WO2002025116A1 - Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades - Google Patents

Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades Download PDF

Info

Publication number
WO2002025116A1
WO2002025116A1 PCT/EP2001/009195 EP0109195W WO0225116A1 WO 2002025116 A1 WO2002025116 A1 WO 2002025116A1 EP 0109195 W EP0109195 W EP 0109195W WO 0225116 A1 WO0225116 A1 WO 0225116A1
Authority
WO
WIPO (PCT)
Prior art keywords
blades
rows
pump according
pressure
rotor
Prior art date
Application number
PCT/EP2001/009195
Other languages
German (de)
French (fr)
Inventor
Ralf Adamietz
Christian Beyer
Günter Schütz
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Priority to US10/380,918 priority Critical patent/US20040091351A1/en
Priority to JP2002528686A priority patent/JP2004526090A/en
Priority to KR10-2003-7004016A priority patent/KR20030032046A/en
Priority to EP01967249A priority patent/EP1319130A1/en
Publication of WO2002025116A1 publication Critical patent/WO2002025116A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/10—Stators
    • F05D2240/12—Fluid guiding means, e.g. vanes
    • F05D2240/122—Fluid guiding means, e.g. vanes related to the trailing edge of a stator vane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/20—Rotors
    • F05D2240/30—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor
    • F05D2240/304—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor related to the trailing edge of a rotor blade
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the invention relates to a turbomolecular vacuum pump with rows of rotor blades and rows of stator blades, which interlock with one another with changing angles of attack.
  • the pumping speed in the delivery chamber of a turbomolecular vacuum pump is generated by the interaction of the rotating rotor blades with the stationary stator blades.
  • the angle of attack of the blades becomes flatter from the suction side to the pressure side, and the blade pitch becomes smaller in this direction.
  • the effective pumping speed s e f is therefore equal to the theoretical pumping speed S theo / reduced by Currents that are unavoidable due to the existing gaps (gap losses).
  • the backflows are getting bigger towards higher pressures. This applies in particular to light gases.
  • the backflow probability of the extracted gases decreases with increasing mass.
  • the present invention has for its object to improve the pump properties of a turbomolecular vacuum pump of the type mentioned.
  • this object is achieved in that at least some of the blades of the rows of blades arranged on the pressure side are designed in the region of their pressure-side edge in such a way that longer overlap sections are formed to the following rotor (stator) blades, so that there is a higher seal against backflow.
  • These thickenings must be designed in such a way that, on the one hand, the edges of the blades, thickened on the pressure side, significantly reduce backflow and, on the other hand, the conveying cross-section experiences only a small and tolerable constriction. This applies to rotor and stator blades.
  • the pressure-side edges of the thickened blades are particularly effective with regard to the prevention of backflows if they lie in a plane perpendicular to the axis of rotation of the rotor blades.
  • the thickening should not exceed the delivery cross section of the turbomolecular vacuum pump by more than 10%. tight. (The compression is equivalent to a level).
  • the thickenings do not impair the delivery properties of the turbomolecular vacuum pump too much, it is expedient for the thickenings to increase conically in cross section through the blades to the pressure side.
  • the thickening increasing towards the pressure side preferably begins only in the pressure side half of the width of the blades.
  • FIGS. 1 to 3. Show it:
  • FIG. 1 sections through some blades of a rotor and a stator blade row (shown unwound) and
  • FIGS. 2 and 3 pump surfaces of a filling stage designed according to the invention.
  • FIG. 1 shows sections through blades 1, 2 of a rotor blade row 3 and a stator blade row 4.
  • the angle of attack of the z. B. blades shown is about 30 °.
  • the direction of the rotor movement, the conveying direction and the backflow direction are generally identified by the arrows 5, 6, 7.
  • the arrows 8 show the existence of the delivery channels, which are formed by the blades 1, 2 and by the walls of the stator and rotor.
  • the rotor axis is designated 9.
  • the pressure-side edges of the blades 1 and 2 are thickened on the pressure side (thickenings 10).
  • the fact that the edge surfaces 11, 12 lie in a plane perpendicular to the rotor axis 9 results in relatively large surface sections 11, 12 which oppose the gas molecules flowing back (arrow 7).
  • Figure 1 shows two of the many variations in the formation of the thickenings 10.
  • an increase in thickness d begins in the lower half of the blades. It increases linearly in the conveying direction.
  • the increase in the thickness d is not linear; the change in thickness also increases.
  • the thickenings are essentially one-sided, since such an embodiment can be produced in a simple manner by milling.
  • the stator 2 is the rear in relation to the rotor movement boundary line of a straight portion 2' and z B. a curve 2 "formed.
  • the thickenings should only be formed in the pressure-side halves of the blades 1, 2.
  • the angle ⁇ that the boundary lines 1 "and 2" in the change point 14 with a connection Extension line 15, which connects the change point 14 with the lower end of the respective blade opposite it, should preferably be greater than 90 °. This measure is intended to ensure that the conveying cross section, given by the spacing a of the blades (line section perpendicular to two adjacent blades), is not restricted by the thickenings 10.
  • the filling stage is designated by 21, the annular delivery channel of the molecular pump by 22, the webs modified according to the invention by 23 and the peripherally open pockets formed thereby.
  • the wedge-shaped webs 23 extend radially, while in the filling stage according to FIG. 3 they are inclined to the rear with respect to the direction of rotation (arrow 5).
  • the width of the webs 23 increases from the outside inwards, the width of the peripherally open pockets 24 decreases inwards, in accordance with the gas volume distribution promoted.
  • both the edge surfaces of the webs 23, which oppose molecules flowing back, and the axial sealing surfaces increase.
  • the measures described all result in an increase in the compression and the pumping speed of a turbomolecular vacuum pump, whether with or without a molecular pump stage connected upstream of a filling stage 21. This applies in particular to light gases.
  • the formation of the pump-effective surfaces according to the invention can, for. B. simply done by milling.
  • the measures described are particularly effective if they are implemented in compression areas with relatively small angles of attack ( ⁇ ⁇ 30 °).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The invention relates to a turbomolecular vacuum pump comprising rows of rotor blades (3) and rows of stator blades (4) that alternately engage with one another at varying angles of attack (α). The aim of the invention is to improve the properties of such a pump. To this end, at least a part of the blades (1 or 2) of the rows of blades (3 or 4) that are mounted on the pressure side thickens towards the rim facing the pressure side.

Description

Turbomolekularvakuumpumpe mit Rotorschaufθlrθihen und StatorschaufelreihenTurbomolecular vacuum pump with rotor blades and stator blades
Die Erfindung bezieht sich auf eine Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen, die mit wechselnden Anstellwinkeln alternierend ineinander greifen.The invention relates to a turbomolecular vacuum pump with rows of rotor blades and rows of stator blades, which interlock with one another with changing angles of attack.
Das Saugvermögen im Förderraum einer Turbomolekularvakuumpumpe wird durch die Wechselwirkung der rotierenden Rotorschaufeln mit den stehenden Statorschaufeln erzeugt. Üblicherweise werden die Anstellwinkel der Schaufeln von der Saugseite zur Druckseite hin flacher, und die Schaufelteilung wird in dieser Richtung kleiner.The pumping speed in the delivery chamber of a turbomolecular vacuum pump is generated by the interaction of the rotating rotor blades with the stationary stator blades. Usually, the angle of attack of the blades becomes flatter from the suction side to the pressure side, and the blade pitch becomes smaller in this direction.
Das effektive Saugvermögen Seff einer Turbomolekularvakuumpumpe ist gegeben durchThe effective pumping speed S ef f of a turbomolecular vacuum pump is given by
Seff = St eo — S^ücS e ff = St eo - S ^ üc
Das effektive Saugvermögen sef ist also gleich dem theoretischen Saugvermögen Stheo/ vermindert um Rück- Strömungen, die aufgrund der vorhandenen Spalte unvermeidbar sind (Spaltverluste) . Die Rückströmungen werden zu höheren Drücken hin immer größer. Dieses gilt insbesondere für leichte Gase. Die Rückströmwahrscheinlichkeit der geförderten Gase nimmt mit zunehmender Masse ab.The effective pumping speed s e f is therefore equal to the theoretical pumping speed S theo / reduced by Currents that are unavoidable due to the existing gaps (gap losses). The backflows are getting bigger towards higher pressures. This applies in particular to light gases. The backflow probability of the extracted gases decreases with increasing mass.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Pumpeigenschaften einer Turbomolekularvakuumpumpe der eingangs genannten Art zu verbessern.The present invention has for its object to improve the pump properties of a turbomolecular vacuum pump of the type mentioned.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, dass mindestens ein Teil der Schaufeln von druckseitig angeordneten Schaufelreihen im Bereich ihres druckseitigen Randes so gestaltet sind, dass längere Überdeckungsabschnitte zu den folgenden Rotor (Stator) -Schaufeln entstehen, somit eine höhere Dichtigkeit gegen Rückströmung gegeben ist. Das resultiert zu einer Verdickung der Schaufeln zur Kompressionsseite hin. Diese Verdickungen müssen so ausgebildet sein, dass einerseits die druckseitig verdickten Ränder der Schaufeln Rückströmungen signifikant reduzieren und andererseits der Förderquerschnitt eine nur geringe und verträgliche Einschnürung erfährt. Dieses gilt für Rotor- und Statorschaufeln.According to the invention, this object is achieved in that at least some of the blades of the rows of blades arranged on the pressure side are designed in the region of their pressure-side edge in such a way that longer overlap sections are formed to the following rotor (stator) blades, so that there is a higher seal against backflow. This results in a thickening of the blades towards the compression side. These thickenings must be designed in such a way that, on the one hand, the edges of the blades, thickened on the pressure side, significantly reduce backflow and, on the other hand, the conveying cross-section experiences only a small and tolerable constriction. This applies to rotor and stator blades.
Besonders wirksam in Bezug auf die Verhinderung von Rückströmungen sind die druckseitigen Ränder der verdickten Schaufeln dann, wenn diese in einer zur Drehachse der Rotorschaufeln senkrechten Ebene liegen. Dabei sollen die Verdickungen den Förderquerschnitt der Turbomolekularvakuumpumpe um nicht mehr als 10% ein- engen. (Dem Kompressions ermögen einer Stufe entsprechend) .The pressure-side edges of the thickened blades are particularly effective with regard to the prevention of backflows if they lie in a plane perpendicular to the axis of rotation of the rotor blades. The thickening should not exceed the delivery cross section of the turbomolecular vacuum pump by more than 10%. tight. (The compression is equivalent to a level).
Damit die Verdickungen die Fördereigenschaften der Turbomolekularvakuumpumpe nicht allzusehr beeinträchtigen, ist es zweckmäßig, dass die Verdickungen im Querschnitt durch die Schaufeln konisch zur Druckseite zunehmen. Vorzugsweise beginnen die in Richtung Druckseite zunehmenden Verdickungen erst in der druckseitigen Hälfte der Breite der Schaufeln.So that the thickenings do not impair the delivery properties of the turbomolecular vacuum pump too much, it is expedient for the thickenings to increase conically in cross section through the blades to the pressure side. The thickening increasing towards the pressure side preferably begins only in the pressure side half of the width of the blades.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 3 erläutert werden. Es zeigen:Further advantages and details of the invention will be explained with reference to FIGS. 1 to 3. Show it:
Figur 1 Schnitte durch einige Schaufeln einer Rotor- und einer Statorschaufelreihe (abgewickelt dargestellt) sowieFigure 1 sections through some blades of a rotor and a stator blade row (shown unwound) and
Figuren 2 und 3 erfindungsgemäß ausgebildete Pumpflächen einer Füllstufe.FIGS. 2 and 3 pump surfaces of a filling stage designed according to the invention.
Die Figur 1 zeigt Schnitte durch Schaufeln 1, 2 einer Rotorschaufelreihe 3 und einer Statorschaufelreihe 4.FIG. 1 shows sections through blades 1, 2 of a rotor blade row 3 and a stator blade row 4.
Der Anstellwinkel der z. B. dargestellten Schaufeln beträgt etwa 30°. Die Richtung der Rotorbewegung, die Förderrichtung und die Rückströmrichtung sind generell durch die Pfeile 5, 6, 7 gekennzeichnet. Die Pfeile 8 lassen die Existenz der Förderkanäle erkennen, die von den Schaufeln 1, 2 sowie von den Wandungen von Stator und Rotor gebildet werden. Die Rotorachse ist mit 9 bezeichnet . Die druckseitigen Ränder der Schaufeln 1 und 2 sind druckseitig verdickt (Verdickungen 10) . Dadurch, dass die Randflächen 11, 12 in einer zur Rotorachse 9 senkrechten Ebene liegen, ergeben sich relativ große Flächenabschnitte 11, 12, die zurückströmenden Gasmolekülen (Pfeil 7) entgegenstehen.The angle of attack of the z. B. blades shown is about 30 °. The direction of the rotor movement, the conveying direction and the backflow direction are generally identified by the arrows 5, 6, 7. The arrows 8 show the existence of the delivery channels, which are formed by the blades 1, 2 and by the walls of the stator and rotor. The rotor axis is designated 9. The pressure-side edges of the blades 1 and 2 are thickened on the pressure side (thickenings 10). The fact that the edge surfaces 11, 12 lie in a plane perpendicular to the rotor axis 9 results in relatively large surface sections 11, 12 which oppose the gas molecules flowing back (arrow 7).
Figur 1 lässt zwei der vielen Varianten der Ausbildung der Verdickungen 10 erkennen. Bei den Rotorschaufeln 1 beginnt in der unteren Hälfte der Schaufeln eine Zunahme der Dicke d (konisch) . Sie nimmt linear in Förderrichtung zu. Bei den Statorschaufeln 2 ist die Zunahme der Dicke d nicht linear; die Änderung der Dicke nimmt ebenfalls zu.Figure 1 shows two of the many variations in the formation of the thickenings 10. In the case of rotor blades 1, an increase in thickness d (conical) begins in the lower half of the blades. It increases linearly in the conveying direction. In the case of the stator blades 2, the increase in the thickness d is not linear; the change in thickness also increases.
Die Verdickungen sind im wesentlichen einseitig ausgebildet, da eine solche Ausführung durch Fräsen in einfacher Weise herstellbar ist. Die vorlaufende Begrenzungslinie der im Querschnitt dargestellten Rotorschaufeln 1 besteht aus zwei geraden Linienabschnitten l'', l", die zwischen sich den Änderungspunkt 14 einschließen. Bei den Statorschaufeln 2 wird die in Bezug auf die Rotorbewegung rückseitige Begrenzungslinie von einem geraden Abschnitt 2' und z. B. einer Kurve 2" gebildet .The thickenings are essentially one-sided, since such an embodiment can be produced in a simple manner by milling. The leading boundary line of the rotor blades 1 shown in cross section consisting of two straight line segments l ', l "which enclose between them the change point fourteenth The stator 2 is the rear in relation to the rotor movement boundary line of a straight portion 2' and z B. a curve 2 "formed.
Um die Fördereigenschaften der Förderkanäle (Pfeile 8) im wesentlichen zu erhalten, sollen die Verdickungen nur in den druckseitigen Hälften der Schaufeln 1, 2 ausgebildet sein. Der Winkel ß, den die Begrenzungsli- nien 1" und 2" im Änderungspunkt 14 mit einer Verbin- dungslinie 15, die den Änderungspunkt 14 mit dem unteren Ende der ihm jeweils gegenüberliegenden Schaufel verbindet, bildet, soll vorzugsweise größer als 90° sein. Durch diese Maßnahme soll sichergestellt werden, dass der Förderquerschnitt, gegeben durch den Abstand a der Schaufeln (auf zwei benachbarten Schaufeln senkrecht stehender Linienabschnitt) , durch die Verdickungen 10 nicht eingeschränkt wird.In order to substantially maintain the conveying properties of the conveying channels (arrows 8), the thickenings should only be formed in the pressure-side halves of the blades 1, 2. The angle β that the boundary lines 1 "and 2" in the change point 14 with a connection Extension line 15, which connects the change point 14 with the lower end of the respective blade opposite it, should preferably be greater than 90 °. This measure is intended to ensure that the conveying cross section, given by the spacing a of the blades (line section perpendicular to two adjacent blades), is not restricted by the thickenings 10.
Aus der WO 99/15793 ist es bekannt, zwischen einer Turbomolekularpumpenstufe und einer Molekularpumpenstufe eine Füllstufe vorzusehen, die als Zentrifugalstufe ausgebildet ist und sich im wesentlichen radial nach außen erstreckende Stege umfasst. Erfindungsgemäß veränderte Füllstufen dieser Art sind in den Figuren 2, 3 in Draufsicht dargestellt.From WO 99/15793 it is known to provide a filling stage between a turbomolecular pump stage and a molecular pump stage which is designed as a centrifugal stage and comprises webs which extend essentially radially outwards. Filling stages of this type modified according to the invention are shown in plan view in FIGS. 2, 3.
In den Figuren sind die Füllstufe mit 21, der ringförmige Förderkanal der Molekularpumpe mit 22, die erfindungsgemäß veränderten Stege mit 23 und die dadurch gebildeten, peripher offenen Taschen mit 24 bezeichnet. Bei der Füllstufe 21 nach Figur 2 erstrecken sich die keilförmigen Stege 23 radial, während sie bei der Füllstufe nach Figur 3 in Bezug auf die Drehrichtung (Pfeil 5) nach hinten geneigt sind.In the figures, the filling stage is designated by 21, the annular delivery channel of the molecular pump by 22, the webs modified according to the invention by 23 and the peripherally open pockets formed thereby. In the filling stage 21 according to FIG. 2, the wedge-shaped webs 23 extend radially, while in the filling stage according to FIG. 3 they are inclined to the rear with respect to the direction of rotation (arrow 5).
Dadurch, dass die Breite der Stege 23 von außen nach innen zunimmt, nimmt die Breite der peripher offenen Taschen 24 nach innen ab, entsprechend der geförderten Gasvolumen-Verteilung. Dadurch nehmen sowohl die Randflächen der Stege 23, die zurückströmenden Molekülen entgegenstehen, als auch die axialen Dichtflächen zu. Die beschriebenen Maßnahmen bewirken sämtlich eine Erhöhung der Kompression und des Saugvermögens einer Turbomolekularvakuumpumpe, sei es mit über eine Füllstufe 21 vorgeschalteter Molekularpumpenstufe oder ohne. Dieses gilt insbesondere für leichte Gase. Die Ausbildung der erfindungsgemäßen pumpwirksamen Flächen kann z . B . einfach durch Fräsen erfolgen. Besonders wirksam sind die beschriebenen Maßnahmen, wenn sie in Kompressions- Bereichen mit relativ kleinen Anstellwinkeln (α < 30°) verwirklicht werden. Because the width of the webs 23 increases from the outside inwards, the width of the peripherally open pockets 24 decreases inwards, in accordance with the gas volume distribution promoted. As a result, both the edge surfaces of the webs 23, which oppose molecules flowing back, and the axial sealing surfaces increase. The measures described all result in an increase in the compression and the pumping speed of a turbomolecular vacuum pump, whether with or without a molecular pump stage connected upstream of a filling stage 21. This applies in particular to light gases. The formation of the pump-effective surfaces according to the invention can, for. B. simply done by milling. The measures described are particularly effective if they are implemented in compression areas with relatively small angles of attack (α <30 °).

Claims

PATENTA SPRUCHE PATENTA SPEECH
1. Turbomolekularvakuumpumpe mit Rotorschaufelreihen (3) und Statorschaufelreihen (4) , die mit wechselnden Anstellwinkeln ( ) alternierend ineinander greifen, dadurch gekennzeichnet, dass mindestens ein Teil der Schaufeln (1 oder 2) von druckseitig angeordneten Schaufelreihen (3 oder 4) im Bereich ihres druckseitigen Randes verdickt sind.1. Turbomolecular vacuum pump with rotor blade rows (3) and stator blade rows (4), which interlock with one another with changing angles of attack (), characterized in that at least part of the blades (1 or 2) of blade rows (3 or 4) arranged on the pressure side in the region of their print side edge are thickened.
2. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass die jeweils den druckseitigen Rand bildenden Flächen (11, 12) der verdickten Schaufeln (1, 2) in einer zur Drehachse (9) des Rotors senkrechten Ebene liegen.2. Pump according to claim 1, characterized in that the surfaces (11, 12) of the thickened blades (1, 2) each forming the pressure-side edge lie in a plane perpendicular to the axis of rotation (9) of the rotor.
3. Pumpe nach Anspruch 1 oder 2 , dadurch gekennzeichnet, dass die Verdickungen (10) im Querschnitt durch die Schaufeln (1, 2) konisch zur Druckseite zunehmend ausgebildet sind. 3. Pump according to claim 1 or 2, characterized in that the thickenings (10) in cross section through the blades (1, 2) are increasingly conical to the pressure side.
4. Pumpe nach Anspruch 3, dadurch gekennzeichnet, dass die in Richtung Druckseite zunehmenden Verdickungen (10) in der druckseitigen Hälfte der Breite der Schaufeln (1, 2) beginnen.4. Pump according to claim 3, characterized in that the thickenings (10) increasing in the direction of the pressure side begin in the pressure-side half of the width of the blades (1, 2).
5. Pumpe nach Anspruch 3 oder 4, dadurch gekennzeichnet, dass die Verdickungen (10) auf beiden Seiten oder nur auf einer Seite der Schaufeln (1, 2) vorgesehen sind.5. Pump according to claim 3 or 4, characterized in that the thickenings (10) are provided on both sides or only on one side of the blades (1, 2).
6. Pumpe nach Anspruch 5 , dadurch gekennzeichnet, dass die Verdickung (10) mit einem Änderungspunkt (14) beginnt und dass der Winkel (ß) , den der druckseitige Abschnitt (1", 2") der Begrenzungsli- nien (1', 1";- 2', 2") der Schaufeln (1, 2) mit einer Verbindungslinie (15) bildet, die den Änderungspunkt (14) mit dem unteren Rand der jeweils gegenüberliegenden Schaufel bildet, größer 90° ist.6. Pump according to claim 5, characterized in that the thickening (10) begins with a change point (14) and that the angle (ß) that the pressure-side section (1 ", 2") of the boundary lines (1 ', 1 "; - 2 ', 2") of the blades (1, 2) with a connecting line (15), which forms the change point (14) with the lower edge of the opposite blade, is greater than 90 °.
7. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie mit einer Füllstufe (21) ausgerüstet ist, die als Radialstufe ausgebildet ist.7. Pump according to one of the preceding claims, characterized in that it is equipped with a filling stage (21) which is designed as a radial stage.
8. Pumpe nach Anspruch 7 , dadurch gekennzeichnet, dass die Radialstufe sich nach außen erstreckende Stege (23) umfasst, deren Breite nach außen abnimmt. 8. Pump according to claim 7, characterized in that the radial stage comprises outwardly extending webs (23) whose width decreases outwards.
PCT/EP2001/009195 2000-09-20 2001-08-09 Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades WO2002025116A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US10/380,918 US20040091351A1 (en) 2000-09-20 2001-08-09 Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
JP2002528686A JP2004526090A (en) 2000-09-20 2001-08-09 Turbo molecular vacuum pump provided with rotor blade row and stator blade row
KR10-2003-7004016A KR20030032046A (en) 2000-09-20 2001-08-09 Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
EP01967249A EP1319130A1 (en) 2000-09-20 2001-08-09 Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10046506.4 2000-09-20
DE10046506A DE10046506A1 (en) 2000-09-20 2000-09-20 Turbo-molecular vacuum pump has part of blades thickened in region of pressure side edge

Publications (1)

Publication Number Publication Date
WO2002025116A1 true WO2002025116A1 (en) 2002-03-28

Family

ID=7656904

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/009195 WO2002025116A1 (en) 2000-09-20 2001-08-09 Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades

Country Status (6)

Country Link
US (1) US20040091351A1 (en)
EP (1) EP1319130A1 (en)
JP (1) JP2004526090A (en)
KR (1) KR20030032046A (en)
DE (1) DE10046506A1 (en)
WO (1) WO2002025116A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1580435A2 (en) * 2004-03-16 2005-09-28 Pfeiffer Vacuum GmbH Turbomolecular pump
WO2008012565A1 (en) * 2006-07-27 2008-01-31 Edwards Limited Molecular drag pumping mechanism

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4519185B2 (en) * 2008-07-22 2010-08-04 株式会社大阪真空機器製作所 Turbo molecular pump
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
KR100969410B1 (en) * 2009-06-15 2010-07-14 박지운 Street lighting pole and foundation structure for installing poles
TWI424121B (en) * 2010-12-10 2014-01-21 Prosol Corp Turbo molecular pump with improved blade structures
JP7363494B2 (en) * 2020-01-09 2023-10-18 株式会社島津製作所 turbo molecular pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1313886A (en) * 1961-11-20 1963-01-04 Alsacienne D Electronique Et D Improvement in turbochargers and turbopumps
GB936175A (en) * 1961-05-15 1963-09-04 Snecma Improvements in or relating to rotary high-vacuum pumps
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump
WO1999015793A1 (en) 1997-09-24 1999-04-01 Leybold Vakuum Gmbh Compound pump
WO2000000746A1 (en) * 1998-06-30 2000-01-06 Ebara Corporation Turbo-molecular pump
EP1004775A2 (en) * 1998-11-24 2000-05-31 Seiko Seiki Kabushiki Kaisha Turbomolecular pump and vacuum apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2974927A (en) * 1955-09-27 1961-03-14 Elmer G Johnson Supersonic fluid machine
US3138318A (en) * 1961-05-15 1964-06-23 Snecma Turbo-molecular vacuum pump
DE2229724B2 (en) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
DE2717366B2 (en) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Impeller for a turbo molecular pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB936175A (en) * 1961-05-15 1963-09-04 Snecma Improvements in or relating to rotary high-vacuum pumps
FR1313886A (en) * 1961-11-20 1963-01-04 Alsacienne D Electronique Et D Improvement in turbochargers and turbopumps
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump
WO1999015793A1 (en) 1997-09-24 1999-04-01 Leybold Vakuum Gmbh Compound pump
WO2000000746A1 (en) * 1998-06-30 2000-01-06 Ebara Corporation Turbo-molecular pump
EP1004775A2 (en) * 1998-11-24 2000-05-31 Seiko Seiki Kabushiki Kaisha Turbomolecular pump and vacuum apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 007, no. 041 (M - 194) 18 February 1983 (1983-02-18) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1580435A2 (en) * 2004-03-16 2005-09-28 Pfeiffer Vacuum GmbH Turbomolecular pump
EP1580435A3 (en) * 2004-03-16 2009-12-30 Pfeiffer Vacuum GmbH Turbomolecular pump
WO2008012565A1 (en) * 2006-07-27 2008-01-31 Edwards Limited Molecular drag pumping mechanism

Also Published As

Publication number Publication date
EP1319130A1 (en) 2003-06-18
US20040091351A1 (en) 2004-05-13
KR20030032046A (en) 2003-04-23
DE10046506A1 (en) 2002-03-28
JP2004526090A (en) 2004-08-26

Similar Documents

Publication Publication Date Title
EP2242931B1 (en) Circulation structure for a turbo compressor
EP2627907B1 (en) Side channel blower, in particular a secondary air blower for an internal combustion machine
EP1948939B1 (en) Radial compressor rotor
DE102015100214B4 (en) Side channel blower for an internal combustion engine
WO2005106207A1 (en) Compressor blade and compressor
DE3148985C2 (en) ROTOR ASSEMBLY
WO2017013021A1 (en) Side-channel machine (compressor, vacuum pump or blower) having an extraction duct in the stripper
DE102015100215B4 (en) Side channel blower for an internal combustion engine
EP2251547B1 (en) Vacuum pump
EP2746534B1 (en) Stator and/or rotor stage of a turbomachine and corresponding gas turbine
EP1413712A1 (en) Shrouded turbine blade with tip sealing
DE3728154A1 (en) MULTI-STAGE MOLECULAR PUMP
WO2002025116A1 (en) Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
EP0363503B1 (en) Pump stage for a high vacuum pump
EP1335136A1 (en) Flow guiding system along the walls of the flow canal of a compressor
CH677009A5 (en)
EP1165965A1 (en) Side channel compressor
EP1128069B1 (en) Gas friction pump
WO2009143920A1 (en) Radial fan
DE3303460A1 (en) SELF-PRIMING SIDE CHANNEL PUMP
EP3224480B1 (en) Compressor having a sealing channel
EP2342464B1 (en) Side channel blower, in particular secondary air blower for an internal combustion engine
DE3402549C2 (en)
EP0463385B1 (en) Fan impeller
WO2021143971A1 (en) Support module for a fan and fan having a corresponding support module

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP KR US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2001967249

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 10380918

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 2002528686

Country of ref document: JP

Ref document number: 1020037004016

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 1020037004016

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 2001967249

Country of ref document: EP

WWW Wipo information: withdrawn in national office

Ref document number: 2001967249

Country of ref document: EP