EP1128069B1 - Gas friction pump - Google Patents

Gas friction pump Download PDF

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Publication number
EP1128069B1
EP1128069B1 EP01102552.5A EP01102552A EP1128069B1 EP 1128069 B1 EP1128069 B1 EP 1128069B1 EP 01102552 A EP01102552 A EP 01102552A EP 1128069 B1 EP1128069 B1 EP 1128069B1
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EP
European Patent Office
Prior art keywords
pump
gas
components
rotor
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01102552.5A
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German (de)
French (fr)
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EP1128069A2 (en
EP1128069A3 (en
Inventor
Armin Conrad
Heinrich Lotz
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Filing date
Publication date
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Publication of EP1128069A2 publication Critical patent/EP1128069A2/en
Publication of EP1128069A3 publication Critical patent/EP1128069A3/en
Application granted granted Critical
Publication of EP1128069B1 publication Critical patent/EP1128069B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Definitions

  • the invention relates to a gas friction pump according to the preamble of the first claim.
  • gas friction pumps of various types are known. Their mode of operation is based on the transmission of impulses from moving walls to the gas particles. In this way, a gas flow is generated in the desired direction.
  • Gas friction pumps which operate in a pressure range in which the mean free path of the gas molecules is large compared to the geometrical dimensions of the pump, ie in the molecular flow area, are called molecular pumps.
  • the first gas friction pump of this type was presented by Gaede [1], further technical modifications while retaining the basic principle are designs of Siegbahn [2], Holweck [3] and Becker [4].
  • the latter is known as a turbomolecular pump and has proven successful in many areas of technology and science with great success. It is therefore used as an example for the description of the present invention.
  • the pumping speed of a turbomolecular pump is essentially dependent on the inlet cross-section of the suction flange, on the average circumferential speed of the space to be pumped facing the rotor blade ring and its geometric structure, beyond the internal structure of the pump through which determines the gradation of pressure ratio and pumping speed between the individual stages is, and not least of that part of the pump or the pump combination, which expels against atmospheric pressure.
  • the WO 97/15760 shows a vacuum pump with alternately arranged bladed rotor and stator discs. Relative to the rotor longitudinal axis is located at mid-height of the rotor-stator packet, an intermediate inlet, can enter through the gas in the vacuum pump.
  • the longitudinal axes of the blades on rotor and stator disks are in the disk plane.
  • the invention has for its object to present a gas friction pump, which has a significantly higher pumping capacity over the conventional constructions with constant cross section of the intake.
  • an additional pump unit which may consist of one or more stages, designed so that outside of the pump housing takes place in addition to the axial promotion and promotion in the radial direction.
  • a promotion only in the radial direction is possible according to the features of the first claim. This ensures that the pumping speed of the pump is no longer limited by the cross section of the intake flange.
  • the entire area provided with gas-promoting structure, which captures the molecules, is significantly enlarged and provided with a radial conveying component.
  • Fig. 1 shows a gas friction pump with the housing 1, which is provided with a suction port 2 and a gas outlet opening 3.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • the rotor disks 12 are fixed. These are provided with a pump-active structure and effect with the stator discs 14, which are also provided with a pump-active structure, the pumping effect.
  • a pump unit 20 is mounted according to the invention. This is carried out in one step in the present example.
  • Fig. 1 a is a section along the line A / A-
  • Fig. 1b a section along the line B / B
  • Fig. 1c a perspective view shown.
  • the rotor components 21 and the stator components 22 of this additional pumping unit each consist of an end-face disk-shaped section 23, 24 and cylindrical sections 25, 26.
  • the pump-active structure 23a, 24a of the end-side disk-shaped section is modeled on the structure of corresponding components in turbomolecular pumps.
  • the pump-active structure 25a, 26a of the cylindrical portion 25, 26 corresponds to that of paddle wheels.
  • the rotor components 31 and stator components 32 of the additional pump unit 30 are designed in a conical design.
  • the pump-active structure of these components corresponds to a blade profile inclined in the conveying direction.
  • the additional pumping unit 40 shows rotor components 41 and stator components 42, each having a dome-shaped design.
  • the pump-active structure corresponds to a blade profile inclined in the conveying direction.
  • Fig. 4 an example is shown in which the additional pumping unit 20 is located within the housing 1. This is the example of embodiment 20 of the additional pumping unit Fig. 1 shown. Similarly, the embodiments 30 and 40 of the additional pumping unit in the Fig. 2 and 3 are inside the case.

Description

Die Erfindung betrifft eine Gasreibungspumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a gas friction pump according to the preamble of the first claim.

Zur Förderung von Gasen sind Gasreibungspumpen der verschiedensten Bauart bekannt. Ihre Arbeitsweise beruht auf der Übertragung von Impulsen von bewegten Wänden auf die Gasteilchen. Auf diese Weise wird eine Gasströmung in die gewünschte Richtung erzeugt. Gasreibungspumpen, welche in einem Druckbereich arbeiten, in dem die mittlere freie Weglänge der Gasmoleküle groß ist gegenüber den geometrischen Abmessungen der Pumpe, also im molekularen Strömungsgebiet, werden Molekularpumpen genannt.To promote gases gas friction pumps of various types are known. Their mode of operation is based on the transmission of impulses from moving walls to the gas particles. In this way, a gas flow is generated in the desired direction. Gas friction pumps, which operate in a pressure range in which the mean free path of the gas molecules is large compared to the geometrical dimensions of the pump, ie in the molecular flow area, are called molecular pumps.

Die erste Gasreibungspumpe dieser Art wurde von Gaede [1] vorgestellt, weitere technische Abwandlungen unter Beibehaltung des Grundprinzips sind Konstruktionen von Siegbahn [2], Holweck [3] und Becker [4]. Letztere ist als Turbomolekularpumpe bekannt und hat sich in weiten Bereichen der Technik und Wissenschaft mit großem Erfolg bewährt. Sie wird daher für die Beschreibung der vorliegenden Erfindung als Beispiel herangezogen.The first gas friction pump of this type was presented by Gaede [1], further technical modifications while retaining the basic principle are designs of Siegbahn [2], Holweck [3] and Becker [4]. The latter is known as a turbomolecular pump and has proven successful in many areas of technology and science with great success. It is therefore used as an example for the description of the present invention.

Die im Folgenden beschriebenen Nachteile der bisher bekannten Pumpen und die Beseitigung der Nachteile im Rahmen der Erfindung treffen genau so gut für andere Gasreibungspumpen zu.The disadvantages described below of the previously known pumps and the elimination of the disadvantages in the context of the invention apply just as well to other gas friction pumps.

Das Saugvermögen einer Turbomolekularpumpe ist im wesentlichen abhängig vom Eingangsquerschnitt des Ansaugflansches, von der mittleren Umfangsgeschwindigkeit des dem auszupumpenden Raum zugewandten Rotorschaufelkranzes und dessen geometrischer Struktur, darüber hinaus von der inneren Struktur der Pumpe, durch die die Abstufung von Druckverhältnis und Saugvermögen zwischen den einzelnen Stufen bestimmt wird, und nicht zuletzt auch von demjenigen Teil der Pumpe oder der Pumpenkombination, welcher gegen Atmosphärendruck ausstößt.The pumping speed of a turbomolecular pump is essentially dependent on the inlet cross-section of the suction flange, on the average circumferential speed of the space to be pumped facing the rotor blade ring and its geometric structure, beyond the internal structure of the pump through which determines the gradation of pressure ratio and pumping speed between the individual stages is, and not least of that part of the pump or the pump combination, which expels against atmospheric pressure.

Diese Verhältnisse können so optimal gestaltet werden und die Drehzahl kann im Rahmen der technischen Möglichkeiten so weit erhöht werden, dass der größte Teil der Moleküle, welche auf den o. g. Rotorschaufelkranz treffen, abgepumpt werden können. Hierbei werden nicht alle Moleküle erfasst, welche auf den Eingangsquerschnitt des Ansaugflansches treffen. Ein großer Bereich dieser Fläche wird durch die Rotorstirnfläche, welche keine gasfördernde Struktur aufweist, gebildet. Selbst wenn der Rotorschaufelkranz auf Kosten der Rotorstirnfläche weiter vergrößert wird, bleibt das Saugvermögen durch den Querschnitt des Ansaugflansches begrenzt. Es können nicht mehr Moleküle abgepumpt werden als auf die gasfördernde Struktur der Eingangsstufe treffen.These ratios can be optimally designed and the speed can be increased within the technical possibilities so far that the majority of the molecules, which on the o. G. Rotor blade ring meet, can be pumped out. In this case, not all molecules are detected, which hit the inlet cross-section of the intake flange. A large area of this area is formed by the rotor end face, which has no gas-promoting structure. Even if the rotor blade ring is further increased at the expense of the rotor face, the suction capacity is limited by the cross-section of the suction flange. It is not possible to pump out more molecules than to hit the gas-promoting structure of the input stage.

Die WO 97/15760 zeigt eine Vakuumpumpe mit abwechselnd angeordneten beschaufelten Rotor- und Statorscheiben. Bezogen auf die Rotorlängsachse befindet sich in mittlerer Höhe des Rotor-Stator-Pakets ein Zwischeneinlass, durch den Gas in Vakuumpumpe eintreten kann. Die Längsachsen der Schaufeln an Rotor- und Statorscheiben liegen in der Scheibenebene.The WO 97/15760 shows a vacuum pump with alternately arranged bladed rotor and stator discs. Relative to the rotor longitudinal axis is located at mid-height of the rotor-stator packet, an intermediate inlet, can enter through the gas in the vacuum pump. The longitudinal axes of the blades on rotor and stator disks are in the disk plane.

Der Erfindung liegt die Aufgabe zugrunde, eine Gasreibungspumpe vorzustellen, welche gegenüber den herkömmlichen Konstruktionen bei gleichbleibendem Querschnitt des Ansaugflansches ein deutlich höheres Saugvermögen aufweist.The invention has for its object to present a gas friction pump, which has a significantly higher pumping capacity over the conventional constructions with constant cross section of the intake.

Die Aufgabe wird durch die kennzeichnenden Merkmale des ersten Patentanspruches gelöst. Die Ansprüche 2 bis 7 6 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is solved by the characterizing features of the first claim. The claims 2 to 7 6 illustrate further embodiments of the invention.

Bei der erfindungsgemäßen Anordnung nach dem Anspruch 1 ist eine zusätzliche Pumpeinheit, die aus einer oder mehreren Stufen bestehen kann, so gestaltet, dass außerhalb des Pumpgehäuses zusätzlich zur axialen Förderung auch eine Förderung in radialer Richtung stattfindet. Auch eine Förderung lediglich in radialer Richtung ist entsprechend der Merkmale des 1. Anspruches möglich. Dadurch wird erreicht, dass das Saugvermögen der Pumpe nicht mehr durch den Querschnitt des Ansaugflansches begrenzt wird. Die gesamte mit gasfördernder Struktur versehene Fläche, welche die Moleküle einfängt, ist deutlich vergrößert und dazu mit einer radialen Förderkomponente versehen.In the arrangement according to the invention according to claim 1, an additional pump unit, which may consist of one or more stages, designed so that outside of the pump housing takes place in addition to the axial promotion and promotion in the radial direction. A promotion only in the radial direction is possible according to the features of the first claim. This ensures that the pumping speed of the pump is no longer limited by the cross section of the intake flange. The entire area provided with gas-promoting structure, which captures the molecules, is significantly enlarged and provided with a radial conveying component.

Unterschiedliche Gestaltungsformen der pumpaktiven Rotor- und Statorbauteile sind in den folgenden Ansprüchen beschrieben.Different embodiments of the pump-active rotor and stator components are described in the following claims.

Den größten Effekt bringt die erfindungsgemäße Anordnung, wenn die zusätzliche Pumpeinheit ganz oder teilweise außerhalb des Gehäuses angebracht ist. Aus baulichen Gründen kann es jedoch erforderlich sein, dass die zusätzliche Pumpeinheit ganz oder teilweise innerhalb des Gehäuses angebracht sein muss. Selbst dann ergibt sich durch die zusätzliche radiale Förderkomponente noch ein erheblicher Vorteil gegenüber der herkömmlichen Bauart.The greatest effect brings the arrangement according to the invention, when the additional pumping unit is mounted wholly or partially outside the housing. Out of construction However, reasons may be required that the additional pumping unit must be wholly or partially mounted within the housing. Even then, the additional radial conveying component still provides a considerable advantage over the conventional design.

Anhand der Fig. 1 bis 4 soll die Erfindung am Beispiel einer Turbomolekularpumpe näher erläutert werden:

  • Fig. 1 zeigt die erfindungsgemäße Anordnung.
  • Fig. 1a zeigt einen Schnitt entlang A/A- durch die stirnseitigen scheibenförmigen pumpaktiven Flächen.
  • Fig. 1b zeigt einen Schnitt entlang B/B- durch die zylindrischen pumpaktiven Flächen.
  • Fig. 1c zeigt eine perspektivische Darstellung der Rotorbauteile der zusätzlichen Pumpeinheit.
  • Fig. 2 bis 4 zeigen weitere Ausführungsformen der erfinderischen Anordnung.
Based on Fig. 1 to 4 the invention will be explained in more detail using the example of a turbomolecular pump:
  • Fig. 1 shows the arrangement according to the invention.
  • Fig. 1a shows a section along A / A- through the front-side disc-shaped pump-active surfaces.
  • Fig. 1b shows a section along B / B through the cylindrical pump-active surfaces.
  • Fig. 1c shows a perspective view of the rotor components of the additional pumping unit.
  • Fig. 2 to 4 show further embodiments of the inventive arrangement.

Fig. 1 zeigt eine Gasreibungspumpe mit dem Gehäuse 1, welches mit einer Ansaugöffnung 2 und einer Gasaustrittsöffnung 3 versehen ist. Die Rotorwelle 4 ist in Lagern 5 und 6 fixiert und wird durch den Motor 7 angetrieben. Auf der Rotorwelle 4 sind die Rotorscheiben 12 befestigt. Diese sind mit einer pumpaktiven Struktur versehen und bewirken mit den Statorscheiben 14, welche ebenfalls mit einer pumpaktiven Struktur versehen sind, den Pumpeffekt. Fig. 1 shows a gas friction pump with the housing 1, which is provided with a suction port 2 and a gas outlet opening 3. The rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7. On the rotor shaft 4, the rotor disks 12 are fixed. These are provided with a pump-active structure and effect with the stator discs 14, which are also provided with a pump-active structure, the pumping effect.

Auf der Seite der Ansaugöffnung 2 ist erfindungsgemäß eine Pumpeinheit 20 angebracht. Diese ist im vorliegenden Beispiel einstufig ausgeführt. Zur weiteren Erläuterung sind in Fig. 1 a ein Schnitt entlang der Linie A/A-, in Fig. 1b ein Schnitt entlang der Linie B/B- und in Fig. 1c eine perspektivische Darstellung gezeigt. Die Rotorbauteile 21 und die Statorbauteile 22 dieser zusätzlichen Pumpeinheit bestehen jeweils aus einem stirnseitigen scheibenförmigen Abschnitt 23, 24 und zylindrischen Abschnitten 25, 26. Die pumpaktive Struktur 23a, 24a des stirnseitigen scheibenförmigen Abschnittes ist der Struktur von entsprechenden Bauteilen bei Turbomolekularpumpen nachgebildet. Die pumpaktive Struktur 25a, 26a des zylindrisches Abschnittes 25, 26 entspricht derjenigen von Schaufelrädern.On the side of the suction port 2, a pump unit 20 is mounted according to the invention. This is carried out in one step in the present example. For further explanation are in Fig. 1 a is a section along the line A / A-, in Fig. 1b a section along the line B / B and in Fig. 1c a perspective view shown. The rotor components 21 and the stator components 22 of this additional pumping unit each consist of an end-face disk-shaped section 23, 24 and cylindrical sections 25, 26. The pump-active structure 23a, 24a of the end-side disk-shaped section is modeled on the structure of corresponding components in turbomolecular pumps. The pump-active structure 25a, 26a of the cylindrical portion 25, 26 corresponds to that of paddle wheels.

Bei der in Fig. 2 dargestellten Ausführungsform sind die Rotorbauteile 31 und Statorbauteile 32 der zusätzlichen Pumpeinheit 30 in konischer Bauform ausgebildet. Die pumpaktive Struktur dieser Bauteile entspricht einem in Förderrichtung geneigten Schaufelprofil.At the in Fig. 2 In the embodiment shown, the rotor components 31 and stator components 32 of the additional pump unit 30 are designed in a conical design. The pump-active structure of these components corresponds to a blade profile inclined in the conveying direction.

Die in Fig. 3 dargestellte Ausführungsform der zusätzlichen Pumpeinheit 40 zeigt Rotorbauteile 41 und Statorbauteile 42, die jeweils eine kuppelförmige Bauform aufweisen. Auch hier entspricht die pumpaktive Struktur einem in Förderrichtung geneigten Schaufelprofil.In the Fig. 3 illustrated embodiment of the additional pumping unit 40 shows rotor components 41 and stator components 42, each having a dome-shaped design. Again, the pump-active structure corresponds to a blade profile inclined in the conveying direction.

In Fig. 4 ist ein Beispiel dargestellt, bei welchem sich die zusätzliche Pumpeinheit 20 innerhalb des Gehäuses 1 befindet. Dies ist hier am Beispiel der Ausführungsform 20 der zusätzlichen Pumpeinheit aus Fig. 1 gezeigt. In entsprechender Weise können auch die Ausführungsformen 30 und 40 der zusätzlichen Pumpeinheit in den Fig. 2 und 3 sich innerhalb des Gehäuses befinden.In Fig. 4 an example is shown in which the additional pumping unit 20 is located within the housing 1. This is the example of embodiment 20 of the additional pumping unit Fig. 1 shown. Similarly, the embodiments 30 and 40 of the additional pumping unit in the Fig. 2 and 3 are inside the case.

Literaturliterature

  • [1] W. Gaede, Ann. Phys. 41 (1913) 337 ff .[1] W. Gaede, Ann. Phys. 41 (1913) 337 ff ,
  • [2] M. Siegbahn, Arch. Math. Astr. Fys. 30 B (1943 )[2] M. Siegbahn, Arch. Math. Astr. Fys. 30 B (1943 )
  • [3] F. Holweck, Comptes redus Acad. Science 177 (1923) 43 ff .[3] F. Holweck, Comptes redus Acad. Science 177 (1923) 43 ff ,
  • [4] W. Becker, Vakuum Technik 9/10 (1966 )[4] W. Becker, Vacuum Technology 9/10 (1966 )

Claims (4)

  1. Gas friction pump consisting of a housing (1) with a suction opening (2) and a gas outlet opening (3), wherein rotor (12) and stator components (14) are located in the housing for conveying gases and for the production of a compression ratio, and on the suction opening (2) side there is mounted a one-or multi-stage pump unit (20, 30, 40), which has a gas conveying structure, which is configured so that the gas is conveyed in a radial direction and in that the rotor components (21, 31, 41) of this pump unit and the rotor components (12) of the rest of the gas friction pump are located on the same rotor shaft (4) characterised in that the rotor components (21) and the stator components (22) of the pump unit (20) each consist of an end pump-active portion (23, 24) in the form of a disc and of a cylindrical pump-active portion, and in that the components of the end pump-active portion (23a, 24a) replicate the corresponding components in turbomolecular pumps and the pump-active structure (25a, 26a) of the cylindrical pump-active structure corresponds to the structure of blade wheels.
  2. Gas friction pump according to claim 1, characterised in that gas is conveyed in an axial and a radial direction by the pump unit (20, 30, 40).
  3. Gas friction pump according to claim 1 or 2, characterised in that the pump unit (20, 30, 40) is mounted wholly or partly outside the housing (1).
  4. Gas friction pump according to claim 1 or 2, characterised in that the pump unit (20, 30, 40) is mounted wholly or partly inside the housing (1).
EP01102552.5A 2000-02-24 2001-02-06 Gas friction pump Expired - Lifetime EP1128069B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10008691 2000-02-24
DE10008691.8A DE10008691B4 (en) 2000-02-24 2000-02-24 Gas friction pump

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EP1128069A2 EP1128069A2 (en) 2001-08-29
EP1128069A3 EP1128069A3 (en) 2002-11-06
EP1128069B1 true EP1128069B1 (en) 2016-03-30

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EP01102552.5A Expired - Lifetime EP1128069B1 (en) 2000-02-24 2001-02-06 Gas friction pump

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US (1) US6524060B2 (en)
EP (1) EP1128069B1 (en)
JP (1) JP4907774B2 (en)
DE (1) DE10008691B4 (en)

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DE10056144A1 (en) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gas friction pump
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
KR100610012B1 (en) * 2004-08-16 2006-08-09 삼성전자주식회사 turbo pump
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
DE102009035812A1 (en) * 2009-08-01 2011-02-03 Pfeiffer Vacuum Gmbh Turbo molecular pump rotor
DE202013010195U1 (en) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vacuum pump rotor device and vacuum pump
DE102018119747B3 (en) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh TURBOMOLECULAR PUMP FOR MASS SPECTROMETERS

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Publication number Publication date
DE10008691A1 (en) 2001-08-30
US20010018018A1 (en) 2001-08-30
EP1128069A2 (en) 2001-08-29
JP4907774B2 (en) 2012-04-04
US6524060B2 (en) 2003-02-25
EP1128069A3 (en) 2002-11-06
DE10008691B4 (en) 2017-10-26
JP2001280289A (en) 2001-10-10

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