WO2002025116A1 - Pompe a vide turbomoleculaire comprenant des alignements d'ailettes de rotor et des alignements d'ailettes de stator - Google Patents

Pompe a vide turbomoleculaire comprenant des alignements d'ailettes de rotor et des alignements d'ailettes de stator Download PDF

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Publication number
WO2002025116A1
WO2002025116A1 PCT/EP2001/009195 EP0109195W WO0225116A1 WO 2002025116 A1 WO2002025116 A1 WO 2002025116A1 EP 0109195 W EP0109195 W EP 0109195W WO 0225116 A1 WO0225116 A1 WO 0225116A1
Authority
WO
WIPO (PCT)
Prior art keywords
blades
rows
pump according
pressure
rotor
Prior art date
Application number
PCT/EP2001/009195
Other languages
German (de)
English (en)
Inventor
Ralf Adamietz
Christian Beyer
Günter Schütz
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Priority to US10/380,918 priority Critical patent/US20040091351A1/en
Priority to KR10-2003-7004016A priority patent/KR20030032046A/ko
Priority to JP2002528686A priority patent/JP2004526090A/ja
Priority to EP01967249A priority patent/EP1319130A1/fr
Publication of WO2002025116A1 publication Critical patent/WO2002025116A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/10—Stators
    • F05D2240/12—Fluid guiding means, e.g. vanes
    • F05D2240/122—Fluid guiding means, e.g. vanes related to the trailing edge of a stator vane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/20—Rotors
    • F05D2240/30—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor
    • F05D2240/304—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor related to the trailing edge of a rotor blade
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the invention relates to a turbomolecular vacuum pump with rows of rotor blades and rows of stator blades, which interlock with one another with changing angles of attack.
  • the pumping speed in the delivery chamber of a turbomolecular vacuum pump is generated by the interaction of the rotating rotor blades with the stationary stator blades.
  • the angle of attack of the blades becomes flatter from the suction side to the pressure side, and the blade pitch becomes smaller in this direction.
  • the effective pumping speed s e f is therefore equal to the theoretical pumping speed S theo / reduced by Currents that are unavoidable due to the existing gaps (gap losses).
  • the backflows are getting bigger towards higher pressures. This applies in particular to light gases.
  • the backflow probability of the extracted gases decreases with increasing mass.
  • the present invention has for its object to improve the pump properties of a turbomolecular vacuum pump of the type mentioned.
  • this object is achieved in that at least some of the blades of the rows of blades arranged on the pressure side are designed in the region of their pressure-side edge in such a way that longer overlap sections are formed to the following rotor (stator) blades, so that there is a higher seal against backflow.
  • These thickenings must be designed in such a way that, on the one hand, the edges of the blades, thickened on the pressure side, significantly reduce backflow and, on the other hand, the conveying cross-section experiences only a small and tolerable constriction. This applies to rotor and stator blades.
  • the pressure-side edges of the thickened blades are particularly effective with regard to the prevention of backflows if they lie in a plane perpendicular to the axis of rotation of the rotor blades.
  • the thickening should not exceed the delivery cross section of the turbomolecular vacuum pump by more than 10%. tight. (The compression is equivalent to a level).
  • the thickenings do not impair the delivery properties of the turbomolecular vacuum pump too much, it is expedient for the thickenings to increase conically in cross section through the blades to the pressure side.
  • the thickening increasing towards the pressure side preferably begins only in the pressure side half of the width of the blades.
  • FIGS. 1 to 3. Show it:
  • FIG. 1 sections through some blades of a rotor and a stator blade row (shown unwound) and
  • FIGS. 2 and 3 pump surfaces of a filling stage designed according to the invention.
  • FIG. 1 shows sections through blades 1, 2 of a rotor blade row 3 and a stator blade row 4.
  • the angle of attack of the z. B. blades shown is about 30 °.
  • the direction of the rotor movement, the conveying direction and the backflow direction are generally identified by the arrows 5, 6, 7.
  • the arrows 8 show the existence of the delivery channels, which are formed by the blades 1, 2 and by the walls of the stator and rotor.
  • the rotor axis is designated 9.
  • the pressure-side edges of the blades 1 and 2 are thickened on the pressure side (thickenings 10).
  • the fact that the edge surfaces 11, 12 lie in a plane perpendicular to the rotor axis 9 results in relatively large surface sections 11, 12 which oppose the gas molecules flowing back (arrow 7).
  • Figure 1 shows two of the many variations in the formation of the thickenings 10.
  • an increase in thickness d begins in the lower half of the blades. It increases linearly in the conveying direction.
  • the increase in the thickness d is not linear; the change in thickness also increases.
  • the thickenings are essentially one-sided, since such an embodiment can be produced in a simple manner by milling.
  • the stator 2 is the rear in relation to the rotor movement boundary line of a straight portion 2' and z B. a curve 2 "formed.
  • the thickenings should only be formed in the pressure-side halves of the blades 1, 2.
  • the angle ⁇ that the boundary lines 1 "and 2" in the change point 14 with a connection Extension line 15, which connects the change point 14 with the lower end of the respective blade opposite it, should preferably be greater than 90 °. This measure is intended to ensure that the conveying cross section, given by the spacing a of the blades (line section perpendicular to two adjacent blades), is not restricted by the thickenings 10.
  • the filling stage is designated by 21, the annular delivery channel of the molecular pump by 22, the webs modified according to the invention by 23 and the peripherally open pockets formed thereby.
  • the wedge-shaped webs 23 extend radially, while in the filling stage according to FIG. 3 they are inclined to the rear with respect to the direction of rotation (arrow 5).
  • the width of the webs 23 increases from the outside inwards, the width of the peripherally open pockets 24 decreases inwards, in accordance with the gas volume distribution promoted.
  • both the edge surfaces of the webs 23, which oppose molecules flowing back, and the axial sealing surfaces increase.
  • the measures described all result in an increase in the compression and the pumping speed of a turbomolecular vacuum pump, whether with or without a molecular pump stage connected upstream of a filling stage 21. This applies in particular to light gases.
  • the formation of the pump-effective surfaces according to the invention can, for. B. simply done by milling.
  • the measures described are particularly effective if they are implemented in compression areas with relatively small angles of attack ( ⁇ ⁇ 30 °).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne une pompe à vide turbomoléculaire comportant des alignements d'ailettes de rotor (3) et des alignements d'ailettes de stator (4), qui s'engrènent alternativement les uns dans les autres selon des angles d'attaque ( alpha ) changeants. Afin de perfectionner les propriétés de ladite pompe, au moins une partie des ailettes (1 ou 2) des alignements (3 ou 4) disposés côté pression est plus large au niveau du bord orienté côté pression.
PCT/EP2001/009195 2000-09-20 2001-08-09 Pompe a vide turbomoleculaire comprenant des alignements d'ailettes de rotor et des alignements d'ailettes de stator WO2002025116A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US10/380,918 US20040091351A1 (en) 2000-09-20 2001-08-09 Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
KR10-2003-7004016A KR20030032046A (ko) 2000-09-20 2001-08-09 회전자 블레이드 열 및 고정자 블레이드 열을 갖는 터보분자 진공 펌프
JP2002528686A JP2004526090A (ja) 2000-09-20 2001-08-09 ロータ羽根列とステータ羽根列とを備えたターボ分子真空ポンプ
EP01967249A EP1319130A1 (fr) 2000-09-20 2001-08-09 Pompe a vide turbomoleculaire comprenant des alignements d'ailettes de rotor et des alignements d'ailettes de stator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10046506A DE10046506A1 (de) 2000-09-20 2000-09-20 Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
DE10046506.4 2000-09-20

Publications (1)

Publication Number Publication Date
WO2002025116A1 true WO2002025116A1 (fr) 2002-03-28

Family

ID=7656904

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/009195 WO2002025116A1 (fr) 2000-09-20 2001-08-09 Pompe a vide turbomoleculaire comprenant des alignements d'ailettes de rotor et des alignements d'ailettes de stator

Country Status (6)

Country Link
US (1) US20040091351A1 (fr)
EP (1) EP1319130A1 (fr)
JP (1) JP2004526090A (fr)
KR (1) KR20030032046A (fr)
DE (1) DE10046506A1 (fr)
WO (1) WO2002025116A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1580435A2 (fr) * 2004-03-16 2005-09-28 Pfeiffer Vacuum GmbH Pompe turbomoléculaire
WO2008012565A1 (fr) * 2006-07-27 2008-01-31 Edwards Limited Mécanisme de pompage moléculaire mécanique

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4519185B2 (ja) * 2008-07-22 2010-08-04 株式会社大阪真空機器製作所 ターボ分子ポンプ
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
KR100969410B1 (ko) * 2009-06-15 2010-07-14 박지운 가로등 시설물
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
JP7363494B2 (ja) * 2020-01-09 2023-10-18 株式会社島津製作所 ターボ分子ポンプ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1313886A (fr) * 1961-11-20 1963-01-04 Alsacienne D Electronique Et D Perfectionnement aux turbocompresseurs et turbopompes
GB936175A (en) * 1961-05-15 1963-09-04 Snecma Improvements in or relating to rotary high-vacuum pumps
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump
WO1999015793A1 (fr) 1997-09-24 1999-04-01 Leybold Vakuum Gmbh Pompe compound
WO2000000746A1 (fr) * 1998-06-30 2000-01-06 Ebara Corporation Pompe turbomoleculaire
EP1004775A2 (fr) * 1998-11-24 2000-05-31 Seiko Seiki Kabushiki Kaisha Pompe turbomoléculair et appareil à vide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2974927A (en) * 1955-09-27 1961-03-14 Elmer G Johnson Supersonic fluid machine
US3138318A (en) * 1961-05-15 1964-06-23 Snecma Turbo-molecular vacuum pump
DE2229724B2 (de) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2717366B2 (de) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Laufrad für eine Turbomolekularpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB936175A (en) * 1961-05-15 1963-09-04 Snecma Improvements in or relating to rotary high-vacuum pumps
FR1313886A (fr) * 1961-11-20 1963-01-04 Alsacienne D Electronique Et D Perfectionnement aux turbocompresseurs et turbopompes
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump
WO1999015793A1 (fr) 1997-09-24 1999-04-01 Leybold Vakuum Gmbh Pompe compound
WO2000000746A1 (fr) * 1998-06-30 2000-01-06 Ebara Corporation Pompe turbomoleculaire
EP1004775A2 (fr) * 1998-11-24 2000-05-31 Seiko Seiki Kabushiki Kaisha Pompe turbomoléculair et appareil à vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 007, no. 041 (M - 194) 18 February 1983 (1983-02-18) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1580435A2 (fr) * 2004-03-16 2005-09-28 Pfeiffer Vacuum GmbH Pompe turbomoléculaire
EP1580435A3 (fr) * 2004-03-16 2009-12-30 Pfeiffer Vacuum GmbH Pompe turbomoléculaire
WO2008012565A1 (fr) * 2006-07-27 2008-01-31 Edwards Limited Mécanisme de pompage moléculaire mécanique

Also Published As

Publication number Publication date
JP2004526090A (ja) 2004-08-26
US20040091351A1 (en) 2004-05-13
KR20030032046A (ko) 2003-04-23
DE10046506A1 (de) 2002-03-28
EP1319130A1 (fr) 2003-06-18

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