EP1498612A3 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

Info

Publication number
EP1498612A3
EP1498612A3 EP20040014174 EP04014174A EP1498612A3 EP 1498612 A3 EP1498612 A3 EP 1498612A3 EP 20040014174 EP20040014174 EP 20040014174 EP 04014174 A EP04014174 A EP 04014174A EP 1498612 A3 EP1498612 A3 EP 1498612A3
Authority
EP
European Patent Office
Prior art keywords
molecular pump
turbo molecular
stator
spacers
centering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20040014174
Other languages
German (de)
French (fr)
Other versions
EP1498612A2 (en
EP1498612B1 (en
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1498612A2 publication Critical patent/EP1498612A2/en
Publication of EP1498612A3 publication Critical patent/EP1498612A3/en
Application granted granted Critical
Publication of EP1498612B1 publication Critical patent/EP1498612B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Abstract

Die Erfindung betrifft eine Turbomolekularpumpe mit Rotor- (14) und Statorscheiben (16), wobei die Statorscheiben durch Distanzringe (18, 19) auf Abstand gehalten werden. Die Distanzringe sind so gestaltet, dass sie eine feste Verbindung mit dem jeweiligen Nachbarring eingehen, so dass sie in ihrer Gesamtheit die Fixierung und Zentrierung der Statorscheiben übernehmen.

Figure imgaf001
The invention relates to a turbomolecular pump with rotor (14) and stator (16), wherein the stator discs are held by spacers (18, 19) at a distance. The spacers are designed so that they enter into a fixed connection with the respective adjacent ring, so that they take over the fixation and centering of the stator in their entirety.
Figure imgaf001
EP04014174.9A 2003-07-15 2004-06-17 Turbo molecular pump Not-in-force EP1498612B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10331932 2003-07-15
DE10331932.8A DE10331932B4 (en) 2003-07-15 2003-07-15 Turbo molecular pump

Publications (3)

Publication Number Publication Date
EP1498612A2 EP1498612A2 (en) 2005-01-19
EP1498612A3 true EP1498612A3 (en) 2011-09-14
EP1498612B1 EP1498612B1 (en) 2015-07-29

Family

ID=33461927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04014174.9A Not-in-force EP1498612B1 (en) 2003-07-15 2004-06-17 Turbo molecular pump

Country Status (4)

Country Link
US (1) US7278822B2 (en)
EP (1) EP1498612B1 (en)
JP (1) JP2005036798A (en)
DE (1) DE10331932B4 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005045283B4 (en) 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vacuum pumping system
DE102006050565A1 (en) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Stator disk for turbo-molecular pump, has plate at outer ring side, so that plate fulfills spacer ring function, and support ring connected with plate, where plate is turned away from plane, and side is turned outwards in radial direction
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
DE102008004297A1 (en) 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
CN101981321B (en) * 2008-03-31 2014-05-28 株式会社岛津制作所 Turbomolecular pump
EP2143953B1 (en) * 2008-07-10 2011-06-15 Grundfos Management A/S Pump power unit
DE102008056352A1 (en) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh vacuum pump rotor
DE102008058149A1 (en) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
CN114593075B (en) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 Molecular pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2523390B1 (en) * 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik STATOR BRACKET FOR TURBO MOLECULAR PUMPS
JPH04330397A (en) * 1991-04-30 1992-11-18 Fujitsu Ltd Turbo molecular pump
US20010016160A1 (en) * 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1288360A (en) * 1916-11-06 1918-12-17 Ludwig W Zaar Turbine.
US2610786A (en) * 1946-06-25 1952-09-16 Gen Electric Axial flow compressor
US3032260A (en) * 1955-07-12 1962-05-01 Latham Manufactruing Co Rotary apparatus and method of making the same
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
DE3402549A1 (en) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molecular vacuum pump
DE3722164C2 (en) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolecular pump
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
JPH02131089U (en) * 1989-03-31 1990-10-30
JP3469055B2 (en) * 1997-08-20 2003-11-25 三菱重工業株式会社 Turbo molecular pump
DE29717764U1 (en) * 1997-10-06 1997-11-20 Leybold Vakuum Gmbh Stator for a turbomolecular vacuum pump
JP3748323B2 (en) * 1998-01-09 2006-02-22 株式会社荏原製作所 Turbo molecular pump
DE19951954A1 (en) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolecular pump
DE10010371A1 (en) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolecular pump
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2523390B1 (en) * 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik STATOR BRACKET FOR TURBO MOLECULAR PUMPS
JPH04330397A (en) * 1991-04-30 1992-11-18 Fujitsu Ltd Turbo molecular pump
US20010016160A1 (en) * 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump

Also Published As

Publication number Publication date
EP1498612A2 (en) 2005-01-19
DE10331932B4 (en) 2017-08-24
US20050013710A1 (en) 2005-01-20
DE10331932A1 (en) 2005-02-03
JP2005036798A (en) 2005-02-10
EP1498612B1 (en) 2015-07-29
US7278822B2 (en) 2007-10-09

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