EP0347706B1 - Multistage vacuum pump unit - Google Patents

Multistage vacuum pump unit Download PDF

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Publication number
EP0347706B1
EP0347706B1 EP89110607A EP89110607A EP0347706B1 EP 0347706 B1 EP0347706 B1 EP 0347706B1 EP 89110607 A EP89110607 A EP 89110607A EP 89110607 A EP89110607 A EP 89110607A EP 0347706 B1 EP0347706 B1 EP 0347706B1
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EP
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Prior art keywords
pump
gas ring
unit according
ring pump
oil
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EP89110607A
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German (de)
French (fr)
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EP0347706A1 (en
Inventor
Kurt-Willy Dipl.-Ing. Mugele
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Siemens AG
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Siemens AG
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the invention relates to a multi-stage vacuum pump unit in which an oil-lubricated or dry-running mechanical displacement pump is provided in the last, atmospheric stage and this is preceded by at least one further pump on the vacuum side.
  • Roots pumps are characterized by an outstanding efficiency due to the contact-free rotation of their Roots compared to other mechanical vacuum pumps.
  • an overall efficiency can be improved by connecting a Roots pump.
  • Roots pump of less than 50 mbar The many narrow gaps of this pump do not allow larger pressure differences, because the greater heating associated with higher pressure differences causes thermal expansions which, due to the narrow gaps, can easily cause the roots to jam.
  • US Pat. No. 4,090,815 discloses a high-vacuum unit which consists of a molecular pump and an oil-sealed rotary pump.
  • Oil-sealed rotary pumps are used in vacuum technology for the pressure range from 1013 mb (760 Torr) to a maximum of 10 ⁇ 4 mbar (approx. 10 ⁇ 4 Torr) and are not able to generate a high vacuum.
  • a molecular pump is therefore connected upstream of the oil-sealed rotary pump in order to generate a high vacuum.
  • Molecular pumps work on the principle of pulse transmission on solid surfaces.
  • the molecular pump according to US-A-4 090 815 has a rotating, circular disk which is rotatably mounted in a two-part housing.
  • Each housing part is provided with a spiral conveyor groove, the cross section of which tapers in the direction of increasing pressure, i.e. increasing molecular density.
  • Each conveyor groove forms a working channel together with the disc.
  • the rotating disc forms the moving wall of the working channel on which the molecules hit. Due to the rotation of the disk, the isotropic velocity distribution of the individual gas molecules (corresponding to the wall temperature) is superimposed on a drift velocity. This leads to a flow and thus to a pumping action.
  • a vacuum pump unit in which a side-channel compressor is connected upstream of a liquid ring vacuum pump in order to reduce the negative influence of the steam pressure of the process water and the associated underperformance in the suction pressure range between approximately 20 and approximately 60 mb to compensate for the liquid ring vacuum pump. Without the connection of a side channel compressor, a liquid ring vacuum pump in the pressure range below 40 mb would no longer be operational.
  • the invention has for its object to develop a multi-stage vacuum pump unit of the type described in such a way that on the one hand the oil consumption and thus the contaminated amount of oil is significantly reduced and on the other hand the efficiency compared to known multi-stage vacuum pump units is still improved.
  • the upstream pump is a gas ring pump.
  • the efficiency of a gas ring pump is only half as high as the efficiency of a Roots pump, tests have shown that the use of a gas ring pump in a multi-stage vacuum pump unit can significantly reduce both the energy requirement and the cost, with no losses in terms of the operational safety of the unit must be accepted.
  • gas ring pumps work oil-free in the compressor chamber, the amount of oil otherwise required when using a mechanical displacement pump is completely eliminated. Because of the higher pressure ratio that can be achieved with a gas ring pump, the size of the downstream positive displacement pump is reduced. Smaller sizes of these pumps also require smaller amounts of lubricating oil, and the power requirement also decreases.
  • Appropriate cooling of the medium compressed by the gas ring pump or the gas ring pump itself also contributes to reducing the amount of lubricating oil.
  • a further, very effective cooling of the gas ring pump is achieved in that cooling ducts for jacket cooling are provided on its housing and these cooling ducts are connected to a coolant circuit. Because the gas ring pump is connected to the coolant circuit of the rotary vane pump, a single cooler or heat exchanger for the unit is sufficient.
  • the speed of each pump can be optimally adapted to the prevailing operating conditions. If only one drive motor is used for both pumps, the different speeds that may be necessary for an optimal adaptation of both pumps can be achieved in that one of the two pumps is coupled to the drive motor directly and the other is coupled to the drive motor via a belt drive or a gear.
  • a gas ring pump 2 driven by its own electric motor 1 has an intake pipe 3, via which the gas ring pump 2 is connected to a container (not shown in the drawing) to be evacuated. With its outlet 4, the gas ring pump 2 is connected via a connecting pipe 5 to the inlet opening 6 of a rotary vane pump 7. Through this rotary vane pump 7, the medium pre-compressed by the gas ring pump 2 is further compressed and expelled through the outlet opening 8.
  • the size of the rotary vane pump, which compresses to atmosphere can be selected to be considerably smaller as a result of the precompression by the gas ring pump, as a result of which the amount of lubricating oil produced is significantly reduced compared to a multi-stage vacuum pump unit consisting only of rotary vane pumps. Since the gas ring pump 2 works completely oil-free in the compression chamber, the amount of oil otherwise required for the preliminary stage is also eliminated. In addition, a gas ring pump with only one shaft and without gear can be inexpensively built in multiple stages, so that a large pressure difference, i.e. high pre-compression, can be achieved.
  • a gas ring pump is considerably less sensitive due to the fact that the gap is two to three times larger than Roots pumps, whereby the gap losses are not higher or even lower due to the division into several stages. Furthermore, due to its mode of operation (freely rotating impeller), the gas ring pump is only limited in the permissible speed by the type of material used for the impeller. With a multi-stage version of the gas ring pump, particularly good and intensive cooling can be achieved due to the larger surface area compared to a Roots pump, which contributes to an improvement in efficiency.
  • Injection cooling is another advantageous cooling option.
  • a coolant is injected into the gas ring pump 2.
  • the cooling of the volume of the medium to be compressed, which can be handled by the downstream rotary vane pump 7, is reduced, so that the downstream rotary vane pump 7 can be designed correspondingly smaller.
  • a very intensive cooling of the medium to be compressed is achieved by jacket cooling of the gas ring pump 2.
  • cooling channels 10 are formed on the housing of the gas ring pump 2, through which a cooling liquid flows.
  • the cooling ducts 10 of the gas ring pump 2 are connected via pipes 12 to a cooling jacket 11 of the rotary vane pump 7 which also has the cooling liquid flowing through it.
  • the cooling ducts 10 of the gas ring pump 2 are connected to one connection of a cooler 13 and the cooling jacket 11 of the rotary vane pump 7 to the other connection of the cooler 13 via further pipelines 12a and 12b.
  • the cooler 13 has a fan 15 which is driven by an electric motor 14.
  • a circulation pump 16 can be arranged in the course of the pipes 12a or 12b.
  • a series connection of the coolant circuits of the two pumps 2 and 7 is shown.
  • a parallel connection of these cooling circuits is also possible.
  • a cooler for the two pumps 2 and 7 is sufficient, so that the construction work is kept to a minimum.
  • the intermediate cooler 9 can be dispensed with in case of jacket cooling of the gas ring pump 2.
  • a reduction in the cost of materials is also possible in that the rotary vane pump 7 is connected directly to the outlet of the gas ring pump 2 with its inlet opening 6. This also results in a compact design of the compressor unit.
  • each of the two pumps 2 and 7 with its own drive motor offers the possibility of optimal power control, since each pump can be regulated in its speed so that optimal conditions arise.
  • optimal operation is ensured by regulating the speed of the electric motor 1 assigned to it so that the current consumption remains constant over the entire speed range.

Abstract

PCT No. PCT/EP89/00659 Sec. 371 Date Dec. 21, 1990 Sec. 102(e) Date Dec. 21, 1990 PCT Filed Jun. 12, 1989 PCT Pub. No. WO89/12751 PCT Pub. Date Dec. 28, 1989.A multi-stage vacuum pump installation having an oil-lubricated or dry-running mechanical displacement pump located in the atmospheric stage. The oil-lubricated or dry-running pump is preceded on the vacuum side by at least one additional pump which is a side channel compressor pump (or gas ring pump). A side channel compressor pump located upstream of the oil-lubricated or dry-running pump reduces oil consumption and at the same time improves efficiency of the installation.

Description

Die Erfindung betrifft ein mehrstufiges Vakuumpumpenaggregat, bei dem in der letzten, atmosphärischen Stufe eine ölgeschmierte oder trockenlaufende mechanische Verdrängerpumpe vorgesehen und dieser vakuumseitig mindestens eine weitere Pumpe vorgeschaltet ist.The invention relates to a multi-stage vacuum pump unit in which an oil-lubricated or dry-running mechanical displacement pump is provided in the last, atmospheric stage and this is preceded by at least one further pump on the vacuum side.

Mechanische Verdrängerpumpen gelten als Vakuumpumpen mit dem besten Wirkungsgrad im gesamten Vakuumbereich. Daher ist es bekannt (DE-A-3 545 982; DE-U-8 427 615), bei einem mehrstufigen Vakuumpumpenaggregat mehrere Drehschieberpumpen hintereinander zu schalten. Derartige Pumpen benötigen in der Regel als Schmier- und Abdichtmedium Öl, das in allen Verdichterstufen ständig frisch zugeführt wird. Wenn die zugeführten Mengen auch relativ klein sind, so bedeutet die ständige oder gezielte Zufuhr von frischem Öl doch eine nicht unerhebliche Kostenbelastung. Außerdemß muß das verbrauchte Öl mittels gesonderter Abscheider wieder aus dem geförderten Medium abgeschieden und schließlich beseitigt werden.Mechanical positive displacement pumps are considered to be vacuum pumps with the best efficiency in the entire vacuum range. It is therefore known (DE-A-3 545 982; DE-U-8 427 615) to connect a plurality of rotary vane pumps in series in a multi-stage vacuum pump unit. Pumps of this type generally require oil as the lubricant and sealing medium, which is constantly freshly supplied in all compressor stages. Even if the quantities supplied are relatively small, the constant or targeted supply of fresh oil means a not inconsiderable cost burden. In addition, the used oil must be separated from the pumped medium by means of a separate separator and finally removed.

Es ist ferner bekannt (Sonderdruck "Auswahlkriterien für Pumpen zum Erzeugen von Vakuum" aus der Zeitschrift "Maschinenmarkt" Vogel-Verlag Würzburg, 88 JG., Heft 17 vom 02.03.1982), einer Drehschieberpumpe eine Wälzkolbenpumpe vorzuschalten. Bekannterweise zeichnen sich Wälzkolbenpumpen wegen der berührungsfreien Rotation ihrer Wälzkolben gegenüber anderen mechanischen Vakuumpumpen durch einen hervorragenden Wirkungsgrad ausläßt. Somit läßt sich bei einem mehrstufigen Vakuumpumpenaggregat durch Vorschalten einer Wälzkolbenpumpe eine Verbesserung des Gesamtwirkungsgrades erreichen. Dies gilt jedoch nur bei Druckdifferenzen derIt is also known (special print "Selection criteria for pumps for generating vacuum" from the magazine "Maschinenmarkt" Vogel-Verlag Würzburg, 88 JG., Issue 17 of 02.03.1982) to connect a Roots pump to a rotary vane pump. As is known, Roots pumps are characterized by an outstanding efficiency due to the contact-free rotation of their Roots compared to other mechanical vacuum pumps. Thus, in a multi-stage vacuum pump unit, an overall efficiency can be improved by connecting a Roots pump. However, this only applies to pressure differences

Wälzkolbenpumpe von kleiner 50 mbar. Die vielen engen Spalte dieser Pumpe lassen größere Druckdiffeerenzen nicht zu, denn die mit höheren Druckdifferenzen verbundene stärkere Erwärmung ruft Wärmedehnungen hervor, die infolge der engen Spalte leicht zum Verklemmen der Wälzkolben führen können.Roots pump of less than 50 mbar. The many narrow gaps of this pump do not allow larger pressure differences, because the greater heating associated with higher pressure differences causes thermal expansions which, due to the narrow gaps, can easily cause the roots to jam.

Eine größere Druckdifferenz ließe sich ohne die genannte Gefahr des Verklemmens durch eine intensive Kühlung oder durch die Hintereinanderschaltung mehrerer Wälzkolbenpumpen erzielen. Der Bauaufwand und im Betrieb dann der Wartungsaufwand für solche Lösungen wäre jedoch unverhälnismäßig hoch. Außerdem leidet die Betriebssicherheit.A greater pressure difference could be achieved without the aforementioned risk of jamming through intensive cooling or by connecting several Roots pumps in series. The construction effort and then the maintenance effort for such solutions would be disproportionately high. Operational safety also suffers.

Weiterhin ist durch die US-A-4 090 815 ein Aggregat für den Hochvakuumbereich bekannt, das aus einer Molekularpumpe und einer ölgedichteten Rotationspumpe besteht. Ölgedichtete Rotationspumpen werden in der Vakuumtechnik für den Druckbereich von 1013 mb (760 Torr) bis maximal 10⁻⁴ mbar (ca. 10⁻⁴ Torr) verwendet und sind nicht in der Lage ein Hochvakuum zu erzeugen. Zur Erzeugung eines Hochvakuums ist deshalb im bekannten Fall der ölgedichteten Rotationspumpe eine Molekularpumpe vorgeschaltet. Molekularpumpen arbeiten nach dem Prinzip der Impulsübertragung an festen Flächen. Die Molekularpumpe gemäß der US-A-4 090 815 weist hierzu eine rotierende, kreisförmige Scheibe auf, die in einem zweiteiligen Gehäuse drehbar gelagert ist. Jedes Gehäuseteil ist mit einer spiralförmigen Fördernut versehen, deren Querschnitt sich in Richtung wachsenden Drucks, also wachsender Molekulardichte verjüngt. Jede Fördernut bildet zusammen mit der Scheibe jeweils einen Arbeitskanal. Die drehende Scheibe bildet hierbei die bewegte Wand des Arbeitskanals, auf die die Moleküle auftreffen. Durch die Rotation der Scheibe wird der isotropen (der Wandtemperatur entsprechenden) Geschwindigkeitsverteilung der einzelnen Gasmoleküle eine Driftgeschwindigkeit überlagert. Dies führt zu einer Strömung und damit zu einer Pumpwirkung.Furthermore, US Pat. No. 4,090,815 discloses a high-vacuum unit which consists of a molecular pump and an oil-sealed rotary pump. Oil-sealed rotary pumps are used in vacuum technology for the pressure range from 1013 mb (760 Torr) to a maximum of 10⁻⁴ mbar (approx. 10⁻⁴ Torr) and are not able to generate a high vacuum. In the known case, a molecular pump is therefore connected upstream of the oil-sealed rotary pump in order to generate a high vacuum. Molecular pumps work on the principle of pulse transmission on solid surfaces. For this purpose, the molecular pump according to US-A-4 090 815 has a rotating, circular disk which is rotatably mounted in a two-part housing. Each housing part is provided with a spiral conveyor groove, the cross section of which tapers in the direction of increasing pressure, i.e. increasing molecular density. Each conveyor groove forms a working channel together with the disc. The rotating disc forms the moving wall of the working channel on which the molecules hit. Due to the rotation of the disk, the isotropic velocity distribution of the individual gas molecules (corresponding to the wall temperature) is superimposed on a drift velocity. This leads to a flow and thus to a pumping action.

Ferner ist durch die FR-A-2 276 487 ein Vakuumpumpenaggregat bekannt, bei der einer Flüssigkeitsring-Vakuumpumpe ein Seitenkanalverdichter vorgeschaltet ist, um im Ansaugdruckbereich zwischen ca. 20 und ca. 60 mb den negativen Einfluß des Dampfdruckes des Betriebswassers und die damit verbundene Minderleistung der Flüssigkeitsring-Vakuumpumpe zu kompensieren. Ohne die Vorschaltung eines Seitenkanalverdichters wäre eine Flüssigkeitsring-Vakuumpumpe im Druckbereich unterhalb 40 mb nicht mehr betriebsfägig.Furthermore, from FR-A-2 276 487 a vacuum pump unit is known in which a side-channel compressor is connected upstream of a liquid ring vacuum pump in order to reduce the negative influence of the steam pressure of the process water and the associated underperformance in the suction pressure range between approximately 20 and approximately 60 mb to compensate for the liquid ring vacuum pump. Without the connection of a side channel compressor, a liquid ring vacuum pump in the pressure range below 40 mb would no longer be operational.

Der Erfindung liegt die Aufgabe zugrunde, ein mehrstufiges Vakuumpumpenaggregat der eingangs beschriebenen Art so weiterzubilden, daß einerseits der Ölverbrauch und damit die verschmutzte Ölmenge wesentlich reduziert ist und andererseits der Wirkungsgrad gegenüber bekannten mehrstufigen Vakuumpumpenaggregaten noch verbessert ist.The invention has for its object to develop a multi-stage vacuum pump unit of the type described in such a way that on the one hand the oil consumption and thus the contaminated amount of oil is significantly reduced and on the other hand the efficiency compared to known multi-stage vacuum pump units is still improved.

Die Lösung der gestellten Aufgabe gelingt nach der Erfindung dadurch, daß die vorgeschaltete Pumpe eine Gasringpumpe ist. Obwohl der Wirkungsgrad einer Gasringpumpe etwa nur halb so hoch wie der Wirkungsgrad einer Wälzkolbenpumpe ist, wurde durch Versuche nachgewiesen, daß durch den Einsatz einer Gasringpumpe bei einem mehrstufigen Vakuumpumpenaggregat sowohl der Energiebedarf als auch der Kostenaufwand wesentlich vermindert werden können, wobei keine Einbußen im Hinblick auf die Betriebssicherheit des Aggregates hingenommen werden müssen. Da Gasringpumpen im Verdichterraum ölfrei arbeiten, entfällt die ansonsten beim Einsatz einer mechanischen Verdrängerpumpe notwendige Ölmenge vollständig. Wegen des mit einer Gasringpumpe erzielbaren höheren Druckverhältnisses ergibt sich eine Verkleinerung der Baugröße der nachgeschalteten Verdrängerpumpe. Kleinere Baugrößen dieser Pumpen erfordern auch geringere Schmierölmengen, außerdem sinkt der Leistungsbedarf.The object is achieved according to the invention in that the upstream pump is a gas ring pump. Although the efficiency of a gas ring pump is only half as high as the efficiency of a Roots pump, tests have shown that the use of a gas ring pump in a multi-stage vacuum pump unit can significantly reduce both the energy requirement and the cost, with no losses in terms of the operational safety of the unit must be accepted. Since gas ring pumps work oil-free in the compressor chamber, the amount of oil otherwise required when using a mechanical displacement pump is completely eliminated. Because of the higher pressure ratio that can be achieved with a gas ring pump, the size of the downstream positive displacement pump is reduced. Smaller sizes of these pumps also require smaller amounts of lubricating oil, and the power requirement also decreases.

Zur Verminderung der Schmierölmenge trägt auch eine entsprechende Kühlung des durch die Gasringpumpe verdichteten Mediums oder der Gasringpumpe selbst bei.Appropriate cooling of the medium compressed by the gas ring pump or the gas ring pump itself also contributes to reducing the amount of lubricating oil.

Eine weitere, sehr wirksame Kühlung der Gasringpumpe wird dadurch erreicht, daß an ihrem Gehäuse Kühlkanäle für eine Mantelkühlung vorgesehen und diese Kühlkanäle an einen Kühlmittelkreis angeschlossen sind. Dadurch, daß die Gasringpumpe an den Kühlmittelkreislauf der Drehschieberpumpe angeschlossen ist, kommt man mit einem einzigen Kühler bzw. Wärmetauscher für das Aggregat aus.A further, very effective cooling of the gas ring pump is achieved in that cooling ducts for jacket cooling are provided on its housing and these cooling ducts are connected to a coolant circuit. Because the gas ring pump is connected to the coolant circuit of the rotary vane pump, a single cooler or heat exchanger for the unit is sufficient.

Eine wesentliche Platz- und Materialersparnis wird dadurch erzielt, daß die Kühlmittelwege von Gasring- und Drehschieberpumpe konstruktiv direkt miteinander verbunden sind.A significant space and material saving is achieved in that the coolant paths of the gas ring and rotary vane pumps are directly connected to one another in terms of construction.

Durch die Zuordnung je eines eigenen, gegebenenfalls drehzahlregelbaren Antriebsmotors kann die Drehzahl jeder Pumpe optimal den jeweils vorliegenden Betriebsverhältnissen angepaßt werden. Bei der Verwendung nur eines Antriebsmotors für beide Pumpen lassen sich die für eine optimale Anpassung beider Pumpen gegebenenfalls notwendigen unterschiedlichen Drehzahlen dadurch erreichen, daß eine der beiden Pumpen mit dem Antriebsmotor direkt und die andere über einen Riementrieb oder ein Getriebe mit diesem gekuppelt ist.By assigning a separate, possibly speed-controllable drive motor, the speed of each pump can be optimally adapted to the prevailing operating conditions. If only one drive motor is used for both pumps, the different speeds that may be necessary for an optimal adaptation of both pumps can be achieved in that one of the two pumps is coupled to the drive motor directly and the other is coupled to the drive motor via a belt drive or a gear.

Anhand eines in der Zeichnung dargestellten Ausführungsbeispieles wird der Anmeldungsgegenstand nachfolgend näher beschrieben.The subject of the application is described in more detail below using an exemplary embodiment shown in the drawing.

Eine von einem eigenen Elektromotor 1 angetriebene Gasringpumpe 2 weist ein Ansaugrohr 3 auf, über das die Gasringpumpe 2 an einen in der Zeichnung nicht dargestellten, zu evakuierenden Behälter angeschlossen ist. Mit ihrem Auslaß 4 ist die Gasringpumpe 2 über ein Verbindungsrohr 5 an die Einlaßöffnung 6 einer Drehschieberpumpe 7 angeschlossen. Durch diese Drehschieberpumpe 7 wird das durch die Gasringpumpe 2 vorverdichtete Medium weiter verdichtet und über die Auslaßöffnung 8 ausgestoßen.A gas ring pump 2 driven by its own electric motor 1 has an intake pipe 3, via which the gas ring pump 2 is connected to a container (not shown in the drawing) to be evacuated. With its outlet 4, the gas ring pump 2 is connected via a connecting pipe 5 to the inlet opening 6 of a rotary vane pump 7. Through this rotary vane pump 7, the medium pre-compressed by the gas ring pump 2 is further compressed and expelled through the outlet opening 8.

Durch die Vorschaltung einer Gasringpumpe 2 vor eine Drehschieberpumpe 7 kann die Baugröße der auf Atmosphäre verdichtenden Drehschieberpumpe infolge der Vorverdichtung durch die Gasringpumpe erheblich kleiner gewählt werden, wodurch die anfallende Schmierölmenge gegenüber einem nur aus Drehschieberpumpen bestehenden mehrstufigen Vakuumpumpenaggregat wesentlich reduziert wird. Da die Gasringpumpe 2 im Verdichtungsraum vollkommen ölfrei arbeitet, entfällt auch die ansonsten für die Vorstufe notwendige Ölmenge. Außerdem läßt sich eine Gasringpumpe mit nur einer Welle und ohne Getriebe kostengünstig mehrstufig bauen, so daß eine große Druckdifferenz, d.h. hohe Vorverdichtung, erzielbar ist. Wegen der gegenüber Wälzkolbenpumpen um das zwei- bis dreifache größeren Spalten ist eine Gasringpumpe wesentlich unempfindlicher, wobei durch die Aufteilung auf mehrere Stufen die Spaltverluste nicht höher oder sogar geringer sind. Ferner ist die Gasringpumpe aufgrund ihrer Wirkungsweise (frei rotierendes Laufrad) in der zulässigen Drehzahl nur durch die Art des für das Laufrad verwendeten Materials begrenzt. Bei mehrstufiger Ausführung der Gasringpumpe läßt sich darüber hinaus eine besonders gute und intensive Kühlung infolge der im Vergleich zu einer Wälzkolbenpumpe größeren Oberfläche erzielen, was zu einer Verbesserung des Wirkungsgrades beiträgt.By connecting a gas ring pump 2 upstream of a rotary vane pump 7, the size of the rotary vane pump, which compresses to atmosphere, can be selected to be considerably smaller as a result of the precompression by the gas ring pump, as a result of which the amount of lubricating oil produced is significantly reduced compared to a multi-stage vacuum pump unit consisting only of rotary vane pumps. Since the gas ring pump 2 works completely oil-free in the compression chamber, the amount of oil otherwise required for the preliminary stage is also eliminated. In addition, a gas ring pump with only one shaft and without gear can be inexpensively built in multiple stages, so that a large pressure difference, i.e. high pre-compression, can be achieved. A gas ring pump is considerably less sensitive due to the fact that the gap is two to three times larger than Roots pumps, whereby the gap losses are not higher or even lower due to the division into several stages. Furthermore, due to its mode of operation (freely rotating impeller), the gas ring pump is only limited in the permissible speed by the type of material used for the impeller. With a multi-stage version of the gas ring pump, particularly good and intensive cooling can be achieved due to the larger surface area compared to a Roots pump, which contributes to an improvement in efficiency.

Es wurde ferner festgestellt, daß bei Ansaugdrücken unter 20 mbar der Leistungs- und Kühlwasserbedarf der Gasringpumpe erheblich sinkt.It was also found that the power and cooling water requirement of the gas ring pump drops considerably at intake pressures below 20 mbar.

Zur weiteren Verminderung der in der nachgeschalteten Drehschieber pumpe 7 anfallenden Schmierölmenge ist es vorteilhaft, mit einer Kühlung des durch die Gasringpumpe 2 geförderten Mediums zu arbeiten. Es besteht die Möglichkeit, zwischen der Gasringpumpe 2 und der Drehschieberpumpe 7 einen Zwischenkühler 9 an zuordnen, durch den das geförderte, vorverdichtete Medium gekühlt wird.To further reduce the amount of lubricating oil occurring in the downstream rotary valve 7, it is advantageous to work with a cooling of the medium conveyed by the gas ring pump 2. There is the possibility of an intercooler 9 between the gas ring pump 2 and the rotary vane pump 7 assign by which the pumped, pre-compressed medium is cooled.

Eine weitere vorteilhafte Kühlmöglichkeit stellt eine Einspritzkühlung dar. Hierbei wird ein Kühlmittel in die Gasringpumpe 2 eingespritzt. Durch die Kühlung wird das von der nachgeschalteten Drehschieberpumpe 7 zu bewältigende Volumen des zu verdichtetenden Mediums vermindert, so daß die nachgeschaltete Drehschieberpumpe 7 entsprechend kleiner ausgelegt werden kann.Injection cooling is another advantageous cooling option. Here, a coolant is injected into the gas ring pump 2. The cooling of the volume of the medium to be compressed, which can be handled by the downstream rotary vane pump 7, is reduced, so that the downstream rotary vane pump 7 can be designed correspondingly smaller.

Eine sehr intensive Kühlung des zu verdichtenden Mediums wird durch eine Mantelkühlung der Gasringpumpe 2 erreicht. Hierzu sind an dem Gehäuse der Gasringpumpe 2 Kühlkanäle 10 ausgebildet, die von einer Kühlflüssigkeit durchströmt werden. Ober Rohre 12 sind die Kühlkanäle 10 der Gasringpumpe 2 mit einem ebenfalls von der Kühlflüssigkeit durchströmten Kühlmantel 11 der Drehschieberpumpe 7 verbunden. Über weitere Rohrleitungen 12a und 12b sind die Kühlkanäle 10 der Gasringpumpe 2 mit dem einen Anschluß eines Kühlers 13 und der Kühlmantel 11 der Drehschieberpumpe 7 mit dem anderen Anschluß des Kühlers 13 verbunden. Der Kühler 13 besitzt einen über einen Elektromotor 14 angetriebenen Ventilator 15. Im Zuge der Rohrleitungen 12a bzw. 12b kann eine Umwälzpumpe 16 angeordnet werden.A very intensive cooling of the medium to be compressed is achieved by jacket cooling of the gas ring pump 2. For this purpose, cooling channels 10 are formed on the housing of the gas ring pump 2, through which a cooling liquid flows. The cooling ducts 10 of the gas ring pump 2 are connected via pipes 12 to a cooling jacket 11 of the rotary vane pump 7 which also has the cooling liquid flowing through it. The cooling ducts 10 of the gas ring pump 2 are connected to one connection of a cooler 13 and the cooling jacket 11 of the rotary vane pump 7 to the other connection of the cooler 13 via further pipelines 12a and 12b. The cooler 13 has a fan 15 which is driven by an electric motor 14. A circulation pump 16 can be arranged in the course of the pipes 12a or 12b.

Bei dem Ausführungsbeispiel ist eine Reihenschaltung der Kühlmittelkreise der beiden Pumpen 2 und 7 dargestellt. Es ist auch eine Parallelschaltung dieser Kühlkreise möglich. In beiden Fällen kommt man mit einem Kühler für die beiden Pumpen 2 und 7 aus, so daß der Bauaufwand kleingehalten wird.In the exemplary embodiment, a series connection of the coolant circuits of the two pumps 2 and 7 is shown. A parallel connection of these cooling circuits is also possible. In both cases, a cooler for the two pumps 2 and 7 is sufficient, so that the construction work is kept to a minimum.

Bei einer Mantelkühlung der Gasringpumpe 2 kann auf den Zwischenkühler 9 verzichtet werden. Eine Verminderung des Materialaufwandes ist auch dadurch möglich, daß die Drehschieberpumpe 7 mit ihrer Einlaßöffnung 6 direkt an den Auslaß der Gasringpumpe 2 angeschlossen wird. Dies ergibt außerdem eine gedrängte Bauweise des Verdichteraggregates.The intermediate cooler 9 can be dispensed with in case of jacket cooling of the gas ring pump 2. A reduction in the cost of materials is also possible in that the rotary vane pump 7 is connected directly to the outlet of the gas ring pump 2 with its inlet opening 6. This also results in a compact design of the compressor unit.

Die Ausrüstung jeder der beiden Pumpen 2 und 7 mit einem eigenen Antriebsmotor bietet die Möglichkeit einer optimalen Leistungssteuerung, da jede Pumpe in ihrer Drehzahl so geregelt werden kann, daß sich optimale Verhältnisse einstellen. Bei der Gasringpumpe 2 wird ein optimaler Betrieb dadurch sichergestellt, daß die Drehzahl des ihr zugeordneten Elektromotors 1 so geregelt wird, daß die Stromaufnahme im gesamten Drehzahlbereich konstant bleibt.Equipping each of the two pumps 2 and 7 with its own drive motor offers the possibility of optimal power control, since each pump can be regulated in its speed so that optimal conditions arise. In the gas ring pump 2, optimal operation is ensured by regulating the speed of the electric motor 1 assigned to it so that the current consumption remains constant over the entire speed range.

Claims (10)

1. Multi-stage vacuum pump unit in which in the final atmospheric stage there is provided an oil-lubricated or dry-running mechanical positive-displacement pump to which there is previously connected on the vacuum side at least one further pump, characterised in that the previously connected pump is a gas ring pump (2).
2. Unit according to claim 1, characterised in that an intermediate cooler (9) is arranged after the gas ring pump (2).
3. Unit according to claim 1, characterised in that a coolant is injected into the gas ring pump (2).
4. Unit according to claim 1, characterised in that cooling channels (10) are provided on the housing of the gas ring pump (2) for a jacket cooling system and these cooling channels (10) are connected to a coolant circuit.
5. Unit according to claim 4, characterised in that the gas ring pump (2) is connected to the coolant circuit of a rotary slide valve pump (7) which is provided as a positive-displacement pump.
6. Unit according to claim 5, characterised in that the coolant paths of gas ring pump and rotary slide valve pump (2 and 7) are connected together directly in terms of construction.
7. Unit according to one or several of the preceding claims, characterised in that a particular drive motor (1) is associated, in each case, with both the gas ring pump (2) and the rotary slide valve pump (7).
8. Unit according to one or several of the preceding claims, characterised in that one of the two pumps (2 or 7) is directly coupled with a drive motor and the other pump (7 or 2) is coupled therewith by way of a belt drive or a gear unit.
9. Unit according to claim 7 or 8, characterised in that the drive motor (1) can be regulated in terms of speed.
10. Unit according to one or several of the preceding claims, characterised in that the running wheels of both pumps (2 and 7) are arranged on a common shaft coupled with a drive motor (1).
EP89110607A 1988-06-24 1989-06-12 Multistage vacuum pump unit Expired - Lifetime EP0347706B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89110607T ATE75007T1 (en) 1988-06-24 1989-06-12 MULTISTAGE VACUUM PUMP UNIT.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3821437 1988-06-24
DE3821437 1988-06-24

Publications (2)

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EP0347706A1 EP0347706A1 (en) 1989-12-27
EP0347706B1 true EP0347706B1 (en) 1992-04-15

Family

ID=6357218

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EP89907120A Pending EP0420899A1 (en) 1988-06-24 1989-06-12 Multi-stage vacuum-pump set
EP89110607A Expired - Lifetime EP0347706B1 (en) 1988-06-24 1989-06-12 Multistage vacuum pump unit

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EP89907120A Pending EP0420899A1 (en) 1988-06-24 1989-06-12 Multi-stage vacuum-pump set

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US (1) US5244352A (en)
EP (2) EP0420899A1 (en)
JP (1) JPH0545827Y2 (en)
AT (1) ATE75007T1 (en)
DE (1) DE58901145D1 (en)
ES (1) ES2030561T3 (en)
WO (1) WO1989012751A1 (en)

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DE102004038924A1 (en) * 2004-03-02 2006-03-02 Friedhelm Gevelhoff Side channel rotary vane pump has ring channel divided into chambers that suck gas into work space through inlet ports and out of discharge openings

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DE19929519A1 (en) 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Method for operating a multi-chamber vacuum system
US7033137B2 (en) 2004-03-19 2006-04-25 Ametek, Inc. Vortex blower having helmholtz resonators and a baffle assembly
US20090142212A1 (en) * 2007-12-03 2009-06-04 Paul Xiubao Huang Rotary blower with noise abatement jacket enclosure
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DE202012008133U1 (en) * 2012-08-25 2013-11-27 Oerlikon Leybold Vacuum Gmbh vacuum pump
CN105756936A (en) * 2016-04-29 2016-07-13 东莞市佛尔盛智能机电股份有限公司 Gas ring type vacuum pump

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Also Published As

Publication number Publication date
EP0420899A1 (en) 1991-04-10
US5244352A (en) 1993-09-14
EP0347706A1 (en) 1989-12-27
WO1989012751A1 (en) 1989-12-28
ATE75007T1 (en) 1992-05-15
JPH0545827Y2 (en) 1993-11-26
JPH03500007U (en) 1991-12-05
ES2030561T3 (en) 1992-11-01
DE58901145D1 (en) 1992-05-21

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