EP1498612A3 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

Info

Publication number
EP1498612A3
EP1498612A3 EP20040014174 EP04014174A EP1498612A3 EP 1498612 A3 EP1498612 A3 EP 1498612A3 EP 20040014174 EP20040014174 EP 20040014174 EP 04014174 A EP04014174 A EP 04014174A EP 1498612 A3 EP1498612 A3 EP 1498612A3
Authority
EP
European Patent Office
Prior art keywords
molecular pump
turbo molecular
stator
spacers
centering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20040014174
Other languages
German (de)
English (en)
Other versions
EP1498612B1 (fr
EP1498612A2 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1498612A2 publication Critical patent/EP1498612A2/fr
Publication of EP1498612A3 publication Critical patent/EP1498612A3/fr
Application granted granted Critical
Publication of EP1498612B1 publication Critical patent/EP1498612B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP04014174.9A 2003-07-15 2004-06-17 Pompe turbomoléculaire Not-in-force EP1498612B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10331932.8A DE10331932B4 (de) 2003-07-15 2003-07-15 Turbomolekularpumpe
DE10331932 2003-07-15

Publications (3)

Publication Number Publication Date
EP1498612A2 EP1498612A2 (fr) 2005-01-19
EP1498612A3 true EP1498612A3 (fr) 2011-09-14
EP1498612B1 EP1498612B1 (fr) 2015-07-29

Family

ID=33461927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04014174.9A Not-in-force EP1498612B1 (fr) 2003-07-15 2004-06-17 Pompe turbomoléculaire

Country Status (4)

Country Link
US (1) US7278822B2 (fr)
EP (1) EP1498612B1 (fr)
JP (1) JP2005036798A (fr)
DE (1) DE10331932B4 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005045283B4 (de) 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE102006050565A1 (de) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
DE102007048703A1 (de) 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
DE102008004297A1 (de) 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5115622B2 (ja) * 2008-03-31 2013-01-09 株式会社島津製作所 ターボ分子ポンプ
EP2143953B1 (fr) * 2008-07-10 2011-06-15 Grundfos Management A/S Groupe motopompe
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2523390B1 (de) * 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
US20010016160A1 (en) * 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1288360A (en) * 1916-11-06 1918-12-17 Ludwig W Zaar Turbine.
US2610786A (en) * 1946-06-25 1952-09-16 Gen Electric Axial flow compressor
US3032260A (en) * 1955-07-12 1962-05-01 Latham Manufactruing Co Rotary apparatus and method of making the same
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
DE3891263T1 (de) * 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov Turbomolekular-vakuumpumpe
JPH02131089U (fr) * 1989-03-31 1990-10-30
JP3469055B2 (ja) * 1997-08-20 2003-11-25 三菱重工業株式会社 ターボ分子ポンプ
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum Gmbh Stator für eine Turbomolekularvakuumpumpe
JP3748323B2 (ja) * 1998-01-09 2006-02-22 株式会社荏原製作所 ターボ分子ポンプ
DE19951954A1 (de) 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10010371A1 (de) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2523390B1 (de) * 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
US20010016160A1 (en) * 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump

Also Published As

Publication number Publication date
DE10331932A1 (de) 2005-02-03
JP2005036798A (ja) 2005-02-10
EP1498612B1 (fr) 2015-07-29
US7278822B2 (en) 2007-10-09
DE10331932B4 (de) 2017-08-24
US20050013710A1 (en) 2005-01-20
EP1498612A2 (fr) 2005-01-19

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