EP1081387A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP1081387A3
EP1081387A3 EP00117868A EP00117868A EP1081387A3 EP 1081387 A3 EP1081387 A3 EP 1081387A3 EP 00117868 A EP00117868 A EP 00117868A EP 00117868 A EP00117868 A EP 00117868A EP 1081387 A3 EP1081387 A3 EP 1081387A3
Authority
EP
European Patent Office
Prior art keywords
fixed
pump
components
casing
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00117868A
Other languages
German (de)
French (fr)
Other versions
EP1081387B1 (en
EP1081387A2 (en
Inventor
Armin Conrad
Wolfgang Eberl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1081387A2 publication Critical patent/EP1081387A2/en
Publication of EP1081387A3 publication Critical patent/EP1081387A3/en
Application granted granted Critical
Publication of EP1081387B1 publication Critical patent/EP1081387B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Abstract

The pump has several pump units (14,16,18) in a casing (1) with gas inlet (2) and outlet (4) openings. The pump units are formed from rotating and fixed gas supply components. The rotating components are fixed on a shaft (6) with a drive arrangement (8) and bearing elements (10,12). The fixed components are fixed to the casing. At least one pump unit has several parallel molecular pump stages (16a) in the style of Gaede pumps. The molecular pump stages are arranged one behind the other axially and are connected by common connection channels (34), for a parallel supply.
EP00117868A 1999-09-06 2000-08-19 Vacuum pump Expired - Lifetime EP1081387B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19942410A DE19942410A1 (en) 1999-09-06 1999-09-06 Vacuum pump
DE19942410 1999-09-06

Publications (3)

Publication Number Publication Date
EP1081387A2 EP1081387A2 (en) 2001-03-07
EP1081387A3 true EP1081387A3 (en) 2002-04-17
EP1081387B1 EP1081387B1 (en) 2009-03-18

Family

ID=7920926

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00117868A Expired - Lifetime EP1081387B1 (en) 1999-09-06 2000-08-19 Vacuum pump

Country Status (5)

Country Link
US (1) US6464451B1 (en)
EP (1) EP1081387B1 (en)
JP (1) JP2001090690A (en)
AT (1) ATE426098T1 (en)
DE (2) DE19942410A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10114585A1 (en) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh vacuum pump
US7171786B2 (en) * 2003-12-01 2007-02-06 Tapco International Corporation Window well
EP2027015A1 (en) * 2006-06-12 2009-02-25 Mag Aerospace Industries, Inc. Regenerative vacuum generator for aircraft and other vehicles
GB0618745D0 (en) † 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102007010068A1 (en) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vacuum pump or vacuum device for evacuation of multiple volumes, has two suction inlets with multiple pressure stages and outer suction inlet for one pressure stage spatially encompasses inner suction inlet for another pressure stage
US8673394B2 (en) 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
WO1996001373A1 (en) * 1994-07-06 1996-01-18 Jiguo Chu Molecular pump with multiple air suction grooves
EP0874159A2 (en) * 1993-05-03 1998-10-28 Leybold Vakuum GmbH Friction vacuum pump with Gaede pump stage
DE19848406A1 (en) * 1997-10-21 1999-05-20 Varian Associates Molecular pump with ribbed rotor construction

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1809902C3 (en) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Multi-stage turbo molecular high vacuum pump
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2354046A1 (en) * 1973-10-29 1975-05-07 Battelle Institut E V Molecular turbine pump for high vacuum - has permanently magnetised rotor blades forming rotor of brushless motor
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
DE3919529C2 (en) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vacuum pump
DE4331589C2 (en) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vacuum pumping system
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
EP0874159A2 (en) * 1993-05-03 1998-10-28 Leybold Vakuum GmbH Friction vacuum pump with Gaede pump stage
WO1996001373A1 (en) * 1994-07-06 1996-01-18 Jiguo Chu Molecular pump with multiple air suction grooves
DE19848406A1 (en) * 1997-10-21 1999-05-20 Varian Associates Molecular pump with ribbed rotor construction

Also Published As

Publication number Publication date
ATE426098T1 (en) 2009-04-15
DE50015596D1 (en) 2009-04-30
DE19942410A1 (en) 2001-03-08
JP2001090690A (en) 2001-04-03
US6464451B1 (en) 2002-10-15
EP1081387B1 (en) 2009-03-18
EP1081387A2 (en) 2001-03-07

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