EP1852613A3 - Vacuum pump with casing - Google Patents

Vacuum pump with casing Download PDF

Info

Publication number
EP1852613A3
EP1852613A3 EP07008039.5A EP07008039A EP1852613A3 EP 1852613 A3 EP1852613 A3 EP 1852613A3 EP 07008039 A EP07008039 A EP 07008039A EP 1852613 A3 EP1852613 A3 EP 1852613A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
casing
structures
housing
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07008039.5A
Other languages
German (de)
French (fr)
Other versions
EP1852613B1 (en
EP1852613A2 (en
Inventor
Bernd Hofmann
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1852613A2 publication Critical patent/EP1852613A2/en
Publication of EP1852613A3 publication Critical patent/EP1852613A3/en
Application granted granted Critical
Publication of EP1852613B1 publication Critical patent/EP1852613B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit einem Gehäuse (2), mit einem Rotor, der eine Welle (4) und pumpaktive Rotorstrukturen (5) aufweist, einem pumpaktive Statorstrukturen (6) aufweisenden Stator, mit Lagermitteln (8) und Antriebsmitteln (9). Um eine kompaktere Bauform mit weniger Bauteilen zu erreichen, wird vorgeschlagen, dass das der Halterung der pumpaktiven Statorstrukturen dienende Gehäuse der Vakuumpumpe mindestens eine Vakuumkammer aufweist (20, 21, 31, 32, 33).

Figure imgaf001
The invention relates to a vacuum pump (1) having a housing (2), a rotor having a shaft (4) and pumping rotor structures (5), a stator having pumping-active stator structures (6), bearing means (8) and drive means ( 9). In order to achieve a more compact design with fewer components, it is proposed that the housing of the vacuum pump serving to hold the pump-active stator structures have at least one vacuum chamber (20, 21, 31, 32, 33).
Figure imgaf001
EP07008039.5A 2006-05-04 2007-04-20 Vacuum pump with casing Active EP1852613B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006020710A DE102006020710A1 (en) 2006-05-04 2006-05-04 Vacuum pump with housing

Publications (3)

Publication Number Publication Date
EP1852613A2 EP1852613A2 (en) 2007-11-07
EP1852613A3 true EP1852613A3 (en) 2014-04-02
EP1852613B1 EP1852613B1 (en) 2019-02-27

Family

ID=38051882

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07008039.5A Active EP1852613B1 (en) 2006-05-04 2007-04-20 Vacuum pump with casing

Country Status (3)

Country Link
US (1) US20070258836A1 (en)
EP (1) EP1852613B1 (en)
DE (1) DE102006020710A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010068B4 (en) 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vacuum pump or vacuum apparatus with vacuum pump
DE102008024764A1 (en) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Multi-stage vacuum pump
DE102008034948A1 (en) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh vacuum pump
GB2473839B (en) * 2009-09-24 2016-06-01 Edwards Ltd Mass spectrometer
GB2504329A (en) * 2012-07-26 2014-01-29 Edwards Ltd Ultra high vacuum pump seal arrangement
DE102013103650A1 (en) 2013-04-11 2014-10-16 Pfeiffer Vacuum Gmbh vacuum system
DE202013003855U1 (en) * 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Examination device and multi-inlet vacuum pump
DE102014110078A1 (en) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh vacuum system
EP3026303B1 (en) * 2014-11-28 2021-01-06 Pfeiffer Vacuum Gmbh Vacuum pump, vacuum accessories and their sealing
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system
JP6705169B2 (en) * 2015-12-28 2020-06-03 株式会社島津製作所 Monitoring device and monitoring program
JP6664269B2 (en) * 2016-04-14 2020-03-13 東京エレクトロン株式会社 Heating device and turbo molecular pump
EP3296571B1 (en) * 2017-07-21 2021-11-03 Pfeiffer Vacuum Gmbh Vacuum pump
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump
GB202108988D0 (en) * 2021-06-23 2021-08-04 Micromass Ltd Mass and/or mobility spectrometer vacuum pumping line
EP4108932A1 (en) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Recipient and high vacuum pump

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0990886A1 (en) * 1998-10-01 2000-04-05 Alcatel Compact leak detector
EP1085214A2 (en) * 1999-09-16 2001-03-21 The BOC Group plc Vacuum pumps
EP1205667A2 (en) * 2000-11-13 2002-05-15 Pfeiffer Vacuum GmbH Gas friction pump
US6457954B1 (en) * 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP1302667A1 (en) * 2001-10-15 2003-04-16 The BOC Group plc Vacuum pumps
WO2006000745A1 (en) * 2004-06-25 2006-01-05 The Boc Group Plc Vaccum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168819A (en) * 1961-03-06 1965-02-09 Gen Electric Vacuum system
DE10052489A1 (en) * 2000-10-23 2002-05-02 Hermania Dr Schirm Gmbh Solid glyphosate formulation and method of manufacture
DE10055057A1 (en) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leak detector pump has high vacuum pump, gas analyzer, test object connector, gas outlet opening, gas inlet opening, valve bodies and gas connections in or forming parts of housing
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
US6457954B1 (en) * 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP0990886A1 (en) * 1998-10-01 2000-04-05 Alcatel Compact leak detector
EP1085214A2 (en) * 1999-09-16 2001-03-21 The BOC Group plc Vacuum pumps
EP1205667A2 (en) * 2000-11-13 2002-05-15 Pfeiffer Vacuum GmbH Gas friction pump
EP1302667A1 (en) * 2001-10-15 2003-04-16 The BOC Group plc Vacuum pumps
WO2006000745A1 (en) * 2004-06-25 2006-01-05 The Boc Group Plc Vaccum pump

Also Published As

Publication number Publication date
US20070258836A1 (en) 2007-11-08
DE102006020710A1 (en) 2007-11-08
EP1852613B1 (en) 2019-02-27
EP1852613A2 (en) 2007-11-07

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