuumtechnischen Größen, wie Druckverhältnis und Saugvermögen notwendig sind, weisen den Nachteil auf, dass sie aufwendig sind und einen großen Platzbedarf haben. Jede Pumpe erfordert ein eigenes Antriebssystem mit Stromversorgung, -überwachung und -regelung sowie ein eigenes Lagersystem. Verbindungsleitungen zwischen den Pumpen mit Ventilen und Regeleinrichtungen vergrößern den Aufwand.Since then, at least two vacuum pumps of different design and operation have been assembled to form a pumping station to produce high vacuum. Proved, for example, pumping stations, consisting of a turbomolecular pump as a high vacuum pump and a rotary vane pump, which expels against atmospheric pressure. Pumping stations, consisting of at least two vacuum pumps, which are necessary to achieve the required vacuum technical parameters, such as pressure ratio and pumping speed, have the disadvantage that they are expensive and have a large footprint. Each pump requires its own drive system with power supply, monitoring and control and its own storage system. Connecting lines between the pumps with valves and control devices increase the effort.
Besonders geeignet zur Erzeugung von Hoch- und Ultrahochvakuum zum Einsatz in weiten Gebieten der Technik sind Turbomolekularpumpen. Ihr Einsatzgebiet ist jedoch nach höheren Drücken hin begrenzt, da sie aufgrund ihrer Arbeitsweise nur bei niedrigen Drücken bis etwa 10-3 mbar voll wirksam sind.Turbomolecular pumps are particularly suitable for generating high and ultra-high vacuum for use in wide areas of technology. However, their field of use is limited to higher pressures because they are fully effective only at low pressures to about 10 -3 mbar due to their operation.
Im hohen Druckbereich bis hin zu Atmosphärendruck können Seitenkanalpumpen in mehrstufiger Bauweise eingesetzt werden. Sie lassen sich gut mit Turbomolekularpumpen und auch mit Molekularpumpen anderer Bauarten kombinieren. Die Rotorteile beider Pumpen können auf einer Welle untergebracht werden, so dass beide eine Baueinheit bilden.In the high pressure range up to atmospheric pressure side channel pumps in multi-stage construction can be used. They get along well Turbomolecular pumps and also combine with molecular pumps of other types. The rotor parts of both pumps can be accommodated on a shaft, so that both form a structural unit.
Die D1 (
Die D2 (
Der Übergang von einer Turbomolekularpumpstufe oder einer anderen Molekularpumpstufe zur Seitenkanalpumpstufe lässt sich jedoch vakuumtechnisch nicht lükkenlos vollziehen. Die Kompression einer Turbomolekularpumpstufe nimmt nach höherem Druck hin ab, und die Kompression einer Seitenkanalpumpstufe wird mit niedrigerem Druck geringer. Die Arbeitsbereiche beider Pumpen überschneiden sich praktisch leider nicht.However, the transition from a turbomolecular pumping stage or another molecular pumping stage to the side-channel pumping stage can not be completed without vacuum technology. The compression of a turbomolecular pumping stage decreases after higher pressure and the compression of a side channel pumping stage decreases with lower pressure. The work areas of both pumps practically do not overlap.
Die fehlende Kompression könnte in diesem Gebiet mit Gaedestufen bewirkt werden. Diese haben jedoch im Vergleich zu Turbomolekularpumpstufen ein äußerst geringes Saugvermögen. Dadurch kann das von der letzten Stufe der Turbomolekularpumpe abgegebene Gasvolumen nur zu einem geringen Teil weiter gefördert werden, wodurch das Gesamtsaugvermögen der Pumpkombination erheblich verringert wird.The lack of compression could be effected in this area with Gaedestufen. However, these have an extremely low pumping speed compared to turbomolecular pumping stages. As a result, the gas volume discharged by the last stage of the turbomolecular pump can be conveyed only to a small extent further, whereby the overall absorbency of the pump combination is considerably reduced.
Der Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe zu entwickeln, welche den gesamten Druckbereich von Atmosphärendruck bis zum Hoch- und Ultrahochvakuumbereich umfasst. Die Pumpe soll aus einem Stück bestehen und einen kompakten Aufbau aufweisen, so dass die oben beschriebenen Nachteile, welche Pumpständen anhaften, die aus mehreren Pumpen bestehen, vermieden werden. Weiterhin soll sie ein ausreichend hohes Druckverhältnis und Saugvermögen aufweisen, um den Anforderungen im praktischen Einsatz gerecht zu werden. Eine zuverlässige und sichere Betriebweise ist eine der Grundvoraussetzungen.The invention has for its object to develop a vacuum pump, which comprises the entire pressure range from atmospheric pressure to the high and ultra-high vacuum range. The pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations consisting of several pumps, are avoided. Furthermore, they should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use. Reliable and safe operation is one of the basic requirements.
Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruchs gelöst. Die Ansprüche 2 ― 4 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is solved by the characterizing features of the first claim. The claims 2-4 represent further embodiments of the invention.
Die erfindungsgemäße Anordnung ermöglicht es, durch die Parallelschaltung von Gaedepumpstufen eine kompakte Vakuumpumpe vorzustellen, welche dazu geeignet ist, den gesamten Druckbereich von Atmosphärendruck bis zum Hoch- oder Ultrahochvakuumbereich abzudecken. Mit der Kombination von kleinen Pumpeinheiten, insbesondere durch die Verwendung von parallel und in Serie geschalteten Gaedepumpstufen, werden optimale Pumpeigenschaften und eine effektive Arbeitsweise erreicht. Das an der Ansaugöffnung anstehende Saugvermögen kann über den gesamten Druckbereich optimal ausgenutzt werden, da die Druckverträglichkeit so gestaltet werden kann, dass die von der jeweils vorangehenden Pumpeinheit oder -stufe geförderte Gasmenge von der nächsten Pumpeinheit oder -stufe ohne Verlust übernommen wird. Besonders deutlich werden die Vorteile, wenn die parallel pumpenden Gaedestufen mit einer Turbomolekularpumpe oder mit einer Seitenkanalpumpe oder mit beiden kombiniert wird.The arrangement according to the invention makes it possible by the parallel connection of Gaedepumpstufen to present a compact vacuum pump, which is adapted to cover the entire pressure range from atmospheric pressure to the high or ultra-high vacuum range. With the combination of small pumping units, in particular through the use of parallel and in series Gaedepumpstufen, optimum pumping properties and an effective operation are achieved. The suction capacity present at the intake opening can be optimally utilized over the entire pressure range, since the pressure compatibility can be designed in such a way that that of the respective preceding pumping unit or unit can be designed level of delivered gas from the next pump unit or stage is taken without loss. The advantages are particularly clear when the parallel pumping Gaedestufen with a turbomolecular pump or with a side channel pump or both combined.
Anhand der Abbildung soll die Erfindung an einem Beispiel näher erläutert werden.With reference to the figure, the invention will be explained in more detail by way of example.
Die dargestellte Vakuumpumpe beherbergt in einem Gehäuse 1 drei Pumpeinheiten 14, 16, 18. Das Gehäuse ist mit einer Gaseintrittsöffnung 2 und einer Gasauslassöffnung 4 versehen. Die Pumpeinheiten bestehen aus rotierenden und feststehenden gasfördernden Bauteilen. Die rotierenden Bauteile sind auf einer Welle 6 in axialer Richtung hintereinander angebracht. Zum Betrieb der Welle gehört ein Antriebssystem 8 und Lagerelemente 10 und 12. Die feststehenden Bauteile sind mit dem Gehäuse 1 verbunden.The illustrated vacuum pump houses in a housing 1 three
Die der Gaseintrittsöffnung zugewandte Pumpeinheit 14 ist als Turbomolekularpumpe ausgebildet. Die in Richtung Gasströmung folgende Pumpeinheit 16 besteht aus mehreren Untereinheiten 16a, 16b und 16c. Diese weisen jeweils eine oder mehrere Molekularpumpstufen nach der Bauart von Gaede, im folgenden Gaedestufen genannt, auf. Innerhalb der Untereinheiten sind die Gaedestufen parallel geschaltet. Dies bedeutet, dass Verbindungselemente 34a für die Untereinheit 16a bzw. 34b für die Untereinheit 16b die Eingangsseiten und auf der anderen Seite die Ausgangsseiten der Gaedestufen so zusammenschließen, dass eine parallele Gasführung in den einzelnen Untereinheiten ermöglicht wird. So bestehen in dem vorliegenden Beispiel die Untereinheit 16a aus vier parallel pumpenden Gaedestufen, die Untereinheit 16b aus zwei parallel pumpenden Gaedestufen und die Untereinheit 16c aus zwei einzelnen, in Serie geschalteten Gaedestufen. Die Untereinheiten sind durch Verbindungselemente 36a, 36b und 36c so zusammengeschlossen, dass jeweils die Ausgangsseite der einen Untereinheit mit der Eingangsseite der folgenden Untereinheit verbunden ist. Die der Gasauslassöffnung zugewandte Pumpeinheit ist als mehrstufige Seitenkanalpumpe ausgebildet.The gas inlet opening facing
Die Pumpeinheiten 14 und 16 sind über Verbindungskanäle 32 und die Pumpeinheiten 16 und 18 über Verbindungskanäle 38 so in Serie zusammengeschlossen wie die Untereinheiten 16a, 16b, 16c. Über eine Leitung 42 ist die Pumpeinheit 18 mit der Gasauslassöffnung verbunden.The
Die auf der Hochvakuumseite über die Gaseintrittsöffnung 2 angesaugte Gasmenge wird durch die Turbomolekularpumpeinheit 14 verdichtet und über die Verbindungsleitungen 32 weitergeführt zu der zweiten Pumpeinheit 16. Die erste Untereinheit 16a besteht aus vier Gaedestufen, die in paralleler Arbeitsweise die Weiterförderung übernehmen. Dadurch, dass mehrere Gaedestufen parallel geschaltet sind, kann die gesamte, von der Turbomolekularpumpe geförderte und verdichtete Gasmenge aufgenommen werden. In der Untereinheit 16a wird die Gasmenge weiter verdichtet, so dass für die zweite Untereinheit 16b zwei parallele Gaedestufen ausreichend sind, um die gesamte Gasmenge weiter zu fördern und weiter zu verdichten, bis schließlich eine Gaedestufe als Untereinheit 16c für die Förderung ausreicht. Die an die letzte Gaedestufe anschließende Seitenkanalpumpe kann jetzt die Gasmenge ohne Verlust weiter fördern und bis zu hohem Druck verdichten.The amount of gas sucked in via the gas inlet opening 2 on the high-vacuum side is compressed by the
Die Kombination der Pumpeinheiten kann je nach Einsatzgebiet und vakuumtechnischen Erfordernissen variieren. So kann für manche Anwendungen nur eine Kombination einer Turbomolekularpumpe mit der Pumpeinheit 16, bestehend aus Gaedestufen, ausreichend sein. Für andere Anwendungen kann eine Kombination aus Gaedestufen und Seitenkanalpumpe die Erfordernisse erfüllen.The combination of the pump units can vary depending on the application and vacuum technical requirements. Thus, for some applications, only a combination of a turbomolecular pump with the
Claims (3)
- A vacuum pump consisting of a plurality of pump units (14, 16, 18) which are accommodated in a housing (1) with a gas inlet opening (2) and a gas outlet opening (4), wherein the pump units are formed from rotating and fixed gas-feeding components and the rotating components are mounted on a shaft (6) having a drive arrangement (8) and bearing elements (10, 12) and the fixed components are connected to the housing (1), wherein at least one of the pump units (16) consists of a plurality of parallel-connected molecular pump stages of the Gaede-type construction, the molecular pumps being disposed successively in the axial direction and being connected to each other by common connection channels (34) such that there is provided a parallel feed, characterised in that a plurality of sub-units (16a, 16b, 16c), which consist of one or more parallel-connected pump stages of the Gaede-type construction, are connected one behind the other.
- A vacuum pump according to claim 1, characterised in that the pump unit facing the gas entry opening (2) is a turbo-molecular pump.
- A vacuum-pump according to claim 1 or 2, characterised in that the pump unit (18) facing the gas outlet opening (4) is a side channel pump.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19942410A DE19942410A1 (en) | 1999-09-06 | 1999-09-06 | Vacuum pump |
| DE19942410 | 1999-09-06 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP1081387A2 EP1081387A2 (en) | 2001-03-07 |
| EP1081387A3 EP1081387A3 (en) | 2002-04-17 |
| EP1081387B1 true EP1081387B1 (en) | 2009-03-18 |
Family
ID=7920926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP00117868A Expired - Lifetime EP1081387B1 (en) | 1999-09-06 | 2000-08-19 | Vacuum pump |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6464451B1 (en) |
| EP (1) | EP1081387B1 (en) |
| JP (1) | JP2001090690A (en) |
| AT (1) | ATE426098T1 (en) |
| DE (2) | DE19942410A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10114585A1 (en) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | vacuum pump |
| US7171786B2 (en) * | 2003-12-01 | 2007-02-06 | Tapco International Corporation | Window well |
| EP2027015A1 (en) * | 2006-06-12 | 2009-02-25 | Mag Aerospace Industries, Inc. | Regenerative vacuum generator for aircraft and other vehicles |
| GB0618745D0 (en) † | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
| DE102007010068A1 (en) | 2007-02-28 | 2008-09-04 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump or vacuum device for evacuation of multiple volumes, has two suction inlets with multiple pressure stages and outer suction inlet for one pressure stage spatially encompasses inner suction inlet for another pressure stage |
| US8673394B2 (en) | 2008-05-20 | 2014-03-18 | Sundew Technologies Llc | Deposition method and apparatus |
| US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1809902C3 (en) * | 1968-11-20 | 1973-11-15 | Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar | Multi-stage turbo molecular high vacuum pump |
| US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
| DE2354046A1 (en) * | 1973-10-29 | 1975-05-07 | Battelle Institut E V | Molecular turbine pump for high vacuum - has permanently magnetised rotor blades forming rotor of brushless motor |
| US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
| JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
| DE3919529C2 (en) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vacuum pump |
| US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
| DE4331589C2 (en) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vacuum pumping system |
| DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
| GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
| CN1115362A (en) * | 1994-07-06 | 1996-01-24 | 储继国 | Multiple dragging face molecular pump |
| US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
| GB2333127A (en) * | 1997-10-21 | 1999-07-14 | Varian Associates | Molecular drag compressors having finned rotor construction |
-
1999
- 1999-09-06 DE DE19942410A patent/DE19942410A1/en not_active Withdrawn
-
2000
- 2000-08-19 DE DE50015596T patent/DE50015596D1/en not_active Expired - Lifetime
- 2000-08-19 AT AT00117868T patent/ATE426098T1/en not_active IP Right Cessation
- 2000-08-19 EP EP00117868A patent/EP1081387B1/en not_active Expired - Lifetime
- 2000-09-05 JP JP2000268621A patent/JP2001090690A/en active Pending
- 2000-09-06 US US09/655,981 patent/US6464451B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| ATE426098T1 (en) | 2009-04-15 |
| DE50015596D1 (en) | 2009-04-30 |
| DE19942410A1 (en) | 2001-03-08 |
| JP2001090690A (en) | 2001-04-03 |
| US6464451B1 (en) | 2002-10-15 |
| EP1081387A2 (en) | 2001-03-07 |
| EP1081387A3 (en) | 2002-04-17 |
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