EP1243796A3 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP1243796A3 EP1243796A3 EP02005166A EP02005166A EP1243796A3 EP 1243796 A3 EP1243796 A3 EP 1243796A3 EP 02005166 A EP02005166 A EP 02005166A EP 02005166 A EP02005166 A EP 02005166A EP 1243796 A3 EP1243796 A3 EP 1243796A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- double
- flow
- gas friction
- side channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10114585A DE10114585A1 (de) | 2001-03-24 | 2001-03-24 | Vakuumpumpe |
DE10114585 | 2001-03-24 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1243796A2 EP1243796A2 (fr) | 2002-09-25 |
EP1243796A3 true EP1243796A3 (fr) | 2003-08-27 |
EP1243796B1 EP1243796B1 (fr) | 2006-11-08 |
Family
ID=7678927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02005166A Expired - Lifetime EP1243796B1 (fr) | 2001-03-24 | 2002-03-08 | Pompe à vide |
Country Status (4)
Country | Link |
---|---|
US (1) | US6676384B2 (fr) |
EP (1) | EP1243796B1 (fr) |
JP (1) | JP2002310092A (fr) |
DE (2) | DE10114585A1 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10150015A1 (de) * | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür |
GB0229352D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement and method of operating same |
GB0229353D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
US7140847B2 (en) * | 2004-08-11 | 2006-11-28 | The Boc Group, Inc. | Integrated high vacuum pumping system |
US8673394B2 (en) * | 2008-05-20 | 2014-03-18 | Sundew Technologies Llc | Deposition method and apparatus |
GB2474507B (en) | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
DE102009056218A1 (de) * | 2009-11-28 | 2011-06-01 | Robert Bosch Gmbh | Schraubenspindelpumpe mit integriertem Druckbegrenzungsventil |
US20150377239A1 (en) * | 2013-02-15 | 2015-12-31 | Edwards Limited | Vacuum pump |
DE102013114290A1 (de) * | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
GB2592030B (en) * | 2020-02-12 | 2022-03-09 | Edwards Ltd | Multiple stage vacuum pump |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
US4183719A (en) * | 1976-05-13 | 1980-01-15 | Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) | Composite impeller wheel with improved centering of one component on the other |
DE3442843A1 (de) * | 1983-11-30 | 1985-06-05 | Hitachi, Ltd., Tokio/Tokyo | Vakuumpumpe |
US5040949A (en) * | 1989-06-05 | 1991-08-20 | Alcatel Cit | Two stage dry primary pump |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19632375A1 (de) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
US6220824B1 (en) * | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
DE19930952A1 (de) * | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE19942410A1 (de) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2001
- 2001-03-24 DE DE10114585A patent/DE10114585A1/de not_active Withdrawn
-
2002
- 2002-02-07 JP JP2002030826A patent/JP2002310092A/ja active Pending
- 2002-03-07 US US10/093,204 patent/US6676384B2/en not_active Expired - Fee Related
- 2002-03-08 DE DE50208630T patent/DE50208630D1/de not_active Expired - Lifetime
- 2002-03-08 EP EP02005166A patent/EP1243796B1/fr not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
US4183719A (en) * | 1976-05-13 | 1980-01-15 | Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) | Composite impeller wheel with improved centering of one component on the other |
DE3442843A1 (de) * | 1983-11-30 | 1985-06-05 | Hitachi, Ltd., Tokio/Tokyo | Vakuumpumpe |
US5040949A (en) * | 1989-06-05 | 1991-08-20 | Alcatel Cit | Two stage dry primary pump |
Also Published As
Publication number | Publication date |
---|---|
EP1243796A2 (fr) | 2002-09-25 |
US6676384B2 (en) | 2004-01-13 |
DE10114585A1 (de) | 2002-09-26 |
EP1243796B1 (fr) | 2006-11-08 |
JP2002310092A (ja) | 2002-10-23 |
US20020136643A1 (en) | 2002-09-26 |
DE50208630D1 (de) | 2006-12-21 |
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